JP5877328B2 - SCREEN PRINTING APPARATUS AND METHOD FOR SETTING BOARD CLAMP POSITION IN SCREEN PRINTING APPARATUS - Google Patents

Description

  The present invention relates to a screen printing apparatus that prints a viscous material such as cream solder on a substrate, and a method for setting a clamp position of the substrate in the screen printing apparatus.

  Solder bonding is often used as a bonding method for mounting electronic components on a substrate. In this method, prior to solder bonding, a viscous material such as cream solder, which is a solder bonding material, is supplied to the electrodes of the substrate. As a method for supplying this viscous material, screen printing in which the viscous material is printed on a substrate through a pattern hole provided in the screen mask is widely used. In the screen printing operation, the substrate to be printed is sandwiched from both sides in the horizontal direction by the clamp member to fix the position, and the substrate is brought into contact with the lower surface of the screen mask while being supported from the lower surface side by the receiving member (for example, Patent Document 1).

JP 2004-322479 A

  In order to obtain a high-quality printing result in screen printing, it is necessary to bring the printed surface of the substrate into close contact with the screen mask with high accuracy in squeezing by sliding the squeegee on the screen mask. In order to ensure this highly accurate adhesion, it is required to appropriately set a clamp position indicating a relative positional relationship in the height direction between the upper surface of the substrate and the upper surface of the clamp member that sandwiches the substrate. However, the appropriate relative positional relationship between the clamp member and the substrate for ensuring print quality has not necessarily been clarified in the prior art including the above-described patent document examples. In addition, since the substrate to be printed also has deformation such as variation in thickness and bending, the upper surface of the substrate is not necessarily held at an appropriate height position even when the substrate is correctly supported from the lower surface by the receiving member. However, this is a problem in ensuring good print quality.

  Therefore, an object of the present invention is to provide a screen printing apparatus and a clamp position setting method in the screen printing apparatus that can prevent a print quality defect caused by the relative height between the substrate and the clamp member.

A screen printing apparatus according to the present invention is a screen printing apparatus for printing a viscous material on an upper surface of a substrate through the pattern hole by superimposing a screen mask on which a pattern hole is formed, on the lower surface of the substrate. A substrate receiving member for receiving the substrate, and a substrate clamp for clamping the substrate on the receiving member by bringing at least one pair of clamping members into contact with the side surfaces of the two opposite sides of the substrate received by the receiving member. And lowering the receiving member relative to the clamping member to position the substrate at a clamping position indicating a relative height position between the means and the clamping member on which the substrate is to be positioned. First elevating means and alignment means for aligning the substrate and the screen mask received by the lower receiving member in the horizontal direction In order to overlap the screen mask on the upper surface of the substrate on which the alignment has been performed, or to bring the screen mask close to each other so that a screen printing can be performed, the substrate and the screen mask are relatively close to each other after the screen printing. In order to separate the screen mask from the upper surface, a second lifting means for relatively separating the substrate and the screen mask in the vertical direction, and a viscosity through the pattern hole by moving along the upper surface of the screen mask. A print head for printing a body on the upper surface of the substrate; a control unit for controlling the operation of the screen printing apparatus; and the upper surfaces of the clamp members and the clamps at a plurality of locations in a state where the position of the substrate is regulated by the clamp means. And a height difference measuring means for measuring a height difference with the upper surface of the substrate in the vicinity of the member, the control unit, Based on the measurement result of the low differential measurement means performs clamping position correction processing for correcting the clamp position to be included within the scope of height difference defined in advance showing the smallest value among the height difference of the plurality of locations .

A method of setting a clamp position of a substrate in a screen printing apparatus according to the present invention includes a screen printing apparatus in which a screen mask formed with a pattern hole is overlaid on an upper surface of a substrate, and a viscous material is printed on the upper surface of the substrate through the pattern hole. a method of setting the clamping position of the substrate in the steps receiving lower substrate to receive under the lower surface of the substrate, the substrate that has been received under in order to position the substrate to the clamp position of the tentatively set provisionally A substrate raising / lowering step for raising and lowering the substrate relative to the clamp member, a height difference measuring step for measuring a height difference between the upper surface of the clamp member at a plurality of locations and the upper surface of the substrate in the vicinity of the clamp member, and the height Based on the measurement result of the difference measurement step, the height difference indicating the smallest value among the height differences of the plurality of locations is included in a predetermined range. And a clamping position setting step of setting the clamping position to so that.

The method for setting the clamp position of the substrate in the screen printing apparatus according to the present invention includes a screen printing in which a screen mask formed with a pattern hole is superimposed on the upper surface of the substrate, and a viscous material is printed on the upper surface of the substrate through the pattern hole. A method of setting a clamp position of a substrate in an apparatus, comprising: a substrate receiving step of receiving a lower surface of the substrate; and raising and lowering the substrate relative to the clamp member to position the substrate at the clamp position a substrate lifting step of causing a plurality of clamped and the substrate clamping step, the pre-Symbol substrate clamping the front Kimoto plate abut the clamp members to the side of two opposing sides of the substrate positioned in the clamp position height difference meter for measuring the height difference between the upper surface of the substrate in the vicinity of the upper surface and the clamping member portion of the clamping member Step a clamp position to correct the clamp position so height difference showing the smallest value included in the predefined range of the height difference of the measurement results based-out the plurality of positions of the height difference measuring step A correction step is included.

