JP5854726B2 - ニッケル上に銀ストライクを電気めっきする方法 - Google Patents
ニッケル上に銀ストライクを電気めっきする方法 Download PDFInfo
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- JP5854726B2 JP5854726B2 JP2011204195A JP2011204195A JP5854726B2 JP 5854726 B2 JP5854726 B2 JP 5854726B2 JP 2011204195 A JP2011204195 A JP 2011204195A JP 2011204195 A JP2011204195 A JP 2011204195A JP 5854726 B2 JP5854726 B2 JP 5854726B2
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- Prior art keywords
- silver
- nickel
- layer
- electroplating
- strike
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229910052709 silver Inorganic materials 0.000 title claims description 190
- 239000004332 silver Substances 0.000 title claims description 190
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 title claims description 176
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims description 156
- 229910052759 nickel Inorganic materials 0.000 title claims description 78
- 238000009713 electroplating Methods 0.000 title claims description 51
- 238000000034 method Methods 0.000 title claims description 24
- 239000000758 substrate Substances 0.000 claims description 21
- -1 1-methyl-2-ethyl Chemical group 0.000 claims description 11
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims description 11
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 11
- 150000003949 imides Chemical class 0.000 claims description 10
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 claims description 7
- 229910001963 alkali metal nitrate Inorganic materials 0.000 claims description 6
- 239000000872 buffer Substances 0.000 claims description 6
- KZNICNPSHKQLFF-UHFFFAOYSA-N succinimide Chemical group O=C1CCC(=O)N1 KZNICNPSHKQLFF-UHFFFAOYSA-N 0.000 claims description 6
- 239000004094 surface-active agent Substances 0.000 claims description 5
- RHYBFKMFHLPQPH-UHFFFAOYSA-N N-methylhydantoin Chemical compound CN1CC(=O)NC1=O RHYBFKMFHLPQPH-UHFFFAOYSA-N 0.000 claims description 4
- 229940091173 hydantoin Drugs 0.000 claims description 4
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical group [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims description 4
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 claims description 4
- WJRBRSLFGCUECM-UHFFFAOYSA-N hydantoin Chemical compound O=C1CNC(=O)N1 WJRBRSLFGCUECM-UHFFFAOYSA-N 0.000 claims description 3
- XKJCHHZQLQNZHY-UHFFFAOYSA-N phthalimide Chemical class C1=CC=C2C(=O)NC(=O)C2=C1 XKJCHHZQLQNZHY-UHFFFAOYSA-N 0.000 claims description 3
- 229960002317 succinimide Drugs 0.000 claims description 3
- RFTORHYUCZJHDO-UHFFFAOYSA-N 1,3-dimethylimidazolidine-2,4-dione Chemical compound CN1CC(=O)N(C)C1=O RFTORHYUCZJHDO-UHFFFAOYSA-N 0.000 claims description 2
- JVQHRYVXOWBSNS-UHFFFAOYSA-N 3,3-dimethylpyrrolidine-2,5-dione Chemical compound CC1(C)CC(=O)NC1=O JVQHRYVXOWBSNS-UHFFFAOYSA-N 0.000 claims description 2
- USICVVZOKTZACS-UHFFFAOYSA-N 3-butylpyrrole-2,5-dione Chemical compound CCCCC1=CC(=O)NC1=O USICVVZOKTZACS-UHFFFAOYSA-N 0.000 claims description 2
- VJXIFKZHWWSQBD-UHFFFAOYSA-N 3-butylpyrrolidine-2,5-dione Chemical compound CCCCC1CC(=O)NC1=O VJXIFKZHWWSQBD-UHFFFAOYSA-N 0.000 claims description 2
