MX2012009044A - Herramientas de corte con recubrimientos de multiples capas de al-cr-b-n/ti-al-n. - Google Patents

Herramientas de corte con recubrimientos de multiples capas de al-cr-b-n/ti-al-n.

Info

Publication number
MX2012009044A
MX2012009044A MX2012009044A MX2012009044A MX2012009044A MX 2012009044 A MX2012009044 A MX 2012009044A MX 2012009044 A MX2012009044 A MX 2012009044A MX 2012009044 A MX2012009044 A MX 2012009044A MX 2012009044 A MX2012009044 A MX 2012009044A
Authority
MX
Mexico
Prior art keywords
individual layers
deposited
coating system
thickness
cutting tools
Prior art date
Application number
MX2012009044A
Other languages
English (en)
Other versions
MX343044B (es
Inventor
Markus Lechthaler
Christian Tritremmel
Original Assignee
Oerlikon Trading Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading Ag filed Critical Oerlikon Trading Ag
Publication of MX2012009044A publication Critical patent/MX2012009044A/es
Publication of MX343044B publication Critical patent/MX343044B/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0647—Boron nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12542—More than one such component
    • Y10T428/12549—Adjacent to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

La presente invención se relaciona con un sistema de recubrimiento de múltiples capas depositado en por lo menos una porción de una superficie de cuerpo sólida y que contiene en la arquitectura de múltiples capas, las capas individuales de Al-Cr-B-N depositadas mediante un método de deposición física de vapor caracterizado porque en por lo menos una porción del espesor total del sistema de recubrimiento de múltiples capas se combinan las capas individuales de AI-Cr-B-N con las capas individuales de Ti-Al-N, en donde las capas individuales de Al-Cr-B-N y Ti-Al-N se depositan alternativamente una sobre la otra, y en donde el espesor de las capas individuales de Al-Cr-B-N es más grueso que el espesor de las capas individuales de Ti-Al-N, y de tal modo la tensión residual del sistema de recubrimiento de múltiples capas es considerablemente más baja con respecto a la tensión residual del recubrimiento analógico correspondiente de una sola capa de Al-Cr-B-N.
MX2012009044A 2010-02-04 2011-01-25 Herramientas de corte con recubrimientos de multiples capas de al-cr-b-n/ti-al-n. MX343044B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30133610P 2010-02-04 2010-02-04
PCT/EP2011/000295 WO2011095292A1 (en) 2010-02-04 2011-01-25 CUTTING TOOLS WITH Al-Cr-B-N / Ti-Al-N MULTILAYER COATINGS

Publications (2)

Publication Number Publication Date
MX2012009044A true MX2012009044A (es) 2012-12-17
MX343044B MX343044B (es) 2016-10-21

Family

ID=43625149

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2012009044A MX343044B (es) 2010-02-04 2011-01-25 Herramientas de corte con recubrimientos de multiples capas de al-cr-b-n/ti-al-n.

Country Status (13)