  According to the present invention, the substrate is clamped on the basis of the measurement result obtained by measuring the height difference between the upper surface of the clamp member and the upper surface of the substrate in the vicinity of the clamp member in a state where the position of the substrate is regulated by the clamping means. Perform clamp position setting processing that sets the clamp position that indicates the relative height position to the clamp member that should be positioned, or clamp position correction processing that corrects the set clamp position, so that the clamp member and the substrate are properly positioned. It is possible to prevent the print quality from being deteriorated due to the relative height between the substrate and the clamp member.

The side view of the screen printing apparatus of one embodiment of this invention The partial top view of the screen printing apparatus of one embodiment of this invention Operation explanatory diagram of a screen printing apparatus according to an embodiment of the present invention Operation explanatory diagram of a screen printing apparatus according to an embodiment of the present invention Explanatory drawing of the squeezing operation | movement in the screen printing apparatus of one embodiment of this invention Explanatory drawing of the height difference measurement of the board | substrate and clamp member in the screen printing method of one embodiment of this invention Explanatory drawing of the measurement result of the height difference measurement of a board | substrate and a clamp in the screen printing method of one embodiment of this invention The block diagram which shows the structure of the control system of the screen printing apparatus of one embodiment of this invention The flowchart which shows the clamp position setting process in the screen printing apparatus of one embodiment of this invention The flowchart which shows the clamp position correction | amendment process in the screen printing apparatus of one embodiment of this invention

  Next, embodiments of the present invention will be described with reference to the drawings. First, the overall structure of the screen printing apparatus 1 will be described with reference to FIGS. The screen printing apparatus 1 is configured such that a screen mask in which pattern holes are formed is superimposed on the upper surface of a substrate, and a squeegee is slid on the upper surface of the screen mask to which a viscous material such as solder paste is supplied, thereby causing viscous materials to pass through the pattern holes. Is printed on the upper surface of the substrate.

  In FIG. 1, the screen printing apparatus 1 has a configuration in which a screen printing mechanism including a screen mask 14 and a print head 17 is disposed above a substrate positioning unit 2. The substrate positioning unit 2 is provided with a substrate holding unit 4 that clamps and holds a substrate 11 to be printed on an alignment mechanism 3 having a configuration in which a Y-axis table 3Y, an X-axis table 3X, and a Θ-axis table 3Θ are stacked. Configured. A moving plate 3a is coupled to the upper surface of the Θ-axis table 3Θ, and a substrate elevating mechanism 5 is disposed on the moving plate 3a.

  The substrate elevating mechanism 5 moves a second elevating plate 5a held by a plurality of guide shafts 7 so as to be slidable in a vertical direction with respect to the moving plate 3a, and includes a second motor 5b, a nut 5c, and a feed screw 5d. It is configured to be raised and lowered by a mechanism. Further, a lower substrate lifting mechanism 6 is disposed on the second lifting plate 5a. The substrate lowering / lifting mechanism 6 includes a first motor 6b, a nut 6c, and a feed screw. The first lifting plate 6a is slidably held in the vertical direction with respect to the second lifting plate 5a by a plurality of guide shafts 8. It is configured to be moved up and down by a linear motion mechanism composed of 6d.

  Two vertical frames 9 are erected in the X direction on the second elevating plate 5a, and a transport rail 10 is juxtaposed in the X direction (substrate transport direction) at the upper end of each vertical frame 9. . As shown in FIG. 2, a belt conveyor 10 a (see also FIG. 5) is provided inside each conveyance rail 10. With the pair of belt conveyors 10a supporting two opposite sides (both ends in the Y direction) of the substrate 11, the substrate 11 is predetermined by horizontally driving the belt conveyor 10a by a transport drive mechanism (not shown). It is conveyed to the position.

  A block-shaped support member 13 is disposed on the upper surface of the first elevating plate 6a, and the lower surface 11b of the substrate 11 conveyed to a predetermined position rises together with the first elevating plate 6a. 13 (see FIG. 3). The transport rail 10, the belt conveyor 10a, and the transport drive mechanism constitute substrate transport means for transporting the substrate 11 to a predetermined position for screen printing by supporting the lower surfaces of two opposite sides of the substrate 11 with a pair of belt conveyors 10a. ing.

  An elongated clamp member 12 is disposed in the X direction on the upper surface of each transport rail 10, and one of the clamp members 12 of the set of clamp members 12 is Y-attached by a clamp member drive mechanism 12b. The width is freely adjustable in the direction. As shown in FIG. 2, the substrate 11 is driven by driving the clamp member driving mechanism 12 b by bringing the clamp member 12 into contact with the side surfaces of the two opposite sides of the substrate 11 received by the lower receiving member 13. The horizontal position of the substrate 11 on the lower receiving member 13 is regulated by being sandwiched by the clamp member 12.

