JP2008224262A - 加速度センサ - Google Patents
加速度センサ Download PDFInfo
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- JP2008224262A JP2008224262A JP2007059449A JP2007059449A JP2008224262A JP 2008224262 A JP2008224262 A JP 2008224262A JP 2007059449 A JP2007059449 A JP 2007059449A JP 2007059449 A JP2007059449 A JP 2007059449A JP 2008224262 A JP2008224262 A JP 2008224262A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
- G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
Abstract
【解決手段】錘部2と基板6の各々の対向面に第1〜第4対向電極14、16、18、20を配置して形成した対向電極部を有し、第1〜第4対向電極14、16、18、20に基準電圧を印加し、第2、第4対向電極16、20における対向距離の拡大変位に起因した静電容量変化と、第1、第3対向電極14、18における対向距離の縮小変位に起因した静電容量変化とに基づいて加速度を検出しており、第1〜第4対向電極14、16、18、20の全ての対向距離が、拡大変位または縮小変位した場合は基準電圧を上昇または下降させた制御電圧を印加する構成である。
【選択図】図1
Description
2 錘部
4 固定部
6 基板
8 第1アーム
10 第2アーム
12 支持部
14 第1対向電極
16 第2対向電極
18 第3対向電極
20 第4対向電極
21 基準電圧部
22 駆動電極
23 制御電圧部
24 検知電極
26 第1感知電極
28 第2感知電極
30 圧電層
32 上部電極
34 下部電極
50 CV変換アンプ
51 差動アンプ
52 加算処理回路
53 レベル調整回路
54 オートゲインコントロール回路(AGC回路)
55 レベル検出回路
56 クロック生成回路
57 検波・出力処理部
58 出力端子
Claims (6)
- 加速度検出部を有する検出素子を備え、
前記検出素子は、可撓部を介して固定部と連結した錘部と、前記錘部と対向させた基板と、前記錘部と前記基板の各々の対向面に電極を配置して形成した対向電極部とを有し、
前記対向電極部として、互いに直交するX軸、Y軸、Z軸において、前記X軸上に2つのX対向電極部を配置し、
前記加速度検出部は、
全ての前記X対向電極部に基準電圧を印加し、一方の前記X対向電極部における対向距離の拡大変位に起因した静電容量変化と、他方の前記X対向電極部における対向距離の縮小変位に起因した静電容量変化とに基づいてX方向への加速度を検出しており、
全ての前記X対向電極部の対向距離が、拡大変位または縮小変位した場合は前記基準電圧を上昇または下降させた制御電圧を印加する加速度センサ。 - 前記加速度検出部は、全ての前記X対向電極部の対向距離が、拡大変位した場合は前記基準電圧を上昇させ、縮小変位した場合は前記基準電圧を下降させた前記制御電圧を印加する請求項1記載の加速度センサ。
- 前記X軸に平行なX平行軸上に2つのX対向電極部を配置し、前記X軸および前記X平行軸の正側に配置された2つのX対向電極部における静電容量の和算値と、前記X軸および前記X平行軸の負側に配置された2つのX対向電極部における静電容量の和算値に基づいて、X方向への加速度を検出する請求項1記載の加速度センサ。
- 前記対向電極部として、互いに直交するX軸、Y軸、Z軸において、前記X軸上に2つのX対向電極部を配置するとともに前記Y軸上に2つのY対向電極部を配置し、
前記加速度検出部は、全てのX対向電極部および全てのY対向電極部に基準電圧を印加し、
一方の前記X対向電極部における対向距離の拡大変位と、他方の前記X対向電極部における対向距離の縮小変位とに基づいてX方向への加速度を検出し、
一方の前記Y対向電極部における対向距離の拡大変位と、他方の前記Y対向電極部における縮小変位とに基づいてY方向への加速度を検出しており、
全ての前記X対向電極部の対向距離と全ての前記Y対向電極部の対向距離とが、拡大変位または縮小変位した場合は、前記基準電圧を上昇または下降させた制御電圧を印加する請求項1記載の加速度センサ。 - 前記加速度検出部は、全ての前記X対向電極部の対向距離と全ての前記Y対向電極部の対向距離とが、拡大変位した場合は前記基準電圧を上昇させ、縮小変位した場合は前記基準電圧を下降させた前記制御電圧を印加する請求項4記載の加速度センサ。
- 前記X軸に平行なX平行軸上に2つのX対向電極部を配置し、前記X軸および前記X平行軸の正側に配置された2つのX対向電極部における静電容量の和算値と、前記X軸および前記X平行軸の負側に配置された2つのX対向電極部における静電容量の和算値に基づいてX方向への加速度を検出し、前記Y軸に平行なY平行軸上に配置された2つのY対向電極部を有し、前記Y軸および前記Y平行軸の正側に配置された2つのY対向電極部における静電容量の和算値と、前記X軸および前記Y平行軸の負側に配置された2つのY対向電極部における静電容量の和算値に基づいてY方向への加速度を検出する請求項4記載の加速度センサ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007059449A JP5631529B2 (ja) | 2007-03-09 | 2007-03-09 | 加速度センサ |
PCT/JP2008/000458 WO2008111291A1 (ja) | 2007-03-09 | 2008-03-06 | 加速度センサ |
EP08720344A EP2110672B1 (en) | 2007-03-09 | 2008-03-06 | Acceleration sensor |
US12/529,675 US8413510B2 (en) | 2007-03-09 | 2008-03-06 | Acceleration sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007059449A JP5631529B2 (ja) | 2007-03-09 | 2007-03-09 | 加速度センサ |
Publications (3)
Publication Number | Publication Date |
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JP2008224262A true JP2008224262A (ja) | 2008-09-25 |
