JP3720784B2 - Hot air circulation oven - Google Patents

Hot air circulation oven Download PDF

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Publication number
JP3720784B2
JP3720784B2 JP2002078804A JP2002078804A JP3720784B2 JP 3720784 B2 JP3720784 B2 JP 3720784B2 JP 2002078804 A JP2002078804 A JP 2002078804A JP 2002078804 A JP2002078804 A JP 2002078804A JP 3720784 B2 JP3720784 B2 JP 3720784B2
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JP
Japan
Prior art keywords
furnace
furnace body
gap
purge gas
hot air
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Expired - Lifetime
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JP2002078804A
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Japanese (ja)
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JP2003279045A (en
Inventor
伸治 南
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Koyo Thermo Systems Co Ltd
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Koyo Thermo Systems Co Ltd
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Description

【0001】
【発明の属する技術分野】
本発明は、セラミックス材料の脱バインダー処理等の熱処理を行う熱風循環式オーブンに関する。
【0002】
【従来の技術及び発明が解決しようとする課題】
熱風循環式オーブンには、ヒータによって加熱したイナート(不活性)ガスを熱風として用いて、例えばセラミックス材料の脱バインダー処理を行うイナートガスオーブンがある。このようなイナートガスオーブンでは、上記セラミックス材料等の被処理物を炉体本体内に配置するとともに、その炉体本体に設けられた炉口を炉口扉によって閉じた状態で高温度(max600℃)としたイナートガスを炉体本体内で循環させることにより、被処理物に熱処理を施している。
【0003】
ところが、上記のような従来のイナートガスオーブンでは、炉口扉で炉口を閉じたときに当該扉と炉体本体との間に形成される隙間の内部に、炉体本体の内部を循環している高温のイナートガスが流れ込み、このイナートガスが上記隙間を囲む炉口扉の表面や炉体本体の表面などと接触することにより冷却されることがあった。この結果、バインダー等の昇華物がイナートガスから析出し、上記隙間を囲む炉口扉の表面などに付着するという問題を生じた。
【0004】
上記のような従来の問題点に鑑み、本発明は、熱風が炉体本体と炉口扉との間の隙間に流入するのを阻止することができ、よってその隙間を囲む炉口扉の表面などに熱風に含まれた昇華物が付着するのを防ぐことができる熱風循環式オーブンを提供することを目的とする。
【0005】
【課題を解決するための手段】
本発明は、炉体本体と、この炉体本体に設けられた炉口を開閉する炉口扉と、前記炉体本体の内部に設けられた加熱槽とを備え、前記炉体本体の内部を循環させた熱風により前記加熱槽内の被処理物を加熱する熱風循環式オーブンであって、前記炉口扉が前記炉口を閉じたときに当該炉口扉と前記炉体本体との間に形成され、かつ前記炉体本体の内部と連通する隙間に対し、当該隙間への前記熱風の流入を阻止する所定のパージガスを導入するパージガス導入手段を設け、前記パージガス導入手段が前記パージガスを前記隙間の内部に供給することにより前記隙間の内圧が前記加熱槽の内圧よりも高くされており、前記パージガス導入手段は前記加熱槽内に配置された供給管を有することを特徴とするものである(請求項1)。
【0006】
上記のように構成された熱風循環式オーブンでは、パージガス導入手段が上記隙間に対して所定のパージガスを導入することにより、炉体本体内部の熱風が当該隙間の内部に流入するのを阻止することができる。
【0007】
また、上記熱風循環式オーブン(請求項1)において、前記炉体本体及び前記炉口扉のいずれか一方に取り付けられ、炉口扉が前記炉口を閉じたときに前記隙間内で前記炉体本体及び前記炉口扉のいずれか他方の表面と接触し前記炉体本体の内部をシールするシール部材を備えることが好ましい。この場合、上記パージガス導入手段によって隙間内に導入されたパージガスがその隙間内への上記熱風の流入を阻止して、シール部材及びこれに接触する炉体本体の各表面が熱風に曝されるのを防ぐことができるとともに、当該シール部材により炉体本体の内部を確実に密封することができる。