  Here, an example in which the substrate 11 is sandwiched by a set of clamp members 12 is shown, but the substrate 11 may be sandwiched by a plurality of sets of clamp members 12 at a plurality of positions in the X direction. The clamp member 12 and the clamp member drive mechanism 12b serve as a clamp unit that performs a clamp operation for restricting the horizontal position of the substrate 11 on the lower receiving member 13 by bringing at least one pair of clamp members 12 into contact with each other. .

  In the above configuration, the lower receiving member 13 can be moved up and down relatively with respect to the clamp member 12 by driving the substrate lowering lifting mechanism 6. Thus, the substrate 11 can be positioned at a clamp position indicating a relative height position with respect to the clamp member 12 where the substrate 11 should be positioned in clamping the substrate 11. Accordingly, the substrate lowering / lifting mechanism 6 is a first lifting / lowering means for moving the lower receiving member 13 relative to the clamp member 12 in order to position the substrate 11 at the clamp position.

  The above-described clamping means performs the above-described clamping operation by bringing at least one pair of clamping members 12 into contact with the opposite side surfaces of the substrate 11 lifted from the belt conveyor 10a by the first lifting / lowering means. Further, the first elevating means described above lifts the substrate 11 from above the belt conveyor 10a by elevating the lower receiving member 13 relative to the belt conveyor 10a.

  The screen mask 14 is configured by extending a mask plate 16 on a mask holder 15, and a plurality of pattern holes 16 a are formed in the mask plate 16 corresponding to electrode arrangements to be printed on the substrate 11. . The print head 17 disposed above the screen mask 14 is horizontally movable (arrow a) in the Y direction (squeezing direction) by the print head driving mechanism 17a, and is moved up and down by the squeegee lifting mechanism 18 respectively. A pair of squeegees 19 are provided. In the screen printing operation, one of the squeegees 19 is lowered and brought into contact with the upper surface of the mask plate 16 according to the traveling direction of the print head 17, and in this state, the print head 17 is moved to the mask plate 16 by the print head driving mechanism 17a. By horizontally moving along the upper surface, the solder paste 21 is printed on the upper surface of the substrate 11 through the pattern holes 16a.

  Below the screen mask 14, an intermediate unit 20 in which the substrate recognition camera 20a, the mask recognition camera 20b, and the distance measuring device 20c are integrated is an intermediate unit drive in the space between the substrate holder 4 and the screen mask 14. The mechanism 22 (see FIG. 7) is disposed so as to be horizontally movable. By positioning the intermediate unit 20 between the mask plate 16 and the substrate 11, the substrate recognition camera 20a and the mask recognition camera 20b respectively image the upper surface of the substrate 11 and the lower surface of the mask plate 16. By recognizing the imaging result, the positions of the substrate 11 and the mask plate 16 are detected. The distance measuring device 20c has a function of measuring the height position of an object positioned below such as a laser displacement meter in a non-contact manner, and is arranged with the measurement surface facing downward.

  In the present embodiment, the upper surface 11a of the substrate 11 and the upper surface 12a of the clamp member 12 are to be measured, and the substrate 11 when the substrate 11 is received by the lower receiving member 13 based on the height measurement results. The height difference from the clamp member 12 is measured. That is, the distance measuring device 20c measures the height distance between the upper surface 11a of the substrate 11 and the upper surface 12a of the clamp member 12 in a state where the position of the substrate 11 is regulated by the above-described clamping means, It functions as a height difference measuring means for measuring a height difference from the upper surface 11a of the substrate 11 in the vicinity of the clamp member 12.

  In the present embodiment, the distance measuring device 20c recognizes the substrate 11 on the intermediate unit 20 that moves horizontally by the intermediate unit drive mechanism 22 (FIG. 7) above the substrate 11 received by the receiving member 13. A board recognition camera 20a for imaging the mark 11c (see FIG. 6) and a mask recognition camera 20b for imaging a recognition mark (not shown) of the screen mask 14 are mounted.

  The substrate 11 received by the lower receiving member 13 and clamped by the clamping member 12 in this way is aligned with the mask plate 16 in the horizontal direction. This alignment is performed by driving the alignment mechanism 3 based on the position detection results of the substrate 11 and the mask plate 16. Therefore, the alignment mechanism 3 serves as alignment means for aligning the substrate 11 received by the lower receiving member 13 and the screen mask 14 in the horizontal direction.

  When screen printing is performed, the mask plate 16 is superimposed on the aligned upper surface of the substrate 11, or when the printing mode is off-contact printing in which the upper surface of the substrate 11 and the mask plate 16 are not in contact with each other, screen printing is performed. Therefore, the substrate 11 and the clamp member 12 are relatively moved closer to each other. After the screen printing, the substrate 11 and the screen mask 14 are relatively separated from each other in the vertical direction in order to separate the screen mask 14 from the upper surface of the substrate 11. These elevating operations are performed by driving the substrate elevating mechanism 5 to elevate the transport rail 10 together with the second elevating plate 5 a and the vertical frame 9.

