JP5679199B2 - トレーサビリティが表示されたpgコート製品およびその製造方法 - Google Patents
トレーサビリティが表示されたpgコート製品およびその製造方法 Download PDFInfo
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- JP5679199B2 JP5679199B2 JP2011145392A JP2011145392A JP5679199B2 JP 5679199 B2 JP5679199 B2 JP 5679199B2 JP 2011145392 A JP2011145392 A JP 2011145392A JP 2011145392 A JP2011145392 A JP 2011145392A JP 5679199 B2 JP5679199 B2 JP 5679199B2
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- traceability
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- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 18
- 229910002804 graphite Inorganic materials 0.000 claims description 18
- 239000010439 graphite Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 12
- 238000005979 thermal decomposition reaction Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 description 35
- 239000000463 material Substances 0.000 description 6
- 230000000007 visual effect Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003863 physical function Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Chemical Vapour Deposition (AREA)
- General Factory Administration (AREA)
Description
2 製品シリアル番号(トレーサビリティ表示)
3 PG膜
4 PGコートPBNハースライナー(PGコート製品)
Claims (2)
- 本体表面をPG(熱分解グラファイト)膜で被覆したPG(熱分解グラファイト)コート製品において、本体表面の任意箇所において黒鉛によるトレーサビリティ表示が設けられ、該トレーサビリティ表示が膜厚100μm以下のPG(熱分解グラファイト)膜を通して外部から視認可能であることを特徴とする、トレーサビリティが表示されたPG(熱分解グラファイト)コート製品。
- 本体を製造した後、該本体表面の任意箇所に黒鉛でトレーサビリティ表示を設け、該トレーサビリティ表示を含めた本体表面を膜厚100μm以下のPG(熱分解グラファイト)膜で被覆することを特徴とする、トレーサビリティが表示されたPG(熱分解グラファイト)コート製品の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011145392A JP5679199B2 (ja) | 2011-06-30 | 2011-06-30 | トレーサビリティが表示されたpgコート製品およびその製造方法 |
US14/128,794 US20140134410A1 (en) | 2011-06-30 | 2012-06-28 | Product having traceability displayed thereon and method for displaying traceability of product |
KR1020137033802A KR101867646B1 (ko) | 2011-06-30 | 2012-06-28 | 추적성이 표시된 제품 및 제품의 추적성을 표시하는 방법 |
CN201280031456.3A CN103748261B (zh) | 2011-06-30 | 2012-06-28 | 具有可追踪性指示物的产品和显示产品的可追踪性的方法 |
PCT/JP2012/066562 WO2013002334A1 (ja) | 2011-06-30 | 2012-06-28 | トレーサビリティが表示された製品および製品のトレーサビリティを表示する方法 |
EP12805271.9A EP2738286B1 (en) | 2011-06-30 | 2012-06-28 | Product having traceability displayed thereon and method for displaying traceability of product |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011145392A JP5679199B2 (ja) | 2011-06-30 | 2011-06-30 | トレーサビリティが表示されたpgコート製品およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013011000A JP2013011000A (ja) | 2013-01-17 |
JP5679199B2 true JP5679199B2 (ja) | 2015-03-04 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011145392A Active JP5679199B2 (ja) | 2011-06-30 | 2011-06-30 | トレーサビリティが表示されたpgコート製品およびその製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP5679199B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62169448A (ja) * | 1986-01-22 | 1987-07-25 | Hitachi Tokyo Electron Co Ltd | 半導体装置 |
JP3783789B2 (ja) * | 1995-08-24 | 2006-06-07 | 巴工業株式会社 | 電子ビーム蒸着用pbnハースライナおよびpbnハースライナを用いた金属の成膜方法 |
JP3874528B2 (ja) * | 1998-03-11 | 2007-01-31 | 株式会社小松製作所 | 半導体ウエハのレーザマーキング方法 |
JP2003267378A (ja) * | 2002-03-15 | 2003-09-25 | Murase Glass Kk | 炭素系皮膜を有する容器およびその製造方法 |
JP4358089B2 (ja) * | 2004-11-25 | 2009-11-04 | 原子燃料工業株式会社 | 高温ガス炉用成型燃料のマーキング方法 |
JP5478833B2 (ja) * | 2008-03-25 | 2014-04-23 | 株式会社カネカ | 透明導電膜の製造方法ならびにそれにより作製された透明導電膜 |
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2011
- 2011-06-30 JP JP2011145392A patent/JP5679199B2/ja active Active
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JP2013011000A (ja) | 2013-01-17 |
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