JP5649810B2 - 静電容量式センサ - Google Patents

静電容量式センサ Download PDF

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Publication number
JP5649810B2
JP5649810B2 JP2009249424A JP2009249424A JP5649810B2 JP 5649810 B2 JP5649810 B2 JP 5649810B2 JP 2009249424 A JP2009249424 A JP 2009249424A JP 2009249424 A JP2009249424 A JP 2009249424A JP 5649810 B2 JP5649810 B2 JP 5649810B2
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JP
Japan
Prior art keywords
signal
unit
capacitance
frequency
movable
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Expired - Fee Related
Application number
JP2009249424A
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English (en)
Japanese (ja)
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JP2011095104A (ja
JP2011095104A5 (enExample
Inventor
希元 鄭
希元 鄭
山中　聖子
聖子 山中
後藤　康
康 後藤
敏明 中村
敏明 中村
雅秀 林
雅秀 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Astemo Ltd
Original Assignee
Hitachi Automotive Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Automotive Systems Ltd filed Critical Hitachi Automotive Systems Ltd
Priority to JP2009249424A priority Critical patent/JP5649810B2/ja
Priority to EP10013373.5A priority patent/EP2317328B1/en
Priority to US12/912,580 priority patent/US8427177B2/en
Publication of JP2011095104A publication Critical patent/JP2011095104A/ja
Publication of JP2011095104A5 publication Critical patent/JP2011095104A5/ja
Application granted granted Critical
Publication of JP5649810B2 publication Critical patent/JP5649810B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Air Bags (AREA)
JP2009249424A 2009-10-29 2009-10-29 静電容量式センサ Expired - Fee Related JP5649810B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009249424A JP5649810B2 (ja) 2009-10-29 2009-10-29 静電容量式センサ
EP10013373.5A EP2317328B1 (en) 2009-10-29 2010-10-06 Capacitive Sensor
US12/912,580 US8427177B2 (en) 2009-10-29 2010-10-26 Capacitance sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009249424A JP5649810B2 (ja) 2009-10-29 2009-10-29 静電容量式センサ

Publications (3)

Publication Number Publication Date
JP2011095104A JP2011095104A (ja) 2011-05-12
JP2011095104A5 JP2011095104A5 (enExample) 2012-11-15
JP5649810B2 true JP5649810B2 (ja) 2015-01-07

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009249424A Expired - Fee Related JP5649810B2 (ja) 2009-10-29 2009-10-29 静電容量式センサ

Country Status (3)

Country Link
US (1) US8427177B2 (enExample)
EP (1) EP2317328B1 (enExample)
JP (1) JP5649810B2 (enExample)