  Therefore, the substrate elevating mechanism 5 moves the substrate 11 and the screen mask 14 relatively to overlap the upper surface of the aligned substrate 11 or to bring the screen mask 14 close to a distance capable of screen printing. In order to move the screen mask 14 away from the upper surface of the substrate 11 after the screen printing, the substrate 11 and the screen mask 14 are separated from each other in the vertical direction.

  Next, with reference to FIG. 3 and FIG. 4, the operation | movement operation | movement process in the screen printing method by the screen printing apparatus 1 is demonstrated. First, as shown in FIG. 3A, the substrate 11 is conveyed to a predetermined position above the lower receiving member 13 by the belt conveyor 10a of the conveying rail 10 (substrate conveying step). This conveying operation is performed by supporting the lower surfaces of two opposite sides of the substrate 11 by the belt conveyor 10a (see FIG. 2).

  Next, as shown in FIG. 3B, the lower surface 11 b of the substrate 11 is supported by the lower receiving member 13, the substrate 11 is lifted from the belt conveyor 10 a, and a pair of side surfaces of the substrate 11 are opposed to each other. The clamp member 12 is brought into contact to regulate the horizontal position of the substrate 11 on the lower receiving member 13 (substrate clamping step). That is, by driving the substrate lowering / lifting mechanism 6 (arrow b), the lower receiving member 13 on the first elevating plate 6a is raised to a predetermined clamping position, and the lower receiving member 13 is relative to the clamping member 12. Raise and lower. As a result, the substrate 11 is lifted by being brought into contact with the lower surface 11b of the substrate 11, and then the clamp member driving mechanism 12b is driven to bring the clamp member 12 into width, and the substrate 11 is sandwiched and clamped.

  At this time, the clamp position is set in advance so that the upper surface 11a of the substrate 11 protrudes upward from the upper surface 12a of the clamp member 12 by a protrusion amount (height difference Dh). Accordingly, as shown in FIG. 5A, the substrate 11 is lifted from the belt conveyor 10a by the lower receiving member 13, and is clamped in a state where the upper surface 11a protrudes upward from the upper surface 12a by the height difference Dh.

  Thereafter, as shown in FIG. 4A, the intermediate unit 20 is advanced into the space between the substrate holding part 4 and the screen mask 14 (arrow c), and the substrate is recognized by the substrate recognition camera 20a and the mask recognition camera 20b. 11. Recognize the mask plate 16 and detect the position (substrate recognition step and mask recognition step), and measure the height difference between the substrate 11 and the clamp member 12 by the distance measuring device 20c (level difference measurement step). Then, by driving the alignment mechanism 3 based on the position detection results of the substrate 11 and the mask plate 16, the substrate 11 held on the substrate holding unit 4 is aligned with the mask plate 16 in the horizontal direction.

  Here, the height difference detection by the distance measuring device 20c will be described with reference to FIG. FIG. 6A shows an example of setting measurement points for measuring the height difference between the upper surface 12 a of the clamp member 12 to be detected and the upper surface 11 a of the substrate 11 in the vicinity of the clamp member 12. Measurement points C1 to C5 and measurement points C6 to C10 are set in a row at a constant pitch near the contact line with the substrate 11 on the upper surface 12a of the pair of clamp members 12. Further, measurement points P1 to P5 and measurement points P6 to P10 correspond to the measurement points C1 to C5 and the measurement points C6 to C10 in the vicinity of the contact line with the clamp member 12 on the upper surface 11a of the substrate 11, respectively. Is set.

  In the height difference measurement step, as shown in FIG. 6B, first, the distance measuring device 20c is moved onto the clamp member 12, and the height of the measurement point Ci is measured. That is, the measurement light L1 is irradiated from the distance measuring device 20c to the measurement point Ci and the reflected light L2 is received, whereby the height dimension HCi from the reference position of the distance measurement device 20c to the measurement point Ci is measured. The Next, the distance measuring device 20c is moved to the measuring point Pi corresponding to the measuring point Ci on the clamp member 12, and the height of the measuring point Pi is measured in the same manner, and the distance measuring device 20c is measured from the reference position of the distance measuring device 20c. The height dimension HPi up to the point Pi is measured. Then, by calculating the difference between the height dimension HCi and the height dimension HPi, the height difference Dih is obtained.

  FIG. 7 shows an example of the measurement result of the above-described height difference measurement. In FIG. 7, the height difference Dih (i = 1 to 10) indicated on the horizontal axis indicates a combination of the measurement point Ci and the corresponding measurement point Pi, and the vertical axis indicates the height difference Dh, that is, the upper surface 11 a of the substrate 11. The protrusion amount from the upper surface 12a of the clamp member 12 is shown. In the present embodiment, the clamp position is set such that the height difference Dmh indicating the smallest value among the plurality of height differences Dh falls within a predetermined range (0.05 mm to 0.15 mm). The

  Next, after aligning the substrate 11 and the mask plate 16 in which the pattern holes 16a are formed, as shown in FIG. 4B, the mask plate 16 is overlaid on the upper surface of the substrate 11 (substrate mask alignment step). That is, here, the entire substrate holding unit 4 holding the substrate 11 is raised by driving the substrate raising / lowering mechanism 5 to raise the second raising / lowering plate 5a (arrow d). In the case of off-contact printing, instead of overlaying the mask plate 16 on the upper surface of the substrate 11, the substrate 11 and the mask plate 16 are brought close to each other up to a predetermined distance.

