JP5810512B2 - 光学装置 - Google Patents

光学装置 Download PDF

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Publication number
JP5810512B2
JP5810512B2 JP2010254066A JP2010254066A JP5810512B2 JP 5810512 B2 JP5810512 B2 JP 5810512B2 JP 2010254066 A JP2010254066 A JP 2010254066A JP 2010254066 A JP2010254066 A JP 2010254066A JP 5810512 B2 JP5810512 B2 JP 5810512B2
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JP
Japan
Prior art keywords
wavelength
interference filter
light
gap
optical system
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JP2010254066A
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English (en)
Japanese (ja)
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JP2012103208A5 (enExample
JP2012103208A (ja
Inventor
達昭 舟本
達昭 舟本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010254066A priority Critical patent/JP5810512B2/ja
Priority to CN201110259007.1A priority patent/CN102466516B/zh
Priority to US13/238,312 priority patent/US8786861B2/en
Publication of JP2012103208A publication Critical patent/JP2012103208A/ja
Publication of JP2012103208A5 publication Critical patent/JP2012103208A5/ja
Priority to US14/303,033 priority patent/US9158049B2/en
Application granted granted Critical
Publication of JP5810512B2 publication Critical patent/JP5810512B2/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2010254066A 2010-11-12 2010-11-12 光学装置 Active JP5810512B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010254066A JP5810512B2 (ja) 2010-11-12 2010-11-12 光学装置
CN201110259007.1A CN102466516B (zh) 2010-11-12 2011-09-02 光学装置
US13/238,312 US8786861B2 (en) 2010-11-12 2011-09-21 Optical device with variable wavelength interference filter
US14/303,033 US9158049B2 (en) 2010-11-12 2014-06-12 Optical device with variable wavelength interference filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010254066A JP5810512B2 (ja) 2010-11-12 2010-11-12 光学装置

Publications (3)

Publication Number Publication Date
JP2012103208A JP2012103208A (ja) 2012-05-31
JP2012103208A5 JP2012103208A5 (enExample) 2013-12-26
JP5810512B2 true JP5810512B2 (ja) 2015-11-11

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010254066A Active JP5810512B2 (ja) 2010-11-12 2010-11-12 光学装置

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US (2) US8786861B2 (enExample)
JP (1) JP5810512B2 (enExample)
CN (1) CN102466516B (enExample)

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* Cited by examiner, † Cited by third party
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JP5810512B2 (ja) * 2010-11-12 2015-11-11 セイコーエプソン株式会社 光学装置
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP2014095594A (ja) * 2012-11-08 2014-05-22 Yokogawa Electric Corp 分光装置および分光用光源
US9466628B2 (en) * 2012-12-21 2016-10-11 Imec Spectral imaging device and method to calibrate the same
JP6225423B2 (ja) * 2013-01-07 2017-11-08 セイコーエプソン株式会社 分光測定装置、カラーマネージメントシステム、及びプロファイル作成方法
JP6136357B2 (ja) * 2013-02-25 2017-05-31 セイコーエプソン株式会社 分光測定装置、通信システム及びカラーマネージメントシステム
JP2014174136A (ja) * 2013-03-13 2014-09-22 Panasonic Corp 受光装置、空間情報検出装置
JP6107254B2 (ja) * 2013-03-14 2017-04-05 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
EP3014875A2 (en) 2013-06-24 2016-05-04 Technology Innovation Momentum Fund (Israel) Limited Partnership A system and method for color image acquisition
JP2015031649A (ja) 2013-08-06 2015-02-16 セイコーエプソン株式会社 測色装置
JP6255992B2 (ja) 2013-12-27 2018-01-10 セイコーエプソン株式会社 分光測定システム、分光モジュール、及び、位置ズレ検出方法
JP6476548B2 (ja) * 2014-01-29 2019-03-06 セイコーエプソン株式会社 光源装置及び観察装置
CA2938443C (en) 2014-01-31 2021-01-26 Viavi Solutions Inc. An optical filter and spectrometer
WO2015148604A1 (en) 2014-03-25 2015-10-01 Massachusetts Institute Of Technology Space-time modulated active 3d imager
US10152998B2 (en) 2014-04-07 2018-12-11 Seagate Technology Llc Features maps of articles with polarized light
JP2016011932A (ja) 2014-06-30 2016-01-21 セイコーエプソン株式会社 分光画像撮像装置、分光画像撮像方法
JP6467801B2 (ja) * 2014-07-31 2019-02-13 セイコーエプソン株式会社 分光画像取得装置、及び受光波長取得方法
JP6575179B2 (ja) * 2015-07-06 2019-09-18 セイコーエプソン株式会社 光学モジュール及び撮像装置
CN107850771B (zh) 2015-07-15 2020-08-28 科技创新动量基金（以色列）有限责任合伙公司 可调微机电标准具
US10048127B2 (en) * 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
TWI581004B (zh) * 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
JP6679959B2 (ja) * 2016-02-02 2020-04-15 セイコーエプソン株式会社 分光測定装置、及び分光測定方法
DE102017130024A1 (de) * 2017-12-14 2019-06-19 Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg Reduzieren von Falschlicht in einem Kamerasystem
WO2020110106A1 (en) * 2018-11-26 2020-06-04 Unispectral Ltd. A tunable filter having different gaps
CN109917348B (zh) * 2019-01-25 2020-11-03 上海禾赛科技股份有限公司 一种激光雷达系统

