JP5432588B2 - 気化冷却装置 - Google Patents
気化冷却装置 Download PDFInfo
- Publication number
- JP5432588B2 JP5432588B2 JP2009118597A JP2009118597A JP5432588B2 JP 5432588 B2 JP5432588 B2 JP 5432588B2 JP 2009118597 A JP2009118597 A JP 2009118597A JP 2009118597 A JP2009118597 A JP 2009118597A JP 5432588 B2 JP5432588 B2 JP 5432588B2
- Authority
- JP
- Japan
- Prior art keywords
- heat exchange
- cooling water
- compressed air
- exchange surface
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
2 熱交換面
5 冷却水供給管
6 吸引手段
10 吸込室
12 圧縮空気供給管
13 液体エゼクタ
14 冷却水タンク
15 循環ポンプ
24,25 供給口
Claims (1)
- 熱交換容器へ弁を介して冷却水を供給すると共に、前記熱交換容器の内部を減圧状態に維持する吸引手段を接続して、前記熱交換容器の被熱交換物を冷却するものにおいて、
前記熱交換容器の熱交換面を水平状に配置して、
前記熱交換面の下表面に対向して冷却水供給口と圧縮空気供給口とを設けて、
前記冷却水供給口と前記圧縮空気供給口とから交互に冷却水と圧縮空気とを、前記熱交換面の下表面に向けて噴射すること
を特徴とする気化冷却装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009118597A JP5432588B2 (ja) | 2009-05-15 | 2009-05-15 | 気化冷却装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009118597A JP5432588B2 (ja) | 2009-05-15 | 2009-05-15 | 気化冷却装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010266144A JP2010266144A (ja) | 2010-11-25 |
JP5432588B2 true JP5432588B2 (ja) | 2014-03-05 |
Family
ID=43363269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009118597A Expired - Fee Related JP5432588B2 (ja) | 2009-05-15 | 2009-05-15 | 気化冷却装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5432588B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103528261B (zh) * | 2013-10-15 | 2015-09-09 | 上海交通大学 | 一种非能动式有机物喷射制冷装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0517575Y2 (ja) * | 1989-10-13 | 1993-05-11 | ||
JP2517217Y2 (ja) * | 1990-12-14 | 1996-11-20 | 株式会社テイエルブイ | 減圧気化冷却装置 |
JP2681318B2 (ja) * | 1991-07-15 | 1997-11-26 | 株式会社テイエルブイ | 減圧気化冷却装置 |
JPH0596229A (ja) * | 1991-10-09 | 1993-04-20 | Fujitsu Ltd | スピン式樹脂液塗布方法 |
JP3170669B2 (ja) * | 1993-12-15 | 2001-05-28 | 株式会社テイエルブイ | 加熱冷却装置 |
JP2969209B2 (ja) * | 1993-12-15 | 1999-11-02 | 株式会社テイエルブイ | 減圧気化冷却装置 |
JP2000070796A (ja) * | 1998-08-31 | 2000-03-07 | Nkk Corp | 塗布膜厚制御方法及び装置 |
-
2009
- 2009-05-15 JP JP2009118597A patent/JP5432588B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2010266144A (ja) | 2010-11-25 |
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