JP5658753B2 - エンハンスメント型窒化ガリウム高電子移動度トランジスタ - Google Patents
エンハンスメント型窒化ガリウム高電子移動度トランジスタ Download PDFInfo
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- 229910002601 GaN Inorganic materials 0.000 title claims description 61
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 title claims description 59
- 230000004888 barrier function Effects 0.000 claims description 54
- 229910052782 aluminium Inorganic materials 0.000 claims description 21
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 14
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical group [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 7
- 230000014509 gene expression Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000005428 wave function Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Description
(関連出願)
Claims (15)
- アルミニウムを含む第1バリア層と、
前記第1バリア層上の窒化ガリウムチャネル層と、
前記窒化ガリウム(GaN)チャネル層の直上に存在する第1アルミニウム窒化ガリウム(AlGaN)サブレイヤーと、前記第1AlGaNサブレイヤーの直上に存在するアルミニウムを含まないGaNサブレイヤーと、前記アルミニウムを含まないGaNサブレイヤーの直上に存在する第2AlGaNサブレイヤーと、を含み、前記第1AlGaNサブレイヤーおよび前記第2AlGaNサブレイヤーのそれぞれは、前記第1バリア層のアルミニウム濃度よりも高い濃度でアルミニウムを含む第2バリア層と、
を備えることを特徴とする装置。 - 前記第1バリア層はアルミニウム窒化ガリウムを含み、前記GaNチャネル層は前記第1バリア層の直上に存在することを特徴とする請求項1に記載の装置。
- さらに基板を備え、前記第1バリア層は前記基板の直上に存在し、前記基板は、炭化ケイ素、窒化ガリウム、窒化アルミニウムまたはシリコンを含むことを特徴とする請求項1に記載の装置。
- 前記第2AlGaNサブレイヤー内に埋め込まれたゲート電極をさらに備えることを特徴とする請求項1に記載の装置。
- 前記ゲート電極はT−ゲートであることを特徴とする請求項4に記載の装置。
- 前記ゲート電極、第1バリア層、窒化ガリウムチャネル層および第2バリア層は、エンハンスメント型トランジスタを形成することを特徴とする請求項4に記載の装置。
- 前記ゲート電極と前記アルミニウムを含まないGaNサブレイヤー間に絶縁層をさらに備えることを特徴とする請求項4に記載の装置。
- 前記アルミニウムを含まないGaNサブレイヤーと前記第2AlGaNサブレイヤー間にエッチストップ層を備えることを特徴とする請求項1に記載の装置。
- 無線周波数(RF)入力信号を受信するトランシーバと、
前記トランシーバに接続され、前記RF入力信号をデジタル入力信号に変換するアナログ−デジタル変換器(ADC)と、を備えるシステムであって、
前記ADCは、
アルミニウムを含む第1バリア層と、
前記第1バリア層上の窒化ガリウムチャネル層と、
前記窒化ガリウム(GaN)チャネル層の直上に存在する第1アルミニウム窒化ガリウム(AlGaN)サブレイヤーと、前記第1AlGaNサブレイヤーの直上に存在するアルミニウムを含まないGaNサブレイヤーと、前記アルミニウムを含まないGaNサブレイヤーの直上に存在する第2AlGaNサブレイヤーと、を含み、前記第1AlGaNサブレイヤーおよび前記第2AlGaNサブレイヤーのそれぞれは、前記第1バリア層のアルミニウム濃度よりも高い濃度でアルミニウムを含む第2バリア層と、
前記第2AlGaNサブレイヤー内に埋め込まれたゲート電極と、
を有するエンハンスメント型高電子移動度トランジスタ(HEMT)を備えることを特徴とするシステム。 - 前記トランシーバに接続され、前記RF入力信号を受信しやすいように構成されたアンテナ構造をさらに備えることを特徴とする請求項9に記載のシステム。
- 前記システムは、レーダ装置、衛星通信装置、携帯電話、基地局、放送ラジオあるいはTV増幅器システムであることを特徴とする請求項9に記載のシステム。
- アルミニウムを含む第1バリア層を形成するステップと、
前記第1バリア層上に窒化ガリウム(GaN)チャネル層を形成するステップと、
前記窒化ガリウムチャネル層上に第2バリア層を形成するステップであって、前記第2バリア層は、前記GaNチャネル層の直上に存在する第1アルミニウム窒化ガリウム(AlGaN)サブレイヤーと、前記第1AlGaNサブレイヤーの直上に存在するアルミニウムを含まないGaNサブレイヤーと、前記アルミニウムを含まないGaNサブレイヤーの直上に存在する第2AlGaNサブレイヤーとを含み、前記第1AlGaNサブレイヤーおよび前記第2AlGaNサブレイヤーのそれぞれは、前記第1バリア層のアルミニウム濃度よりも高い濃度でアルミニウムを含むステップと、
を備えることを特徴とする方法。 - 前記第1バリア層は、アルミニウム窒化ガリウムを含むことを特徴とする請求項12に記載の方法。
- 前記第2AlGaNサブレイヤー内に埋め込まれた第1ゲート電極を形成するステップをさらに備えることを特徴とする請求項12に記載の方法。
- 前記第2バリア層上に第2ゲート電極を形成するステップをさらに備えることを特徴とする請求項14に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/509,144 US8344420B1 (en) | 2009-07-24 | 2009-07-24 | Enhancement-mode gallium nitride high electron mobility transistor |
US12/509,144 | 2009-07-24 | ||
PCT/US2010/042151 WO2011011261A2 (en) | 2009-07-24 | 2010-07-15 | Enhancement-mode gallium nitride high electron mobility transistor |
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JP2013500582A JP2013500582A (ja) | 2013-01-07 |
JP2013500582A5 JP2013500582A5 (ja) | 2013-05-16 |
JP5658753B2 true JP5658753B2 (ja) | 2015-01-28 |
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US (1) | US8344420B1 (ja) |
JP (1) | JP5658753B2 (ja) |
WO (1) | WO2011011261A2 (ja) |
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JP2011171640A (ja) * | 2010-02-22 | 2011-09-01 | Sanken Electric Co Ltd | 窒化物半導体装置及びその製造方法 |
JP5866773B2 (ja) * | 2011-02-25 | 2016-02-17 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
JP2013077635A (ja) * | 2011-09-29 | 2013-04-25 | Sumitomo Electric Ind Ltd | 半導体装置およびその製造方法 |
US9666705B2 (en) * | 2012-05-14 | 2017-05-30 | Infineon Technologies Austria Ag | Contact structures for compound semiconductor devices |