- BHYLCQRRNWUVHE-UHFFFAOYSA-N 3-ethylpyrrolidine-2,5-dione Chemical compound CCC1CC(=O)NC1=O BHYLCQRRNWUVHE-UHFFFAOYSA-N 0.000 claims description 2
- KAJJUFUPJGVIFJ-UHFFFAOYSA-N 3-methylpyrrolidine-2,5-dione Chemical compound CC1CC(=O)NC1=O KAJJUFUPJGVIFJ-UHFFFAOYSA-N 0.000 claims description 2
- YIROYDNZEPTFOL-UHFFFAOYSA-N 5,5-Dimethylhydantoin Chemical compound CC1(C)NC(=O)NC1=O YIROYDNZEPTFOL-UHFFFAOYSA-N 0.000 claims description 2
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 claims description 2
- HAPOVYFOVVWLRS-UHFFFAOYSA-N ethosuximide Chemical compound CCC1(C)CC(=O)NC1=O HAPOVYFOVVWLRS-UHFFFAOYSA-N 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims description 2
- 239000003112 inhibitor Substances 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 2
- 235000010333 potassium nitrate Nutrition 0.000 claims description 2
- 239000004323 potassium nitrate Substances 0.000 claims description 2
- 235000010344 sodium nitrate Nutrition 0.000 claims description 2
- 239000004317 sodium nitrate Substances 0.000 claims description 2
- CXOFVDLJLONNDW-UHFFFAOYSA-N Phenytoin Chemical compound N1C(=O)NC(=O)C1(C=1C=CC=CC=1)C1=CC=CC=C1 CXOFVDLJLONNDW-UHFFFAOYSA-N 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 229960002036 phenytoin Drugs 0.000 claims 1
- 125000005543 phthalimide group Chemical group 0.000 claims 1
- 239000000243 solution Substances 0.000 description 60
- 238000007747 plating Methods 0.000 description 28
- 238000012360 testing method Methods 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 12
- 239000007788 liquid Substances 0.000 description 11
- 238000005245 sintering Methods 0.000 description 11
- 150000003378 silver Chemical class 0.000 description 10
- 239000008367 deionised water Substances 0.000 description 8
- 229910021641 deionized water Inorganic materials 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 6
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 5
- 229910021334 nickel silicide Inorganic materials 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- UUWCBFKLGFQDME-UHFFFAOYSA-N platinum titanium Chemical compound [Ti].[Pt] UUWCBFKLGFQDME-UHFFFAOYSA-N 0.000 description 4
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910001923 silver oxide Inorganic materials 0.000 description 3
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 2
- 150000002825 nitriles Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002574 poison Substances 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 2
- 229910001961 silver nitrate Inorganic materials 0.000 description 2
- JZDSOQSUCWVBMV-UHFFFAOYSA-N 2-ethylisoindole-1,3-dione Chemical compound C1=CC=C2C(=O)N(CC)C(=O)C2=C1 JZDSOQSUCWVBMV-UHFFFAOYSA-N 0.000 description 1
- ZXLYYQUMYFHCLQ-UHFFFAOYSA-N 2-methylisoindole-1,3-dione Chemical compound C1=CC=C2C(=O)N(C)C(=O)C2=C1 ZXLYYQUMYFHCLQ-UHFFFAOYSA-N 0.000 description 1
- RYKLZUPYJFFNRR-UHFFFAOYSA-N 3-hydroxypiperidin-2-one Chemical compound OC1CCCNC1=O RYKLZUPYJFFNRR-UHFFFAOYSA-N 0.000 description 1