【0008】
【発明の実施の形態】
以下、本発明の熱風循環式オーブンの好ましい実施形態について、図面を参照しながら説明する。尚、以下の説明では、炉体内部でイナートガスを加熱し循環させるイナートガスオーブンに適用した場合を例示して説明する。
図1は、本発明の一実施形態に係るイナートガスオーブンの要部構成を示す水平断面図である。図において、本実施形態のイナートガスオーブンは、断面略コ字状に形成された炉体本体1と、上記略コ字状の開口部側に形成された矩形状の炉口Aを開閉する炉口扉2とを備えている。また、このオーブンには、上記炉口扉2によって炉口Aを閉じたときに当該扉2と炉体本体1との間に形成される枠状の隙間Bに対し、当該隙間Bへの熱風の流入を阻止するN2ガス等の所定のパージガスを導入するパージガス導入手段としての吹き出し管3及び供給管4が設けられている。上記炉体本体1には、供給口及び排気口(図示せず)が設けられており、炉口扉2によって炉口Aを閉じたときに当該本体内部の空気をアルゴンガス等のイナートガスと置換する。また、炉体本体1及び炉口扉2の内部にはそれぞれ断熱材5が取り付けられている。
【0009】
上記炉体本体1の内部には、左右の縁6a,6bを有する平板状の仕切部材6が設けられており、この仕切部材6の下方に図示を省略したヒータ及びシロッコファン等が配置されている。また、仕切部材6の上方空間はセラミックス材料等の被処理物が配置される加熱槽Cを形成している。この加熱槽Cの図の右側には仕切部材6の下方から上方にイナートガスが流れる吹き出し風洞部Dが形成されている。また、加熱槽Cの左側には仕切部材6の上方から下方にイナートガスが流れる吸い込み風洞部Eが設けられており、上記ヒータで加熱したイナートガスをシロッコファンにより図の矢印P、Q、及びRにて示す方向に順次流すことにより、オーブンは加熱槽C内の被処理物に対して脱バインダー処理等の熱処理を行うようになっている。
【0010】
上記炉口扉2は、図の左端部に設けられたヒンジ部2aを介して炉体本体1に取り付けられたものであり、当該ヒンジ部2aを中心として図の時計回り方向に取っ手部2b側を回動させることによって炉口Aを開いて、被処理物を加熱槽C内に搬入出するようになっている。
また、この炉口扉2の内側表面2cには、グラファイトパッキン7が枠状に取り付けられており、当該パッキン7が炉体本体1の内側表面1aと接することで上記隙間Bの本体1側の開口部を閉いでイナートガスが加熱槽Cから隙間B側に流れ込むのを抑えている(図2も参照)。
【0011】
上記吹き出し管3は、例えば角筒形のパイプにより構成されたものであり、炉口Aを囲むように上記内側表面1aに枠状に固定されている。また、この吹き出し管3には、図2に示すように、隙間Bに向かってパージガスを吹き出すための吹き出し孔3aが所定間隔で複数設けられており、図2(a)の矢印x方向にパージガスを流している。
上記供給管4は、例えば円筒形のパイプにより構成されたものであり、上記吹き出し管3に炉体外部からパージガスを供給する。詳細には、供給管4は、パージガスの供給源に接続され、炉体本体1を気密に貫通した状態で当該本体1に取り付けられた貫通部分4aと、この貫通部分4aから左右に分岐し加熱槽C内に配置された分岐部分4b,4cとを有している。これら分岐部分4b,4cの先端部は略直角に曲げられており、上記グラファイトパッキン7のU字状の切欠部7a(図2(b))を挿通して、上記枠状の吹き出し管3に対し左右2箇所でそれぞれ連結されている。これらの吹き出し管3及び供給管4がパージガスを隙間Bの内部に供給することにより、隙間Bの内圧を加熱槽Cの内圧よりも高くしている。
【0012】
また、上記炉口扉2には、図2(a)に示すように、シール部材としてのシリコンパッキン8が設けられており、当該パッキン8が炉口Aが閉じられたときに隙間B内で炉体本体1側に設けられた接触面1bと接触することで炉体本体1の内部を密封している。また、上記接触面1bの裏側には、冷却水が循環する冷却管10が熱伝導促進材9により覆われた状態で設けられており、シリコンパッキン8をその許容温度以下に冷却して劣化の発生を抑えている。
【0013】
上記のように構成された本実施形態のイナートガスオーブンでは、吹き出し管3及び供給管4(パージガス導入手段)がパージガスを隙間Bの内部に供給することにより、隙間Bの内圧を加熱槽Cの内圧よりも高くしているので、加熱槽C内を循環する高温のイナートガスが隙間Bの内部に流れ込むのを防ぐことができる。この結果、高温のイナートガスが隙間Bを囲む炉口扉2及び炉体本体1の各内側表面2c,1aなどと接触して冷却されるのを防ぐことができ、従ってそのイナートガスからバインダー等の昇華物が析出し内側表面2c,1aなどに付着するのを防止することができる。また、上記内側表面2c,1aで昇華物の付着を生じないことから、上記従来例と異なり、付着した昇華物を拭き取り除去するクリーンアップ作業を省略することができる。その結果、オーブンのメンテナンス作業を簡単に、しかもその実施間隔を長くして行うことができ、かつ長期間にわたって当該オーブンの性能を維持することができる。さらに、昇華物が付着しないので、例えば扉開閉時に付着した昇華物が剥離し炉体本体1の内部に侵入することがなく、その炉体本体1内の被処理物が昇華物で汚染されるのを防ぐことができ、よって被処理物の処理品質の低下を防止することができる。
