JP5684829B2 - Al−Cr−B−N/Ti−Al−N多層被覆を有する多層被覆システム及び該多層被覆システムで被覆される固体本体 - Google Patents

Al−Cr−B−N/Ti−Al−N多層被覆を有する多層被覆システム及び該多層被覆システムで被覆される固体本体 Download PDF

Info

Publication number
JP5684829B2
JP5684829B2 JP2012551531A JP2012551531A JP5684829B2 JP 5684829 B2 JP5684829 B2 JP 5684829B2 JP 2012551531 A JP2012551531 A JP 2012551531A JP 2012551531 A JP2012551531 A JP 2012551531A JP 5684829 B2 JP5684829 B2 JP 5684829B2
Authority
JP
Japan
Prior art keywords
layer
coating system
deposited
coating
individual layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012551531A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013518987A (ja
Inventor
レヒトハーラー,マルクス
トリトレメル,クリスティアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Publication of JP2013518987A publication Critical patent/JP2013518987A/ja
Application granted granted Critical
Publication of JP5684829B2 publication Critical patent/JP5684829B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • C23C14/0647Boron nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12542More than one such component
    • Y10T428/12549Adjacent to each other
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • Y10T428/24967Absolute thicknesses specified
    • Y10T428/24975No layer or component greater than 5 mils thick
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
JP2012551531A 2010-02-04 2011-01-25 Al−Cr−B−N/Ti−Al−N多層被覆を有する多層被覆システム及び該多層被覆システムで被覆される固体本体 Active JP5684829B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US30133610P 2010-02-04 2010-02-04
US61/301,336 2010-02-04
PCT/EP2011/000295 WO2011095292A1 (fr) 2010-02-04 2011-01-25 Outils de coupe avec revêtements multicouche à base de al-cr-b-n / ti-al-n

Publications (2)

Publication Number Publication Date
JP2013518987A JP2013518987A (ja) 2013-05-23
JP5684829B2 true JP5684829B2 (ja) 2015-03-18

Family

ID=43625149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012551531A Active JP5684829B2 (ja) 2010-02-04 2011-01-25 Al−Cr−B−N/Ti−Al−N多層被覆を有する多層被覆システム及び該多層被覆システムで被覆される固体本体

Country Status (13)

Country Link
US (1) US8926722B2 (fr)
EP (1) EP2531633B1 (fr)
JP (1) JP5684829B2 (fr)
KR (1) KR101800039B1 (fr)
CN (1) CN102725434B (fr)
BR (1) BR112012019543B1 (fr)
CA (1) CA2788142C (fr)
ES (1) ES2657844T3 (fr)
MX (1) MX343044B (fr)
MY (1) MY156403A (fr)
RU (1) RU2560480C2 (fr)
SG (1) SG182749A1 (fr)
WO (1) WO2011095292A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019230166A1 (fr) 2018-05-30 2019-12-05 三菱日立ツール株式会社 Outil de coupe revêtu et son procédé de production

