JP5731448B2 - パワーサイクル試験装置 - Google Patents
パワーサイクル試験装置 Download PDFInfo
- Publication number
- JP5731448B2 JP5731448B2 JP2012159274A JP2012159274A JP5731448B2 JP 5731448 B2 JP5731448 B2 JP 5731448B2 JP 2012159274 A JP2012159274 A JP 2012159274A JP 2012159274 A JP2012159274 A JP 2012159274A JP 5731448 B2 JP5731448 B2 JP 5731448B2
- Authority
- JP
- Japan
- Prior art keywords
- test
- power
- cycle test
- cycle
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000012360 testing method Methods 0.000 title claims description 284
- 239000004065 semiconductor Substances 0.000 claims description 34
- 238000010438 heat treatment Methods 0.000 claims description 33
- 230000035882 stress Effects 0.000 claims description 32
- 230000007613 environmental effect Effects 0.000 claims description 5
- 238000005338 heat storage Methods 0.000 claims description 4
- 230000008646 thermal stress Effects 0.000 claims description 3
- 238000001816 cooling Methods 0.000 description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 19
- 238000005259 measurement Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000020169 heat generation Effects 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2608—Circuits therefor for testing bipolar transistors
- G01R31/2619—Circuits therefor for testing bipolar transistors for measuring thermal properties thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012159274A JP5731448B2 (ja) | 2012-07-18 | 2012-07-18 | パワーサイクル試験装置 |
| KR1020130079729A KR101546129B1 (ko) | 2012-07-18 | 2013-07-08 | 파워 사이클 시험 장치 및 파워 사이클 시험 방법 |
| US13/945,757 US9435850B2 (en) | 2012-07-18 | 2013-07-18 | Apparatus and method for power cycle test |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012159274A JP5731448B2 (ja) | 2012-07-18 | 2012-07-18 | パワーサイクル試験装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014020893A JP2014020893A (ja) | 2014-02-03 |
| JP2014020893A5 JP2014020893A5 (enExample) | 2014-06-19 |
| JP5731448B2 true JP5731448B2 (ja) | 2015-06-10 |
Family
ID=49946033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012159274A Active JP5731448B2 (ja) | 2012-07-18 | 2012-07-18 | パワーサイクル試験装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9435850B2 (enExample) |
| JP (1) | JP5731448B2 (enExample) |
| KR (1) | KR101546129B1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021124457A (ja) * | 2020-02-07 | 2021-08-30 | エスペック株式会社 | パワーサイクル試験装置及びパワーサイクル試験方法 |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569774A (zh) * | 2014-05-08 | 2015-04-29 | 江苏中科君芯科技有限公司 | 一种检测igbt功率器件可靠性的系统和方法 |
| JP6275629B2 (ja) * | 2014-12-08 | 2018-02-07 | エスペック株式会社 | パワーサイクル試験装置およびパワーサイクル試験方法 |
| JP6275631B2 (ja) * | 2014-12-12 | 2018-02-07 | エスペック株式会社 | パワーサイクル試験装置およびパワーサイクル試験方法 |
| JP6607724B2 (ja) * | 2015-07-29 | 2019-11-20 | 新電元工業株式会社 | 半導体試験装置及び半導体試験方法 |
| CN106610445B (zh) * | 2015-10-27 | 2019-07-12 | 全球能源互联网研究院 | 一种数字化驱动的igbt电流检测系统及其检测方法 |
| EP3239726A1 (en) * | 2016-04-28 | 2017-11-01 | Vincotech GmbH | Testing method with active heating and testing system |
| DE102016207381A1 (de) | 2016-04-29 | 2017-11-02 | Robert Bosch Gmbh | Schaltelement mit einer Temperaturüberwachung und Verfahren zur Temperaturüberwachung |