JP2008224262A5 JP2008224262A5 (ja) | 2010-02-25 |
JP5631529B2 JP5631529B2 (ja) | 2014-11-26 |
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007059449A Active JP5631529B2 (ja) | 2007-03-09 | 2007-03-09 | 加速度センサ |
Country Status (4)
Country | Link |
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US (1) | US8413510B2 (ja) |
EP (1) | EP2110672B1 (ja) |
JP (1) | JP5631529B2 (ja) |
WO (1) | WO2008111291A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101529257B (zh) * | 2006-11-14 | 2011-06-15 | 松下电器产业株式会社 | 传感器 |
EP2113744A4 (en) * | 2007-02-20 | 2013-04-17 | Panasonic Corp | DEGREE OF INERT AND SENSOR FOR DETECTING VENTILATION POWER |
DE102009001847B4 (de) | 2009-03-25 | 2022-07-28 | Robert Bosch Gmbh | Mikromechanisches Bauteil, Sensorvorrichtung mit einem mikromechanischen Bauteil und Verfahren zum Betreiben eines mikromechanischen Bauteils |
EP3429523B1 (en) | 2016-03-15 | 2019-12-25 | The Procter and Gamble Company | Method and apparatus for manufacturing an absorbent article including an ultra short pulse laser source |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04278464A (ja) * | 1991-03-05 | 1992-10-05 | Nec Corp | 半導体加速度センサ |
JPH09196682A (ja) * | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 角速度センサと加速度センサ |
JPH1048247A (ja) * | 1996-04-30 | 1998-02-20 | Motorola Inc | 加速度検出素子 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3124710B2 (ja) | 1995-07-28 | 2001-01-15 | 住友精密工業株式会社 | 静電容量の変化を利用したセンサ用信号処理回路 |
JPH10177034A (ja) | 1996-12-17 | 1998-06-30 | Sumitomo Precision Prod Co Ltd | 静電容量型加速度センサとその製造方法 |
JPH11248741A (ja) * | 1998-02-26 | 1999-09-17 | Omron Corp | 静電容量型多軸加速度センサ |
US6666091B2 (en) * | 2000-08-30 | 2003-12-23 | Matsushita Electric Industrial Co., Ltd. | Angular velocity sensor |
US20030033850A1 (en) * | 2001-08-09 | 2003-02-20 | Challoner A. Dorian | Cloverleaf microgyroscope with electrostatic alignment and tuning |
US6910379B2 (en) * | 2003-10-29 | 2005-06-28 | Honeywell International, Inc. | Out-of-plane compensation suspension for an accelerometer |
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2007
- 2007-03-09 JP JP2007059449A patent/JP5631529B2/ja active Active
-
2008
- 2008-03-06 US US12/529,675 patent/US8413510B2/en active Active
- 2008-03-06 EP EP08720344A patent/EP2110672B1/en active Active
- 2008-03-06 WO PCT/JP2008/000458 patent/WO2008111291A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04278464A (ja) * | 1991-03-05 | 1992-10-05 | Nec Corp | 半導体加速度センサ |
JPH09196682A (ja) * | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 角速度センサと加速度センサ |
JPH1048247A (ja) * | 1996-04-30 | 1998-02-20 | Motorola Inc | 加速度検出素子 |
Also Published As
Publication number | Publication date |
---|---|
US20100107764A1 (en) | 2010-05-06 |
JP5631529B2 (ja) | 2014-11-26 |
EP2110672B1 (en) | 2013-02-27 |
EP2110672A1 (en) | 2009-10-21 |
US8413510B2 (en) | 2013-04-09 |
EP2110672A4 (en) | 2012-04-04 |
WO2008111291A1 (ja) | 2008-09-18 |
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