JP5690711B2 - 弾性波素子 - Google Patents

弾性波素子 Download PDF

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JP5690711B2
JP5690711B2 JP2011288230A JP2011288230A JP5690711B2 JP 5690711 B2 JP5690711 B2 JP 5690711B2 JP 2011288230 A JP2011288230 A JP 2011288230A JP 2011288230 A JP2011288230 A JP 2011288230A JP 5690711 B2 JP5690711 B2 JP 5690711B2
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dielectric film
electrode
acoustic wave
region
piezoelectric substrate
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JP2013138333A5 (https=
JP2013138333A (ja
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城二 藤原
城二 藤原
中西　秀和
秀和 中西
哲也 鶴成
哲也 鶴成
禎也 小松
禎也 小松
中村　弘幸
弘幸 中村
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スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社
スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社
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JP2011288230A 2011-12-28 2011-12-28 弾性波素子 Active JP5690711B2 (ja)

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JP2013138333A JP2013138333A (ja) 2013-07-11
JP2013138333A5 JP2013138333A5 (https=) 2014-01-09
JP5690711B2 true JP5690711B2 (ja) 2015-03-25

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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012111121A1 (de) 2012-11-19 2014-05-22 Epcos Ag Elektroakustisches Bauelement und Verfahren zur Herstellung
WO2016039026A1 (ja) * 2014-09-09 2016-03-17 株式会社村田製作所 弾性表面波装置
JP6601503B2 (ja) 2015-10-23 2019-11-06 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
WO2017110586A1 (ja) * 2015-12-25 2017-06-29 株式会社村田製作所 弾性波装置
JP6415469B2 (ja) 2016-03-22 2018-10-31 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ並びに弾性波共振器の製造方法
WO2017169514A1 (ja) * 2016-03-31 2017-10-05 株式会社村田製作所 複合フィルタ装置、高周波フロントエンド回路及び通信装置
CN110089030B (zh) * 2016-12-20 2023-01-06 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
CN113348625B (zh) * 2019-01-31 2024-02-23 株式会社村田制作所 弹性波装置及多工器
US11451212B2 (en) 2019-06-19 2022-09-20 Skyworks Solutions, Inc. Acoustic wave resonator with transverse spurious mode for filter steepness
KR102479251B1 (ko) 2019-11-20 2022-12-20 (주)와이솔 표면 탄성파 소자

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005010658A1 (de) * 2005-03-08 2006-09-14 Epcos Ag Duplexer mit verbesserter Leistungsverträglichkeit
WO2010052914A1 (ja) * 2008-11-10 2010-05-14 パナソニック株式会社 弾性波素子と、これを用いた電子機器
WO2011158445A1 (ja) * 2010-06-17 2011-12-22 パナソニック株式会社 弾性波素子

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