JP5658604B2 - 半導体発光素子の製造方法 - Google Patents
半導体発光素子の製造方法 Download PDFInfo
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- JP5658604B2 JP5658604B2 JP2011062099A JP2011062099A JP5658604B2 JP 5658604 B2 JP5658604 B2 JP 5658604B2 JP 2011062099 A JP2011062099 A JP 2011062099A JP 2011062099 A JP2011062099 A JP 2011062099A JP 5658604 B2 JP5658604 B2 JP 5658604B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
Description
11 支持基板
12 接合層
13 p電極
15 n電極
16 保護層
20 半導体積層体
30 成長基板
43 犠牲部
44 分離溝
51 褶曲部
Claims (3)
- 半導体発光素子の製造方法であって、
成長基板の表面側上に活性層を含む半導体積層体を形成する工程と、
前記半導体積層体上に複数の電極を形成する工程と、
前記複数の電極とは分離溝を介して離れた犠牲部を前記半導体積層体上に形成する工程と、
前記複数の電極及び前記犠牲部上に渡って形成され、前記分離溝を埋めるキャップ層を成膜する工程と、
接合層を介して前記キャップ層に支持基板を接合する工程と、
前記成長基板の裏面側からレーザ光を前記半導体積層体へ照射して、前記半導体積層体から前記成長基板を剥離する工程と、
前記半導体積層体をエッチングして前記犠牲部を露出させる分割溝を形成する工程と、
ウェットエッチングによって少なくとも前記犠牲部を除去する工程と、を含むことを特徴とする半導体発光素子の製造方法。 - 前記複数の電極と前記犠牲部は同一材料で設けられ、
前記複数の電極を形成する工程と前記犠牲部を形成する工程は、前記半導体積層体に金属膜を設けて前記金属膜に前記分離溝を形成することにより、前記複数の電極と前記犠牲部とに分けることで行われることを特徴とする請求項1に記載の半導体発光素子の製造方法。 - 前記キャップ層は多層膜からなり、前記キャップ層は前記分離溝内に褶曲部を有することを特徴とする請求項1又は2に記載の半導体発光素子の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2011062099A JP5658604B2 (ja) | 2011-03-22 | 2011-03-22 | 半導体発光素子の製造方法 |
US13/426,141 US8772808B2 (en) | 2011-03-22 | 2012-03-21 | Semiconductor light emitting element and manufacturing method thereof |
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JP2011062099A JP5658604B2 (ja) | 2011-03-22 | 2011-03-22 | 半導体発光素子の製造方法 |
Publications (2)
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JP2012199357A JP2012199357A (ja) | 2012-10-18 |
JP5658604B2 true JP5658604B2 (ja) | 2015-01-28 |
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JP2011062099A Active JP5658604B2 (ja) | 2011-03-22 | 2011-03-22 | 半導体発光素子の製造方法 |
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JP (1) | JP5658604B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6068091B2 (ja) * | 2012-10-24 | 2017-01-25 | スタンレー電気株式会社 | 発光素子 |
JP6130155B2 (ja) * | 2013-02-01 | 2017-05-17 | スタンレー電気株式会社 | 半導体発光素子 |
CN105378951B (zh) * | 2013-07-18 | 2019-11-05 | 亮锐控股有限公司 | 高度反射倒装芯片led管芯 |
US9107316B2 (en) * | 2013-09-11 | 2015-08-11 | Eastman Kodak Company | Multi-layer micro-wire substrate structure |
JP6423234B2 (ja) * | 2013-11-21 | 2018-11-14 | ローム株式会社 | 半導体発光素子およびその製造方法 |
JP6845483B2 (ja) * | 2018-11-26 | 2021-03-17 | 日亜化学工業株式会社 | 発光素子の製造方法 |
CN110660888B (zh) * | 2019-11-08 | 2021-02-02 | 扬州乾照光电有限公司 | 一种发光二极管及其制作方法 |
CN112885938B (zh) * | 2019-11-29 | 2022-06-14 | 山东浪潮华光光电子股份有限公司 | 一种银基键合的反极性GaAs基AlGaInP红光LED芯片的制备方法 |
Family Cites Families (19)
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JP2783210B2 (ja) * | 1995-09-04 | 1998-08-06 | 日本電気株式会社 | 面発光型ダイオード |
DE19640594B4 (de) | 1996-10-01 | 2016-08-04 | Osram Gmbh | Bauelement |
US6784463B2 (en) * | 1997-06-03 | 2004-08-31 | Lumileds Lighting U.S., Llc | III-Phospide and III-Arsenide flip chip light-emitting devices |
JP2000228539A (ja) | 1999-02-08 | 2000-08-15 | Sharp Corp | 窒素化合物半導体の製造方法 |
US6630689B2 (en) * | 2001-05-09 | 2003-10-07 | Lumileds Lighting, U.S. Llc | Semiconductor LED flip-chip with high reflectivity dielectric coating on the mesa |
TWI226139B (en) | 2002-01-31 | 2005-01-01 | Osram Opto Semiconductors Gmbh | Method to manufacture a semiconductor-component |
JP4097510B2 (ja) | 2002-11-20 | 2008-06-11 | 株式会社沖データ | 半導体装置の製造方法 |
KR100631840B1 (ko) * | 2004-06-03 | 2006-10-09 | 삼성전기주식회사 | 플립칩용 질화물 반도체 발광소자 |
WO2006043422A1 (ja) * | 2004-10-19 | 2006-04-27 | Nichia Corporation | 半導体素子 |
KR100862453B1 (ko) * | 2004-11-23 | 2008-10-08 | 삼성전기주식회사 | GaN 계 화합물 반도체 발광소자 |
US7868349B2 (en) * | 2005-02-17 | 2011-01-11 | Lg Electronics Inc. | Light source apparatus and fabrication method thereof |
JP4923693B2 (ja) * | 2006-04-17 | 2012-04-25 | 日亜化学工業株式会社 | 半導体発光素子と半導体発光装置 |
TW200837974A (en) * | 2007-03-01 | 2008-09-16 | Touch Micro System Tech | Light emitting diode package structure and manufacturing method thereof |
TW200945620A (en) * | 2008-04-25 | 2009-11-01 | Formosa Epitaxy Inc | Light-emitting device with reflection layer and structure of the reflection layer |
DE102009025015A1 (de) * | 2008-07-08 | 2010-02-18 | Seoul Opto Device Co. Ltd., Ansan | Lichtemittierende Vorrichtung und Verfahren zu ihrer Herstellung |
KR101072034B1 (ko) * | 2009-10-15 | 2011-10-10 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
KR100986407B1 (ko) * | 2009-10-22 | 2010-10-08 | 엘지이노텍 주식회사 | 발광소자 및 그 제조방법 |
KR101007077B1 (ko) * | 2009-11-06 | 2011-01-10 | 엘지이노텍 주식회사 | 발광소자, 발광소자 패키지 및 그 제조방법 |
JP5725927B2 (ja) * | 2010-05-18 | 2015-05-27 | ソウル バイオシス カンパニー リミテッドSeoul Viosys Co.,Ltd. | 高効率発光ダイオード及びその製造方法 |
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2011
- 2011-03-22 JP JP2011062099A patent/JP5658604B2/ja active Active
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2012
- 2012-03-21 US US13/426,141 patent/US8772808B2/en active Active
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JP2012199357A (ja) | 2012-10-18 |
US8772808B2 (en) | 2014-07-08 |
US20120241805A1 (en) | 2012-09-27 |
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