201113490 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種藉由在搬入和排出例如液晶面板用玻 璃基板等工件時進行開閉的門而構成將爐體之爐口進行氣 密式封閉之熱處理裝置。 【先前技術】 在熱處理裝置中，為了將爐體内部之溫度分佈保持在所希 望之狀態，最重要是提高爐體之密封性。習知為了提高爐體 之密封性，而存在一種在構成爐體開口部的爐口周圍及爐蓋 分別δ又置雄封構件之熱處理裝置。 可是，由於爐口周圍處於高溫狀態，因此密封構件會硬化 而產生摩耗，而容易產生粉塵，其結果會產生壚内潔淨性降 低之問題。 因此，在習知熱處理裝置中，係採用一種提高密封構件之 耐熱性而防止密封構件之粉塵之技術（例如，參照日本專利 第3614748號）。該技術係如圖1所示，在爐體12 口周 圍設置金屬製密封構件130,藉由使設於門200之密封部 壓接於該密封構件130，而維持爐體12及門2〇〇之門之广 密性。具體而言，圖1係採用使構成為被覆具有耐熱性及彈 性的支撐構件142的耐熱樹脂片144壓接於金屬製密封構件 130之構成。 然而’在上述日本專利第3614748號技術中， 會有 門200 099106724 4 201113490 側擋板之強度降低、平面度變差和重量增加之不良情況。原 本較佳是將擋板保持於適當強度及平面度，並使其輕量化， 但在上述專利文獻1之技術中，由於採用將耐熱樹脂片144 設置在轉動門200等複雜之構成，因此容易產生擋板強度降 低、平面度變差和重量增加之問題。 此外，密封構件130(金屬）和耐熱樹脂片144之硬度有很 大差異’且由於密封構件130和耐熱樹脂片144之接觸面積 小’使摩耗速度變快，其結果在密封構件13〇和耐熱樹脂片 144之間容易產生粉塵。 另一方面’在圖1所示之構成中，即使單純將爐體12之 金屬製密封構件130置換成樹脂製密封構件，該樹脂製密封 構件亦θ因爐内產生之氣體而發生腐^虫，或受熱而硬化等， 結果亦難以長時間維持爐口和門之間的氣密性。 【發明内容】 本發明之目的在於提供一種熱處理裝置，可使門侧擋板之 構成簡單化’並且可有效防止保持爐口和門之間氣密性的密 封件產生粉塵’ JL可長時間維持爐口和門之間的氣密性。 本發明之熱處理裝置具備有爐齡門。舰構成為收容欲 進灯熱處理之X件，其具有用於搬人及㈣工件之爐口。 又，於該爐體設置有包圍爐口之第β封部。 Η具有配置在與第1密封部相對應位置處之第2密封部， 透過第1密封部及第2密封部，而構成為可氣密封閉上述爐 099106724 201113490 口 ° 第1密封部具備有：第1樹脂構件，具有絕熱性及彈性； 及樹脂片，具有耐熱性，構成上覆蓋第丨樹脂構件。關於第 1樹脂構件材料之例’可列舉出發泡維東合成橡膠(viton)或 氟合成橡膠(fluoroelastomer)。又，樹脂片為具優異耐藥品 性和耐使用溫度之物質’且較佳為摩擦係數低且滑動性好， 關於其材料之例’例如可列舉出聚四氟乙烯等氟樹脂 (fluororesin)、或聚醯亞胺。 又’第2密封部具備有具耐熱性之板狀第2樹脂構件。關 於第2樹脂構件之構成例，可列舉出由聚四氟乙烯等氟樹脂 所構成之樹脂塊(block)。 在以上構成中，在爐體側設置由硬度比金屬等低之樹脂材 料所構成的第1密封部，在門側亦設置由樹脂材料所構成之 第2密封部’因此爐體和門之間的密封件難以產生摩耗。 又’由於第二密封部呈板狀，因此會與構成第1密封部的 樹脂片形成面接觸，可增加接觸面積。更進一步，由於可將 樹脂片穩定地固定於爐體，因此樹脂片不會因門之動作而發 生變位’可將作用在樹脂月之摩擦等外力作用抑制於必要之 最小限度。 又’由於設置在爐體側的第丨樹脂構件由樹脂片所覆蓋， 因此可防止第1樹脂構件因爐内產生之氣體而發生腐勉、因 受熱而硬化之情況。更進一步，由於係在爐體側而非門側配 099106724 6 201113490 置樹脂片，因此可使門側之擋板構成簡單化，可提高擋板之 平面度及使其輕量化。 根據本發明，可使門側擋板之構成簡單化，可有效地防止 保持爐口和門之間的氣密性之密封件產生粉塵之情況，且可 長時間維持爐口和門之間的氣密性。 【實施方式】 圖2為表示本發明實施形態單片式潔淨燒結爐之多層式 IR (紅外線輻射）爐10概略之圖。在以下實施形態中，以 IR爐10作為本發明熱處理裝置例來說明，但本發明之適用 範圍不受限於使用紅外線加熱器者，亦可將本發明適用於熱 風循環加熱方式或加熱板加熱方式等其他加熱方式之熱處 理裝置。 如圖2所示，IR爐10上部具有收容欲進行熱處理工件15 之爐體12。本實施形態中，係使用液晶顯示器用玻璃基板 而作為工件15，但工件15例不受限於此。在爐體12下方 配置有收納有IR爐10之驅動系統基板和控制系統基板的控 制部16。控制部16構成上總括控制IR爐10之動作。 在爐體12内部設置有多層配置之多個熱處理部14。各熱 處理部14具有構成上在設定溫度下對工件15進行加熱之加 熱器單元18。又，如圖3A〜圖3C所示，在各熱處理部14 之前側設置有構成為當工件15通過時則進行開閉之門20 ' 門20被多個設置在與各熱處理部14相對應之位置處，在將 099106724 7 201113490 ^'件從對應之熱處 工件搬入於對應之熱處理部14時、及將 理部14搬出時’其構成上呈現開放狀。 如圖3B所示’門20具備有擋板26、主始加Λ 一 忙木22和驅動單 凡28。擋板26構成為阻斷爐體π内部與外部之 曾[Technical Field] The present invention relates to a gas-tight sealing of a furnace mouth of a furnace body by opening and closing a door when a workpiece such as a glass substrate for a liquid crystal panel is carried in and discharged. Heat treatment device. [Prior Art] In the heat treatment apparatus, in order to maintain the temperature distribution inside the furnace body in a desired state, it is most important to improve the sealing property of the furnace body. Conventionally, in order to improve the sealing property of the furnace body, there is a heat treatment apparatus which is disposed around the furnace opening constituting the opening of the furnace body and the furnace cover is respectively δ and the male sealing member. However, since the periphery of the furnace mouth is in a high temperature state, the sealing member is hardened to cause wear and is likely to generate dust, and as a result, there is a problem that the cleanliness of the crucible is lowered. Therefore, in the conventional heat treatment apparatus, a technique for improving the heat resistance of the sealing member to prevent the dust of the sealing member is employed (for example, refer to Japanese Patent No. 3614748). This technique is as shown in Fig. 1. A metal sealing