JP5787586B2 - 電気機械変換装置 - Google Patents

電気機械変換装置 Download PDF

Info

Publication number
JP5787586B2
JP5787586B2 JP2011090123A JP2011090123A JP5787586B2 JP 5787586 B2 JP5787586 B2 JP 5787586B2 JP 2011090123 A JP2011090123 A JP 2011090123A JP 2011090123 A JP2011090123 A JP 2011090123A JP 5787586 B2 JP5787586 B2 JP 5787586B2
Authority
JP
Japan
Prior art keywords
layer
electrode
light reflection
stress relaxation
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011090123A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012222785A5 (enExample
JP2012222785A (ja
Inventor
虎島　和敏
和敏 虎島
有二 笠貫
有二 笠貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011090123A priority Critical patent/JP5787586B2/ja
Priority to US13/421,791 priority patent/US8767278B2/en
Priority to EP12161161.0A priority patent/EP2511702A3/en
Priority to CN201210102975.6A priority patent/CN102738383B/zh
Priority to CN201510245395.6A priority patent/CN104977360B/zh
Publication of JP2012222785A publication Critical patent/JP2012222785A/ja
Publication of JP2012222785A5 publication Critical patent/JP2012222785A5/ja
Application granted granted Critical
Publication of JP5787586B2 publication Critical patent/JP5787586B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP2011090123A 2011-04-14 2011-04-14 電気機械変換装置 Active JP5787586B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011090123A JP5787586B2 (ja) 2011-04-14 2011-04-14 電気機械変換装置
US13/421,791 US8767278B2 (en) 2011-04-14 2012-03-15 Electromechanical transducer and photoacoustic apparatus
EP12161161.0A EP2511702A3 (en) 2011-04-14 2012-03-26 Electromechanical transducer and photoacoustic apparatus
CN201210102975.6A CN102738383B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置
CN201510245395.6A CN104977360B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011090123A JP5787586B2 (ja) 2011-04-14 2011-04-14 電気機械変換装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015145751A Division JP5980388B2 (ja) 2015-07-23 2015-07-23 電気機械変換装置

Publications (3)

Publication Number Publication Date
JP2012222785A JP2012222785A (ja) 2012-11-12
JP2012222785A5 JP2012222785A5 (enExample) 2014-05-29
JP5787586B2 true JP5787586B2 (ja) 2015-09-30

Family

ID=46084747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011090123A Active JP5787586B2 (ja) 2011-04-14 2011-04-14 電気機械変換装置

Country Status (4)

Country Link
US (1) US8767278B2 (enExample)
EP (1) EP2511702A3 (enExample)
JP (1) JP5787586B2 (enExample)
CN (2) CN102738383B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5511260B2 (ja) * 2009-08-19 2014-06-04 キヤノン株式会社 容量型電気機械変換装置、及びその感度調整方法
JP5812660B2 (ja) * 2011-04-19 2015-11-17 キヤノン株式会社 電気機械変換装置及びその製造方法
JP5943677B2 (ja) * 2012-03-31 2016-07-05 キヤノン株式会社 探触子、及びそれを用いた被検体情報取得装置
JP5986441B2 (ja) 2012-07-06 2016-09-06 キヤノン株式会社 静電容量型トランスデューサ
JP6029413B2 (ja) 2012-10-12 2016-11-24 キヤノン株式会社 プローブ及び被検体情報取得装置
JP6359280B2 (ja) * 2013-02-28 2018-07-18 キヤノンメディカルシステムズ株式会社 医用音響カプラ
US9502023B2 (en) 2013-03-15 2016-11-22 Fujifilm Sonosite, Inc. Acoustic lens for micromachined ultrasound transducers
JP6234073B2 (ja) * 2013-06-07 2017-11-22 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
JP6381195B2 (ja) 2013-10-22 2018-08-29 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
JP2015100472A (ja) 2013-11-22 2015-06-04 キヤノン株式会社 静電容量型トランスデューサの駆動方法および駆動装置
JP2015112326A (ja) * 2013-12-12 2015-06-22 キヤノン株式会社 プローブ、被検体情報取得装置
JP6278770B2 (ja) * 2014-03-19 2018-02-14 キヤノン株式会社 被検体情報取得装置
JP6399803B2 (ja) * 2014-05-14 2018-10-03 キヤノン株式会社 力覚センサおよび把持装置
CN103976743A (zh) * 2014-05-27 2014-08-13 江西科技师范大学 基于cMUT环形阵列的微型光声传感器
JP2016122759A (ja) * 2014-12-25 2016-07-07 キヤノン株式会社 貫通配線を有する電子デバイスの作製方法
JP6429711B2 (ja) 2015-03-31 2018-11-28 キヤノン株式会社 探触子、及びそれを用いた被検体情報取得装置
CN109171660A (zh) * 2018-10-09 2019-01-11 深圳先进技术研究院 光声成像探头及应用