Country Link
US (1) US8926722B2 (es)
EP (1) EP2531633B1 (es)
JP (1) JP5684829B2 (es)
KR (1) KR101800039B1 (es)
CN (1) CN102725434B (es)
BR (1) BR112012019543B1 (es)
CA (1) CA2788142C (es)
ES (1) ES2657844T3 (es)
MX (1) MX343044B (es)
MY (1) MY156403A (es)
RU (1) RU2560480C2 (es)
SG (1) SG182749A1 (es)
WO (1) WO2011095292A1 (es)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BRPI1103935A2 (pt) * 2011-08-17 2013-08-06 Mahle Metal Leve Sa anel de pistço
DE102012200378A1 (de) * 2012-01-12 2013-07-18 Federal-Mogul Burscheid Gmbh Kolbenring
IN2014DN08669A (es) * 2012-04-16 2015-05-22 Oerlikon Trading Ag Trübbach
EP2653583B1 (de) * 2012-04-20 2021-03-10 Oerlikon Surface Solutions AG, Pfäffikon Beschichtungsverfahren zur Abscheidung eines Schichtsystems auf einem Substrat
DE102012017694A1 (de) * 2012-09-07 2014-03-13 Oerlikon Trading Ag, Trübbach Mo-haltige Beschichtungen auf Werkzeugen für das direkte Presshärten
CN102922052B (zh) * 2012-09-28 2014-10-22 武汉大学 一种AlTiN-AlCrN超硬纳米多层复合涂层滚齿刀及其制备方法
AR092945A1 (es) * 2012-10-10 2015-05-06 Oerlikon Trading Ag Trübbach Recubrimiento para usos a altas temperaturas con solicitacion tribologica
KR101471257B1 (ko) * 2012-12-27 2014-12-09 한국야금 주식회사 절삭공구용 다층박막과 이를 포함하는 절삭공구
WO2014136755A1 (ja) * 2013-03-04 2014-09-12 株式会社タンガロイ 被覆切削工具
WO2015024098A1 (en) * 2013-08-20 2015-02-26 Mds Coating Technologies Corp. Coating containing macroparticles and cathodic arc process of making the coating
WO2015041802A1 (en) 2013-09-18 2015-03-26 United Technologies Corporation Article having coating including compound of aluminum, boron and nitrogen
DE102013019691A1 (de) * 2013-11-26 2015-05-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht zur Reduzierung eines Wärmeeintrags in das beschichtete Substrat
EP3124146B1 (en) * 2014-03-27 2020-06-24 Tungaloy Corporation Coated tool
JP6507377B2 (ja) * 2014-04-10 2019-05-08 株式会社タンガロイ 被覆工具
DE102014018915A1 (de) * 2014-12-22 2016-06-23 Oerlikon Surface Solutions Ag, Trübbach AlCrN-basierte Beschichtung zur verbesserten Beständigkeit gegen Kolkverschleiß
EP3303651A1 (en) * 2015-05-26 2018-04-11 Oerlikon Surface Solutions AG, Pfäffikon Wear and/or friction reduction by using molybdenum nitride based coatings
EP3387164B1 (en) * 2015-12-07 2024-01-17 IHI Bernex AG Coated extrusion tool
RU2637188C1 (ru) * 2016-10-11 2017-11-30 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
RU2639425C1 (ru) * 2016-12-20 2017-12-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
JP6959577B2 (ja) * 2018-01-04 2021-11-02 三菱マテリアル株式会社 表面被覆切削工具
WO2019152936A1 (en) 2018-02-02 2019-08-08 Lockheed Martin Corporation Tribological optimized cutter tool for milling titanium or titanium alloys
RU2671782C1 (ru) * 2018-03-01 2018-11-06 Общество с ограниченной ответственностью "Сборные конструкции инструмента, фрезы Москвитина" Фреза концевая
CN108504997A (zh) * 2018-03-13 2018-09-07 国宏工具系统（无锡）股份有限公司 一种高光刀电弧涂层工艺
US11511352B2 (en) 2018-05-30 2022-11-29 Moldino Tool Engineering, Ltd. Coated cutting tool and production method therefor
RU2694857C1 (ru) * 2018-08-06 2019-07-18 федеральное государственное бюджетное образовательное учреждение высшего образования "Уфимский государственный авиационный технический университет" Способ нанесения износостойкого покрытия ионно-плазменным методом
KR102168162B1 (ko) 2018-12-26 2020-10-20 한국야금 주식회사 절삭공구용 경질피막 및 이의 제조방법
KR102646471B1 (ko) 2019-05-09 2024-03-11 가부시키가이샤 몰디노 피복 절삭 공구
CN112126900B (zh) * 2019-06-24 2023-06-23 中国科学院宁波材料技术与工程研究所 高温低摩擦硬质纳米多层VAlCN/VN-Ag涂层、其制备方法及应用
US20210105888A1 (en) * 2019-10-04 2021-04-08 Kennametal Inc. Coated nozzles for arc torches
KR20210138230A (ko) 2020-05-12 2021-11-19 이무헌 스프레이코팅 방식을 이용한 고경도 커팅 툴 제조방법
CN113667929B (zh) * 2021-07-02 2023-04-07 株洲钻石切削刀具股份有限公司 周期性多层涂层刀具及其制备方法
CN113817985B (zh) * 2021-11-24 2022-03-18 武汉中维创发工业研究院有限公司 纳米多层复合涂层及其制备方法和应用
CN115679258B (zh) * 2022-12-13 2024-09-20 西安稀有金属材料研究院有限公司 一种高硬耐磨CrAlBN基复合涂层及其制备方法
CN116180006B (zh) * 2023-02-08 2024-05-03 苏州六九新材料科技有限公司 TiAlN/CrAlLaBN复合涂层及其制备方法和刀具