- HVBSAKJJOYLTQU-UHFFFAOYSA-N 4-aminobenzenesulfonic acid Chemical class NC1=CC=C(S(O)(=O)=O)C=C1 HVBSAKJJOYLTQU-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- BDAGIHXWWSANSR-UHFFFAOYSA-M Formate Chemical compound [O-]C=O BDAGIHXWWSANSR-UHFFFAOYSA-M 0.000 description 1
- 241000212941 Glehnia Species 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- MFIHOCAEOJNSOL-UHFFFAOYSA-N [Ag]C#N Chemical class [Ag]C#N MFIHOCAEOJNSOL-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 229940045714 alkyl sulfonate alkylating agent Drugs 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 235000001014 amino acid Nutrition 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910021538 borax Inorganic materials 0.000 description 1
- 239000006172 buffering agent Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000007979 citrate buffer Substances 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 231100001231 less toxic Toxicity 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000008363 phosphate buffer Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000001103 potassium chloride Substances 0.000 description 1
- 235000011164 potassium chloride Nutrition 0.000 description 1
- WFIZEGIEIOHZCP-UHFFFAOYSA-M potassium formate Chemical compound [K+].[O-]C=O WFIZEGIEIOHZCP-UHFFFAOYSA-M 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- KCXFHTAICRTXLI-UHFFFAOYSA-N propane-1-sulfonic acid Chemical compound CCCS(O)(=O)=O KCXFHTAICRTXLI-UHFFFAOYSA-N 0.000 description 1
- ZNFFXFIEWVNCJO-UHFFFAOYSA-N pyrrolidine-2,5-dione;silver Chemical compound [Ag].O=C1CCC(=O)N1 ZNFFXFIEWVNCJO-UHFFFAOYSA-N 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229940100890 silver compound Drugs 0.000 description 1
- 150000003379 silver compounds Chemical class 0.000 description 1
- RHUVFRWZKMEWNS-UHFFFAOYSA-M silver thiocyanate Chemical compound [Ag+].[S-]C#N RHUVFRWZKMEWNS-UHFFFAOYSA-M 0.000 description 1
- UAYVLYAIUZPOBE-UHFFFAOYSA-N silver thiourea nitrate Chemical compound NC(=S)N.[N+](=O)([O-])[O-].[Ag+] UAYVLYAIUZPOBE-UHFFFAOYSA-N 0.000 description 1
- YPDPYLJJBBKICP-JIZZDEOASA-M silver;(2r)-2-amino-3-hydroxy-3-oxopropane-1-thiolate;nitric acid Chemical class [Ag+].O[N+]([O-])=O.[S-]C[C@H](N)C(O)=O YPDPYLJJBBKICP-JIZZDEOASA-M 0.000 description 1
- NEMJXQHXQWLYDM-JJKGCWMISA-M silver;(2r,3s,4r,5r)-2,3,4,5,6-pentahydroxyhexanoate Chemical class [Ag+].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O NEMJXQHXQWLYDM-JJKGCWMISA-M 0.000 description 1
- RXWQRLQUJZRVHB-UHFFFAOYSA-M silver;5-oxo-3,4-dihydropyrrol-2-olate Chemical compound [Ag+].[O-]C1=NC(=O)CC1 RXWQRLQUJZRVHB-UHFFFAOYSA-M 0.000 description 1
- XXAQKQFXTTXLEW-UHFFFAOYSA-J silver;trisodium;dioxido-oxo-sulfanylidene-$l^{6}-sulfane Chemical class [Na+].[Na+].[Na+].[Ag+].[O-]S([O-])(=O)=S.[O-]S([O-])(=O)=S XXAQKQFXTTXLEW-UHFFFAOYSA-J 0.000 description 1
- 239000004328 sodium tetraborate Substances 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- IIACRCGMVDHOTQ-UHFFFAOYSA-M sulfamate Chemical compound NS([O-])(=O)=O IIACRCGMVDHOTQ-UHFFFAOYSA-M 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000925 very toxic Toxicity 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/46—Electroplating: Baths therefor from solutions of silver
