JP5716263B2 - セラミックス焼結体および圧電素子 - Google Patents
セラミックス焼結体および圧電素子 Download PDFInfo
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Description
次に、本発明に係る一実施例について説明する。ここでは具体的に、水熱合成により粒径100nmのチタン酸バリウム粉末に対し、5wt%のポリビニールアルコール水溶液をバインダーとして準備し、この原料粉末に、バインダーを、原料粉末比で1wt%加えて、直径12mm、厚さ1.5mmの円盤状に加圧成型した。成型圧力は200MPaとした。この成型体を600℃に加熱して2時間おき、脱バインダーを行った。
また、別の実施例について述べる。水熱合成により粒径100nmのチタン酸バリウム粉末に対し、5wt%のポリビニールアルコール水溶液をバインダーとして準備し、この原料粉末に、バインダーを、原料粉末比で1wt%加えて、直径12mm、厚さ1.5mmの円盤状に加圧成型した。成型圧力は200MPaとした。この成型体を600℃に加熱して2時間おき、脱バインダーを行った。
Claims (5)
- ペロブスカイト型構造を有するセラミックス焼結体であって、
焼結体の実際の密度を理論密度で割った相対密度が97から100%であり、かつ結晶粒の平均粒径が1から10μmであり、
分極を施した後のX線回折による(002)の半値幅が0.12以上、かつ、X線回折による(002)/(200)比が1.3以上、かつ、電気機械結合係数Kpが0.43以上であるセラミックス焼結体。 - 前記セラミックス焼結体は、チタン酸バリウム、ニオブ酸塩系、チタン酸ビスマスナトリウム系の何れかの組成である請求項1に記載のセラミックス焼結体。
- 前記セラミックス焼結体は、分極前の多結晶体としてc軸がランダムに配向しているものを用いたものである請求項1または2に記載のセラミックス焼結体。
- 前記セラミックス焼結体は、第1焼結温度1350〜1390℃まで5〜30℃/分の速度で昇温し、2分以下で焼成した後、10から50℃/分の速度で降温し、第1焼結温度よりも低い第2焼結温度で1〜15時間保持する焼成過程で製造した請求項1から3のいずれか一項に記載のセラミックス焼結体。
- 請求項1から4の何れか一項に記載のセラミックス焼結体を用いた圧電素子。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009085871A JP5716263B2 (ja) | 2008-06-30 | 2009-03-31 | セラミックス焼結体および圧電素子 |
US12/457,888 US8075996B2 (en) | 2008-06-30 | 2009-06-24 | Ceramic sintered compact and piezoelectric element |
KR20090056953A KR20100003211A (ko) | 2008-06-30 | 2009-06-25 | 세라믹스 소결체 및 압전소자 |
EP20090163958 EP2141752B1 (en) | 2008-06-30 | 2009-06-26 | Process for producing a ceramic sintered compact and a piezoelectric element |
CN2009101425296A CN101621112B (zh) | 2008-06-30 | 2009-06-29 | 陶瓷烧结体及压电元件 |
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JP2008171713 | 2008-06-30 | ||
JP2008171713 | 2008-06-30 | ||
JP2009085871A JP5716263B2 (ja) | 2008-06-30 | 2009-03-31 | セラミックス焼結体および圧電素子 |
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JP2010030875A JP2010030875A (ja) | 2010-02-12 |
JP5716263B2 true JP5716263B2 (ja) | 2015-05-13 |
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US (1) | US8075996B2 (ja) |
EP (1) | EP2141752B1 (ja) |
JP (1) | JP5716263B2 (ja) |
KR (1) | KR20100003211A (ja) |
CN (1) | CN101621112B (ja) |
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JP2010042969A (ja) * | 2008-08-18 | 2010-02-25 | Toyama Prefecture | 圧電セラミックスの製造方法と圧電セラミックス、並びに圧電素子 |
JP5578504B2 (ja) * | 2009-04-09 | 2014-08-27 | 堺化学工業株式会社 | ニオブ酸アルカリ金属塩粒子の製造方法、およびニオブ酸アルカリ金属塩粒子 |
CN101913868B (zh) * | 2010-08-06 | 2012-09-26 | 桂林电子科技大学 | 铌酸钾钠织构陶瓷与铌酸钾钠单晶的制备方法 |