member 130 is provided around the mouth of the furnace body 12, and the furnace body 12 and the door 2 are maintained by pressing the sealing portion provided on the door 200 against the sealing member 130. The wideness of the door. Specifically, Fig. 1 is a configuration in which a heat-resistant resin sheet 144 configured to cover a support member 142 having heat resistance and elasticity is pressed against the metal sealing member 130. However, in the technique of the above-mentioned Japanese Patent No. 3614748, there is a problem that the strength of the side baffle of the door 200 099106724 4 201113490 is lowered, the flatness is deteriorated, and the weight is increased. In the technique of the above Patent Document 1, since the heat-resistant resin sheet 144 is provided in the complicated structure such as the rotary door 200, it is easy to use it. There is a problem that the strength of the baffle is lowered, the flatness is deteriorated, and the weight is increased. Further, the hardness of the sealing member 130 (metal) and the heat-resistant resin sheet 144 is greatly different 'and the contact area of the sealing member 130 and the heat-resistant resin sheet 144 is small', the wear speed is made faster, and the result is that the sealing member 13 is heat-resistant. Dust is easily generated between the resin sheets 144. On the other hand, in the configuration shown in Fig. 1, even if the metal sealing member 130 of the furnace body 12 is simply replaced with a resin sealing member, the resin sealing member θ is rotted by the gas generated in the furnace. , or hardened by heat, etc., as a result, it is difficult to maintain the airtightness between the mouth and the door for a long time. SUMMARY OF THE INVENTION An object of the present invention is to provide a heat treatment apparatus which can simplify the constitution of a door side shutter and can effectively prevent dust from being generated in a seal which maintains airtightness between a furnace mouth and a door. Air tightness between the furnace mouth and the door. The heat treatment apparatus of the present invention is provided with a furnace door. The ship is configured to contain an X-piece for heat treatment of the lamp, which has a mouth for carrying and (4) the workpiece. Further, the furnace body is provided with a seventh sealing portion surrounding the furnace opening. The second sealing portion disposed at a position corresponding to the first sealing portion passes through the first sealing portion and the second sealing portion, and is configured to hermetically seal the furnace 099106724 201113490. The first sealing portion is provided with: The first resin member has heat insulating properties and elasticity, and a resin sheet having heat resistance and covering the second resin member. The example of the material of the first resin member is exemplified by a foamed Weidong synthetic rubber (viton) or a fluoroelastomer (fluoroelastomer). In addition, the resin sheet is a material having excellent chemical resistance and temperature resistance, and it is preferable that the friction coefficient is low and the slidability is good. Examples of the material thereof include, for example, a fluororesin such as polytetrafluoroethylene. Or polyimine. Further, the second sealing portion is provided with a plate-shaped second resin member having heat resistance. The resin block composed of a fluororesin such as polytetrafluoroethylene is exemplified as a configuration example of the second resin member. In the above configuration, the first sealing portion