JP5567812B2 - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
- Publication number
- JP5567812B2 JP5567812B2 JP2009235068A JP2009235068A JP5567812B2 JP 5567812 B2 JP5567812 B2 JP 5567812B2 JP 2009235068 A JP2009235068 A JP 2009235068A JP 2009235068 A JP2009235068 A JP 2009235068A JP 5567812 B2 JP5567812 B2 JP 5567812B2
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- seal portion
- resin
- furnace body
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0073—Seals
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009235068A JP5567812B2 (ja) | 2009-10-09 | 2009-10-09 | 熱処理装置 |
KR1020100019206A KR101624998B1 (ko) | 2009-10-09 | 2010-03-03 | 열처리장치 |
TW104134671A TWI542848B (zh) | 2009-10-09 | 2010-03-09 | 熱處理裝置 |
TW099106724A TWI510750B (zh) | 2009-10-09 | 2010-03-09 | 熱處理裝置 |
CN201010139610.1A CN102040339B (zh) | 2009-10-09 | 2010-03-26 | 热处理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009235068A JP5567812B2 (ja) | 2009-10-09 | 2009-10-09 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011080730A JP2011080730A (ja) | 2011-04-21 |
JP5567812B2 true JP5567812B2 (ja) | 2014-08-06 |
Family
ID=43906926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009235068A Expired - Fee Related JP5567812B2 (ja) | 2009-10-09 | 2009-10-09 | 熱処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5567812B2 (zh) |
KR (1) | KR101624998B1 (zh) |
CN (1) | CN102040339B (zh) |
TW (2) | TWI510750B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112815696B (zh) * | 2020-12-31 | 2022-12-27 | 重庆长江造型材料(集团)股份有限公司 | 卧式炉强制供风系统 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4891686U (zh) * | 1972-02-05 | 1973-11-02 | ||
JP2843471B2 (ja) * | 1992-12-16 | 1999-01-06 | 川崎重工業株式会社 | 真空処理炉における仕切扉の気密構造 |
JPH11281258A (ja) * | 1998-03-30 | 1999-10-15 | Kurimoto Ltd | 高温密封容器 |
JP3614748B2 (ja) * | 2000-03-08 | 2005-01-26 | 株式会社デンコー | 熱処理装置 |
JP3720784B2 (ja) * | 2002-03-20 | 2005-11-30 | 光洋サーモシステム株式会社 | 熱風循環式オーブン |
JP4102168B2 (ja) * | 2002-11-18 | 2008-06-18 | 新日本製鐵株式会社 | 炉内メンテナンス用開口部のシール構造 |
CN1303227C (zh) * | 2005-06-30 | 2007-03-07 | 上海交通大学 | 立式热处理生产线的工件密封转移装置 |
JP5074707B2 (ja) * | 2006-05-26 | 2012-11-14 | 光洋サーモシステム株式会社 | 加熱装置 |
CN201003064Y (zh) * | 2007-01-23 | 2008-01-09 | 包头铝业股份有限公司 | 前墙无冷却的均质炉炉门密封系统 |
JP5569999B2 (ja) * | 2008-10-10 | 2014-08-13 | 光洋サーモシステム株式会社 | 熱処理装置 |
-
2009
- 2009-10-09 JP JP2009235068A patent/JP5567812B2/ja not_active Expired - Fee Related
-
2010
- 2010-03-03 KR KR1020100019206A patent/KR101624998B1/ko active IP Right Grant
- 2010-03-09 TW TW099106724A patent/TWI510750B/zh not_active IP Right Cessation
- 2010-03-09 TW TW104134671A patent/TWI542848B/zh not_active IP Right Cessation
- 2010-03-26 CN CN201010139610.1A patent/CN102040339B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR20110039169A (ko) | 2011-04-15 |
TWI542848B (zh) | 2016-07-21 |
CN102040339A (zh) | 2011-05-04 |
CN102040339B (zh) | 2015-11-25 |
TW201610382A (zh) | 2016-03-16 |
KR101624998B1 (ko) | 2016-05-27 |
TWI510750B (zh) | 2015-12-01 |
JP2011080730A (ja) | 2011-04-21 |
TW201113490A (en) | 2011-04-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8349085B2 (en) | Substrate processing apparatus | |
JP2021503716A (ja) | 高圧蒸気アニール処理装置 | |
TW200823439A (en) | Temperature measuring device | |
JP5567812B2 (ja) | 熱処理装置 | |
WO2005041284A1 (ja) | 縦型熱処理装置 | |
KR100970044B1 (ko) | 가열 조리기 | |
WO2007148657A1 (ja) | 弁体部及びゲートバルブ装置 | |
JP5569999B2 (ja) | 熱処理装置 | |
WO2004055419A1 (ja) | 蓋体装置及び真空容器装置 | |
CN111312621B (zh) | 处理腔室以及基板处理装置 | |
JP4432728B2 (ja) | 真空処理装置 | |
JP7417042B2 (ja) | インキュベータ | |
KR20140034028A (ko) | 열처리 장치 | |
JP5082885B2 (ja) | 水平多関節ロボットおよびそれを備えた製造装置 | |
KR101396603B1 (ko) | 기판 처리 장치 | |
CN111312622A (zh) | 处理腔室以及基板处理装置 | |
JP2013061081A (ja) | 熱処理装置 | |
KR100730743B1 (ko) | 기판 베이킹 장치 | |
KR101663262B1 (ko) | 열처리오븐의 셔터장치 | |
JP4354371B2 (ja) | 金属材料の表面改質熱処理装置 | |
JP2007027599A (ja) | 半導体製造装置及び半導体装置の製造方法 | |
CN207351213U (zh) | 一种高温真空保持器及带真空功能的箱式炉 | |
JP2005249276A (ja) | クリーンオーブン | |
JP2000021799A (ja) | 枚葉式熱処理装置 | |
CN115938977A (zh) | 基板处理装置、处理容器、半导体器件的制造方法及记录介质 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120913 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140114 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140225 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140617 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140620 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5567812 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |