JP2016096335A - 層を転写するためのプロセス - Google Patents
層を転写するためのプロセス Download PDFInfo
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- JP2016096335A JP2016096335A JP2015217653A JP2015217653A JP2016096335A JP 2016096335 A JP2016096335 A JP 2016096335A JP 2015217653 A JP2015217653 A JP 2015217653A JP 2015217653 A JP2015217653 A JP 2015217653A JP 2016096335 A JP2016096335 A JP 2016096335A
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- JP
- Japan
- Prior art keywords
- active layer
- temporary substrate
- topology
- substrate
- bonding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/7806—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68363—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving transfer directly from an origin substrate to a target substrate without use of an intermediate handle substrate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Wire Bonding (AREA)
- Micromachines (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Laminated Bodies (AREA)
Abstract
Description
活性層の第1の面を仮基板の1つの面に接合する第1のステップと、
活性層の第2の面を最終基板に接合する第2のステップと、
活性層と仮基板とを分離する第3のステップと、
を含む。
2 活性層
3 電気部品
4 最終基板
5 仮基板
6 面
7 キャビティ
Claims (9)
- 仮基板(5)を使用して、固有の表面トポロジーを有する第1の面(1)を備える活性層(2)を最終基板(4)に転写するプロセスであって、
前記活性層(2)の前記第1の面(1)を前記仮基板(5)の1つの面に接合する第1のステップと、
前記活性層(2)の第2の面(6)を前記最終基板(4)に接合する第2のステップと、
前記活性層(2)と前記仮基板(5)とを分離する第3のステップと、
を含むプロセスにおいて、
前記仮基板(5)の前記面が前記活性層(2)の前記第1の面(1)の前記表面トポロジーに相補的な表面トポロジーを有し、それによって、前記仮基板(5)の前記表面トポロジーが、前記接合の第1のステップにおいて前記活性層(2)の前記第1の面(1)の前記表面トポロジーを包み込むことを特徴とする、プロセス。 - 前記仮基板(5)の前記表面トポロジーが、事前設定されている幾何学形状及び事前設定されている寸法でのエッチングによって生成される、請求項1に記載の転写プロセス。
- 前記仮基板(5)の前記エッチング幾何学形状及び寸法が、前記活性層(2)の前記第1の面(1)の前記表面トポロジーの前記幾何学形状及び寸法を少なくとも5%だけ増加させたものに相当する、請求項2に記載の転写プロセス。
- 前記仮基板(5)の前記エッチングが、深さ及び幅が、それぞれ、前記活性層(2)の前記第1の面(1)の前記表面トポロジーから生じる最大高さ(h)及び最大幅(l)を5%だけ増加させたものに相当する、例えば矩形のキャビティ(7)を形成する、請求項2に記載の転写プロセス。
- 前記第1のステップと前記第2のステップとの間で、前記活性層(2)の第2の面(6)に対して前記活性層(2)を薄膜化するステップが行われる、請求項1に記載の転写プロセス。
- 前記活性層(2)の前記第1の面(1)の前記固有の表面トポロジーが、少なくとも1つの平坦部分及び少なくとも1つの非平坦部分を備える、請求項1に記載の転写プロセス。
- 前記活性層(2)の前記第1の面(1)が前記仮基板(5)の前記面に接合されるとき、前記活性層(2)の前記第1の面(1)の前記平坦部分のみが接合される、請求項6に記載の転写プロセス。
- 前記活性層(2)の前記第1の面(1)の前記平坦部分の面積が、前記非平坦部分の面積よりも大きい、請求項6又は7に記載の転写プロセス。
- 前記活性層(2)の前記第1の面(1)の前記仮基板(5)の1つの面への前記接合が、500℃未満の温度で熱処理によって強化された直接接合である、請求項1に記載の転写プロセス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1402610 | 2014-11-14 | ||
FR1402610A FR3028664B1 (fr) | 2014-11-14 | 2014-11-14 | Procede de separation et de transfert de couches |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016096335A true JP2016096335A (ja) | 2016-05-26 |
JP6594166B2 JP6594166B2 (ja) | 2019-10-23 |
Family
ID=52358818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015217653A Active JP6594166B2 (ja) | 2014-11-14 | 2015-11-05 | 層を転写するためのプロセス |
Country Status (6)
Country | Link |
---|---|
US (1) | US9953855B2 (ja) |
JP (1) | JP6594166B2 (ja) |
KR (1) | KR102435529B1 (ja) |
