JP2017216728A5 - - Google Patents
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- Publication number
- JP2017216728A5 JP2017216728A5 JP2017147319A JP2017147319A JP2017216728A5 JP 2017216728 A5 JP2017216728 A5 JP 2017216728A5 JP 2017147319 A JP2017147319 A JP 2017147319A JP 2017147319 A JP2017147319 A JP 2017147319A JP 2017216728 A5 JP2017216728 A5 JP 2017216728A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electromechanical transducer
- vibration film
- transducer according
- stress relaxation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000002040 relaxant effect Effects 0.000 claims 3
- 239000004205 dimethyl polysiloxane Substances 0.000 claims 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000003990 capacitor Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 claims 1
- -1 polydimethylsiloxane Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000116 mitigating effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017147319A JP6438544B2 (ja) | 2017-07-31 | 2017-07-31 | 電気機械変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017147319A JP6438544B2 (ja) | 2017-07-31 | 2017-07-31 | 電気機械変換装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016147972A Division JP6186055B2 (ja) | 2016-07-28 | 2016-07-28 | 電気機械変換装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017216728A JP2017216728A (ja) | 2017-12-07 |
| JP2017216728A5 true JP2017216728A5 (enExample) | 2018-02-15 |
| JP6438544B2 JP6438544B2 (ja) | 2018-12-12 |
Family
ID=60575902
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017147319A Expired - Fee Related JP6438544B2 (ja) | 2017-07-31 | 2017-07-31 | 電気機械変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6438544B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3077163B1 (fr) * | 2018-01-22 | 2021-08-27 | Soitec Silicon On Insulator | Procedes de conception et de fabrication d'un dispositif comprenant un reseau d'elements micro-usines, dispositif obtenu a l'issu de tels procedes |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1720046B1 (en) * | 2004-02-24 | 2016-10-12 | Panasonic Intellectual Property Management Co., Ltd. | Light reflector and lighting fixture including the same |
| JP2007329368A (ja) * | 2006-06-09 | 2007-12-20 | Canon Inc | 多層膜ミラー、評価方法、露光装置及びデバイス製造方法 |
| JP5546111B2 (ja) * | 2007-06-29 | 2014-07-09 | キヤノン株式会社 | 超音波探触子、該超音波探触子を備えた検査装置 |
| JP5408937B2 (ja) * | 2007-09-25 | 2014-02-05 | キヤノン株式会社 | 電気機械変換素子及びその製造方法 |
| JP4900979B2 (ja) * | 2008-08-27 | 2012-03-21 | キヤノン株式会社 | 光音響装置および光音響波を受信するための探触子 |
| JP5317826B2 (ja) * | 2009-05-19 | 2013-10-16 | キヤノン株式会社 | 容量型機械電気変換素子の製造方法 |
| WO2011033887A1 (ja) * | 2009-09-17 | 2011-03-24 | 株式会社日立メディコ | 超音波探触子及び超音波撮像装置 |
| JP6186055B2 (ja) * | 2016-07-28 | 2017-08-23 | キヤノン株式会社 | 電気機械変換装置 |
-
2017
- 2017-07-31 JP JP2017147319A patent/JP6438544B2/ja not_active Expired - Fee Related
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