JP5606279B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP5606279B2
JP5606279B2 JP2010249606A JP2010249606A JP5606279B2 JP 5606279 B2 JP5606279 B2 JP 5606279B2 JP 2010249606 A JP2010249606 A JP 2010249606A JP 2010249606 A JP2010249606 A JP 2010249606A JP 5606279 B2 JP5606279 B2 JP 5606279B2
Authority
JP
Japan
Prior art keywords
arm
cooling plate
shaft
link
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010249606A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012101292A5 (https=
JP2012101292A (ja
Inventor
勝 島田
清子 寶邊
英樹 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2010249606A priority Critical patent/JP5606279B2/ja
Priority to PCT/JP2011/075312 priority patent/WO2012063706A1/ja
Priority to US13/884,117 priority patent/US9259841B2/en
Publication of JP2012101292A publication Critical patent/JP2012101292A/ja
Publication of JP2012101292A5 publication Critical patent/JP2012101292A5/ja
Application granted granted Critical
Publication of JP5606279B2 publication Critical patent/JP5606279B2/ja
Priority to US14/990,324 priority patent/US9566713B2/en
Priority to US15/398,187 priority patent/US9868206B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0054—Cooling means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2010249606A 2010-11-08 2010-11-08 搬送装置 Active JP5606279B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010249606A JP5606279B2 (ja) 2010-11-08 2010-11-08 搬送装置
PCT/JP2011/075312 WO2012063706A1 (ja) 2010-11-08 2011-11-02 搬送装置
US13/884,117 US9259841B2 (en) 2010-11-08 2011-11-02 Carrier device
US14/990,324 US9566713B2 (en) 2010-11-08 2016-01-07 Carrier device
US15/398,187 US9868206B2 (en) 2010-11-08 2017-01-04 Carrier device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010249606A JP5606279B2 (ja) 2010-11-08 2010-11-08 搬送装置

Publications (3)

Publication Number Publication Date
JP2012101292A JP2012101292A (ja) 2012-05-31
JP2012101292A5 JP2012101292A5 (https=) 2013-11-28
JP5606279B2 true JP5606279B2 (ja) 2014-10-15

Family

ID=46050855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010249606A Active JP5606279B2 (ja) 2010-11-08 2010-11-08 搬送装置

Country Status (3)

Country Link
US (3) US9259841B2 (https=)
JP (1) JP5606279B2 (https=)
WO (1) WO2012063706A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5606279B2 (ja) * 2010-11-08 2014-10-15 株式会社ダイヘン 搬送装置
US20130272822A1 (en) * 2011-12-19 2013-10-17 Kabushiki Kaisha Yaskawa Denki Transfer robot
KR102402324B1 (ko) * 2014-01-28 2022-05-26 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
JP6339057B2 (ja) * 2015-09-29 2018-06-06 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラム
US10109517B1 (en) * 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes
KR102240925B1 (ko) * 2019-07-17 2021-04-15 세메스 주식회사 기판 처리 설비 및 기판 반송 장치
KR102348261B1 (ko) * 2021-05-31 2022-01-10 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
KR102431664B1 (ko) * 2022-02-15 2022-08-12 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204316A (ja) * 1992-12-28 1994-07-22 Mitsubishi Electric Corp 耐熱ロボットハンド
JPH1187463A (ja) * 1997-09-12 1999-03-30 Dainippon Screen Mfg Co Ltd 基板処理装置
US6499777B1 (en) * 1999-05-11 2002-12-31 Matrix Integrated Systems, Inc. End-effector with integrated cooling mechanism
JP3263684B2 (ja) 1999-07-26 2002-03-04 株式会社ジェーイーエル 基板搬送用ロボット
WO2006062183A1 (ja) * 2004-12-10 2006-06-15 Ulvac, Inc. 搬送ロボット及び搬送装置
JP4908306B2 (ja) * 2007-05-10 2012-04-04 株式会社ダイヘン 搬送装置
JP5189833B2 (ja) 2007-12-19 2013-04-24 株式会社ダイヘン 真空搬送装置
JP2010177411A (ja) 2009-01-29 2010-08-12 Daihen Corp ワーク搬送装置
KR20120127463A (ko) * 2010-01-22 2012-11-21 어플라이드 머티어리얼스, 인코포레이티드 기판 냉각을 수반하는 이송 로봇
JP5606279B2 (ja) * 2010-11-08 2014-10-15 株式会社ダイヘン 搬送装置

Also Published As

Publication number Publication date
WO2012063706A1 (ja) 2012-05-18
US9259841B2 (en) 2016-02-16
US20130294870A1 (en) 2013-11-07
US20160121485A1 (en) 2016-05-05
US20170113345A1 (en) 2017-04-27
JP2012101292A (ja) 2012-05-31
US9566713B2 (en) 2017-02-14
US9868206B2 (en) 2018-01-16

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