CN (1) | CN105679648B (ja) |
DE (1) | DE102015221941A1 (ja) |
FR (1) | FR3028664B1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10446442B2 (en) * | 2016-12-21 | 2019-10-15 | Globalfoundries Inc. | Integrated circuit chip with molding compound handler substrate and method |
US20220336583A1 (en) * | 2021-04-15 | 2022-10-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit structure and method for forming the same |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1603260A (en) * | 1978-05-31 | 1981-11-25 | Secr Defence | Devices and their fabrication |
JPH11297972A (ja) | 1998-04-10 | 1999-10-29 | Fujitsu Ltd | 半導体装置の製造方法 |
JP3668439B2 (ja) * | 2001-06-14 | 2005-07-06 | ソニーケミカル株式会社 | 接着フィルム |
JP2003142666A (ja) | 2001-07-24 | 2003-05-16 | Seiko Epson Corp | 素子の転写方法、素子の製造方法、集積回路、回路基板、電気光学装置、icカード、及び電子機器 |
JP4058425B2 (ja) * | 2004-06-10 | 2008-03-12 | Tdk株式会社 | スタンパー、インプリント方法および情報記録媒体製造方法 |
JP2007158231A (ja) | 2005-12-08 | 2007-06-21 | Seiko Epson Corp | 基板の加工方法、保護基板及び電子機器 |
JP5499428B2 (ja) * | 2007-09-07 | 2014-05-21 | 株式会社Sumco | 貼り合わせウェーハの製造方法 |
FR2926671B1 (fr) | 2008-01-17 | 2010-04-02 | Soitec Silicon On Insulator | Procede de traitement de defauts lors de collage de plaques |
JP5696349B2 (ja) * | 2008-09-05 | 2015-04-08 | 株式会社Sumco | 裏面照射型固体撮像素子用ウェーハの製造方法 |
FR2938202B1 (fr) * | 2008-11-07 | 2010-12-31 | Soitec Silicon On Insulator | Traitement de surface pour adhesion moleculaire |
KR101144842B1 (ko) * | 2010-06-08 | 2012-05-14 | 삼성코닝정밀소재 주식회사 | 접합기판 제조방법 |
US8202786B2 (en) * | 2010-07-15 | 2012-06-19 | Infineon Technologies Austria Ag | Method for manufacturing semiconductor devices having a glass substrate |
EP2650124B1 (en) * | 2010-12-09 | 2019-05-15 | Asahi Kasei Kabushiki Kaisha | Fine-structure laminate, method for preparing fine-structure laminate, and production method for fine-structure laminate |
KR101354491B1 (ko) * | 2012-01-26 | 2014-01-23 | 전북대학교산학협력단 | 고효율 발광다이오드 제조방법 |
KR101291092B1 (ko) | 2012-04-06 | 2013-08-01 | 주식회사 씨티랩 | 반도체 소자 구조물을 제조하는 방법 |
-
2014
- 2014-11-14 FR FR1402610A patent/FR3028664B1/fr active Active
-
2015
- 2015-11-05 JP JP2015217653A patent/JP6594166B2/ja active Active
- 2015-11-09 DE DE102015221941.0A patent/DE102015221941A1/de active Pending
- 2015-11-11 US US14/938,492 patent/US9953855B2/en active Active
- 2015-11-12 KR KR1020150158909A patent/KR102435529B1/ko active IP Right Grant
- 2015-11-12 CN CN201511034378.4A patent/CN105679648B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN105679648A (zh) | 2016-06-15 |
CN105679648B (zh) | 2020-03-13 |
US9953855B2 (en) | 2018-04-24 |
DE102015221941A1 (de) | 2016-06-02 |
FR3028664A1 (fr) | 2016-05-20 |
KR102435529B1 (ko) | 2022-08-23 |
KR20160058045A (ko) | 2016-05-24 |
US20160141198A1 (en) | 2016-05-19 |
JP6594166B2 (ja) | 2019-10-23 |
FR3028664B1 (fr) | 2016-11-25 |
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