【0014】
また、本実施形態では、高温のイナートガスが隙間Bの内部に流れ込むのを防ぐことができるので、その隙間B内で上記冷却水により適切に冷却されているシリコンパッキン8及びその接触面1bが高温のイナートガスに曝されるのを防いで、シリコンパッキン8及び接触面1bに昇華物が付着するのを効果的に防止することができるとともに、当該パッキン8により炉体本体1の内部を確実に密封することができる。この結果、シリコンパッキン8の劣化を極力抑えてその寿命を向上することができ、長期間にわたってオーブンのシール性の低下及びこれに起因する被処理物の処理品質の低下を防ぐことができる。また、炉体本体1の内部を確実に密封することができるので、外部へのパージガスの漏洩を防ぐことができる。
【0015】
尚、上記の説明では、イナートガスを炉体内部で循環させるイナートガスオーブンに適用した場合について説明したが、本発明はこれに限定されるものではなく、水蒸気を含むウェットガスや他の化学成分を含む雰囲気ガスを循環させて被処理物を熱処理する熱風循環式オーブンに適用することができる。また、上記の説明では、上記炉口Aを囲むように内側表面1aに枠状に固定された吹き出し管3を用いた構成について説明したが、本発明は炉口扉が炉口を閉じたときに当該炉口扉と炉体本体との間に形成され、かつ炉体本体の内部と連通する隙間に対し、所定のパージガスを導入するパージガス導入手段を設けて、その隙間の内部に炉体本体内の熱風が流入するのを阻止できる構成であればよく、上記供給管4から隙間Bに向かってパージガスを吹き出させて吹き出し管3を省略した構成でもよい
【0016】
また、上記の説明では、図2(a)の矢印x方向にパージガスを流す構成について説明したが、本発明はこれに限定されるものではなく、炉体本体1の接触面1bの近傍に吹き出し管を設けて、x方向の逆向きの方向にパージガスを流す構成でもよい。
また、上記の説明では、シリコンパッキン8を炉口扉2の内側に設けた構成について説明したが、本発明はこれに限定されるものではなく、炉口扉2の内側に接するようシール部材を上記接触面1bに取り付け、炉体本体1の内部を当該部材により密封してもよい。
【0017】
【発明の効果】
以上のように構成された本発明は以下の効果を奏する。
請求項1の熱風循環式オーブンによれば、炉体本体と炉口扉との間の上記隙間の内部に、その炉体本体内部の熱風が流入するのを阻止することができるので、その熱風に含まれた昇華物が隙間を囲む炉口扉の表面などに付着するのを防止することができる。この結果、オーブンのメンテナンス作業を簡単に行うことができるとともに、長期間にわたって性能を維持することができる長寿命なオーブンを構成することができる。
【0018】
また、上述した熱風循環式オーブンによれば、シール部材及びこれに接触する炉体本体の各表面が熱風に曝されるのを防ぐことができるので、上記昇華物がシール部材及び炉体本体の各表面に付着するのを効果的に防ぐことができ、かつ当該シール部材により炉体本体1の内部を確実に密封することができる。この結果、長期間にわたってシール部材の劣化、並びにオーブンのシール性及び被処理物の処理品質の低下を抑制することができ、しかもパージガスの外部への漏洩を防ぐことができる。
【図面の簡単な説明】
【図1】本発明の一実施形態に係るイナートガスオーブンの要部構成を示す水平断面図である。
【図2】(a)は図1の円IIにて囲んだ部分の拡大断面図であり、(b)は図1に示した吹き出し管と供給管との連結部分を示す拡大斜視図である。
【符号の説明】
1 炉体本体
1b 接触面(炉体本体の表面)
2 炉口扉
3 吹き出し管(パージガス導入手段)
4 供給管(パージガス導入手段)
8 シリコンパッキン(シール部材)
A 炉口
B 隙間
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a hot air circulation oven that performs a heat treatment such as a binder removal treatment of a ceramic material.
[0002]
[Prior art and problems to be solved by the invention]
As the hot air circulation type oven, there is an inert gas oven in which, for example, an inert gas heated by a heater is used as hot air to perform a binder removal treatment of a ceramic material. In such an inert gas oven, the processing object such as the ceramic material is disposed in the furnace body main body, and the furnace port provided in the furnace body main body is closed by the furnace port door at a high temperature (max. 600 ° C.). The inert gas is circulated in the furnace body to heat treat the object.