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/627—Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
- C25D5/12—Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Description
以下の実施例は本発明を例示するために含まれるが、本発明の範囲を限定することを意図していない。
Claims (8)
- a)1種以上の銀イオン源、1種以上のイミドもしくはイミド誘導体、1種以上のアルカリ金属硝酸塩、並びに界面活性剤、緩衝剤、レベラー、結晶粒微細化剤、さび止め剤、および延性増強剤から選択される1種以上の任意成分からなり、シアン化物を含まない溶液を提供し;
b)ニッケルを含む基体を前記溶液と接触させ;
c)ニッケルもしくはニッケル合金上に銀ストライク層を電気めっきし;および
d)銀ストライク層上に第2の銀層を電気めっきする
ことを含む方法。 - 1種以上の銀イオン源が0.2g/L〜2g/Lの量であり、かつ1種以上のアルカリ金属硝酸塩が3g/L〜30g/Lの量である、請求項1に記載の方法。
- 銀ストライク層が厚さ0.01μm〜0.2μmである、請求項1または2に記載の方法。
- 第2の銀層が厚さ1μm〜50μmである、請求項1〜3のいずれか1項に記載の方法。
- 銀ストライク層が0.1A/dm2〜2A/dm2の電流密度で電気めっきされる、請求項1〜4のいずれか1項に記載の方法。
- 前記アルカリ金属硝酸塩が硝酸カリウムまたは硝酸ナトリウムである請求項1〜5のいずれか1項に記載の方法。
- 前記イミドがスクシンイミド、2,2−ジメチルスクシンイミド、2−メチル−2−エチルスクシンイミド、2−メチルスクシンイミド、2−エチルスクシンイミド、1,1,2,2−テトラメチルスクシンイミド、1,1,2−トリメチルスクシンイミド、2−ブチルスクシンイミド、マレイミド、1−メチル−2−エチルマレイミド、2−ブチルマレイミド、1−メチル−2−エチルマレイミド、フタルイミドおよびフタルイミド誘導体から選択される、請求項1〜6のいずれか1項に記載の方法。
- 前記イミド誘導体がヒダントイン、1−メチルヒダントイン、1,3−ジメチルヒダントイン、5,5−ジメチルヒダントイン、1−メタノール−5,5−ジメチルヒダントインおよび5,5−ジフェニルヒダントインから選択される請求項1〜6のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US38506010P | 2010-09-21 | 2010-09-21 | |
US61/385060 | 2010-09-21 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012067388A JP2012067388A (ja) | 2012-04-05 |
JP2012067388A5 JP2012067388A5 (ja) | 2015-12-10 |
JP5854726B2 true JP5854726B2 (ja) | 2016-02-09 |
Family
ID=44651453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011204195A Active JP5854726B2 (ja) | 2010-09-21 | 2011-09-20 | ニッケル上に銀ストライクを電気めっきする方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9228268B2 (ja) |
EP (1) | EP2431501B1 (ja) |
JP (1) | JP5854726B2 (ja) |
KR (1) | KR101812031B1 (ja) |
CN (1) | CN102409372B (ja) |
SG (1) | SG179381A1 (ja) |
TW (1) | TWI480431B (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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SG179380A1 (en) * | 2010-09-21 | 2012-04-27 | Rohm & Haas Elect Mat | Cyanide-free silver electroplating solutions |
US9162901B2 (en) | 2013-03-14 | 2015-10-20 | Ppg Industries Ohio, Inc. | Electrolytic production of metal oxides |
WO2014144180A1 (en) * | 2013-03-15 | 2014-09-18 | Enthone Inc. | Electrodeposition of silver with fluoropolymer nanoparticles |
CN105358741B (zh) * | 2013-06-10 | 2018-04-20 | 东方镀金株式会社 | 镀敷叠层体的制造方法及镀敷叠层体 |
US10351965B2 (en) * | 2013-06-24 | 2019-07-16 | Oriental Electro Plating Corporation | Method for producing plated material, and plated material |
US9364822B2 (en) * | 2013-06-28 | 2016-06-14 | Rohm And Haas Electronic Materials Llc | Catalysts for electroless metallization containing five-membered heterocyclic nitrogen compounds |
US11674235B2 (en) * | 2018-04-11 | 2023-06-13 | Hutchinson Technology Incorporated | Plating method to reduce or eliminate voids in solder applied without flux |
DE102019106004B4 (de) * | 2019-03-08 | 2023-11-30 | Umicore Galvanotechnik Gmbh | Additiv für die cyanidfreie Abscheidung von Silber |
