CN102689517B - 用于印刷头的高密度多层互连 - Google Patents

用于印刷头的高密度多层互连 Download PDF

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Publication number
CN102689517B
CN102689517B CN201210090475.5A CN201210090475A CN102689517B CN 102689517 B CN102689517 B CN 102689517B CN 201210090475 A CN201210090475 A CN 201210090475A CN 102689517 B CN102689517 B CN 102689517B
Authority
CN
China
Prior art keywords
piezoelectric element
barrier film
shim
electric mark
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210090475.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN102689517A (zh
Inventor
彼得·J·奈斯特龙
马克·A·塞吕拉
加里·D·雷丁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of CN102689517A publication Critical patent/CN102689517A/zh
Application granted granted Critical
Publication of CN102689517B publication Critical patent/CN102689517B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201210090475.5A 2011-03-22 2012-03-21 用于印刷头的高密度多层互连 Expired - Fee Related CN102689517B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/053,968 US8585183B2 (en) 2011-03-22 2011-03-22 High density multilayer interconnect for print head
US13/053,968 2011-03-22

Publications (2)

Publication Number Publication Date
CN102689517A CN102689517A (zh) 2012-09-26
CN102689517B true CN102689517B (zh) 2015-07-22

Family

ID=46855316

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210090475.5A Expired - Fee Related CN102689517B (zh) 2011-03-22 2012-03-21 用于印刷头的高密度多层互连

Country Status (4)

Country Link
US (1) US8585183B2 (enExample)
JP (1) JP5793095B2 (enExample)
KR (1) KR101819882B1 (enExample)
CN (1) CN102689517B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
US8826539B2 (en) * 2012-05-16 2014-09-09 Xerox Corporation Method for flex circuit bonding without solder mask for high density electrical interconnect
US10607642B2 (en) * 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9802408B2 (en) * 2015-02-24 2017-10-31 Xerox Corporation Raised fluid pass-through structure in print heads
US9643408B1 (en) 2016-02-09 2017-05-09 Xerox Corporation Joint quantization of drop probability functions in multi-size drop inkjet printers
US10166777B2 (en) * 2016-04-21 2019-01-01 Xerox Corporation Method of forming piezo driver electrodes
US10654270B2 (en) 2016-07-12 2020-05-19 Hewlett-Packard Development Company, L.P. Printhead comprising a thin film passivation layer
CN111216452B (zh) * 2018-11-27 2021-08-17 西安增材制造国家研究院有限公司 一种压电式mems喷墨打印头及制作方法
JP2021136248A (ja) * 2020-02-21 2021-09-13 株式会社ディスコ デバイスウェーハの加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1364106A (zh) * 2000-01-31 2002-08-14 皮科杰特公司 微观流体器件和超声波焊接过程
CN101274523A (zh) * 2007-03-28 2008-10-01 施乐公司 用于喷墨打印头的自对准端口孔开口工艺
CN101557939A (zh) * 2006-12-12 2009-10-14 伊斯曼柯达公司 具有改进的液体腔室的液滴喷射器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007290238A (ja) * 2006-04-25 2007-11-08 Fuji Xerox Co Ltd 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド
US8082641B2 (en) * 2007-06-01 2011-12-27 Xerox Corporation Method of manufacturing a ductile polymer-piezoelectric material composite
JP2009177149A (ja) * 2007-12-26 2009-08-06 Konica Minolta Holdings Inc 金属酸化物半導体とその製造方法および薄膜トランジスタ
WO2009143354A2 (en) * 2008-05-23 2009-11-26 Fujifilm Corporation Insulated film use in a mems device
US8360557B2 (en) * 2008-12-05 2013-01-29 Xerox Corporation Method for laser drilling fluid ports in multiple layers
JP5321832B2 (ja) * 2009-03-26 2013-10-23 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置、並びにアクチュエーター装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1364106A (zh) * 2000-01-31 2002-08-14 皮科杰特公司 微观流体器件和超声波焊接过程
CN101557939A (zh) * 2006-12-12 2009-10-14 伊斯曼柯达公司 具有改进的液体腔室的液滴喷射器
CN101274523A (zh) * 2007-03-28 2008-10-01 施乐公司 用于喷墨打印头的自对准端口孔开口工艺

Also Published As

Publication number Publication date
KR101819882B1 (ko) 2018-01-19
US20120242756A1 (en) 2012-09-27
JP2012196960A (ja) 2012-10-18
CN102689517A (zh) 2012-09-26
KR20120107870A (ko) 2012-10-04
JP5793095B2 (ja) 2015-10-14
US8585183B2 (en) 2013-11-19

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150722

Termination date: 20210321