JP5798315B2 - コンタクトプローブピン - Google Patents
コンタクトプローブピン Download PDFInfo
- Publication number
- JP5798315B2 JP5798315B2 JP2010259507A JP2010259507A JP5798315B2 JP 5798315 B2 JP5798315 B2 JP 5798315B2 JP 2010259507 A JP2010259507 A JP 2010259507A JP 2010259507 A JP2010259507 A JP 2010259507A JP 5798315 B2 JP5798315 B2 JP 5798315B2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- probe pin
- contact probe
- carbon film
- curvature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
- G01R1/06738—Geometry aspects related to tip portion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
- G01R1/06761—Material aspects related to layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
Description
好ましい。また、金属および/またはその炭化物の含有量は5〜30原子%であることが好ましい。更に、炭素皮膜の厚さは、0.1〜5μmであることが好ましい。
Claims (4)
- 先端が2つ以上の突起に分割され、該突起で被検面に繰り返し接触するコンタクトプローブピンであって、少なくとも前記突起の表面には、金属および/またはその炭化物を含有する炭素皮膜が形成されていると共に、前記突起の頂部における曲率半径が30μm以上、100μm以下であり、且つ検査される被検面は、SnAgCu合金からなるものであり、前記突起の頂部を前記被検面に対して5〜40gの荷重をかけて接触したときに、前記炭素皮膜と前記被検面との接触する面の角度が45°以下となるものであることを特徴とするコンタクトプローブピン。
- 前記金属は、W、Ta、Mo、Nb、TiおよびCrよりなる群から選択される1種以上である請求項1に記載のコンタクトプローブピン。
- 前記金属および/またはその炭化物の含有量は5〜30原子%である請求項1または2に記載のコンタクトプローブピン。
- 前記炭素皮膜の厚さは0.1〜5μmである請求項1〜3のいずれかに記載のコンタクトプローブピン。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010259507A JP5798315B2 (ja) | 2010-11-19 | 2010-11-19 | コンタクトプローブピン |
KR1020147035578A KR20150004437A (ko) | 2010-11-19 | 2011-11-16 | 콘택트 프로브 핀 |
US13/883,698 US9625492B2 (en) | 2010-11-19 | 2011-11-16 | Contact probe pin |
CN201180055264.1A CN103210314B (zh) | 2010-11-19 | 2011-11-16 | 接触探针销 |
PCT/JP2011/076444 WO2012067161A1 (ja) | 2010-11-19 | 2011-11-16 | コンタクトプローブピン |
KR1020137012619A KR101586886B1 (ko) | 2010-11-19 | 2011-11-16 | 콘택트 프로브 핀 |
SG2013032859A SG190056A1 (en) | 2010-11-19 | 2011-11-16 | Contact probe pin |
MYPI2013700810A MY166379A (en) | 2010-11-19 | 2011-11-16 | Contact probe pin |
TW100142321A TWI451092B (zh) | 2010-11-19 | 2011-11-18 | Contact probe pin |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010259507A JP5798315B2 (ja) | 2010-11-19 | 2010-11-19 | コンタクトプローブピン |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014069904A Division JP2014145772A (ja) | 2014-03-28 | 2014-03-28 | コンタクトプローブピン |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012112680A JP2012112680A (ja) | 2012-06-14 |
JP5798315B2 true JP5798315B2 (ja) | 2015-10-21 |
Family
ID=46084084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010259507A Active JP5798315B2 (ja) | 2010-11-19 | 2010-11-19 | コンタクトプローブピン |
Country Status (8)
Country | Link |
---|---|
US (1) | US9625492B2 (ja) |
JP (1) | JP5798315B2 (ja) |
KR (2) | KR20150004437A (ja) |
CN (1) | CN103210314B (ja) |
MY (1) | MY166379A (ja) |
SG (1) | SG190056A1 (ja) |
TW (1) | TWI451092B (ja) |
WO (1) | WO2012067161A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5036892B2 (ja) * | 2010-05-10 | 2012-09-26 | 株式会社神戸製鋼所 | コンタクトプローブ |
KR20150084950A (ko) * | 2012-12-14 | 2015-07-22 | 가부시키가이샤 고베 세이코쇼 | 전기적 접점 부재 및 검사용 접속 장치 |
US9810714B2 (en) * | 2013-11-07 | 2017-11-07 | Heraeus Deutschland GmbH & Co. KG | Probe pin and method for producing a probe pin |
EP2894483B1 (en) * | 2014-01-09 | 2018-06-27 | Multitest elektronische Systeme GmbH | Contact tip and contact element and method of producing the same |
JP6655325B2 (ja) * | 2015-08-25 | 2020-02-26 | 株式会社エンプラス | 電気接触子及び電気部品用ソケット |
US10168357B2 (en) * | 2015-12-21 | 2019-01-01 | Intel Corporation | Coated probe tips for plunger pins of an integrated circuit package test system |
IT201700019437A1 (it) * | 2017-02-21 | 2018-08-21 | St Microelectronics Srl | Scheda di test per un dispositivo attuabile magneticamente, e sistema di test includente la scheda di test |
JP2020180889A (ja) * | 2019-04-25 | 2020-11-05 | オムロン株式会社 | プローブピン、検査治具および検査ユニット |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08166407A (ja) | 1994-10-14 | 1996-06-25 | Kobe Steel Ltd | 半導体素子チェック用プローブカード |