JP7405827B2 (ja) | 2018-08-21 | 2023-12-26 | ウミコレ・ガルファノテフニック・ゲーエムベーハー | 銀の非シアン系析出用電解質 |
DE102018120357A1 (de) * | 2018-08-21 | 2020-02-27 | Umicore Galvanotechnik Gmbh | Elektrolyt zur Abscheidung von Silber und Silberlegierungsüberzügen |
US11306409B2 (en) | 2019-05-23 | 2022-04-19 | Ag-Nano System Llc | Method to enable electroplating of golden silver nanoparticles |
CN113215630A (zh) * | 2021-04-21 | 2021-08-06 | 飞荣达科技(江苏)有限公司 | 一种高性能碳纤维及其电镀方法 |
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US4126524A (en) * | 1975-03-12 | 1978-11-21 | Technic, Inc. | Silver complex, method of making said complex and method and electrolyte containing said complex for electroplating silver and silver alloys |
US4246077A (en) * | 1975-03-12 | 1981-01-20 | Technic, Inc. | Non-cyanide bright silver electroplating bath therefor, silver compounds and method of making silver compounds |
JPS52105540A (en) * | 1976-03-01 | 1977-09-05 | Tech Inc | Silver bath for lusterous plating of nonncyanide |
US4055472A (en) * | 1976-09-15 | 1977-10-25 | United Aircraft Products, Inc. | Method of preparing nickel alloy parts for plating |
US4478691A (en) * | 1981-10-13 | 1984-10-23 | At&T Bell Laboratories | Silver plating procedure |
US5198132A (en) | 1990-10-11 | 1993-03-30 | The Lubrizol Corporation | Antioxidant products |
JPH08104993A (ja) * | 1994-10-04 | 1996-04-23 | Electroplating Eng Of Japan Co | 銀めっき浴及びその銀めっき方法 |
US6251249B1 (en) * | 1996-09-20 | 2001-06-26 | Atofina Chemicals, Inc. | Precious metal deposition composition and process |
JPH11302893A (ja) | 1998-04-22 | 1999-11-02 | Okuno Chem Ind Co Ltd | 非シアン系電気銀めっき液 |
US7628903B1 (en) | 2000-05-02 | 2009-12-08 | Ishihara Chemical Co., Ltd. | Silver and silver alloy plating bath |
DE10026680C1 (de) | 2000-05-30 | 2002-02-21 | Schloetter Fa Dr Ing Max | Elektrolyt und Verfahren zur Abscheidung von Zinn-Silber-Legierungsschichten und Verwendung des Elektrolyten |
DE10124002C1 (de) | 2001-05-17 | 2003-02-06 | Ami Doduco Gmbh | Saures Silberbad |
JP2005105386A (ja) | 2003-10-01 | 2005-04-21 | Nagoya Plating Co Ltd | 繊維用の無電解銀めっき液 |
US20050183961A1 (en) | 2004-02-24 | 2005-08-25 | Morrissey Ronald J. | Non-cyanide silver plating bath composition |
RU2323276C2 (ru) * | 2006-03-23 | 2008-04-27 | Закрытое акционерное общество "Драгцветмет" (ЗАО "Драгцветмет") | Электролит серебрения |
EP1918426A1 (de) | 2006-10-09 | 2008-05-07 | Enthone, Inc. | Cyanidfreie Elektrolytzusammensetzung und Verfahren zur Abscheidung von Silber- oder Silberlegierungsschichten auf Substraten |
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TW201226636A (en) | 2012-07-01 |
EP2431501A1 (en) | 2012-03-21 |
JP2012067388A (ja) | 2012-04-05 |
CN102409372B (zh) | 2015-02-11 |
TWI480431B (zh) | 2015-04-11 |
CN102409372A (zh) | 2012-04-11 |
KR101812031B1 (ko) | 2017-12-26 |
SG179381A1 (en) | 2012-04-27 |
US20120067733A1 (en) | 2012-03-22 |
US9228268B2 (en) | 2016-01-05 |
KR20120030983A (ko) | 2012-03-29 |
EP2431501B1 (en) | 2013-11-20 |
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