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BRPI1103935A2 (pt) * 2011-08-17 2013-08-06 Mahle Metal Leve Sa anel de pistço
DE102012200378A1 (de) * 2012-01-12 2013-07-18 Federal-Mogul Burscheid Gmbh Kolbenring
MY169727A (en) * 2012-04-16 2019-05-14 Oerlikon Surface Solutions Ag Trubbach High performance tools exhibiting reduced crater wear in particular by dry machining operations
EP2653583B1 (fr) * 2012-04-20 2021-03-10 Oerlikon Surface Solutions AG, Pfäffikon Procédé de revêtement destiné à la séparation d'un système de couche sur un substrat
DE102012017694A1 (de) * 2012-09-07 2014-03-13 Oerlikon Trading Ag, Trübbach Mo-haltige Beschichtungen auf Werkzeugen für das direkte Presshärten
CN102922052B (zh) * 2012-09-28 2014-10-22 武汉大学 一种AlTiN-AlCrN超硬纳米多层复合涂层滚齿刀及其制备方法
AR092945A1 (es) * 2012-10-10 2015-05-06 Oerlikon Trading Ag Trübbach Recubrimiento para usos a altas temperaturas con solicitacion tribologica
KR101471257B1 (ko) * 2012-12-27 2014-12-09 한국야금 주식회사 절삭공구용 다층박막과 이를 포함하는 절삭공구
EP2965842B1 (fr) * 2013-03-04 2018-12-12 Tungaloy Corporation Outil de coupe garni d'un revêtement
EP3036353B1 (fr) * 2013-08-20 2022-01-26 MDS Coating Technologies Corp. Revêtement contenant des macroparticules et procédé de de formation du revêtement par arc cathodique
US10005696B2 (en) 2013-09-18 2018-06-26 United Technologies Corporation Article having coating including compound of aluminum, boron and nitrogen
DE102013019691A1 (de) * 2013-11-26 2015-05-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht zur Reduzierung eines Wärmeeintrags in das beschichtete Substrat
US10265775B2 (en) * 2014-03-27 2019-04-23 Tungaloy Corporation Coated tool
WO2015156383A1 (fr) * 2014-04-10 2015-10-15 株式会社タンガロイ Outil revêtu
DE102014018915A1 (de) * 2014-12-22 2016-06-23 Oerlikon Surface Solutions Ag, Trübbach AlCrN-basierte Beschichtung zur verbesserten Beständigkeit gegen Kolkverschleiß
WO2016188632A1 (fr) * 2015-05-26 2016-12-01 Oerlikon Surface Solutions Ag, Pfäffikon Réduction de l'usure et/ou du frottement au moyen de revêtements à base de nitrure de molybdène
KR102476668B1 (ko) * 2015-12-07 2022-12-09 아이에이치아이 버넥스 아게 코팅된 압출 공구
RU2637188C1 (ru) * 2016-10-11 2017-11-30 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2639425C1 (ru) * 2016-12-20 2017-12-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
JP6959577B2 (ja) * 2018-01-04 2021-11-02 三菱マテリアル株式会社 表面被覆切削工具
RU2671782C1 (ru) * 2018-03-01 2018-11-06 Общество с ограниченной ответственностью "Сборные конструкции инструмента, фрезы Москвитина" Фреза концевая
CN108504997A (zh) * 2018-03-13 2018-09-07 国宏工具系统(无锡)股份有限公司 一种高光刀电弧涂层工艺
RU2694857C1 (ru) * 2018-08-06 2019-07-18 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Способ нанесения износостойкого покрытия ионно-плазменным методом
KR102168162B1 (ko) 2018-12-26 2020-10-20 한국야금 주식회사 절삭공구용 경질피막 및 이의 제조방법
WO2020178456A1 (fr) * 2019-03-07 2020-09-10 Oerlikon Surface Solutions Ag, Pfäffikon Couches de revêtement à base de tm-al-o-n présentant une stabilité thermique accrue
EP3967430A4 (fr) 2019-05-09 2022-08-31 MOLDINO Tool Engineering, Ltd. Outil de coupe revêtu
CN112126900B (zh) * 2019-06-24 2023-06-23 中国科学院宁波材料技术与工程研究所 高温低摩擦硬质纳米多层VAlCN/VN-Ag涂层、其制备方法及应用
US20210105888A1 (en) * 2019-10-04 2021-04-08 Kennametal Inc. Coated nozzles for arc torches
KR20210138230A (ko) 2020-05-12 2021-11-19 이무헌 스프레이코팅 방식을 이용한 고경도 커팅 툴 제조방법
CN113667929B (zh) * 2021-07-02 2023-04-07 株洲钻石切削刀具股份有限公司 周期性多层涂层刀具及其制备方法
CN113817985B (zh) * 2021-11-24 2022-03-18 武汉中维创发工业研究院有限公司 纳米多层复合涂层及其制备方法和应用
CN116180006B (zh) * 2023-02-08 2024-05-03 苏州六九新材料科技有限公司 TiAlN/CrAlLaBN复合涂层及其制备方法和刀具

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3388267B2 (ja) 2000-05-23 2003-03-17 日立ツール株式会社 耐摩耗皮膜被覆工具
DE60312110T2 (de) * 2002-11-19 2007-10-11 Hitachi Tool Engineering Ltd. Hartstoffschicht und damit beschichtetes Werkzeug
US7226670B2 (en) * 2003-04-28 2007-06-05 Oc Oerlikon Balzers Ag Work piece with a hard film of AlCr-containing material, and process for its production
JP3781374B2 (ja) * 2003-12-09 2006-05-31 日立ツール株式会社 硬質皮膜被覆工具及びその製造方法
CN100419117C (zh) * 2004-02-02 2008-09-17 株式会社神户制钢所 硬质叠层被膜、其制造方法及成膜装置
JP2005330539A (ja) * 2004-05-20 2005-12-02 Tungaloy Corp 耐摩耗性被覆部材
WO2006070509A1 (fr) * 2004-12-28 2006-07-06 Sumitomo Electric Hardmetal Corp. Outil de coupe a revetement de surface et son procede de fabrication
WO2006070730A1 (fr) * 2004-12-28 2006-07-06 Sumitomo Electric Hardmetal Corp. Outil de coupe a revetement de surface et son procede de fabrication
JP5143571B2 (ja) 2005-02-10 2013-02-13 エーリコン・トレイディング・アーゲー・トリューバッハ 切削工具のための高耐摩耗三重被覆
JP4756445B2 (ja) * 2005-02-16 2011-08-24 三菱マテリアル株式会社 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具
US7537822B2 (en) * 2005-05-26 2009-05-26 Hitachi Tool Engineering, Ltd. Hard-coated member
ES2945897T3 (es) * 2006-09-26 2023-07-10 Oerlikon Surface Solutions Ag Pfaeffikon Pieza de trabajo con recubrimiento duro
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
US8129040B2 (en) * 2007-05-16 2012-03-06 Oerlikon Trading Ag, Truebbach Cutting tool
JP4714186B2 (ja) 2007-05-31 2011-06-29 ユニオンツール株式会社 被覆切削工具
WO2008149824A1 (fr) * 2007-06-01 2008-12-11 Onward Ceramic Coating Co., Ltd. Outil revêtu de carbone sous forme de diamant amorphe
JP2009012139A (ja) 2007-07-06 2009-01-22 Mitsubishi Materials Corp 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具
US7947363B2 (en) * 2007-12-14 2011-05-24 Kennametal Inc. Coated article with nanolayered coating scheme
JP4440980B2 (ja) * 2008-01-31 2010-03-24 ユニオンツール株式会社 切削工具用硬質皮膜
JP5125646B2 (ja) * 2008-03-19 2013-01-23 株式会社タンガロイ 立方晶窒化硼素焼結体工具
JP5234499B2 (ja) * 2008-05-28 2013-07-10 三菱マテリアル株式会社 高速高送り切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
RU91069U1 (ru) * 2009-05-25 2010-01-27 Общество с ограниченной ответственностью "Научно-производственное предприятие "Уралавиаспецтехнология" Лопатка турбомашины, стойкая к солевой и газовой коррозии, газоабразивной и капельно-ударной эрозии
WO2011058637A1 (fr) * 2009-11-12 2011-05-19 オーエスジー株式会社 Outil revêtu d'un revêtement dur

