JP5712755B2 - 加速度検出器、加速度検出デバイス及び電子機器 - Google Patents
加速度検出器、加速度検出デバイス及び電子機器 Download PDFInfo
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- JP5712755B2 JP5712755B2 JP2011089833A JP2011089833A JP5712755B2 JP 5712755 B2 JP5712755 B2 JP 5712755B2 JP 2011089833 A JP2011089833 A JP 2011089833A JP 2011089833 A JP2011089833 A JP 2011089833A JP 5712755 B2 JP5712755 B2 JP 5712755B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011089833A JP5712755B2 (ja) | 2011-04-14 | 2011-04-14 | 加速度検出器、加速度検出デバイス及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011089833A JP5712755B2 (ja) | 2011-04-14 | 2011-04-14 | 加速度検出器、加速度検出デバイス及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012220461A JP2012220461A (ja) | 2012-11-12 |
| JP2012220461A5 JP2012220461A5 (enrdf_load_stackoverflow) | 2014-03-20 |
| JP5712755B2 true JP5712755B2 (ja) | 2015-05-07 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011089833A Active JP5712755B2 (ja) | 2011-04-14 | 2011-04-14 | 加速度検出器、加速度検出デバイス及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5712755B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10175092B2 (en) * | 2015-06-30 | 2019-01-08 | Nikkiso Cryo Inc. | Cryogenic vibration sensor and insulator pad assembly, and cryogenic pumps including the same |
| JP6897187B2 (ja) * | 2017-03-16 | 2021-06-30 | セイコーエプソン株式会社 | 物理量検出器、物理量検出デバイス、電子機器および移動体 |
| JP6939475B2 (ja) * | 2017-11-28 | 2021-09-22 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2627592B1 (fr) * | 1988-02-22 | 1990-07-27 | Sagem | Accelerometre pendulaire non asservi a poutre resonante |
| FR2666887A1 (fr) * | 1990-09-17 | 1992-03-20 | Asulab Sa | Capteur de mesure d'une grandeur physique. |
| JPH05283713A (ja) * | 1992-03-31 | 1993-10-29 | Mitsubishi Electric Corp | 半導体センサ |
| JPH06232421A (ja) * | 1993-01-30 | 1994-08-19 | Nippon Seiki Co Ltd | 加速度センサ |
| JP3473115B2 (ja) * | 1994-07-04 | 2003-12-02 | 株式会社村田製作所 | 加速度センサ |
| US6145380A (en) * | 1997-12-18 | 2000-11-14 | Alliedsignal | Silicon micro-machined accelerometer using integrated electrical and mechanical packaging |
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2011
- 2011-04-14 JP JP2011089833A patent/JP5712755B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP2012220461A (ja) | 2012-11-12 |
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