  Thereafter, the squeegee raising / lowering mechanism 18 is driven in the print head 17 to lower the squeegee 19 (arrow e) and contact the upper surface of the mask plate 16. Then, the print head 17 is moved in the squeezing direction on the upper surface of the mask plate 16 to which the solder paste 21 has been supplied in advance. As a result, as shown in FIG. 5B, the squeegee 19 slides on the upper surface of the mask plate 16 while scraping the solder paste 21 (arrow f), and the upper surface of the substrate 11 is soldered via the pattern holes 16a. The paste 21 is printed (printing process).

  This printing process is performed in a state where the upper surface of the upper surface 11a protrudes upward from the upper surface 12a of the clamp member 12 by the above-described protrusion amount (height difference Dh). The protruding amount of the upper surface 11a of the substrate 11 from the upper surface 12a of the clamp member 12 is set to be equal to or less than half the thickness t of the substrate 11. As a specific numerical range, the protrusion amount (height difference Dh) is set in a range of 0.01 mm to 0.5 mm.

  Next, the configuration of the control system will be described with reference to FIG. The control unit 25 has a CPU function, and controls the respective units described below based on various operation / processing programs and various data stored in the storage unit 29, thereby controlling the screen printing apparatus 1. The screen printing work operation and various control processes are executed. In the storage unit 29, in addition to the above-described various operation / processing programs and various data, a protrusion amount upper limit value 29a indicating the upper limit and the lower limit of the protrusion amount of the substrate 11 relative to the clamp member 12 when the substrate 11 is clamped by the clamp member 12. The protrusion amount lower limit value 29b and the substrate thickness data 29c indicating the thickness of the target substrate 11 are stored.

  The control unit 25 includes a clamp member driving mechanism 12b, a substrate lowering / lifting mechanism 6, a substrate lifting mechanism 5, a positioning mechanism 3, a print head driving mechanism 17a, a distance measuring device 20c, a substrate recognition camera 20a, a mask recognition camera 20b, an intermediate The unit drive mechanism 22, the display unit 23, and the operation / input unit 24 are connected. The control unit 25 controls the clamp member driving mechanism 12b, the substrate lowering / lifting mechanism 6, the substrate lifting / lowering mechanism 5, the alignment mechanism 3, and the print head driving mechanism 17a, whereby the screen printing work operation is executed.

  Further, the control unit 25 has an image recognition function, and recognizes the imaging results obtained by the substrate recognition camera 20a and the mask recognition camera 20b, whereby the substrate recognition mark 11c (see FIG. 6) on the substrate 11 and the mask on the mask plate 16 are recognized. The position of the recognition mark is recognized. Further, the control unit 25 controls the intermediate unit driving mechanism 22 to perform position control of the intermediate unit 20 during imaging by the substrate recognition camera 20a and the mask recognition camera 20b and in height difference measurement by the distance measuring device 20c.

  In the screen printing work operation, the control unit 25 uses the upper surface 11a of the substrate 11 as the upper surface 12a of the clamp member 12 based on the upper limit value 29a of the protrusion amount, the lower limit value 29b of the protrusion amount, and the substrate thickness data 29c stored in the storage unit 29. The substrate lowering / lifting mechanism 6 that is the first lifting / lowering means is controlled so as to protrude further upward. That is, the control unit 25 includes a storage unit 29 that stores the thickness of the substrate 11 and the amount of protrusion of the substrate 11 from the upper surface 12a of the clamp member 12, and includes the thickness of the substrate 11, the protrusion amount upper limit value 29a, and the protrusion amount lower limit value 29b. The first lifting means is controlled based on the above.

  The display unit 23 is a display device such as a liquid crystal panel, and displays a guidance screen at the time of operation / input by the operation / input unit 24 and various notification screens. The operation / input unit 24 is an input unit such as a keyboard or a touch panel switch, and performs operation commands for operating the screen printing apparatus 1 and various data inputs.

  The control unit 25 includes an elevation difference measurement processing unit 26, a clamp position setting processing unit 27, and a clamp position correction processing unit 28 as internal processing functions. The height difference measurement processing unit 26 performs a process of obtaining a height difference between the upper surface 11a of the substrate 11 and the upper surface 12a of the clamp member 12 based on the height measurement result by the distance measuring device 20c. The clamp position setting processing unit 27 performs a process of setting a clamp position, that is, a relative height position with respect to the clamp member 12 where the substrate 11 should be positioned in clamping the substrate 11. This process is executed before the start of production every time the type of substrate to be printed is switched by the screen printing apparatus 1. The clamp position correction processing unit 28 performs a process of correcting the clamp position when a need arises during production. That is, the control unit 25 performs a clamp position correction process for correcting the clamp position based on the measurement result of the distance measuring device 20c that is a height difference measuring unit.