JP6200227B2 (ja) * | 2013-02-25 | 2017-09-20 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US9640650B2 (en) * | 2014-01-16 | 2017-05-02 | Qorvo Us, Inc. | Doped gallium nitride high-electron mobility transistor |
US10516043B1 (en) | 2018-07-19 | 2019-12-24 | Cree, Inc. | Monolithic microwave integrated circuits having both enhancement-mode and depletion mode transistors |
US11101378B2 (en) | 2019-04-09 | 2021-08-24 | Raytheon Company | Semiconductor structure having both enhancement mode group III-N high electron mobility transistors and depletion mode group III-N high electron mobility transistors |
US11545566B2 (en) | 2019-12-26 | 2023-01-03 | Raytheon Company | Gallium nitride high electron mobility transistors (HEMTs) having reduced current collapse and power added efficiency enhancement |
US11362190B2 (en) | 2020-05-22 | 2022-06-14 | Raytheon Company | Depletion mode high electron mobility field effect transistor (HEMT) semiconductor device having beryllium doped Schottky contact layers |
CN112509924B (zh) * | 2020-11-04 | 2022-08-05 | 中国电子科技集团公司第五十五研究所 | 一种E/D集成的GaN HEMT器件制备方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6045614A (en) | 1996-03-14 | 2000-04-04 | Raytheon Company | Method for epitaxial growth of twin-free, (111)-oriented II-VI alloy films on silicon substrates |
EP0962963A4 (en) | 1997-08-27 | 2004-08-04 | Matsushita Electric Ind Co Ltd | SILICON CARBIDE SUBSTRATE, THEIR PRODUCTION AND SEMICONDUCTOR ELEMENT FROM SIC |
JP3707765B2 (ja) | 1999-09-09 | 2005-10-19 | 株式会社村田製作所 | 電界効果型半導体装置 |
US6447604B1 (en) | 2000-03-13 | 2002-09-10 | Advanced Technology Materials, Inc. | Method for achieving improved epitaxy quality (surface texture and defect density) on free-standing (aluminum, indium, gallium) nitride ((al,in,ga)n) substrates for opto-electronic and electronic devices |
US6624452B2 (en) | 2000-07-28 | 2003-09-23 | The Regents Of The University Of California | Gallium nitride-based HFET and a method for fabricating a gallium nitride-based HFET |
KR100379619B1 (ko) | 2000-10-13 | 2003-04-10 | 광주과학기술원 | 단일집적 e/d 모드 hemt 및 그 제조방법 |
CA2456662A1 (en) | 2001-08-07 | 2003-02-20 | Jan Kuzmik | High electron mobility devices |
US6954473B2 (en) | 2002-10-25 | 2005-10-11 | Opel, Inc. | Optoelectronic device employing at least one semiconductor heterojunction thyristor for producing variable electrical/optical delay |
US7323256B2 (en) | 2003-11-13 | 2008-01-29 | Cree, Inc. | Large area, uniformly low dislocation density GaN substrate and process for making the same |
US7118813B2 (en) | 2003-11-14 | 2006-10-10 | Cree, Inc. | Vicinal gallium nitride substrate for high quality homoepitaxy |
JP2005251820A (ja) * | 2004-03-02 | 2005-09-15 | Nippon Telegr & Teleph Corp <Ntt> | ヘテロ接合型電界効果トランジスタ |
JP2006032911A (ja) * | 2004-06-15 | 2006-02-02 | Ngk Insulators Ltd | 半導体積層構造、半導体素子およびhemt素子 |
FR2875338B1 (fr) * | 2004-09-13 | 2007-01-05 | Picogiga Internat Soc Par Acti | Methode d'elaboration de structures hemt piezoelectriques a desordre d'alliage nul |
JP4832768B2 (ja) * | 2005-02-09 | 2011-12-07 | 日本電信電話株式会社 | 半導体装置 |
JP2010509177A (ja) | 2006-11-15 | 2010-03-25 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 有機金属化学気相成長法による、高品質のN面GaN、InNおよびAlNならびにそれらの合金のヘテロエピタキシャル成長の方法 |
JP5217157B2 (ja) * | 2006-12-04 | 2013-06-19 | 日本電気株式会社 | 電界効果トランジスタおよびその製造方法 |
US7601980B2 (en) * | 2006-12-29 | 2009-10-13 | Intel Corporation | Dopant confinement in the delta doped layer using a dopant segregation barrier in quantum well structures |
US7655962B2 (en) | 2007-02-23 | 2010-02-02 | Sensor Electronic Technology, Inc. | Enhancement mode insulated gate heterostructure field-effect transistor with electrically isolated RF-enhanced source contact |
JP5347228B2 (ja) * | 2007-03-05 | 2013-11-20 | 日本電気株式会社 | 電界効果トランジスタ |
JP5431652B2 (ja) * | 2007-04-02 | 2014-03-05 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
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