JP5793095B2 - インクジェットプリントヘッドを形成するための方法 - Google Patents

インクジェットプリントヘッドを形成するための方法 Download PDF

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Publication number
JP5793095B2
JP5793095B2 JP2012042539A JP2012042539A JP5793095B2 JP 5793095 B2 JP5793095 B2 JP 5793095B2 JP 2012042539 A JP2012042539 A JP 2012042539A JP 2012042539 A JP2012042539 A JP 2012042539A JP 5793095 B2 JP5793095 B2 JP 5793095B2
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JP
Japan
Prior art keywords
layer
diaphragm
trace
forming
traces
Prior art date
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Expired - Fee Related
Application number
JP2012042539A
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English (en)
Japanese (ja)
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JP2012196960A5 (enExample
JP2012196960A (ja
Inventor
ピーター・ジェイ・ニストロム
マーク・エイ・セルラ
ゲイリー・ディー・レディング
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of JP2012196960A publication Critical patent/JP2012196960A/ja
Publication of JP2012196960A5 publication Critical patent/JP2012196960A5/ja
Application granted granted Critical
Publication of JP5793095B2 publication Critical patent/JP5793095B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012042539A 2011-03-22 2012-02-28 インクジェットプリントヘッドを形成するための方法 Expired - Fee Related JP5793095B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/053,968 US8585183B2 (en) 2011-03-22 2011-03-22 High density multilayer interconnect for print head
US13/053,968 2011-03-22

Publications (3)

Publication Number Publication Date
JP2012196960A JP2012196960A (ja) 2012-10-18
JP2012196960A5 JP2012196960A5 (enExample) 2015-04-09
JP5793095B2 true JP5793095B2 (ja) 2015-10-14

Family

ID=46855316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012042539A Expired - Fee Related JP5793095B2 (ja) 2011-03-22 2012-02-28 インクジェットプリントヘッドを形成するための方法

Country Status (4)

Country Link
US (1) US8585183B2 (enExample)
JP (1) JP5793095B2 (enExample)
KR (1) KR101819882B1 (enExample)
CN (1) CN102689517B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
US8826539B2 (en) * 2012-05-16 2014-09-09 Xerox Corporation Method for flex circuit bonding without solder mask for high density electrical interconnect
US10607642B2 (en) * 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9802408B2 (en) * 2015-02-24 2017-10-31 Xerox Corporation Raised fluid pass-through structure in print heads
US9643408B1 (en) 2016-02-09 2017-05-09 Xerox Corporation Joint quantization of drop probability functions in multi-size drop inkjet printers
US10166777B2 (en) * 2016-04-21 2019-01-01 Xerox Corporation Method of forming piezo driver electrodes
WO2018013093A1 (en) 2016-07-12 2018-01-18 Hewlett-Packard Development Company, L.P. Printhead comprising a thin film passivation layer
CN111216452B (zh) * 2018-11-27 2021-08-17 西安增材制造国家研究院有限公司 一种压电式mems喷墨打印头及制作方法
JP2021136248A (ja) * 2020-02-21 2021-09-13 株式会社ディスコ デバイスウェーハの加工方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6464324B1 (en) * 2000-01-31 2002-10-15 Picojet, Inc. Microfluid device and ultrasonic bonding process
JP2007290238A (ja) * 2006-04-25 2007-11-08 Fuji Xerox Co Ltd 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド
US7699441B2 (en) * 2006-12-12 2010-04-20 Eastman Kodak Company Liquid drop ejector having improved liquid chamber
US7959266B2 (en) * 2007-03-28 2011-06-14 Xerox Corporation Self aligned port hole opening process for ink jet print heads
US8082641B2 (en) * 2007-06-01 2011-12-27 Xerox Corporation Method of manufacturing a ductile polymer-piezoelectric material composite
JP2009177149A (ja) * 2007-12-26 2009-08-06 Konica Minolta Holdings Inc 金属酸化物半導体とその製造方法および薄膜トランジスタ
US8857020B2 (en) * 2008-05-23 2014-10-14 Fujifilm Corporation Actuators and methods of making the same
US8360557B2 (en) * 2008-12-05 2013-01-29 Xerox Corporation Method for laser drilling fluid ports in multiple layers
JP5321832B2 (ja) * 2009-03-26 2013-10-23 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置、並びにアクチュエーター装置

Also Published As

Publication number Publication date
CN102689517A (zh) 2012-09-26
KR20120107870A (ko) 2012-10-04
US20120242756A1 (en) 2012-09-27
US8585183B2 (en) 2013-11-19
JP2012196960A (ja) 2012-10-18
KR101819882B1 (ko) 2018-01-19
CN102689517B (zh) 2015-07-22

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