JP5757746B2 - 窒化物半導体装置 - Google Patents
窒化物半導体装置 Download PDFInfo
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- JP5757746B2 JP5757746B2 JP2011028050A JP2011028050A JP5757746B2 JP 5757746 B2 JP5757746 B2 JP 5757746B2 JP 2011028050 A JP2011028050 A JP 2011028050A JP 2011028050 A JP2011028050 A JP 2011028050A JP 5757746 B2 JP5757746 B2 JP 5757746B2
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- nitride semiconductor
- semiconductor layer
- anode electrode
- layer
- anode
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- 239000004065 semiconductor Substances 0.000 title claims description 101
- 150000004767 nitrides Chemical class 0.000 title claims description 95
- 239000000758 substrate Substances 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 239000000969 carrier Substances 0.000 claims description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 4
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052733 gallium Inorganic materials 0.000 claims description 4
- 229910021478 group 5 element Inorganic materials 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000011574 phosphorus Substances 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- 229910002601 GaN Inorganic materials 0.000 description 13
- 230000004888 barrier function Effects 0.000 description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 11
- 230000005533 two-dimensional electron gas Effects 0.000 description 11
- 230000015556 catabolic process Effects 0.000 description 8
- 239000010931 gold Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000011777 magnesium Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- -1 FET structure nitride Chemical class 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Description
Claims (2)
- ガリウム、アルミニウム、ホウ素及びインジウムからなる群のうち少なくとも1つからなるIII族元素と、窒素、リン及び砒素からなる群のうちの少なくとも窒素を含むV族元素で構成されたIII−V族窒化物半導体層からなる窒化物半導体装置において、
基板上に積層した前記III−V族窒化物半導体層からなる第1の窒化物半導体層と、p型の導電性を有する前記III−V族窒化物半導体層からなる第2の窒化物半導体層と、前記第2の窒化物半導体層の一部を除去し、露出する前記第1の窒化物半導体層上にオーミック接合する第1のアノード電極と、該第1のアノード電極に接続し、前記第2の窒化物半導体層にオーミック接合する第2のアノード電極と、前記第1の窒化物半導体層にオーミック接合するカソード電極とを備え、
前記第1及び前記第2のアノード電極に印加する電圧が0Vのとき、前記第2のアノード電極直下の前記第1の窒化物半導体層からなるチャネルにキャリアが存在せず、前記第2のアノード電極直下を除く前記第1の窒化物半導体層にキャリアが存在しており、前記第1及び前記第2のアノード電極に印加する電圧が正電圧であって、前記第2のアノード電極に電流が流れるとき、前記第2の窒化物半導体層から前記チャネルにホールが注入されることを特徴とする窒化物半導体装置。 - 請求項1記載の窒化物半導体装置において、前記基板と前記第1の窒化物半導体層との間に、前記第1の窒化物半導体層のエネルギーギャップより小さいエネルギーギャップを持つ、前記III−V族窒化物半導体層からなる第3の窒化物半導体層を備え、
前記第1及び前記第2のアノード電極に印加する電圧が0Vのとき、前記第2のアノード電極直下の前記第1の窒化物半導体層と前記第3の窒化物半導体層との界面にキャリアが存在せず、前記第2のアノード電極直下を除く前記第1の窒化物半導体層と前記第3の窒化物半導体層との界面にキャリアが存在しており、前記第1及び前記第2のアノード電極に印加する電圧が正電圧であって、前記第2のアノード電極に電流が流れるとき、前記第2の窒化物半導体層から前記第1の窒化物半導体層と前記第3の窒化物半導体層との界面にホールが注入されることを特徴とする窒化物半導体装置。
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Families Citing this family (4)
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KR101963227B1 (ko) * | 2012-09-28 | 2019-03-28 | 삼성전자주식회사 | 파워 스위칭 소자 및 그 제조방법 |
KR101435937B1 (ko) * | 2013-04-15 | 2014-11-03 | 홍익대학교 산학협력단 | 쇼트키 배리어 다이오드 및 그 제조방법 |
CN112420850B (zh) * | 2019-08-23 | 2024-04-12 | 苏州捷芯威半导体有限公司 | 一种半导体器件及其制备方法 |
US20220375926A1 (en) * | 2020-04-29 | 2022-11-24 | Innoscience (Zhuhai) Technology Co., Ltd. | Electronic device |
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JP4775859B2 (ja) * | 2007-08-24 | 2011-09-21 | シャープ株式会社 | 窒化物半導体装置とそれを含む電力変換装置 |
JP5595685B2 (ja) * | 2009-07-28 | 2014-09-24 | パナソニック株式会社 | 半導体装置 |
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