CN102466516B - 光学装置 - Google Patents

光学装置 Download PDF

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Publication number
CN102466516B
CN102466516B CN201110259007.1A CN201110259007A CN102466516B CN 102466516 B CN102466516 B CN 102466516B CN 201110259007 A CN201110259007 A CN 201110259007A CN 102466516 B CN102466516 B CN 102466516B
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CN
China
Prior art keywords
interference filter
light
variable wavelength
wavelength interference
reflective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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CN201110259007.1A
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English (en)
Chinese (zh)
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CN102466516A (zh
Inventor
舟本达昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication of CN102466516A publication Critical patent/CN102466516A/zh
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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/22—Telecentric objectives or lens systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
CN201110259007.1A 2010-11-12 2011-09-02 光学装置 Active CN102466516B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010254066A JP5810512B2 (ja) 2010-11-12 2010-11-12 光学装置
JP2010-254066 2010-11-12

Publications (2)

Publication Number Publication Date
CN102466516A CN102466516A (zh) 2012-05-23
CN102466516B true CN102466516B (zh) 2015-12-16

Family

ID=46047483

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110259007.1A Active CN102466516B (zh) 2010-11-12 2011-09-02 光学装置

Country Status (3)

Country Link
US (2) US8786861B2 (enExample)
JP (1) JP5810512B2 (enExample)
CN (1) CN102466516B (enExample)

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JP5810512B2 (ja) * 2010-11-12 2015-11-11 セイコーエプソン株式会社 光学装置
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP2014095594A (ja) * 2012-11-08 2014-05-22 Yokogawa Electric Corp 分光装置および分光用光源
US9466628B2 (en) * 2012-12-21 2016-10-11 Imec Spectral imaging device and method to calibrate the same
JP6225423B2 (ja) * 2013-01-07 2017-11-08 セイコーエプソン株式会社 分光測定装置、カラーマネージメントシステム、及びプロファイル作成方法
JP6136357B2 (ja) * 2013-02-25 2017-05-31 セイコーエプソン株式会社 分光測定装置、通信システム及びカラーマネージメントシステム
JP2014174136A (ja) * 2013-03-13 2014-09-22 Panasonic Corp 受光装置、空間情報検出装置
JP6107254B2 (ja) * 2013-03-14 2017-04-05 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
EP3014875A2 (en) 2013-06-24 2016-05-04 Technology Innovation Momentum Fund (Israel) Limited Partnership A system and method for color image acquisition
JP2015031649A (ja) 2013-08-06 2015-02-16 セイコーエプソン株式会社 測色装置
JP6255992B2 (ja) 2013-12-27 2018-01-10 セイコーエプソン株式会社 分光測定システム、分光モジュール、及び、位置ズレ検出方法
JP6476548B2 (ja) * 2014-01-29 2019-03-06 セイコーエプソン株式会社 光源装置及び観察装置
CA2938443C (en) 2014-01-31 2021-01-26 Viavi Solutions Inc. An optical filter and spectrometer
WO2015148604A1 (en) 2014-03-25 2015-10-01 Massachusetts Institute Of Technology Space-time modulated active 3d imager
US10152998B2 (en) 2014-04-07 2018-12-11 Seagate Technology Llc Features maps of articles with polarized light
JP2016011932A (ja) 2014-06-30 2016-01-21 セイコーエプソン株式会社 分光画像撮像装置、分光画像撮像方法
JP6467801B2 (ja) * 2014-07-31 2019-02-13 セイコーエプソン株式会社 分光画像取得装置、及び受光波長取得方法
JP6575179B2 (ja) * 2015-07-06 2019-09-18 セイコーエプソン株式会社 光学モジュール及び撮像装置
CN107850771B (zh) 2015-07-15 2020-08-28 科技创新动量基金（以色列）有限责任合伙公司 可调微机电标准具
US10048127B2 (en) * 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
TWI581004B (zh) * 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
JP6679959B2 (ja) * 2016-02-02 2020-04-15 セイコーエプソン株式会社 分光測定装置、及び分光測定方法
DE102017130024A1 (de) * 2017-12-14 2019-06-19 Arnold & Richter Cine Technik Gmbh & Co. Betriebs Kg Reduzieren von Falschlicht in einem Kamerasystem
WO2020110106A1 (en) * 2018-11-26 2020-06-04 Unispectral Ltd. A tunable filter having different gaps
CN109917348B (zh) * 2019-01-25 2020-11-03 上海禾赛科技股份有限公司 一种激光雷达系统

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US6590710B2 (en) * 2000-02-18 2003-07-08 Yokogawa Electric Corporation Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
CN1580861A (zh) * 2003-08-04 2005-02-16 精工爱普生株式会社 Mems器件及其制造方法以及mems组件
CN1719302A (zh) * 2004-07-09 2006-01-11 精工爱普生株式会社 可调波长滤波器及其制造方法、以及检测装置
CN101750731A (zh) * 2008-12-09 2010-06-23 精工爱普生株式会社 滤光器及具备该滤光器的光学模块

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JP5564759B2 (ja) 2008-04-02 2014-08-06 セイコーエプソン株式会社 光学フィルタ装置
JP4691131B2 (ja) * 2008-04-28 2011-06-01 キヤノンアネルバ株式会社 スパッタ成膜方法、電子素子の製造方法、スパッタ装置
JP2011170137A (ja) * 2010-02-19 2011-09-01 Seiko Epson Corp 波長可変干渉フィルター、光センサーおよび分析機器
JP5810512B2 (ja) * 2010-11-12 2015-11-11 セイコーエプソン株式会社 光学装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6590710B2 (en) * 2000-02-18 2003-07-08 Yokogawa Electric Corporation Fabry-Perot filter, wavelength-selective infrared detector and infrared gas analyzer using the filter and detector
CN1580861A (zh) * 2003-08-04 2005-02-16 精工爱普生株式会社 Mems器件及其制造方法以及mems组件
CN1719302A (zh) * 2004-07-09 2006-01-11 精工爱普生株式会社 可调波长滤波器及其制造方法、以及检测装置
CN101750731A (zh) * 2008-12-09 2010-06-23 精工爱普生株式会社 滤光器及具备该滤光器的光学模块

Also Published As

Publication number Publication date
US20140293427A1 (en) 2014-10-02
US9158049B2 (en) 2015-10-13
CN102466516A (zh) 2012-05-23
JP5810512B2 (ja) 2015-11-11
US8786861B2 (en) 2014-07-22
US20120120403A1 (en) 2012-05-17
JP2012103208A (ja) 2012-05-31

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