made of a resin material having a hardness lower than that of metal or the like is provided on the furnace body side, and the second sealing portion made of a resin material is also provided on the door side. Therefore, between the furnace body and the door The seal is difficult to produce wear. Further, since the second sealing portion has a plate shape, it faces the resin sheet forming surface constituting the first sealing portion, and the contact area can be increased. Further, since the resin sheet can be stably fixed to the furnace body, the resin sheet is not displaced by the action of the door, and the external force acting on the resin month friction can be suppressed to the minimum necessary. Further, since the second resin member provided on the furnace body side is covered with the resin sheet, it is possible to prevent the first resin member from being corroded by the gas generated in the furnace and hardened by heat. Furthermore, since the resin sheet is placed on the side of the furnace rather than the door, 099106724 6 201113490, the baffle of the door side can be simplified, and the flatness of the baffle can be improved and the weight can be reduced. According to the present invention, the configuration of the door side baffle can be simplified, the dust of the seal which maintains the airtightness between the furnace mouth and the door can be effectively prevented, and the gap between the mouth and the door can be maintained for a long time. Air tightness. [Embodiment] FIG. 2 is a schematic view showing a multilayer IR (infrared radiation) furnace 10 of a one-piece type clean sintering furnace according to an embodiment of the present invention. In the following embodiments, the IR furnace 10 is described as an example of the heat treatment apparatus of the present invention. However, the scope of application of the present invention is not limited to the use of an infrared heater, and the present invention can also be applied to a hot air circulation heating method or a heating plate heating. A heat treatment device of other heating methods such as a method. As shown in FIG. 2, the upper portion of the IR furnace 10 has a furnace body 12 for housing the workpiece 15 to be heat-treated. In the present embodiment, the glass substrate for liquid crystal display is used as the workpiece 15, but the workpiece 15 is not limited thereto. Below the furnace body 12, a control unit 16 that houses the drive system substrate of the IR furnace 10 and the control system substrate is disposed. The control unit 16 is configured to collectively control the operation of the IR furnace 10. A plurality of heat treatment portions 14 arranged in a plurality of layers are disposed inside the furnace body 12. Each heat treatment unit 14 has a heater unit 18 configured to heat the workpiece 15 at a set temperature. Further, as shown in FIG. 3A to FIG. 3C, a door 20' which is configured to open and close when the workpiece 15 passes is provided on the front side of each heat treatment portion 14, and a plurality of doors 20 are provided at positions corresponding to the respective heat treatment portions 14. At the time of loading 099106724 7 201113490 ^'s pieces from the corresponding heat-receiving workpiece into the corresponding heat-treating portion 14, and when the rational part 14 is carried out, the structure is open. As shown in Fig. 3B, the door 20 is provided with a shutter 26, a main starter, a busy wood 22, and a drive unit 28. The baffle 26 is configured to block the inside and the outside of the furnace body π.