JPH08292209A (ja) * | 1995-04-24 | 1996-11-05 | Nippon Denshi Zairyo Kk | プローブカード、それに用いられるプローブ及びプローブの製造方法 |
JPH10226874A (ja) | 1997-02-19 | 1998-08-25 | Sumitomo Electric Ind Ltd | 硬質炭素膜及びその被覆部材 |
JPH1138041A (ja) * | 1997-07-24 | 1999-02-12 | Mitsubishi Electric Corp | プローブカード用片持ち型プローブ針とその製造方法ならびに制御方法 |
WO2000003250A1 (en) * | 1998-07-10 | 2000-01-20 | Nhk Spring Co., Ltd. | Conductive contact |
JP2992512B1 (ja) * | 1998-07-15 | 1999-12-20 | 日本電子材料株式会社 | プローブカード |
US6441315B1 (en) | 1998-11-10 | 2002-08-27 | Formfactor, Inc. | Contact structures with blades having a wiping motion |
US6794890B1 (en) * | 1999-07-27 | 2004-09-21 | Mitsubishi Denki Kabushiki Kaisha | Test socket, method of manufacturing the test socket, test method using the test socket, and member to be tested |
JP2001296312A (ja) * | 2000-04-17 | 2001-10-26 | Yamaichi Electronics Co Ltd | 接触子および接触子の製造方法 |
JP2002071748A (ja) * | 2000-08-28 | 2002-03-12 | Mitsubishi Electric Corp | テスト用ソケット、このテスト用ソケットを用いたテスト方法、及び被テスト部材 |
CN1228638C (zh) * | 2001-04-13 | 2005-11-23 | 住友电气工业株式会社 | 接触探针 |
JP2002318247A (ja) * | 2001-04-20 | 2002-10-31 | Kobe Steel Ltd | 接続装置 |
JP2003231203A (ja) | 2001-08-21 | 2003-08-19 | Toshiba Corp | 炭素膜被覆部材 |
US6633030B2 (en) * | 2001-08-31 | 2003-10-14 | Fiarchild Semiconductor | Surface mountable optocoupler package |
ATE399328T1 (de) | 2001-09-24 | 2008-07-15 | Rika Denshi America Inc | Elektrische testsonden und verfahren zu ihrer herstellung |
JP2003329706A (ja) * | 2002-05-10 | 2003-11-19 | Hitachi Maxell Ltd | 電気特性測定用の接触端子、電気特性測定装置および電池製造装置 |
TWI236723B (en) * | 2002-10-02 | 2005-07-21 | Renesas Tech Corp | Probe sheet, probe card, semiconductor inspection device, and manufacturing method for semiconductor device |
JP4063157B2 (ja) * | 2003-07-08 | 2008-03-19 | 富士電機デバイステクノロジー株式会社 | 半導体素子の電気的測定方法 |
JP2006038641A (ja) * | 2004-07-27 | 2006-02-09 | Sumitomo Electric Ind Ltd | コンタクトプローブ |
JP2006208166A (ja) * | 2005-01-27 | 2006-08-10 | Sumitomo Electric Ind Ltd | コンタクトプローブおよびその使用方法ならびにそのコンタクトプローブを備えるプローブカードおよび検査装置 |
JP2007024613A (ja) * | 2005-07-14 | 2007-02-01 | Genesis Technology Inc | 接触端子およびこれを用いた半導体デバイスの検査用接続装置 |
JP5012281B2 (ja) * | 2007-07-23 | 2012-08-29 | 富士通株式会社 | コンタクトプローブ、コンタクトプローブを使用する電気検査用試験機及びこれを用いたプリント板ユニットの製造方法 |
US20090261851A1 (en) * | 2008-04-18 | 2009-10-22 | Antares Advanced Test Technologies, Inc. | Spring probe |
JP5667350B2 (ja) | 2009-08-07 | 2015-02-12 | 株式会社神戸製鋼所 | コンタクトプローブピン |
CN102033144B (zh) | 2009-09-30 | 2013-10-23 | 株式会社神户制钢所 | 电接点构件 |
JP5036892B2 (ja) | 2010-05-10 | 2012-09-26 | 株式会社神戸製鋼所 | コンタクトプローブ |
-
2010
- 2010-11-19 JP JP2010259507A patent/JP5798315B2/ja active Active
-
2011
- 2011-11-16 US US13/883,698 patent/US9625492B2/en active Active
- 2011-11-16 KR KR1020147035578A patent/KR20150004437A/ko not_active Application Discontinuation
- 2011-11-16 MY MYPI2013700810A patent/MY166379A/en unknown
- 2011-11-16 CN CN201180055264.1A patent/CN103210314B/zh active Active
- 2011-11-16 WO PCT/JP2011/076444 patent/WO2012067161A1/ja active Application Filing
- 2011-11-16 SG SG2013032859A patent/SG190056A1/en unknown
- 2011-11-16 KR KR1020137012619A patent/KR101586886B1/ko active IP Right Grant
- 2011-11-18 TW TW100142321A patent/TWI451092B/zh active
Also Published As
Publication number | Publication date |
---|---|
TWI451092B (zh) | 2014-09-01 |
CN103210314B (zh) | 2015-11-25 |
KR20130102081A (ko) | 2013-09-16 |
KR101586886B1 (ko) | 2016-01-19 |
US9625492B2 (en) | 2017-04-18 |
WO2012067161A1 (ja) | 2012-05-24 |
JP2012112680A (ja) | 2012-06-14 |
SG190056A1 (en) | 2013-06-28 |
MY166379A (en) | 2018-06-25 |
TW201241440A (en) | 2012-10-16 |
KR20150004437A (ko) | 2015-01-12 |
CN103210314A (zh) | 2013-07-17 |
US20130222005A1 (en) | 2013-08-29 |
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