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US3984190A (en) * 1974-11-26 1976-10-05 Allied Chemical Corporation Simultaneous transmission of periodic spectral components by plural interferometric means
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JP4368163B2 (ja) * 2003-08-19 2009-11-18 富士フイルム株式会社 分光素子アレイ及びこれを備えた分光画像測定装置並びに分光画像測定方法
US7239395B2 (en) 2004-05-27 2007-07-03 Corning Incorporated Optical interrogation systems with reduced parasitic reflections and a method for filtering parasitic reflections
JP4210245B2 (ja) * 2004-07-09 2009-01-14 セイコーエプソン株式会社 波長可変フィルタ及び検出装置
JP4642436B2 (ja) * 2004-11-12 2011-03-02 リンテック株式会社 マーキング方法および保護膜形成兼ダイシング用シート
JP2006178320A (ja) * 2004-12-24 2006-07-06 Olympus Corp 分光透過率可変素子、及び分光透過率可変素子を備えた内視鏡装置
NO322368B1 (no) * 2005-04-15 2006-09-25 Sinvent As Infrarod deteksjon av gass - diffraktiv.
FI119830B (fi) * 2006-05-24 2009-03-31 Valtion Teknillinen Spektrometri ja inferferometrinen menetelmä
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JP2009126727A (ja) * 2007-11-20 2009-06-11 Sumitomo Electric Ind Ltd ＧａＮ基板の製造方法、ＧａＮ基板及び半導体デバイス
JP5564759B2 (ja) 2008-04-02 2014-08-06 セイコーエプソン株式会社 光学フィルタ装置
JP4691131B2 (ja) * 2008-04-28 2011-06-01 キヤノンアネルバ株式会社 スパッタ成膜方法、電子素子の製造方法、スパッタ装置
JP5151944B2 (ja) * 2008-12-09 2013-02-27 セイコーエプソン株式会社 光フィルタ及びそれを備えた光モジュール
JP2011170137A (ja) * 2010-02-19 2011-09-01 Seiko Epson Corp 波長可変干渉フィルター、光センサーおよび分析機器
JP5810512B2 (ja) * 2010-11-12 2015-11-11 セイコーエプソン株式会社 光学装置

Also Published As

Publication number Publication date
US20140293427A1 (en) 2014-10-02
US9158049B2 (en) 2015-10-13
CN102466516A (zh) 2012-05-23
CN102466516B (zh) 2015-12-16
US8786861B2 (en) 2014-07-22
US20120120403A1 (en) 2012-05-17
JP2012103208A (ja) 2012-05-31

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