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019230166A1 (fr) 2018-05-30 2019-12-05 三菱日立ツール株式会社 Outil de coupe revêtu et son procédé de production
KR20200136991A (ko) 2018-05-30 2020-12-08 가부시키가이샤 몰디노 피복 절삭 공구 및 그 제조 방법
US11511352B2 (en) 2018-05-30 2022-11-29 Moldino Tool Engineering, Ltd. Coated cutting tool and production method therefor

Also Published As

Publication number Publication date
BR112012019543B1 (pt) 2019-11-26
CN102725434A (zh) 2012-10-10
MX343044B (es) 2016-10-21
BR112012019543A2 (pt) 2017-06-27
CA2788142A1 (fr) 2011-08-11
CN102725434B (zh) 2014-10-29
WO2011095292A1 (fr) 2011-08-11
RU2560480C2 (ru) 2015-08-20
KR20120113790A (ko) 2012-10-15
EP2531633B1 (fr) 2017-11-22
JP2013518987A (ja) 2013-05-23
KR101800039B1 (ko) 2017-12-20
MY156403A (en) 2016-02-26
US20130052477A1 (en) 2013-02-28
SG182749A1 (en) 2012-08-30
RU2012137516A (ru) 2014-03-10
ES2657844T3 (es) 2018-03-07
MX2012009044A (es) 2012-12-17
US8926722B2 (en) 2015-01-06
EP2531633A1 (fr) 2012-12-12
CA2788142C (fr) 2019-02-19

Similar Documents

Publication Publication Date Title
JP5684829B2 (ja) Al−Cr−B−N/Ti−Al−N多層被覆を有する多層被覆システム及び該多層被覆システムで被覆される固体本体
CN1853832B (zh) 涂层硬质合金刀具及其生产所用的喷镀靶材
JP5376454B2 (ja) 加工対象物の耐摩耗性ハードコートおよびその製造方法
KR102033186B1 (ko) 크롬 함유 기능성층을 갖는 공구
KR102561370B1 (ko) 고강도 스틸의 냉간 성형을 위한 고성능 코팅
JP5395454B2 (ja) 表面被覆切削工具
CN105142831A (zh) 表面被覆切削工具及其制造方法
CN114080469B (zh) 包含涂层的锯片或其他切削工具
JP5450400B2 (ja) Al−Ti−Ru−N−C硬質材料被膜
JP5416429B2 (ja) 表面被覆切削工具
JP5697750B2 (ja) 表面被覆部材
KR20130006347A (ko) 물리기상증착에 의해 도포된 이트륨 함유 코팅을 구비한 코팅 물품, 및 그 제조 방법
JP2022520212A (ja) 加工困難な材料を機械加工するための被覆ツール
KR102223461B1 (ko) 피복 공구 및 이것을 구비한 절삭 공구
CN114641588A (zh) 具有氮化钼层体系的基底和用于制造层体系的涂覆方法
JP6326367B2 (ja) 積層型硬質皮膜および成形用金型
JP2010105137A (ja) 表面被覆切削工具
CN101517126A (zh) 具有硬涂层的工件
CN116583618A (zh) 由至少两种不同的AlCr基靶材制造的耐磨涂层

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20131119

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20140312

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140401

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140701

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140729

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20141029

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150106

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150115

R150 Certificate of patent or registration of utility model

Ref document number: 5684829

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250