JP5601800B2 - 気化冷却装置 - Google Patents
気化冷却装置 Download PDFInfo
- Publication number
- JP5601800B2 JP5601800B2 JP2009167872A JP2009167872A JP5601800B2 JP 5601800 B2 JP5601800 B2 JP 5601800B2 JP 2009167872 A JP2009167872 A JP 2009167872A JP 2009167872 A JP2009167872 A JP 2009167872A JP 5601800 B2 JP5601800 B2 JP 5601800B2
- Authority
- JP
- Japan
- Prior art keywords
- heat exchange
- cooling water
- container
- supplied
- steam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000001816 cooling Methods 0.000 title claims description 14
- 239000000498 cooling water Substances 0.000 claims description 46
- 230000002093 peripheral effect Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
Description
2 熱交換面
5 冷却水供給管
6 吸引手段
10 吸込室
11 水エゼクタ
12 自動弁
13 液体エゼクタ
14 冷却水タンク
15 循環ポンプ
18 冷却水循環弁
24,25 供給口
Claims (1)
- 熱交換容器へ弁を介して冷却水を供給すると共に、前記熱交換容器の内部を減圧状態に維持する吸引手段を接続して、前記熱交換容器の熱交換面を冷却するものにおいて、
前記熱交換容器は、その側面が円筒状をなす円筒部で形成されるとともに、その上端面が水平状をなす前記熱交換面で形成されており、
前記円筒部の内部に設けられた供給口から、水平状の前記熱交換面の下表面に向けて、前記円筒部の内周壁の接線方向へ冷却水を噴射し、
前記冷却水が、前記吸引手段を介して循環することを特徴とする気化冷却装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009167872A JP5601800B2 (ja) | 2009-07-16 | 2009-07-16 | 気化冷却装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009167872A JP5601800B2 (ja) | 2009-07-16 | 2009-07-16 | 気化冷却装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011021831A JP2011021831A (ja) | 2011-02-03 |
JP5601800B2 true JP5601800B2 (ja) | 2014-10-08 |
Family
ID=43632064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009167872A Expired - Fee Related JP5601800B2 (ja) | 2009-07-16 | 2009-07-16 | 気化冷却装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5601800B2 (ja) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6369502A (ja) * | 1986-09-09 | 1988-03-29 | Kurita Water Ind Ltd | 抽出装置 |
JPH0537181Y2 (ja) * | 1989-09-14 | 1993-09-20 | ||
JPH0517575Y2 (ja) * | 1989-10-13 | 1993-05-11 | ||
JPH0728559Y2 (ja) * | 1989-12-22 | 1995-06-28 | 動力炉・核燃料開発事業団 | 溶融炉の流下ノズル |
JP2797906B2 (ja) * | 1993-06-28 | 1998-09-17 | 三菱自動車工業株式会社 | ワーク冷却装置 |
JP3486368B2 (ja) * | 1999-04-20 | 2004-01-13 | 有限会社ヰゲタ金属 | 飲料サーバ |
JP4202552B2 (ja) * | 1999-09-16 | 2008-12-24 | 株式会社テイエルブイ | 気化冷却装置 |
JP3814598B2 (ja) * | 2003-10-02 | 2006-08-30 | キヤノン株式会社 | 温度調整装置、露光装置及びデバイス製造方法 |
JP2006258318A (ja) * | 2005-03-15 | 2006-09-28 | Tlv Co Ltd | 気化冷却装置 |
JP2008122041A (ja) * | 2006-11-15 | 2008-05-29 | Tlv Co Ltd | 加熱冷却装置 |
JP2008261596A (ja) * | 2007-04-13 | 2008-10-30 | Tlv Co Ltd | 冷却ロール |
-
2009
- 2009-07-16 JP JP2009167872A patent/JP5601800B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2011021831A (ja) | 2011-02-03 |
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