JP5693749B2 - 光透過性導電性フィルム及び光透過性導電性フィルムを含有するタッチパネル - Google Patents
光透過性導電性フィルム及び光透過性導電性フィルムを含有するタッチパネル Download PDFInfo
- Publication number
- JP5693749B2 JP5693749B2 JP2013547039A JP2013547039A JP5693749B2 JP 5693749 B2 JP5693749 B2 JP 5693749B2 JP 2013547039 A JP2013547039 A JP 2013547039A JP 2013547039 A JP2013547039 A JP 2013547039A JP 5693749 B2 JP5693749 B2 JP 5693749B2
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- light
- layer
- light transmissive
- conductive film
- transmissive conductive
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- 239000010408 film Substances 0.000 claims description 111
- 238000000034 method Methods 0.000 claims description 41
- 229910003437 indium oxide Inorganic materials 0.000 claims description 40
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 40
- 238000005259 measurement Methods 0.000 claims description 33
- 239000010409 thin film Substances 0.000 claims description 22
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 14
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 14
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 12
- 229920005989 resin Polymers 0.000 claims description 10
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- 239000012789 electroconductive film Substances 0.000 description 25
- 229910004298 SiO 2 Inorganic materials 0.000 description 21
- 229920001225 polyester resin Polymers 0.000 description 21
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- 239000000523 sample Substances 0.000 description 18
- 238000004544 sputter deposition Methods 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 17
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 238000005530 etching Methods 0.000 description 15
- 230000003746 surface roughness Effects 0.000 description 13
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 13
- 239000000463 material Substances 0.000 description 12
- 229910001887 tin oxide Inorganic materials 0.000 description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 239000000758 substrate Substances 0.000 description 10
- 238000002441 X-ray diffraction Methods 0.000 description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 8
- 229910001882 dioxygen Inorganic materials 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 229910001868 water Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010884 ion-beam technique Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
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- 238000001755 magnetron sputter deposition Methods 0.000 description 3
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- 239000000243 solution Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
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- 238000010894 electron beam technology Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004549 pulsed laser deposition Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Insulated Conductors (AREA)
- Laminated Bodies (AREA)
- Physical Vapour Deposition (AREA)
- Position Input By Displaying (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013547039A JP5693749B2 (ja) | 2012-08-06 | 2013-08-05 | 光透過性導電性フィルム及び光透過性導電性フィルムを含有するタッチパネル |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012174379 | 2012-08-06 | ||
JP2012174379 | 2012-08-06 | ||
PCT/JP2013/071108 WO2014024819A1 (ja) | 2012-08-06 | 2013-08-05 | 光透過性導電性フィルム及び光透過性導電性フィルムを含有するタッチパネル |
JP2013547039A JP5693749B2 (ja) | 2012-08-06 | 2013-08-05 | 光透過性導電性フィルム及び光透過性導電性フィルムを含有するタッチパネル |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014193847A Division JP6010078B2 (ja) | 2012-08-06 | 2014-09-24 | 光透過性導電性フィルム、その製造方法及びその用途 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5693749B2 true JP5693749B2 (ja) | 2015-04-01 |
JPWO2014024819A1 JPWO2014024819A1 (ja) | 2016-07-25 |
Family
ID=50068045
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013547039A Active JP5693749B2 (ja) | 2012-08-06 | 2013-08-05 | 光透過性導電性フィルム及び光透過性導電性フィルムを含有するタッチパネル |
JP2014193847A Active JP6010078B2 (ja) | 2012-08-06 | 2014-09-24 | 光透過性導電性フィルム、その製造方法及びその用途 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014193847A Active JP6010078B2 (ja) | 2012-08-06 | 2014-09-24 | 光透過性導電性フィルム、その製造方法及びその用途 |
