JP6438544B2 - 電気機械変換装置 - Google Patents

電気機械変換装置 Download PDF

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Publication number
JP6438544B2
JP6438544B2 JP2017147319A JP2017147319A JP6438544B2 JP 6438544 B2 JP6438544 B2 JP 6438544B2 JP 2017147319 A JP2017147319 A JP 2017147319A JP 2017147319 A JP2017147319 A JP 2017147319A JP 6438544 B2 JP6438544 B2 JP 6438544B2
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Japan
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layer
electromechanical transducer
electrode
light
capacitance type
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Expired - Fee Related
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JP2017147319A
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Japanese (ja)
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JP2017216728A (ja
JP2017216728A5 (enExample
Inventor
虎島　和敏
和敏 虎島
有二 笠貫
有二 笠貫
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Canon Inc
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Canon Inc
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Priority to JP2017147319A priority Critical patent/JP6438544B2/ja
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Publication of JP6438544B2 publication Critical patent/JP6438544B2/ja
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  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2017147319A 2017-07-31 2017-07-31 電気機械変換装置 Expired - Fee Related JP6438544B2 (ja)

Priority Applications (1)

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JP2017147319A JP6438544B2 (ja) 2017-07-31 2017-07-31 電気機械変換装置

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JP2017147319A JP6438544B2 (ja) 2017-07-31 2017-07-31 電気機械変換装置

Related Parent Applications (1)

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JP2016147972A Division JP6186055B2 (ja) 2016-07-28 2016-07-28 電気機械変換装置

Publications (3)

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JP2017216728A JP2017216728A (ja) 2017-12-07
JP2017216728A5 JP2017216728A5 (enExample) 2018-02-15
JP6438544B2 true JP6438544B2 (ja) 2018-12-12

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ID=60575902

Family Applications (1)

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JP2017147319A Expired - Fee Related JP6438544B2 (ja) 2017-07-31 2017-07-31 電気機械変換装置

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JP (1) JP6438544B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3077163B1 (fr) * 2018-01-22 2021-08-27 Soitec Silicon On Insulator Procedes de conception et de fabrication d'un dispositif comprenant un reseau d'elements micro-usines, dispositif obtenu a l'issu de tels procedes

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1720046B1 (en) * 2004-02-24 2016-10-12 Panasonic Intellectual Property Management Co., Ltd. Light reflector and lighting fixture including the same
JP2007329368A (ja) * 2006-06-09 2007-12-20 Canon Inc 多層膜ミラー、評価方法、露光装置及びデバイス製造方法
JP5546111B2 (ja) * 2007-06-29 2014-07-09 キヤノン株式会社 超音波探触子、該超音波探触子を備えた検査装置
JP5408937B2 (ja) * 2007-09-25 2014-02-05 キヤノン株式会社 電気機械変換素子及びその製造方法
JP4900979B2 (ja) * 2008-08-27 2012-03-21 キヤノン株式会社 光音響装置および光音響波を受信するための探触子
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
WO2011033887A1 (ja) * 2009-09-17 2011-03-24 株式会社日立メディコ 超音波探触子及び超音波撮像装置
JP6186055B2 (ja) * 2016-07-28 2017-08-23 キヤノン株式会社 電気機械変換装置

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JP2017216728A (ja) 2017-12-07

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