JP5631529B2 - 加速度センサ - Google Patents

加速度センサ Download PDF

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Publication number
JP5631529B2
JP5631529B2 JP2007059449A JP2007059449A JP5631529B2 JP 5631529 B2 JP5631529 B2 JP 5631529B2 JP 2007059449 A JP2007059449 A JP 2007059449A JP 2007059449 A JP2007059449 A JP 2007059449A JP 5631529 B2 JP5631529 B2 JP 5631529B2
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JP
Japan
Prior art keywords
counter electrode
axis
acceleration
opposing
electrode parts
Prior art date
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Active
Application number
JP2007059449A
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English (en)
Japanese (ja)
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JP2008224262A5 (enExample
JP2008224262A (ja
Inventor
植村　猛
猛 植村
野添　利幸
利幸 野添
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2007059449A priority Critical patent/JP5631529B2/ja
Priority to PCT/JP2008/000458 priority patent/WO2008111291A1/ja
Priority to US12/529,675 priority patent/US8413510B2/en
Priority to EP08720344A priority patent/EP2110672B1/en
Publication of JP2008224262A publication Critical patent/JP2008224262A/ja
Publication of JP2008224262A5 publication Critical patent/JP2008224262A5/ja
Application granted granted Critical
Publication of JP5631529B2 publication Critical patent/JP5631529B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Switches Operated By Changes In Physical Conditions (AREA)
JP2007059449A 2007-03-09 2007-03-09 加速度センサ Active JP5631529B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007059449A JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ
PCT/JP2008/000458 WO2008111291A1 (ja) 2007-03-09 2008-03-06 加速度センサ
US12/529,675 US8413510B2 (en) 2007-03-09 2008-03-06 Acceleration sensor
EP08720344A EP2110672B1 (en) 2007-03-09 2008-03-06 Acceleration sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007059449A JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ

Publications (3)

Publication Number Publication Date
JP2008224262A JP2008224262A (ja) 2008-09-25
JP2008224262A5 JP2008224262A5 (enExample) 2010-02-25
JP5631529B2 true JP5631529B2 (ja) 2014-11-26

Family

ID=39759235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007059449A Active JP5631529B2 (ja) 2007-03-09 2007-03-09 加速度センサ

Country Status (4)

Country Link
US (1) US8413510B2 (enExample)
EP (1) EP2110672B1 (enExample)
JP (1) JP5631529B2 (enExample)
WO (1) WO2008111291A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8201449B2 (en) * 2006-11-14 2012-06-19 Panasonic Corporation Sensor
WO2008102535A1 (ja) * 2007-02-20 2008-08-28 Panasonic Corporation 慣性力センサおよび複合慣性力センサ
DE102009001847B4 (de) 2009-03-25 2022-07-28 Robert Bosch Gmbh Mikromechanisches Bauteil, Sensorvorrichtung mit einem mikromechanischen Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils
EP3429523B1 (en) 2016-03-15 2019-12-25 The Procter and Gamble Company Method and apparatus for manufacturing an absorbent article including an ultra short pulse laser source

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2773460B2 (ja) * 1991-03-05 1998-07-09 日本電気株式会社 半導体加速度センサ
JP3124710B2 (ja) 1995-07-28 2001-01-15 住友精密工業株式会社 静電容量の変化を利用したセンサ用信号処理回路
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
US5806365A (en) 1996-04-30 1998-09-15 Motorola, Inc. Acceleration sensing device on a support substrate and method of operation
JPH10177034A (ja) 1996-12-17 1998-06-30 Sumitomo Precision Prod Co Ltd 静電容量型加速度センサとその製造方法
JPH11248741A (ja) * 1998-02-26 1999-09-17 Omron Corp 静電容量型多軸加速度センサ
WO2002018875A1 (en) * 2000-08-30 2002-03-07 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
US20030033850A1 (en) * 2001-08-09 2003-02-20 Challoner A. Dorian Cloverleaf microgyroscope with electrostatic alignment and tuning
US6910379B2 (en) * 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer

Also Published As

Publication number Publication date
US20100107764A1 (en) 2010-05-06
JP2008224262A (ja) 2008-09-25
WO2008111291A1 (ja) 2008-09-18
EP2110672B1 (en) 2013-02-27
US8413510B2 (en) 2013-04-09
EP2110672A1 (en) 2009-10-21
EP2110672A4 (en) 2012-04-04

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