Country Status (5)
Country | Link |
---|---|
JP (2) | JP5693749B2 (zh) |
KR (1) | KR102078996B1 (zh) |
CN (1) | CN104428844B (zh) |
TW (1) | TWI597174B (zh) |
WO (1) | WO2014024819A1 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170051398A1 (en) * | 2014-04-30 | 2017-02-23 | Nitto Denko Corporation | Transparent conductive film and method for producing the same |
JP6211557B2 (ja) * | 2014-04-30 | 2017-10-11 | 日東電工株式会社 | 透明導電性フィルム及びその製造方法 |
CN106460153B (zh) * | 2014-04-30 | 2019-05-10 | 日东电工株式会社 | 透明导电性膜及其制造方法 |
EP3413100B1 (en) | 2016-09-27 | 2020-11-04 | LG Chem, Ltd. | Antireflection film |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH039323A (ja) * | 1989-06-07 | 1991-01-17 | Teijin Ltd | 液晶表示パネル用電極基板 |
JPH0624826A (ja) * | 1992-07-03 | 1994-02-01 | Sumitomo Metal Mining Co Ltd | 高密度ito焼結体及びその製造方法 |
JP2000238178A (ja) * | 1999-02-24 | 2000-09-05 | Teijin Ltd | 透明導電積層体 |
JP2002014364A (ja) * | 2000-06-29 | 2002-01-18 | Minolta Co Ltd | 液晶表示素子及びその製造方法 |
JP2006310070A (ja) * | 2005-04-28 | 2006-11-09 | Dainippon Printing Co Ltd | フレキシブル透明電極基板および有機elディスプレイデバイス |
JP2010168647A (ja) * | 2008-12-24 | 2010-08-05 | Central Glass Co Ltd | 導電性薄膜の前駆薄膜及び該薄膜から得られる透明導電性薄膜 |
WO2011001631A1 (ja) * | 2009-06-30 | 2011-01-06 | 出光興産株式会社 | 透明導電膜 |
JP2011018623A (ja) * | 2009-07-10 | 2011-01-27 | Geomatec Co Ltd | 透明導電膜及びその製造方法 |
JP2011037679A (ja) * | 2009-08-13 | 2011-02-24 | Tosoh Corp | 複合酸化物焼結体、スパッタリングターゲット、複合酸化物非晶質膜及びその製造方法、並びに、複合酸化物結晶質膜及びその製造方法 |
JP2011126746A (ja) * | 2009-12-18 | 2011-06-30 | Tohoku Univ | Ito粉末、ito粒子の製造方法、透明導電材用塗料並びに透明導電膜 |
JP2012064546A (ja) * | 2010-09-17 | 2012-03-29 | Toppan Printing Co Ltd | 透明導電性積層体及びその製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000129427A (ja) | 1998-10-20 | 2000-05-09 | Teijin Ltd | 透明導電積層体の製造方法 |
JP4269587B2 (ja) | 2002-07-12 | 2009-05-27 | 凸版印刷株式会社 | 導電性積層体及びその製造方法 |
CN1503604A (zh) * | 2002-11-22 | 2004-06-09 | 三井化学株式会社 | 透明导电性薄膜及其制造方法和使用它的电发光元件 |
JP5739742B2 (ja) * | 2010-11-04 | 2015-06-24 | 日東電工株式会社 | 透明導電性フィルムおよびタッチパネル |
KR101684488B1 (ko) * | 2010-11-30 | 2016-12-08 | 닛토덴코 가부시키가이샤 | 터치 입력 기능을 가지는 표시 패널 장치 |
-
2013
- 2013-08-05 JP JP2013547039A patent/JP5693749B2/ja active Active
- 2013-08-05 KR KR1020157002111A patent/KR102078996B1/ko active IP Right Grant
- 2013-08-05 CN CN201380036425.1A patent/CN104428844B/zh active Active
- 2013-08-05 WO PCT/JP2013/071108 patent/WO2014024819A1/ja active Application Filing
- 2013-08-06 TW TW102128067A patent/TWI597174B/zh not_active IP Right Cessation
-
2014
- 2014-09-24 JP JP2014193847A patent/JP6010078B2/ja active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH039323A (ja) * | 1989-06-07 | 1991-01-17 | Teijin Ltd | 液晶表示パネル用電極基板 |
JPH0624826A (ja) * | 1992-07-03 | 1994-02-01 | Sumitomo Metal Mining Co Ltd | 高密度ito焼結体及びその製造方法 |
JP2000238178A (ja) * | 1999-02-24 | 2000-09-05 | Teijin Ltd | 透明導電積層体 |
JP2002014364A (ja) * | 2000-06-29 | 2002-01-18 | Minolta Co Ltd | 液晶表示素子及びその製造方法 |
JP2006310070A (ja) * | 2005-04-28 | 2006-11-09 | Dainippon Printing Co Ltd | フレキシブル透明電極基板および有機elディスプレイデバイス |
JP2010168647A (ja) * | 2008-12-24 | 2010-08-05 | Central Glass Co Ltd | 導電性薄膜の前駆薄膜及び該薄膜から得られる透明導電性薄膜 |
WO2011001631A1 (ja) * | 2009-06-30 | 2011-01-06 | 出光興産株式会社 | 透明導電膜 |
JP2011018623A (ja) * | 2009-07-10 | 2011-01-27 | Geomatec Co Ltd | 透明導電膜及びその製造方法 |
JP2011037679A (ja) * | 2009-08-13 | 2011-02-24 | Tosoh Corp | 複合酸化物焼結体、スパッタリングターゲット、複合酸化物非晶質膜及びその製造方法、並びに、複合酸化物結晶質膜及びその製造方法 |
JP2011126746A (ja) * | 2009-12-18 | 2011-06-30 | Tohoku Univ | Ito粉末、ito粒子の製造方法、透明導電材用塗料並びに透明導電膜 |
JP2012064546A (ja) * | 2010-09-17 | 2012-03-29 | Toppan Printing Co Ltd | 透明導電性積層体及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2014024819A1 (ja) | 2016-07-25 |
TW201420358A (zh) | 2014-06-01 |
WO2014024819A1 (ja) | 2014-02-13 |
KR20150042780A (ko) | 2015-04-21 |
JP2015065169A (ja) | 2015-04-09 |
CN104428844B (zh) | 2016-04-27 |
KR102078996B1 (ko) | 2020-02-19 |
JP6010078B2 (ja) | 2016-10-19 |
CN104428844A (zh) | 2015-03-18 |
TWI597174B (zh) | 2017-09-01 |
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