| CN108226733B (zh) * | 2016-12-09 | 2021-01-15 | 全球能源互联网研究院有限公司 | 一种用于igbt模块的混合功率循环检测装置及其检测方法 |
| FR3066605B1 (fr) * | 2017-05-22 | 2019-07-12 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede applique a un module de puissance d'un onduleur photovoltaique pour obtenir un vieillissement accelere |
| CN108387831B (zh) * | 2018-06-04 | 2024-01-26 | 华北电力大学 | 一种3000a半导体器件的功率循环试验系统 |
| CN108387774B (zh) * | 2018-06-04 | 2023-12-08 | 华北电力大学 | 一种基于750a半导体器件的功率循环试验系统 |
| CN108646163B (zh) * | 2018-06-22 | 2019-08-06 | 华北电力大学 | 一种半导体器件的功率循环测试系统 |
| CN111239576B (zh) * | 2018-11-29 | 2021-08-10 | 株洲中车时代半导体有限公司 | 基于功率损耗线性控制的恒定功率循环测试电路及方法 |
| CN111856229B (zh) * | 2019-04-12 | 2023-08-15 | 华北电力大学 | 一种压接式绝缘栅双极型晶体管高温反偏试验方法 |
| JP7625238B2 (ja) * | 2019-06-14 | 2025-02-03 | 株式会社クオルテック | パワーサイクル試験装置 |
| JP7343180B2 (ja) * | 2019-08-07 | 2023-09-12 | 株式会社クオルテック | 電気素子試験装置 |
| JP7506922B2 (ja) * | 2019-12-18 | 2024-06-27 | 株式会社クオルテック | パワーサイクル試験装置 |
| CN112098789B (zh) * | 2020-08-04 | 2023-06-13 | 株洲中车时代半导体有限公司 | Igbt模块寿命的统计方法、装置、电子设备及存储介质 |
| CN112433138B (zh) * | 2020-11-09 | 2025-02-11 | 桂林电子科技大学 | 一种由功率循环生热的igbt模块温度和应力测试装置及方法 |
| JP7490613B2 (ja) * | 2021-05-13 | 2024-05-27 | エスペック株式会社 | 環境形成装置、プログラム、及び送風ファンの制御方法 |
| CN114152863B (zh) * | 2021-11-27 | 2023-12-08 | 北京工业大学 | 一种智能可控温的GaN功率循环实验装置 |
| CN116087736B (zh) * | 2023-03-02 | 2025-10-10 | 中国科学院电工研究所 | 一种碳化硅器件功率循环测试电路及控制方法 |
| CN117195665B (zh) * | 2023-11-07 | 2024-01-26 | 湖南大学 | 一种功率半导体器件键合线的寿命预测模型构建方法 |
| CN119178990B (zh) * | 2024-11-25 | 2025-04-11 | 北京怀柔实验室 | 芯片的检测装置与检测方法 |
| CN119178981A (zh) * | 2024-11-25 | 2024-12-24 | 北京怀柔实验室 | 功率器件的功率循环测试方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE504398C2 (sv) * | 1994-05-24 | 1997-02-03 | Asea Brown Boveri | Anordning och förfarande för styrning av en anläggning för överföring av högspänd likström |
| JPH11148961A (ja) * | 1997-09-11 | 1999-06-02 | Fuji Electric Co Ltd | パワー半導体モジュールの試験用温度測定装置 |
| JP2000074982A (ja) * | 1998-09-01 | 2000-03-14 | Honda Motor Co Ltd | 電力用半導体の熱ストレス試験装置 |
| JP3769220B2 (ja) * | 2001-10-29 | 2006-04-19 | 富士通テン株式会社 | パワーモジュールの繰返し耐久試験方法および試験装置 |
| JP2010245348A (ja) * | 2009-04-07 | 2010-10-28 | Harison Toshiba Lighting Corp | 試験装置及び試験方法 |
| US8120356B2 (en) | 2009-06-11 | 2012-02-21 | International Business Machines Corporation | Measurement methodology and array structure for statistical stress and test of reliabilty structures |
-
2012
- 2012-07-18 JP JP2012159274A patent/JP5731448B2/ja active Active
-
2013
- 2013-07-08 KR KR1020130079729A patent/KR101546129B1/ko active Active
- 2013-07-18 US US13/945,757 patent/US9435850B2/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021124457A (ja) * | 2020-02-07 | 2021-08-30 | エスペック株式会社 | パワーサイクル試験装置及びパワーサイクル試験方法 |
| JP7223718B2 (ja) | 2020-02-07 | 2023-02-16 | エスペック株式会社 | パワーサイクル試験装置及びパワーサイクル試験方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140011470A (ko) | 2014-01-28 |
| US20140021974A1 (en) | 2014-01-23 |
| KR101546129B1 (ko) | 2015-08-20 |
| US9435850B2 (en) | 2016-09-06 |
| JP2014020893A (ja) | 2014-02-03 |
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