JP5783677B2 - エアガイド - Google Patents
エアガイド Download PDFInfo
- Publication number
- JP5783677B2 JP5783677B2 JP2010000235A JP2010000235A JP5783677B2 JP 5783677 B2 JP5783677 B2 JP 5783677B2 JP 2010000235 A JP2010000235 A JP 2010000235A JP 2010000235 A JP2010000235 A JP 2010000235A JP 5783677 B2 JP5783677 B2 JP 5783677B2
- Authority
- JP
- Japan
- Prior art keywords
- guide
- air
- frame
- slide tube
- air guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
30 ガイドフレーム
31 フレーム部材
33 中心孔
100 エアガイド
311 進気孔
313 導気孔
315 出気孔
317 内側面
3111 孔塞ぎ
3131 皿頭ねじ
3171 ガイド溝
Claims (6)
- 外側には進気孔が開設され、内部には前記進気孔と連通する導気孔が配設され、内側には前記導気孔と連通する出気孔が開設されるガイドフレームと、
前記出気孔に向かうように前記ガイドフレームを覆い、且つ前記ガイドフレームに相対して直線運動するスライドチューブと、を備えてなるエアガイドであって、
前記ガイドフレームの前記スライドチューブに向かう内側には、前記ガイドフレームと前記スライドチューブの間の隙間の厚さより大きいか又は等しい幅を有し且つ前記出気孔と連通するガイド溝がさらに開設され、
前記ガイド溝の縁部及びコーナー部は曲面に形成され、
前記ガイド溝の縁部は、前記ガイド溝の幅が大きくなるように曲面に形成されていることを特徴とするエアガイド。 - 前記スライドチューブの断面は非円形であって、前記ガイドフレームの前記スライドチューブを収容する中心孔は非円形孔であることを特徴とする請求項1に記載のエアガイド。
- 前記スライドチューブの断面は正多角形であって、前記ガイドフレームの中心孔は正多角形孔であることを特徴とする請求項2に記載のエアガイド。
- 前記ガイドフレームは、4つの矩形フレーム部材を突き合わせてなることを特徴とする請求項3に記載のエアガイド。
- 前記ガイドフレームは、L型断面を有する2つの矩形フレーム部材を突き合わせてなることを特徴とする請求項3に記載のエアガイド。
- 前記スライドチューブは中空構造であることを特徴とする請求項1〜5のいずれか一項に記載のエアガイド。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200910300033.7 | 2009-01-05 | ||
CN200910300033.7A CN101769336B (zh) | 2009-01-05 | 2009-01-05 | 空气导轨 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010155342A JP2010155342A (ja) | 2010-07-15 |
JP5783677B2 true JP5783677B2 (ja) | 2015-09-24 |
Family
ID=42311800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010000235A Expired - Fee Related JP5783677B2 (ja) | 2009-01-05 | 2010-01-04 | エアガイド |
Country Status (3)
Country | Link |
---|---|
US (1) | US8297842B2 (ja) |
JP (1) | JP5783677B2 (ja) |
CN (1) | CN101769336B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102837942A (zh) * | 2011-06-22 | 2012-12-26 | 大银微系统股份有限公司 | 引导载件在直曲复合轨道上移动的导引构造 |
CN102996635B (zh) * | 2012-10-30 | 2016-06-08 | 无锡鸿声铝业有限公司 | 一种双弯单矫机组的导轨组件 |
CN102901439A (zh) * | 2012-11-08 | 2013-01-30 | 昆山允可精密工业技术有限公司 | 一种smt网板测厚用接触式测头 |
CN102901438A (zh) * | 2012-11-08 | 2013-01-30 | 昆山允可精密工业技术有限公司 | 一种smt网板厚度测量用接触式测头 |
CN103143905B (zh) * | 2013-02-28 | 2016-09-07 | 深圳朱光波机械科技有限公司 | 一种微刻机床 |
CN104229475B (zh) * | 2013-06-17 | 2017-07-18 | 深圳富泰宏精密工业有限公司 | 分料装置 |
CN109556547A (zh) * | 2018-11-22 | 2019-04-02 | 中国航空工业集团公司北京航空精密机械研究所 | 一种用于测量机的复合导轨结构及其制备方法 |
CN111843004A (zh) * | 2020-08-27 | 2020-10-30 | 王倩 | 一种肋骨牵开器移动臂槽体加工装置 |
Family Cites Families (40)
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US3754799A (en) * | 1971-11-18 | 1973-08-28 | Lidkoepings Mekaniska Verkstad | Movable machine element supported with the aid of a gas or fluid bearing |
US3903993A (en) * | 1973-03-26 | 1975-09-09 | Minster Machine Co | Hydrostatic bearing arrangement for press slide |
US4299518A (en) * | 1980-03-03 | 1981-11-10 | Texas Instruments Incorporated | Manufacturing work station |
JPS60150950A (ja) * | 1984-01-20 | 1985-08-08 | Hitachi Ltd | 案内装置 |
JPS6125742A (ja) * | 1984-07-11 | 1986-02-04 | Ntn Toyo Bearing Co Ltd | ガイド装置 |
JPH0786369B2 (ja) * | 1989-02-04 | 1995-09-20 | 豊田工機株式会社 | 角スライド静圧支承装置 |
US5098204A (en) * | 1989-11-03 | 1992-03-24 | John H. Blanz Company, Inc. | Load balanced planar bearing assembly especially for a cryogenic probe station |
DE69132324T2 (de) * | 1990-11-16 | 2001-01-04 | Watanabe Shoko Tokio Tokyo Kk | Methode zum Transportieren von Substraten mit plattenförmiger Grundlage |
JPH05104384A (ja) * | 1991-10-16 | 1993-04-27 | Canon Inc | 平行移動機構 |
IT1251253B (it) * | 1991-11-08 | 1995-05-05 | Pluritec Italia | Pattino pneumostatico perfezionato. |
JP3082991B2 (ja) | 1992-04-13 | 2000-09-04 | 株式会社東京精密 | 直動式エアベアリングのロック機構 |
JP3128709B2 (ja) * | 1992-08-04 | 2001-01-29 | 株式会社新川 | 非接触型移動テーブル |
JP3260869B2 (ja) | 1992-12-24 | 2002-02-25 | 京セラ株式会社 | 静圧軸受装置 |
AT410018B (de) * | 1998-02-06 | 2003-01-27 | Sticht Walter | Mehrwegventil |
US7269475B1 (en) * | 1998-03-02 | 2007-09-11 | Xerox Corporation | Distributed control system with global contraints for controlling object motion with smart matter |
JPH11280995A (ja) * | 1998-03-26 | 1999-10-15 | Fuji Heavy Ind Ltd | 摺動機構 |
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JP2004011789A (ja) * | 2002-06-07 | 2004-01-15 | Koganei Corp | 空気圧シリンダ |
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2009
- 2009-01-05 CN CN200910300033.7A patent/CN101769336B/zh not_active Expired - Fee Related
- 2009-12-28 US US12/647,637 patent/US8297842B2/en active Active
-
2010
- 2010-01-04 JP JP2010000235A patent/JP5783677B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8297842B2 (en) | 2012-10-30 |
CN101769336B (zh) | 2013-02-13 |
US20100172702A1 (en) | 2010-07-08 |
CN101769336A (zh) | 2010-07-07 |
JP2010155342A (ja) | 2010-07-15 |
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