  Next, the clamp position setting process executed by the clamp position setting processing unit 27 will be described with reference to each drawing according to the flow of FIG. As described above, the clamp position defines the relative positional relationship in the height direction between the substrate 11 and the clamp member 12 in a state where the substrate 11 is clamped and fixed by the clamp member 12. Therefore, the present embodiment As described above, in the configuration in which the substrate 11 is received by the lower receiving member 13 that moves up and down to hold the height position, the height position of the lower receiving member 13 defines the clamp position. If the clamp member 12 is configured to move up and down to define the relative positional relationship between the substrate 11 and the clamp member 12 in the height direction, the height position of the clamp member 12 defines the clamp position.

  In FIG. 9, first, an initial value of the clamp position A is set (ST1). Here, A0 as a provisional value is input as an initial value. Thereafter, as shown in FIG. 3A, the substrate 11 is carried into the screen printing apparatus 1 (ST2) and conveyed to a predetermined position above the lower receiving member 13. Next, the lower receiving member 13 is raised to receive the lower surface 11b of the substrate 11 (ST3) (substrate receiving step).

  That is, as shown in FIG. 3B, in order to position the substrate 11 up to the clamp position A, that is, the temporary clamp position A0 temporarily set as the initial value, The mechanism 6 is driven to raise and lower the lower receiving member 13 receiving the substrate 11 relative to the clamp member 12 (lower receiving member moving step). Next, clamping is performed (ST4), the clamp member driving mechanism 12b is driven, and the clamp member 12 is brought into contact with the opposite side surfaces of the substrate 11 located at the clamp position, so that the substrate 11 on the lower receiving member 13 is brought into contact. Is clamped (substrate clamping step).

  In this state, the height difference measurement process is executed (ST5) (the height difference measurement process). That is, as shown in FIG. 4A, the intermediate unit 20 is moved above the substrate holding portion 4 and, as explained in FIG. 6, the upper surface 12a of the clamp member 12 in a state where the substrate 11 is clamped and the clamp The height difference of the upper surface 11a of the substrate 11 in the vicinity of the member 12 is measured at a plurality of locations.

  Next, the height difference indicated by the measurement result obtained by the height difference measurement, that is, the protrusion amount by which the upper surface 11a of the substrate 11 protrudes from the upper surface 12a of the clamp member 12 becomes the protrusion amount upper limit value 29a and the protrusion amount lower limit value 29b. It is then determined whether it is within the specified range (ST6). If the protrusion amount acquired here is within the specified range, the clamp position A at this stage is set as the final clamp position Af (clamp position setting step).

  On the other hand, when the protruding amount is outside the range defined in (ST6), the temporary clamping position A is gradually updated, and the receiving member moving step shown in (ST3) and (ST5) are shown. A trial process for sequentially performing the elevation difference measurement process is repeatedly performed a plurality of times. That is, first, a new clamp position A is set by A + b obtained by adding a preset increment b to the clamp position A at this stage (ST7). Next, after the clamp by the clamp member 12 is released (ST8), the process returns to (ST3) to (ST6).

  These processes are repeatedly executed until it is determined that the protrusion amount acquired in (ST6) is within the specified range, and the clamp position A at that time is set as the final clamp position Af. That is, in the process of repeatedly executing the trial process described above, the temporary clamp position in the trial process in which it is confirmed that the plurality of height differences (see FIG. 6), which are the measurement results of the height difference measuring means, are included in the predetermined range. Is set as the final clamp position (clamp position setting step), thereby completing the clamp position setting process.

  Next, the clamp position correction process executed by the clamp position correction processing unit 28 during the printing process will be described with reference to the drawings in accordance with the flow of FIG. In FIG. 10, first, as shown in FIG. 3A, the substrate 11 is carried into the screen printing apparatus 1 (ST11) and is conveyed to a predetermined position above the lower receiving member 13. Next, the lower receiving member 13 is raised to receive the lower surface 11b of the substrate 11 (ST12) (substrate receiving step). That is, as shown in FIG. 3B, in order to position the substrate 11 at the clamp position A, the lower receiving member 13 that has received the substrate 11 by driving the lower substrate lifting / lowering mechanism 6 is attached to the clamp member 12. To move up and down relatively (lowering member moving step). Next, clamping is performed (ST13), and the clamp member driving mechanism 12b is driven to bring the clamp member 12 into contact with the side surfaces of the two opposite sides of the substrate 11 located at the clamp position, so that the substrate 11 on the receiving member 13 is brought into contact. Is clamped (substrate clamping step).

  At this stage, it is determined whether or not the clamp position correction process needs to be executed (ST14). That is, when a specific condition is changed in the course of executing the printing process, for example, when a lot of the target substrate is changed, when the cumulative number of times of printing reaches a specified number, when a continuous operation duration time reaches a specified time, etc. If the condition is satisfied, it is determined that the clamp position correction process needs to be executed, and (ST15) to (ST20) surrounded by a broken line frame are executed.