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CN102173797A (zh) * | 2011-01-28 | 2011-09-07 | 上海海事大学 | 一种合成纳米钽铌酸钾钠粉体的方法 |
JP5714361B2 (ja) * | 2011-03-01 | 2015-05-07 | 日本碍子株式会社 | 端子電極形成方法及びそれを用いた圧電/電歪素子の製造方法 |
TW201442983A (zh) * | 2013-01-29 | 2014-11-16 | Canon Kk | 壓電材料,壓電裝置,及電子儀器 |
EP2980045B1 (en) * | 2013-03-26 | 2019-10-16 | NGK Insulators, Ltd. | Dielectric porcelain composition and composite ceramic structural body |
CN103242038A (zh) * | 2013-05-31 | 2013-08-14 | 常州佳冠电子有限公司 | 一种陶瓷电容器介质及其制备方法 |
EP2902377B1 (en) | 2014-01-29 | 2018-11-14 | Canon Kabushiki Kaisha | Piezoelectric ceramic, method for manufacturing the same, piezoelectric element, and electronic apparatus |
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JP2017197389A (ja) * | 2014-09-10 | 2017-11-02 | 日立金属株式会社 | 半導体磁器組成物の製造方法、半導体磁器組成物、並びにptc素子 |
DE102015101311B4 (de) * | 2015-01-29 | 2019-12-05 | Tdk Electronics Ag | Verfahren zur Herstellung von piezoelektrischen Vielschichtbauelementen |
WO2017018313A1 (ja) * | 2015-07-27 | 2017-02-02 | 富士フイルム株式会社 | 電気音響変換フィルムおよびその製造方法、ならびに、電気音響変換器、フレキシブルディスプレイ、声帯マイクロフォンおよび楽器用センサー |
CN106077584B (zh) * | 2016-06-23 | 2018-10-09 | 奇男子五金制品(浙江)有限公司 | 超硬耐磨复合刀片的制备方法 |
WO2021145092A1 (ja) * | 2020-01-16 | 2021-07-22 | 富士フイルム株式会社 | 高分子複合圧電フィルム |
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JP4938340B2 (ja) | 2006-04-05 | 2012-05-23 | 株式会社富士セラミックス | 誘電、圧電体の性質を持つナノサイズのチタン酸バリウム粉末を焼結した圧電セラミックス及びその製造方法 |
US7918542B2 (en) | 2006-09-15 | 2011-04-05 | Fujifilm Corporation | Perovskite oxide, process for producing the perovskite oxide, piezoelectric body, piezoelectric device, and liquid discharge device |
JP2008078267A (ja) * | 2006-09-20 | 2008-04-03 | Ngk Insulators Ltd | 圧電セラミックス、その製造方法、及び圧電/電歪素子 |
JP5114730B2 (ja) | 2006-12-18 | 2013-01-09 | 富山県 | 圧電セラミックスの製造方法 |
WO2008109564A1 (en) * | 2007-03-02 | 2008-09-12 | The Regents Of The University Of California | Complex oxides useful for thermoelectric energy conversion |
CN101182203A (zh) * | 2007-11-27 | 2008-05-21 | 山东大学 | 钛酸钡基压电陶瓷材料及其制备方法与应用 |
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CN101621112A (zh) | 2010-01-06 |
EP2141752B1 (en) | 2013-09-11 |
KR20100003211A (ko) | 2010-01-07 |
US20090324954A1 (en) | 2009-12-31 |
US8075996B2 (en) | 2011-12-13 |
CN101621112B (zh) | 2013-11-06 |
JP2010030875A (ja) | 2010-02-12 |
EP2141752A1 (en) | 2010-01-06 |
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