[0003]
However, in the conventional inert gas oven as described above, the interior of the furnace body is circulated inside the gap formed between the door and the furnace body when the furnace mouth is closed by the furnace door. In some cases, a high temperature inert gas flows and the inert gas comes into contact with the surface of the furnace door, the surface of the furnace body, or the like surrounding the gap. As a result, sublimates such as a binder were precipitated from the inert gas and caused a problem that they adhered to the surface of the furnace door surrounding the gap.
[0004]
In view of the conventional problems as described above, the present invention can prevent hot air from flowing into the gap between the furnace body and the furnace port door, and thus the surface of the furnace port door surrounding the gap. An object of the present invention is to provide a hot air circulation type oven capable of preventing the sublimate contained in the hot air from adhering to the above.
[0005]
[Means for Solving the Problems]
The present invention comprises a furnace body, a furnace door that opens and closes a furnace opening provided in the furnace body, and a heating tank provided in the furnace body. A hot air circulation type oven that heats an object to be processed in the heating tank by circulating hot air, and the furnace port door is closed between the furnace port door and the furnace body body when the furnace port door is closed. A purge gas introducing means for introducing a predetermined purge gas that prevents the hot air from flowing into the gap is provided in the gap that is formed and communicates with the interior of the furnace body, and the purge gas introducing means removes the purge gas from the gap. The internal pressure of the gap is made higher than the internal pressure of the heating tank by supplying the gas into the inside of the heating tank, and the purge gas introducing means has a supply pipe arranged in the heating tank ( Claim 1).
[0006]
In the hot air circulation oven configured as described above, the purge gas introduction means introduces a predetermined purge gas into the gap, thereby preventing the hot air inside the furnace body from flowing into the gap. Can do.