  In this correction process, first, similarly to (ST5) shown in FIG. 9, the height of the upper surface 12a of the clamp member 12 in a state where the substrate 11 is clamped by the distance measuring device 20c and the upper surface 11a of the substrate 11 in the vicinity of the clamp member 12 The difference is measured at a plurality of locations (level difference measurement step) (ST15). Next, similarly to (ST6) shown in FIG. 9, whether or not the protrusion amount indicated by the measurement result obtained by the height difference measurement is within the range defined by the protrusion amount upper limit value 29a and the protrusion amount lower limit value 29b. Is determined (ST16). If the protrusion amount acquired here is outside the specified range, the clamp position is corrected (ST17) (clamp position correction step). In this clamp position correction step, the process of correcting the clamp position so that the upper surface 11a of the substrate 11 at a plurality of locations subject to height difference measurement in (ST15) is higher than the upper surface 12a of the clamp member 12. Is done.

  After this clamp position correction step, a receiving member moving step is performed based on the corrected clamp position, and then the height difference measurement step and the clamp position correction step are executed again. That is, first, the clamping of the substrate 11 is released (ST18), and the lower receiving member height adjustment is performed to raise and lower the lower receiving member 13 based on the corrected clamping position (ST19). In this state, the substrate 11 is re-clamped. (ST20). Thereafter, returning to (ST15), the same processing is repeatedly executed, and if it is determined that the protrusion amount indicated by the measurement result acquired in (ST16) is within the specified range, the clamp position is changed. After completing the correction process, the process returns to the normal printing process.

  That is, as described with reference to FIG. 4B, the substrate mask position where the mask plate 16 is superimposed on the upper surface of the substrate 11 based on the result of recognizing the substrate 11 and the mask plate 16 by the substrate recognition camera 20a and the mask recognition camera 20b. Next, as described with reference to FIG. 5B, the squeegee 19 slides on the upper surface of the mask plate 16 while scraping the solder paste 21, and pattern holes are formed on the upper surface of the substrate 11. A printing process for printing the solder paste 21 through 16a is executed (ST22).

  Thereafter, a plate separation process for separating the substrate 11 from the lower surface of the mask plate 16 is performed by driving the substrate elevating mechanism 5 as the second elevating means to lower the substrate holding portion 4 (ST23). Next, after the clamp of the substrate 11 by the clamp member 12 is released, the lower receiving member 13 is lowered to release the lower receiving state of the substrate 11 (ST24). Thus, the printing process is completed, and the printed substrate 11 is carried out to the downstream side by the transport rail 10.

  As described above, in the screen printing shown in the present embodiment, at least one pair of clamp members 12 is brought into contact with the side surfaces of the two opposite sides of the substrate 11 that is received by the lower receiving member 13. When restricting the horizontal position of the substrate 11 on the member 13, first lifting means for lifting the lower receiving member 13 relative to the clamp member 12 is used, and the upper surface 11 a of the substrate 11 is used as the upper surface of the clamp member 12. It controls so that it may protrude above 12a.

  In the clamping of the substrate 11 based on the measurement result of measuring the height difference between the upper surface 12a of the clamp member 12 and the upper surface 12a of the substrate 11 in the vicinity of the clamp member 12 in a state where the position of the substrate 11 is regulated by the clamping means. A clamp position setting process for setting a clamp position indicating a relative height position with respect to the clamp member 12 on which the substrate 11 should be positioned or a clamp position correction process for correcting the set clamp position is performed.

  As a result, the upper surface 11a of the substrate 11 is always held at an appropriate height position with respect to the clamp member 12 even in the case where there are variations in the dimensional accuracy of the support member 13, the thickness of the substrate 11, deformation, and the like. This makes it possible to prevent print quality defects caused by the relative height between the substrate 11 and the clamp member 12.

  The screen printing apparatus and the screen printing method of the present invention have the effect of preventing print quality defects caused by the relative height between the substrate and the clamp member, such as cream solder or conductive paste on the substrate. This is useful in the field of printing pastes.

DESCRIPTION OF SYMBOLS 1 Screen printing apparatus 2 Board | substrate positioning part 3 Positioning mechanism 4 Board | substrate holding part 10 Conveying rail 11 Board | substrate 11a Upper surface 12 Clamp member 12a Upper surface 13 Underlying member 14 Screen mask 16 Mask plate 17 Print head 19 Squeegee 20 Intermediate unit 20a Board | substrate recognition camera 20b Mask recognition camera 20c Distance measuring instrument Ci, Pi Measurement point Dh, Dih Height difference

Claims (9)