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3388267B2 (ja) 2000-05-23 2003-03-17 日立ツール株式会社 耐摩耗皮膜被覆工具
ES2279050T3 (es) * 2002-11-19 2007-08-16 Hitachi Tool Engineering Ltd. Pelicula dura y herramienta revestida con pelicula dura.
US7226670B2 (en) * 2003-04-28 2007-06-05 Oc Oerlikon Balzers Ag Work piece with a hard film of AlCr-containing material, and process for its production
JP3781374B2 (ja) * 2003-12-09 2006-05-31 日立ツール株式会社 硬質皮膜被覆工具及びその製造方法
CN100419117C (zh) * 2004-02-02 2008-09-17 株式会社神户制钢所 硬质叠层被膜、其制造方法及成膜装置
JP2005330539A (ja) * 2004-05-20 2005-12-02 Tungaloy Corp 耐摩耗性被覆部材
WO2006070509A1 (ja) * 2004-12-28 2006-07-06 Sumitomo Electric Hardmetal Corp. 表面被覆切削工具および表面被覆切削工具の製造方法
EP1842610B1 (en) * 2004-12-28 2017-05-03 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and process for producing the same
US7879443B2 (en) 2005-02-10 2011-02-01 Oc Oerlikon Trading Ag, Truebbach High wear resistant triplex coating for cutting tools
JP4756445B2 (ja) * 2005-02-16 2011-08-24 三菱マテリアル株式会社 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具
US7537822B2 (en) * 2005-05-26 2009-05-26 Hitachi Tool Engineering, Ltd. Hard-coated member
NZ575279A (en) * 2006-09-26 2012-05-25 Oerlikon Trading Ag Metal cutting tools with hard coating applied by a physical vapour deposition process
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
US8129040B2 (en) * 2007-05-16 2012-03-06 Oerlikon Trading Ag, Truebbach Cutting tool
JP4714186B2 (ja) 2007-05-31 2011-06-29 ユニオンツール株式会社 被覆切削工具
WO2008149824A1 (ja) * 2007-06-01 2008-12-11 Onward Ceramic Coating Co., Ltd. Ｄｌｃ被覆工具
JP2009012139A (ja) 2007-07-06 2009-01-22 Mitsubishi Materials Corp 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具
US7947363B2 (en) * 2007-12-14 2011-05-24 Kennametal Inc. Coated article with nanolayered coating scheme
JP4440980B2 (ja) * 2008-01-31 2010-03-24 ユニオンツール株式会社 切削工具用硬質皮膜
JP5125646B2 (ja) * 2008-03-19 2013-01-23 株式会社タンガロイ 立方晶窒化硼素焼結体工具
JP5234499B2 (ja) * 2008-05-28 2013-07-10 三菱マテリアル株式会社 高速高送り切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具
RU91069U1 (ru) * 2009-05-25 2010-01-27 Общество с ограниченной ответственностью "Научно-производственное предприятие "Уралавиаспецтехнология" Лопатка турбомашины, стойкая к солевой и газовой коррозии, газоабразивной и капельно-ударной эрозии
WO2011058637A1 (ja) * 2009-11-12 2011-05-19 オーエスジー株式会社 硬質被膜、および硬質被膜被覆工具

Also Published As

Publication number Publication date
RU2560480C2 (ru) 2015-08-20
CN102725434A (zh) 2012-10-10
CA2788142C (en) 2019-02-19
EP2531633A1 (en) 2012-12-12
SG182749A1 (en) 2012-08-30
ES2657844T3 (es) 2018-03-07
BR112012019543A2 (pt) 2017-06-27
CN102725434B (zh) 2014-10-29
RU2012137516A (ru) 2014-03-10
EP2531633B1 (en) 2017-11-22
WO2011095292A1 (en) 2011-08-11
JP5684829B2 (ja) 2015-03-18
US20130052477A1 (en) 2013-02-28
JP2013518987A (ja) 2013-05-23
KR20120113790A (ko) 2012-10-15
BR112012019543B1 (pt) 2019-11-26
KR101800039B1 (ko) 2017-12-20
MX343044B (es) 2016-10-21
CA2788142A1 (en) 2011-08-11
MY156403A (en) 2016-02-26
US8926722B2 (en) 2015-01-06

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