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69127379T2 (de) 1990-01-11 1998-03-19 Canon K.K., Tokio/Tokyo Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet
JP2884447B2 (ja) 1991-04-22 1999-04-19 キヤノン株式会社 カンチレバー型プローブ、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP2923813B2 (ja) 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JPH05282717A (ja) 1992-03-31 1993-10-29 Canon Inc 記録媒体の製造方法、及び記録媒体、及び情報処理装置
DE69409617T2 (de) 1993-11-09 1998-08-27 Canon Kk Bildanzeigegerät
US20070127164A1 (en) * 2005-11-21 2007-06-07 Physical Logic Ag Nanoscale Sensor
US8540640B2 (en) 2007-03-20 2013-09-24 Hitachi Medical Corporation Ultrasonic probe and method for manufacturing the same and ultrasonic diagnostic device
US8327521B2 (en) * 2007-09-17 2012-12-11 Koninklijke Philips Electronics N.V. Method for production and using a capacitive micro-machined ultrasonic transducer
US20090252977A1 (en) * 2008-04-07 2009-10-08 Canon Kabushiki Kaisha Multilayer film reflector
JP5305993B2 (ja) * 2008-05-02 2013-10-02 キヤノン株式会社 容量型機械電気変換素子の製造方法、及び容量型機械電気変換素子
JP2010068503A (ja) * 2008-08-13 2010-03-25 Seiko Epson Corp 弾性表面波素子
JP4900979B2 (ja) * 2008-08-27 2012-03-21 キヤノン株式会社 光音響装置および光音響波を受信するための探触子
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
JP2011004790A (ja) 2009-06-23 2011-01-13 Canon Inc 光音響計測装置
JP5709368B2 (ja) 2009-11-04 2015-04-30 キヤノン株式会社 生体情報取得装置

Also Published As

Publication number Publication date
US20120262770A1 (en) 2012-10-18
CN104977360A (zh) 2015-10-14
CN102738383A (zh) 2012-10-17
JP2012222785A (ja) 2012-11-12
CN102738383B (zh) 2015-06-03
CN104977360B (zh) 2018-09-28
US8767278B2 (en) 2014-07-01
EP2511702A3 (en) 2016-03-23
EP2511702A2 (en) 2012-10-17

Similar Documents

Publication Publication Date Title
JP5787586B2 (ja) 電気機械変換装置
JP5943677B2 (ja) 探触子、及びそれを用いた被検体情報取得装置
CN103720487B (zh) 探测器、被检体信息获取装置及制造探测器的方法
JP6632431B2 (ja) 超音波トランスデューサユニット及びそれを備える情報取得装置
US20160144402A1 (en) Capacitive transducer and sample information acquisition apparatus
JP2013226391A (ja) 探触子、及びそれを用いた被検体情報取得装置
JP6438544B2 (ja) 電気機械変換装置
US20130261425A1 (en) Probe and object information acquisition apparatus using the same
JP6186055B2 (ja) 電気機械変換装置
US20130263669A1 (en) Probe and manufacturing method thereof, and object information acquisition apparatus using the same
US20150168354A1 (en) Probe and sample information acquisition device
JP5980388B2 (ja) 電気機械変換装置
JP6598944B2 (ja) プローブ、被検体情報取得装置
JP2017042189A (ja) 超音波プローブ
JP6429711B2 (ja) 探触子、及びそれを用いた被検体情報取得装置
JP2017216728A5 (enExample)
JP2013214846A (ja) 探触子、及びそれを用いた被検体情報取得装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140412

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20140412

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140916

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20141021

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141222

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150122

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150122

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150630

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150728

R151 Written notification of patent or utility model registration

Ref document number: 5787586

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: R3D03