[0007]
Further, in the hot-air circulating oven (Claim 1), the furnace body is attached to one of the furnace body main body and the furnace port door, and the furnace body is opened in the gap when the furnace port door closes the furnace port. it is not preferable with a sealing member for sealing the interior of the furnace body in contact with the body and the other one of the surface of the furnace outlet door. In this case, the purge gas introduced into the gap by the purge gas introduction means prevents the hot air from flowing into the gap, and the seal member and each surface of the furnace body main body in contact with the hot air are exposed to the hot air. Can be prevented, and the interior of the furnace body can be reliably sealed by the seal member.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, preferred embodiments of the hot-air circulating oven of the present invention will be described with reference to the drawings. In addition, in the following description, the case where it applies to the inert gas oven which heats and circulates inert gas inside a furnace body is illustrated and demonstrated.
FIG. 1 is a horizontal cross-sectional view showing the main configuration of an inert gas oven according to an embodiment of the present invention. In the figure, the inert gas oven of the present embodiment includes a furnace body 1 having a substantially U-shaped cross section and a furnace port A for opening and closing a rectangular furnace port A formed on the substantially U-shaped opening side. And a door 2. The oven has a hot air flow to the gap B against a frame-like gap B formed between the door 2 and the furnace body 1 when the furnace port A is closed by the furnace door 2. A blow-out pipe 3 and a supply pipe 4 are provided as purge gas introduction means for introducing a predetermined purge gas such as N 2 gas that prevents the inflow of N 2 . The furnace body 1 is provided with a supply port and an exhaust port (not shown). When the furnace port A is closed by the furnace port door 2, the air inside the body is replaced with an inert gas such as argon gas. To do. Moreover, the heat insulating material 5 is attached to the inside of the furnace body main body 1 and the furnace port door 2, respectively.
[0009]
A flat partition member 6 having left and right edges 6 a and 6 b is provided inside the furnace body 1, and a heater and a sirocco fan (not shown) are disposed below the partition member 6. Yes. In addition, a space above the partition member 6 forms a heating tank C in which an object to be processed such as a ceramic material is disposed. On the right side of the figure of the heating tank C, a blow-out wind tunnel portion D through which inert gas flows from below to above the partition member 6 is formed. In addition, a suction wind tunnel E through which inert gas flows from the upper side to the lower side of the partition member 6 is provided on the left side of the heating tank C. The inert gas heated by the heater is sirocco faned to arrows P, Q, and R in the figure. By sequentially flowing in the direction shown, the oven performs a heat treatment such as a debinding process on the object in the heating tank C.
[0010]
The furnace door 2 is attached to the furnace body 1 through a hinge 2a provided at the left end of the figure, and the handle 2b side in the clockwise direction of the figure around the hinge 2a. Is rotated to open the furnace port A, and the workpiece is carried into and out of the heating tank C.
Further, a graphite packing 7 is attached to the inner surface 2 c of the furnace door 2 in a frame shape, and the packing 7 comes into contact with the inner surface 1 a of the furnace body 1 so that the gap B is closer to the body 1 side. The opening is closed to prevent the inert gas from flowing into the gap B from the heating tank C (see also FIG. 2).
[0011]
The blow-out pipe 3 is constituted by, for example, a rectangular tube, and is fixed to the inner surface 1a in a frame shape so as to surround the furnace port A. In addition, as shown in FIG. 2, the blowing pipe 3 is provided with a plurality of blowing holes 3a for blowing purge gas toward the gap B at a predetermined interval, and the purge gas is arranged in the direction of the arrow x in FIG. Is flowing.
The supply pipe 4 is constituted by, for example, a cylindrical pipe, and supplies purge gas to the blowing pipe 3 from the outside of the furnace body. Specifically, the supply pipe 4 is connected to a purge gas supply source, and penetrates the furnace body 1 in an airtight manner. The penetration part 4a is attached to the body 1 and is branched from the penetration part 4a to the left and right to be heated. It has the branch parts 4b and 4c arrange | positioned in the tank C. FIG. The leading ends of these branch portions 4b and 4c are bent at a substantially right angle, and are inserted into the U-shaped notch 7a (FIG. 2B) of the graphite packing 7 into the frame-shaped blowing tube 3. On the other hand, they are connected at two places on the left and right. These blowing pipe 3 and supply pipe 4 supply the purge gas into the gap B, whereby the internal pressure of the gap B is made higher than the internal pressure of the heating tank C.
