JP2012196960A5 - - Google Patents

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Publication number
JP2012196960A5
JP2012196960A5 JP2012042539A JP2012042539A JP2012196960A5 JP 2012196960 A5 JP2012196960 A5 JP 2012196960A5 JP 2012042539 A JP2012042539 A JP 2012042539A JP 2012042539 A JP2012042539 A JP 2012042539A JP 2012196960 A5 JP2012196960 A5 JP 2012196960A5
Authority
JP
Japan
Prior art keywords
layer
diaphragm
traces
forming
piezoelectric elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012042539A
Other languages
English (en)
Japanese (ja)
Other versions
JP5793095B2 (ja
JP2012196960A (ja
Filing date
Publication date
Priority claimed from US13/053,968 external-priority patent/US8585183B2/en
Application filed filed Critical
Publication of JP2012196960A publication Critical patent/JP2012196960A/ja
Publication of JP2012196960A5 publication Critical patent/JP2012196960A5/ja
Application granted granted Critical
Publication of JP5793095B2 publication Critical patent/JP5793095B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012042539A 2011-03-22 2012-02-28 インクジェットプリントヘッドを形成するための方法 Expired - Fee Related JP5793095B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/053,968 US8585183B2 (en) 2011-03-22 2011-03-22 High density multilayer interconnect for print head
US13/053,968 2011-03-22

Publications (3)

Publication Number Publication Date
JP2012196960A JP2012196960A (ja) 2012-10-18
JP2012196960A5 true JP2012196960A5 (enExample) 2015-04-09
JP5793095B2 JP5793095B2 (ja) 2015-10-14

Family

ID=46855316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012042539A Expired - Fee Related JP5793095B2 (ja) 2011-03-22 2012-02-28 インクジェットプリントヘッドを形成するための方法

Country Status (4)

Country Link
US (1) US8585183B2 (enExample)
JP (1) JP5793095B2 (enExample)
KR (1) KR101819882B1 (enExample)
CN (1) CN102689517B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8727508B2 (en) * 2011-11-10 2014-05-20 Xerox Corporation Bonded silicon structure for high density print head
US8826539B2 (en) * 2012-05-16 2014-09-09 Xerox Corporation Method for flex circuit bonding without solder mask for high density electrical interconnect
US10607642B2 (en) * 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9802408B2 (en) * 2015-02-24 2017-10-31 Xerox Corporation Raised fluid pass-through structure in print heads
US9643408B1 (en) 2016-02-09 2017-05-09 Xerox Corporation Joint quantization of drop probability functions in multi-size drop inkjet printers
US10166777B2 (en) * 2016-04-21 2019-01-01 Xerox Corporation Method of forming piezo driver electrodes
WO2018013093A1 (en) 2016-07-12 2018-01-18 Hewlett-Packard Development Company, L.P. Printhead comprising a thin film passivation layer
CN111216452B (zh) * 2018-11-27 2021-08-17 西安增材制造国家研究院有限公司 一种压电式mems喷墨打印头及制作方法
JP2021136248A (ja) * 2020-02-21 2021-09-13 株式会社ディスコ デバイスウェーハの加工方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6464324B1 (en) * 2000-01-31 2002-10-15 Picojet, Inc. Microfluid device and ultrasonic bonding process
JP2007290238A (ja) * 2006-04-25 2007-11-08 Fuji Xerox Co Ltd 液滴吐出ヘッドの製造方法及び液滴吐出ヘッド
US7699441B2 (en) * 2006-12-12 2010-04-20 Eastman Kodak Company Liquid drop ejector having improved liquid chamber
US7959266B2 (en) * 2007-03-28 2011-06-14 Xerox Corporation Self aligned port hole opening process for ink jet print heads
US8082641B2 (en) * 2007-06-01 2011-12-27 Xerox Corporation Method of manufacturing a ductile polymer-piezoelectric material composite
JP2009177149A (ja) * 2007-12-26 2009-08-06 Konica Minolta Holdings Inc 金属酸化物半導体とその製造方法および薄膜トランジスタ
US8857020B2 (en) * 2008-05-23 2014-10-14 Fujifilm Corporation Actuators and methods of making the same
US8360557B2 (en) * 2008-12-05 2013-01-29 Xerox Corporation Method for laser drilling fluid ports in multiple layers
JP5321832B2 (ja) * 2009-03-26 2013-10-23 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置、並びにアクチュエーター装置

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