JP5642362B2 - 陽極酸化ポーラスアルミナおよびその製造方法 - Google Patents
陽極酸化ポーラスアルミナおよびその製造方法 Download PDFInfo
- Publication number
- JP5642362B2 JP5642362B2 JP2009187961A JP2009187961A JP5642362B2 JP 5642362 B2 JP5642362 B2 JP 5642362B2 JP 2009187961 A JP2009187961 A JP 2009187961A JP 2009187961 A JP2009187961 A JP 2009187961A JP 5642362 B2 JP5642362 B2 JP 5642362B2
- Authority
- JP
- Japan
- Prior art keywords
- porous alumina
- anodized porous
- pores
- producing
- pore
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims description 79
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 239000011148 porous material Substances 0.000 claims description 93
- 230000007547 defect Effects 0.000 claims description 32
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 21
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 238000002048 anodisation reaction Methods 0.000 claims description 13
- 238000007743 anodising Methods 0.000 claims description 8
- 235000006408 oxalic acid Nutrition 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000008151 electrolyte solution Substances 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000003792 electrolyte Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 8
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000003491 array Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 4
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical compound OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000010953 base metal Substances 0.000 description 2
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 229960002523 mercuric chloride Drugs 0.000 description 1
- LWJROJCJINYWOX-UHFFFAOYSA-L mercury dichloride Chemical compound Cl[Hg]Cl LWJROJCJINYWOX-UHFFFAOYSA-L 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 239000012229 microporous material Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011158 quantitative evaluation Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Images
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- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009187961A JP5642362B2 (ja) | 2009-08-14 | 2009-08-14 | 陽極酸化ポーラスアルミナおよびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009187961A JP5642362B2 (ja) | 2009-08-14 | 2009-08-14 | 陽極酸化ポーラスアルミナおよびその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004084952A Division JP4423077B2 (ja) | 2004-03-23 | 2004-03-23 | 陽極酸化ポーラスアルミナおよびその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013203707A Division JP5642861B2 (ja) | 2013-09-30 | 2013-09-30 | 陽極酸化ポーラスアルミナおよびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009299188A JP2009299188A (ja) | 2009-12-24 |
| JP2009299188A5 JP2009299188A5 (enExample) | 2011-01-06 |
| JP5642362B2 true JP5642362B2 (ja) | 2014-12-17 |
Family
ID=41546368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009187961A Expired - Lifetime JP5642362B2 (ja) | 2009-08-14 | 2009-08-14 | 陽極酸化ポーラスアルミナおよびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5642362B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5595511B2 (ja) | 2010-10-08 | 2014-09-24 | シャープ株式会社 | 陽極酸化膜の製造方法 |
| JP5642585B2 (ja) * | 2011-02-14 | 2014-12-17 | 公益財団法人神奈川科学技術アカデミー | 陽極酸化ポーラスアルミナの製造方法並びにその方法により製造された陽極酸化ポーラスアルミナ |
| JP2015147969A (ja) * | 2014-02-05 | 2015-08-20 | 住友電気工業株式会社 | 基板及びその製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853719B2 (ja) * | 1981-02-02 | 1983-11-30 | 株式会社フジクラ | 陽極酸化皮膜の処理方法 |
| DE3211782A1 (de) * | 1982-03-30 | 1983-10-06 | Siemens Ag | Bad und verfahren zum anodisieren von aluminierten teilen |
| JP4423077B2 (ja) * | 2004-03-23 | 2010-03-03 | 財団法人神奈川科学技術アカデミー | 陽極酸化ポーラスアルミナおよびその製造方法 |
-
2009
- 2009-08-14 JP JP2009187961A patent/JP5642362B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009299188A (ja) | 2009-12-24 |
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