JP2012101292A5 - - Google Patents

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Publication number
JP2012101292A5
JP2012101292A5 JP2010249606A JP2010249606A JP2012101292A5 JP 2012101292 A5 JP2012101292 A5 JP 2012101292A5 JP 2010249606 A JP2010249606 A JP 2010249606A JP 2010249606 A JP2010249606 A JP 2010249606A JP 2012101292 A5 JP2012101292 A5 JP 2012101292A5
Authority
JP
Japan
Prior art keywords
arm
cooling plate
shaft
link
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010249606A
Other languages
English (en)
Japanese (ja)
Other versions
JP5606279B2 (ja
JP2012101292A (ja
Filing date
Publication date
Priority claimed from JP2010249606A external-priority patent/JP5606279B2/ja
Priority to JP2010249606A priority Critical patent/JP5606279B2/ja
Application filed filed Critical
Priority to PCT/JP2011/075312 priority patent/WO2012063706A1/ja
Priority to US13/884,117 priority patent/US9259841B2/en
Publication of JP2012101292A publication Critical patent/JP2012101292A/ja
Publication of JP2012101292A5 publication Critical patent/JP2012101292A5/ja
Publication of JP5606279B2 publication Critical patent/JP5606279B2/ja
Application granted granted Critical
Priority to US14/990,324 priority patent/US9566713B2/en
Priority to US15/398,187 priority patent/US9868206B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010249606A 2010-11-08 2010-11-08 搬送装置 Active JP5606279B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010249606A JP5606279B2 (ja) 2010-11-08 2010-11-08 搬送装置
PCT/JP2011/075312 WO2012063706A1 (ja) 2010-11-08 2011-11-02 搬送装置
US13/884,117 US9259841B2 (en) 2010-11-08 2011-11-02 Carrier device
US14/990,324 US9566713B2 (en) 2010-11-08 2016-01-07 Carrier device
US15/398,187 US9868206B2 (en) 2010-11-08 2017-01-04 Carrier device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010249606A JP5606279B2 (ja) 2010-11-08 2010-11-08 搬送装置

Publications (3)

Publication Number Publication Date
JP2012101292A JP2012101292A (ja) 2012-05-31
JP2012101292A5 true JP2012101292A5 (https=) 2013-11-28
JP5606279B2 JP5606279B2 (ja) 2014-10-15

Family

ID=46050855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010249606A Active JP5606279B2 (ja) 2010-11-08 2010-11-08 搬送装置

Country Status (3)

Country Link
US (3) US9259841B2 (https=)
JP (1) JP5606279B2 (https=)
WO (1) WO2012063706A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5606279B2 (ja) * 2010-11-08 2014-10-15 株式会社ダイヘン 搬送装置
US20130272822A1 (en) * 2011-12-19 2013-10-17 Kabushiki Kaisha Yaskawa Denki Transfer robot
KR102402324B1 (ko) * 2014-01-28 2022-05-26 브룩스 오토메이션 인코퍼레이티드 기판 이송 장치
JP6339057B2 (ja) * 2015-09-29 2018-06-06 株式会社日立国際電気 基板処理装置、半導体装置の製造方法、プログラム
US10109517B1 (en) * 2018-01-10 2018-10-23 Lam Research Corporation Rotational indexer with additional rotational axes
KR102240925B1 (ko) * 2019-07-17 2021-04-15 세메스 주식회사 기판 처리 설비 및 기판 반송 장치
KR102348261B1 (ko) * 2021-05-31 2022-01-10 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇
KR102431664B1 (ko) * 2022-02-15 2022-08-12 (주) 티로보틱스 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204316A (ja) * 1992-12-28 1994-07-22 Mitsubishi Electric Corp 耐熱ロボットハンド
JPH1187463A (ja) * 1997-09-12 1999-03-30 Dainippon Screen Mfg Co Ltd 基板処理装置
US6499777B1 (en) * 1999-05-11 2002-12-31 Matrix Integrated Systems, Inc. End-effector with integrated cooling mechanism
JP3263684B2 (ja) 1999-07-26 2002-03-04 株式会社ジェーイーエル 基板搬送用ロボット
WO2006062183A1 (ja) * 2004-12-10 2006-06-15 Ulvac, Inc. 搬送ロボット及び搬送装置
JP4908306B2 (ja) * 2007-05-10 2012-04-04 株式会社ダイヘン 搬送装置
JP5189833B2 (ja) 2007-12-19 2013-04-24 株式会社ダイヘン 真空搬送装置
JP2010177411A (ja) 2009-01-29 2010-08-12 Daihen Corp ワーク搬送装置
KR20120127463A (ko) * 2010-01-22 2012-11-21 어플라이드 머티어리얼스, 인코포레이티드 기판 냉각을 수반하는 이송 로봇
JP5606279B2 (ja) * 2010-11-08 2014-10-15 株式会社ダイヘン 搬送装置

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