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US9291636B1 (en) * 2010-03-23 2016-03-22 University Of Washington Through Its Center For Commercialization Methods and systems for detecting acceleration using bondwires
JP4955791B2 (ja) * 2010-04-20 2012-06-20 ファナック株式会社 ロボットシステム
EP2605022B1 (en) * 2010-08-11 2015-02-25 Hitachi Automotive Systems, Ltd. Inertial sensor
WO2013024791A1 (ja) * 2011-08-12 2013-02-21 国立大学法人豊橋技術科学大学 化学・物理現象検出装置及び検出方法
US9032777B2 (en) * 2011-09-16 2015-05-19 Robert Bosch Gmbh Linearity enhancement of capacitive transducers by auto-calibration using on-chip neutralization capacitors and linear actuation
JP6140919B2 (ja) * 2011-09-30 2017-06-07 曙ブレーキ工業株式会社 加速度センサ回路
CN103858016B (zh) * 2011-11-22 2016-06-29 富士电机株式会社 静电电容检测电路
US20150059430A1 (en) * 2012-04-20 2015-03-05 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
JP5963567B2 (ja) 2012-06-26 2016-08-03 日立オートモティブシステムズ株式会社 慣性センサ
JP5982222B2 (ja) * 2012-08-22 2016-08-31 日立オートモティブシステムズ株式会社 加速度検出装置
US9702897B2 (en) 2012-10-08 2017-07-11 Northrop Grumman Systems Corporation Dynamic self-calibration of an accelerometer system
US20140192061A1 (en) * 2013-01-09 2014-07-10 Pixtronix, Inc. Electromechanical systems having sidewall beams
JP6084473B2 (ja) 2013-02-01 2017-02-22 日立オートモティブシステムズ株式会社 複合センサ
US10309997B2 (en) * 2013-03-15 2019-06-04 Infineon Technologies Ag Apparatus and a method for generating a sensor signal indicating information on a capacitance of a variable capacitor comprising a variable capacitance
US9335340B2 (en) * 2013-07-23 2016-05-10 Freescale Semiconductor, Inc. MEMS parameter identification using modulated waveforms
JP6211463B2 (ja) * 2014-05-23 2017-10-11 日立オートモティブシステムズ株式会社 慣性センサ
JP6547934B2 (ja) * 2014-12-11 2019-07-24 セイコーエプソン株式会社 センサーデバイス、電子機器及び移動体
DE102015001128B4 (de) 2015-01-29 2021-09-30 Northrop Grumman Litef Gmbh Beschleunigungssensor mit Federkraftkompensation
JP6373786B2 (ja) 2015-03-30 2018-08-15 日立オートモティブシステムズ株式会社 容量検出型センサの信号検出方法、容量検出型センサ、およびシステム
DE102015218941A1 (de) * 2015-09-30 2017-03-30 Siemens Aktiengesellschaft Verfahren zur Erkennung eines Defekts eines Beschleunigungssensors und Messsystem
ITUB20155780A1 (it) * 2015-11-23 2016-02-23 Sequoia It S R L Accelerometro con calibrazione automatica
US10119834B2 (en) * 2015-12-10 2018-11-06 Panasonic Corporation MEMS sensor with voltage sensing of movable mass
WO2018049426A1 (en) * 2016-09-12 2018-03-15 Sitime Corporation Frequency-modulating sensor array
JP6828544B2 (ja) * 2017-03-23 2021-02-10 セイコーエプソン株式会社 センサー素子制御装置、物理量センサー、電子機器、移動体及び物理量センサーの故障診断方法
US10830816B2 (en) * 2017-03-28 2020-11-10 Panasonic Corporation Single circuit fault detection
US9983032B1 (en) * 2017-06-01 2018-05-29 Nxp Usa, Inc. Sensor device and method for continuous fault monitoring of sensor device
JP6943122B2 (ja) * 2017-09-29 2021-09-29 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体
CN110275047B (zh) * 2018-03-14 2021-01-22 京东方科技集团股份有限公司 加速度传感器、电容检测电路、加速度处理电路及方法
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
JP2020134391A (ja) * 2019-02-22 2020-08-31 セイコーエプソン株式会社 センサーモジュール、センサーシステム及び慣性センサーの異常判定方法
US20230194564A1 (en) * 2020-06-04 2023-06-22 Panasonic Intellectual Property Management Co., Ltd. Inertial detection circuit, inertial sensor, and inertial detection method
CN112799382A (zh) * 2021-04-01 2021-05-14 北京科技大学 一种机器人微机电系统故障诊断方法及系统
US11953533B2 (en) * 2021-06-15 2024-04-09 Capital One Services, Llc Detecting capacitive faults and sensitivity faults in capacitive sensors

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JP3162149B2 (ja) * 1992-02-12 2001-04-25 株式会社日立製作所 静電容量式センサ
JPH05281256A (ja) * 1992-03-31 1993-10-29 Hitachi Ltd 容量式センサ
FR2694403B1 (fr) * 1992-07-31 1994-10-07 Sagem Accéléromètre pendulaire électrostatique à électrode de test et procédé de fabrication d'un tel accéléromètre.
JP3019700B2 (ja) * 1993-12-16 2000-03-13 日産自動車株式会社 加速度センサー
DE4432837B4 (de) * 1994-09-15 2004-05-13 Robert Bosch Gmbh Beschleunigungssensor und Meßverfahren
JP3435665B2 (ja) * 2000-06-23 2003-08-11 株式会社村田製作所 複合センサ素子およびその製造方法
US7212015B2 (en) * 2003-03-13 2007-05-01 Canon Kabushiki Kaisha Capacitance sensor type measuring apparatus
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JP2006170704A (ja) * 2004-12-14 2006-06-29 Mitsubishi Electric Corp 容量型加速度検出装置
JP2007248328A (ja) * 2006-03-17 2007-09-27 Matsushita Electric Ind Co Ltd 複合センサ
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Also Published As

Publication number Publication date
JP2011095104A (ja) 2011-05-12
EP2317328A3 (en) 2012-01-18
EP2317328A2 (en) 2011-05-04
US8427177B2 (en) 2013-04-23
EP2317328B1 (en) 2015-04-15
US20110100126A1 (en) 2011-05-05

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