KR101819882B1 - 프린트 헤드용 고밀도 다중층 상호접속부 - Google Patents

프린트 헤드용 고밀도 다중층 상호접속부 Download PDF

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Publication number
KR101819882B1
KR101819882B1 KR1020120028622A KR20120028622A KR101819882B1 KR 101819882 B1 KR101819882 B1 KR 101819882B1 KR 1020120028622 A KR1020120028622 A KR 1020120028622A KR 20120028622 A KR20120028622 A KR 20120028622A KR 101819882 B1 KR101819882 B1 KR 101819882B1
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KR
South Korea
Prior art keywords
layer
diaphragm
traces
forming
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020120028622A
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English (en)
Korean (ko)
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KR20120107870A (ko
Inventor
피터 제이. 니스트롬
마크 에이. 셀룰러
게리 디. 레딩
Original Assignee
제록스 코포레이션
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Publication date
Application filed by 제록스 코포레이션 filed Critical 제록스 코포레이션
Publication of KR20120107870A publication Critical patent/KR20120107870A/ko
Application granted granted Critical
Publication of KR101819882B1 publication Critical patent/KR101819882B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR1020120028622A 2011-03-22 2012-03-21 프린트 헤드용 고밀도 다중층 상호접속부 Expired - Fee Related KR101819882B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/053,968 US8585183B2 (en) 2011-03-22 2011-03-22 High density multilayer interconnect for print head
US13/053,968 2011-03-22

Publications (2)

Publication Number Publication Date
KR20120107870A KR20120107870A (ko) 2012-10-04
KR101819882B1 true KR101819882B1 (ko) 2018-01-19

Family

ID=46855316

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120028622A Expired - Fee Related KR101819882B1 (ko) 2011-03-22 2012-03-21 프린트 헤드용 고밀도 다중층 상호접속부

Country Status (4)

Country Link
US (1) US8585183B2 (enExample)
JP (1) JP5793095B2 (enExample)
KR (1) KR101819882B1 (enExample)
CN (1) CN102689517B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
US8826539B2 (en) * 2012-05-16 2014-09-09 Xerox Corporation Method for flex circuit bonding without solder mask for high density electrical interconnect
US10607642B2 (en) * 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9802408B2 (en) * 2015-02-24 2017-10-31 Xerox Corporation Raised fluid pass-through structure in print heads
US9643408B1 (en) 2016-02-09 2017-05-09 Xerox Corporation Joint quantization of drop probability functions in multi-size drop inkjet printers
US10166777B2 (en) * 2016-04-21 2019-01-01 Xerox Corporation Method of forming piezo driver electrodes
WO2018013093A1 (en) * 2016-07-12 2018-01-18 Hewlett-Packard Development Company, L.P. Printhead comprising a thin film passivation layer
CN111216452B (zh) * 2018-11-27 2021-08-17 西安增材制造国家研究院有限公司 一种压电式mems喷墨打印头及制作方法
JP2021136248A (ja) * 2020-02-21 2021-09-13 株式会社ディスコ デバイスウェーハの加工方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009081968A1 (ja) * 2007-12-26 2009-07-02 Konica Minolta Holdings, Inc. 金属酸化物半導体の製造方法およびこれを用いる半導体素子
JP2010247511A (ja) * 2009-03-26 2010-11-04 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置、並びにアクチュエーター装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6464324B1 (en) * 2000-01-31 2002-10-15 Picojet, Inc. Microfluid device and ultrasonic bonding process
JP2007290238A (ja) * 2006-04-25 2007-11-08 Fuji Xerox Co Ltd 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド
US7699441B2 (en) * 2006-12-12 2010-04-20 Eastman Kodak Company Liquid drop ejector having improved liquid chamber
US7959266B2 (en) * 2007-03-28 2011-06-14 Xerox Corporation Self aligned port hole opening process for ink jet print heads
US8082641B2 (en) * 2007-06-01 2011-12-27 Xerox Corporation Method of manufacturing a ductile polymer-piezoelectric material composite
WO2009143354A2 (en) * 2008-05-23 2009-11-26 Fujifilm Corporation Insulated film use in a mems device
US8360557B2 (en) * 2008-12-05 2013-01-29 Xerox Corporation Method for laser drilling fluid ports in multiple layers

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009081968A1 (ja) * 2007-12-26 2009-07-02 Konica Minolta Holdings, Inc. 金属酸化物半導体の製造方法およびこれを用いる半導体素子
JP2010247511A (ja) * 2009-03-26 2010-11-04 Seiko Epson Corp 液体噴射ヘッド及び液体噴射装置、並びにアクチュエーター装置

Also Published As

Publication number Publication date
CN102689517B (zh) 2015-07-22
CN102689517A (zh) 2012-09-26
US20120242756A1 (en) 2012-09-27
KR20120107870A (ko) 2012-10-04
JP2012196960A (ja) 2012-10-18
US8585183B2 (en) 2013-11-19
JP5793095B2 (ja) 2015-10-14

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