JP5751844B2 - 圧電デバイスの製造方法 - Google Patents
圧電デバイスの製造方法 Download PDFInfo
- Publication number
- JP5751844B2 JP5751844B2 JP2011009397A JP2011009397A JP5751844B2 JP 5751844 B2 JP5751844 B2 JP 5751844B2 JP 2011009397 A JP2011009397 A JP 2011009397A JP 2011009397 A JP2011009397 A JP 2011009397A JP 5751844 B2 JP5751844 B2 JP 5751844B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- wafer
- base substrate
- piezoelectric
- element wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims description 65
- 239000000463 material Substances 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 3
- 244000241838 Lycium barbarum Species 0.000 claims 1
- 235000015459 Lycium barbarum Nutrition 0.000 claims 1
- 235000015468 Lycium chinense Nutrition 0.000 claims 1
- 238000005304 joining Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000005219 brazing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000010008 shearing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011009397A JP5751844B2 (ja) | 2011-01-20 | 2011-01-20 | 圧電デバイスの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011009397A JP5751844B2 (ja) | 2011-01-20 | 2011-01-20 | 圧電デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012151317A JP2012151317A (ja) | 2012-08-09 |
| JP2012151317A5 JP2012151317A5 (cg-RX-API-DMAC7.html) | 2014-03-06 |
| JP5751844B2 true JP5751844B2 (ja) | 2015-07-22 |
Family
ID=46793293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011009397A Expired - Fee Related JP5751844B2 (ja) | 2011-01-20 | 2011-01-20 | 圧電デバイスの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5751844B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015165619A (ja) * | 2014-03-03 | 2015-09-17 | 京セラクリスタルデバイス株式会社 | 水晶振動素子の中間生成品及びその製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009184810A (ja) * | 2008-02-08 | 2009-08-20 | Seiko Epson Corp | 記録装置 |
| JP5352777B2 (ja) * | 2009-01-30 | 2013-11-27 | パナソニック株式会社 | 水晶デバイスの製造方法 |
| JP2011091685A (ja) * | 2009-10-23 | 2011-05-06 | Seiko Epson Corp | 圧電デバイス |
-
2011
- 2011-01-20 JP JP2011009397A patent/JP5751844B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012151317A (ja) | 2012-08-09 |
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