A screen printing apparatus for superimposing a screen mask on which a pattern hole is formed on an upper surface of a substrate, and printing a viscous material on the upper surface of the substrate through the pattern hole,
A receiving member for receiving the lower surface of the substrate;
Substrate clamping means for clamping the substrate on the lower receiving member by bringing at least one pair of clamping members into contact with the side surfaces of the two opposite sides of the substrate received by the lower receiving member;
In the clamp of the substrate, the lower receiving member is moved up and down relative to the clamp member to position the substrate at a clamp position indicating a relative height position to the clamp member on which the substrate should be positioned. Elevating means;
Alignment means for performing horizontal alignment of the substrate and the screen mask received by the lower receiving member;
In order to superimpose the screen mask on the upper surface of the substrate on which the alignment has been performed, or in order to bring the screen mask closer to a distance where screen printing is possible, the substrate and the screen mask are relatively close to each other. Second elevating means for relatively separating the substrate and the screen mask vertically in order to separate the screen mask from the plate;
A print head for printing a viscous material on the upper surface of the substrate through the pattern hole by moving along the upper surface of the screen mask;
A control unit for controlling the operation of the screen printing apparatus;
A height difference measuring means for measuring a height difference between the upper surface of the clamp member at a plurality of locations and the upper surface of the substrate in the vicinity of the clamp member in a state where the position of the substrate is regulated by the clamp means,
The control unit corrects the clamp position based on a measurement result of the height difference measuring unit so that a height difference indicating the smallest value among the height differences of the plurality of locations is included in a predetermined range. A screen printing apparatus that performs clamp position correction processing. The height difference measuring means is a distance measuring device that measures a height distance to the upper surface of the substrate and the upper surface of the clamp member,
Further, the distance measuring device includes a substrate recognition camera for imaging the recognition mark on the substrate and a recognition mark on the screen mask on the intermediate unit horizontally moved by the intermediate unit driving mechanism above the substrate received by the lower receiving member. The screen printing apparatus according to claim 1, wherein the screen printing apparatus is mounted together with a mask recognition camera for imaging. The control unit performs a clamp position correction process for correcting the clamp position based on a measurement result of the height difference measuring unit so that an upper surface of the substrate is higher than an upper surface of the clamp member. The screen printing apparatus according to claim 1 or 2. A method for setting a clamp position of a substrate in a screen printing apparatus , wherein a screen mask on which a pattern hole is formed is overlaid on the upper surface of the substrate, and a viscous material is printed on the upper surface of the substrate through the pattern hole ,
A substrate receiving step for receiving the lower surface of the substrate;
A substrate raising and lowering step of raising and lowering the substrate received in order to position the substrate at a temporarily set temporary clamp position with respect to a clamp member;
A height difference measuring step for measuring a height difference between the upper surface of the clamp member at a plurality of locations and the upper surface of the substrate in the vicinity of the clamp member;
A clamp position setting step of setting the clamp position so that the height difference indicating the smallest value among the height differences of the plurality of locations is included in a predetermined range based on the measurement result of the height difference measurement step. A method for setting a clamp position of a substrate in a screen printing apparatus. The clamp position setting step sets the clamp position so that an upper surface of the substrate is higher than an upper surface of the clamp member based on a measurement result of the height difference measurement step. Of setting the clamp position of a substrate in the screen printing apparatus of the present invention. The clamp position setting step includes a step of repeatedly performing a trial process for sequentially performing the substrate lifting step and the height difference measurement step while the temporary clamp position is gradually updated. A provisional clamp position in the trial process in which it is confirmed that the height difference indicating the smallest value among the height differences of the plurality of positions as the measurement result is included in a predetermined range is set as a final clamp position. 6. A method for setting a clamp position of a substrate in a screen printing apparatus according to claim 4 or 5. A method for setting a clamp position of a substrate in a screen printing apparatus , wherein a screen mask on which a pattern hole is formed is overlaid on the upper surface of the substrate, and a viscous material is printed on the upper surface of the substrate through the pattern hole ,
A substrate receiving step for receiving the lower surface of the substrate;
A substrate lifting step of down relatively with respect to the clamping member to the substrate to position the substrate to the clamping position,
A substrate clamping step of clamping the front Kimoto plate abut the clamp members to the side of two opposing sides of the substrate positioned in the clamp position,
A height difference measurement step of measuring a height difference of the upper surface of the substrate in the vicinity of the upper surface and the clamping member of the clamping member at a plurality of locations clamping the previous SL substrate,
The clamp position correction step of correcting the clamp position to be included within the scope of height difference indicating the smallest value of the height difference based-out the plurality of locations on the measurement result of the height difference measurement process defined in advance A method for setting a clamping position of a substrate in a screen printing apparatus. The clamp position correcting step corrects the clamp position based on a measurement result of the height difference measuring step so that an upper surface of the substrate is higher than an upper surface of the clamp member. Of setting the clamp position of a substrate in the screen printing apparatus of the present invention. The clamp position correction step includes a measurement result of the height difference measurement step in a process of repeatedly executing a trial process for sequentially performing the substrate lifting step and the height difference measurement step while updating the clamp position gradually. The height difference indicating the smallest value among the height differences at the plurality of locations is corrected within the predetermined range, and the clamp position of the trial process is corrected as a final clamp position. A method for setting a clamp position of a substrate in the screen printing apparatus according to claim 7 or 8.

Images