主框架22構成為支持擋板26，其具有 熱傳V A 乐門2〇強度之功 能。此處，擋板26之構成係採用具有鋼 瑕製容器、及收納 在上述容器内部之陶瓷纖維製絕熱材料之構成，主王加 材料則採用鋁，但擋板26及主框架22之材+4 王十 ，動早凡28透過連接件24而固定於主框架22。又，驅 動單元28構成如圖3C所示，透過臂285而連接在主框架 22,同時旋轉驅動水準方向所配置之旋轉軸28〇。旋轉轴28〇 支持在設於開口部附近既定位置處所配置門支持體282之 軸承284，其經由聯軸器286而與旋轉致動器288相連接。 该構成中，如圖3Β所示，使旋轉致動器288旋轉約90度， 而進行門20之開閉動作。但是，此處說明之構成不過表示 驅動單元28構成之一例’驅動單元28之構成不受限於圖 3C所示之構成。 接著，使用圖4說明爐體12和門20之間的密封件。在擋 板26及爐體12之間介設配置環狀第1密封部40及環狀第 2密封部30 〇此處，第2密封部30由樹脂塊32所構成。樹 脂塊32藉由螺絲等於可更換之狀態下安裝在擋板26。關於 樹脂塊32材料之例，例如可列舉出聚四氟乙烯等氟樹脂。 099106724 201113490 其中，樹脂塊32對應於本發明之第二樹脂構件。 第一密封部40具備有支撐構件42、樹脂片44和壓片板 金46。支撐構件42被配置在爐體12外側開口部周圍所形 成之環狀擋板密封件收容溝122。關於支撐構件42材料之 例，可列舉出發泡維東合成橡膠或氟合成橡膠（耐熱溫度均 在230°C左右），但不受限於此。又，此處支撐構件42對應 於本發明之第一樹脂構件。 樹脂片44被配置為遮蓋支撐構件42。關於樹脂片44材 料之例，可列舉出聚醯亞胺（耐熱溫度在250°C左右），但 不受限於此。壓片板金46透過固定件而固定在爐體12，以 在擋板密封件收容溝122兩側將樹脂片44固定於爐體12。 關於壓片板金46材料之例，可列舉出不銹鋼（例如與爐體 12之鋼材相同），但不受限於此。 根據以上構成，藉由將包括樹脂片44之第1密封部40 安裝於爐體12侧，而可使門20側擋板26之構成簡單化， 因此可提高擋板26之平面度，又可提高擋板26之強度，更 可使撞板26輕量化。 又，樹脂塊32係使用硬度比金屬低之耐熱樹脂材料，且 由於使樹脂塊32與樹脂片44面接觸，而可明顯降低樹脂片 44和樹脂塊32之間的摩擦。結果可抑制粉塵產生，且可延 長維護週期。更進一步，樹脂片44係被配置為固定在爐體 ΓThe main frame 22 is constructed to support the baffle 26, which has the function of heat transfer of the V 2 key. Here, the baffle 26 is constructed by a steel crucible container and a ceramic fiber heat insulating material housed inside the container. The main material is aluminum, but the baffle 26 and the main frame 22 are + 4 Wang Shi, moving 28 is fixed to the main frame 22 through the connecting member 24. Further, as shown in Fig. 3C, the driving unit 28 is connected to the main frame 22 via the arm 285, and rotationally drives the rotating shaft 28A disposed in the horizontal direction. The rotary shaft 28A supports a bearing 284 of the door support body 282 disposed at a predetermined position near the opening, which is coupled to the rotary actuator 288 via the coupling 286. In this configuration, as shown in FIG. 3A, the rotary actuator 288 is rotated by about 90 degrees to open and close the door 20. However, the configuration described here is merely an example of the configuration of the drive unit 28. The configuration of the drive unit 28 is not limited to the configuration shown in Fig. 3C. Next, the seal between the furnace body 12 and the door 20 will be described using FIG. An annular first sealing portion 40 and an annular second sealing portion 30 are disposed between the baffle plate 26 and the furnace body 12. Here, the second sealing portion 30 is composed of a resin block 32. The tree block 32 is mounted to the baffle 26 by means of a screw equal to the replaceable state. Examples of the material of the resin block 32 include a fluororesin such as polytetrafluoroethylene. 099106724 201113490 wherein the resin block 32 corresponds to the second resin member of the present invention. The first seal portion 40 is provided with a support member 42, a resin sheet 44, and a sheet metal 46. The support member 42 is disposed in the annular baffle seal receiving groove 122 formed around the opening portion outside the furnace body 12. Examples of the material of the support member 42 include a foamed Weidong synthetic rubber or a fluorine synthetic rubber (the heat resistance temperature is about 230 ° C), but are not limited thereto. Further, the support member 42 here corresponds to the first resin member of the present invention. The resin sheet 44 is configured to cover the support member 42. The resin sheet 44 is exemplified by a polyimide (the heat resistance temperature is about 250 ° C), but is not limited thereto. The sheet metal 46 is fixed to the furnace body 12 through a fixing member to fix the resin sheet 44 to the furnace body 12 on both sides of the shutter seal receiving groove 122. Examples of the material of the sheet metal 46 include stainless steel (for example, the same as the steel of the furnace body 12), but are not limited thereto. According to the above configuration, since the first sealing portion 40 including the resin sheet 44 is attached to the furnace body 12 side, the structure of the door 20 side shutter 26 can be simplified, and the flatness of the shutter 26 can be improved. The strength of the baffle 26 is increased, and the striker 26 can be made lighter. Further, the resin block 32 is made of a heat resistant resin material having a hardness lower than that of the metal, and since the resin block 32 is brought into surface contact with the resin sheet 44, the friction between the resin sheet 44 and the resin block 32 can be remarkably reduced. As a result, dust generation can be suppressed and the maintenance cycle can be extended. Further, the resin sheet 44 is configured to be fixed to the furnace body.
L 12側而非不穩定門20侧之狀態，因此當維護樹脂片44及 099106724 9 201113490 支撐構件42時可提高作業性。 在上述實施形態中，係說明提高單片式潔淨燒結爐中潔淨 度、良率、維護週期、及維護作業性之例，但本發明除單片 式潔淨燒結爐外，在適用於連續爐等之情況下亦可得到同樣 的作用及效果。 上述實施形態說明全部僅為例示性，而非用於限制本發明 之範圍。本發明之範圍係由申請專利範圍而非上述實施形態 來界定。更進一步，本發明之範圍涵蓋與申請專利範圍均等 之意涵及範圍内之所有變更。 【圖式簡單說明】 圖1為表不習知熱處理裝置概略構成例之圖。 圖2為表示本發明實施形態IR爐概略構成之圖。 圖3A至圖3C為表示IR爐所使用門之構成例之圖。 圖4為表示爐體及門之間之密封件構成例之圖。 【主要元件符號說明】 10 IR爐 12 爐體 14 熱處理部 15 工件 16 控制部 18 加熱器單元 20 門 099106724 10 201113490 22 主框架 24 連接件 26 擋板 28 驅動單元 30 第2密封部 32 樹脂塊 40 第1密封部 42 支撐構件 44 樹脂片 46 壓片板金 122 環狀擋板密封件收容溝 130 密封構件 140 密封部 142 支撐構件 144 而才熱樹脂片 200 門 280 旋轉轴 282 門支持體 284 轴承 285 臂 286 聯轴器 288 旋轉致動器 099106724 11The L 12 side is not in the state of the unstable door 20 side, so workability can be improved when the resin sheet 44 and the 099106724 9 201113490 support member 42 are maintained. In the above embodiment, an example in which the cleanliness, the yield, the maintenance period, and the maintenance workability in the one-piece clean sintering furnace are improved is described. However, the present invention is applicable to a continuous furnace or the like in addition to the one-piece type clean sintering furnace. The same effect and effect can be obtained in the case. The above embodiments are all illustrative only and are not intended to limit the scope of the invention. The scope of the invention is defined by the scope of the claims rather than the embodiments described above. Further, the scope of the present invention is intended to cover all modifications within the scope and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing a schematic configuration example of a conventional heat treatment apparatus. Fig. 2 is a view showing a schematic configuration of an IR furnace according to an embodiment of the present invention. 3A to 3C are views showing a configuration example of a door used in an IR furnace. Fig. 4 is a view showing an example of a configuration of a seal between a furnace body and a door. [Main component symbol description] 10 IR furnace 12 Furnace body 14 Heat treatment section 15 Workpiece 16 Control section 18 Heater unit 20 Door 099106724 10 201113490 22 Main frame 24 Connector 26 Baffle 28 Drive unit 30 2nd sealing part 32 Resin block 40 First sealing portion 42 Support member 44 Resin sheet 46 Press sheet metal 122 Annular shutter seal receiving groove 130 Sealing member 140 Sealing portion 142 Supporting member 144 Only heat resin sheet 200 Door 280 Rotary shaft 282 Door support body 284 Bearing 285 Arm 286 Coupling 288 Rotary Actuator 099106724 11