[0012]
Further, as shown in FIG. 2A, the furnace door 2 is provided with a silicon packing 8 as a seal member, and when the packing 8 is closed in the gap B when the furnace port A is closed. The inside of the furnace body 1 is sealed by contacting the contact surface 1b provided on the furnace body 1 side. Further, on the back side of the contact surface 1b, a cooling pipe 10 through which cooling water circulates is provided in a state of being covered with a heat conduction promoting material 9, and the silicon packing 8 is cooled below its allowable temperature and deteriorated. Occurrence is suppressed.
[0013]
In the inert gas oven of the present embodiment configured as described above, the blowout pipe 3 and the supply pipe 4 (purge gas introducing means) supply the purge gas into the gap B, whereby the internal pressure of the gap B is set to the internal pressure of the heating tank C. Therefore, the high temperature inert gas circulating in the heating tank C can be prevented from flowing into the gap B. As a result, it is possible to prevent the high temperature inert gas from being cooled by coming into contact with the furnace door 2 surrounding the gap B and the inner surfaces 2c, 1a of the furnace body 1 and so on, and thus sublimating the binder from the inert gas. It is possible to prevent the matter from depositing and adhering to the inner surfaces 2c and 1a. Further, since the sublimate does not adhere to the inner surfaces 2c and 1a, unlike the conventional example, it is possible to omit the cleanup work for wiping and removing the attached sublimate. As a result, the maintenance work of the oven can be performed easily and with a longer interval, and the performance of the oven can be maintained over a long period of time. Further, since the sublimate does not adhere, for example, the sublimate attached when the door is opened and closed does not peel off and enter the inside of the furnace body 1, and the object to be processed in the furnace body 1 is contaminated with the sublimate. Therefore, it is possible to prevent a reduction in processing quality of the object to be processed.
[0014]
Moreover, in this embodiment, since high temperature inert gas can be prevented from flowing into the inside of the gap B, the silicon packing 8 and its contact surface 1b that are appropriately cooled by the cooling water in the gap B are heated at a high temperature. It is possible to effectively prevent the sublimate from adhering to the silicon packing 8 and the contact surface 1b and to securely seal the interior of the furnace body 1 with the packing 8. can do. As a result, it is possible to suppress the deterioration of the silicon packing 8 as much as possible to improve its life, and to prevent the deterioration of the sealing performance of the oven and the deterioration of the processing quality of the object to be processed due to this. Moreover, since the inside of the furnace body 1 can be reliably sealed, leakage of the purge gas to the outside can be prevented.
[0015]
In the above description, the case where the inert gas oven is used to circulate the inert gas inside the furnace body has been described. However, the present invention is not limited to this, and includes a wet gas containing water vapor and other chemical components. The present invention can be applied to a hot air circulation type oven that heats an object to be processed by circulating an atmosphere gas. In the above description, the structure using the blowing pipe 3 fixed to the inner surface 1a in a frame shape so as to surround the furnace port A has been described. However, the present invention provides a case where the furnace port door closes the furnace port. And a purge gas introduction means for introducing a predetermined purge gas into a gap formed between the furnace door and the furnace body main body and communicating with the interior of the furnace body main body, and the furnace body main body within the gap. Any configuration may be used as long as it can prevent the hot air from flowing in, and the purge tube may be blown out from the supply pipe 4 toward the gap B so that the blow-out pipe 3 is omitted .
[0016]
Further, in the above description, the configuration in which the purge gas flows in the direction of the arrow x in FIG. 2A has been described, but the present invention is not limited to this, and the blowout is performed near the contact surface 1b of the furnace body 1. A configuration in which a purge gas is allowed to flow in a direction opposite to the x direction may be provided by providing a pipe.
In the above description, the configuration in which the silicon packing 8 is provided inside the furnace port door 2 has been described. However, the present invention is not limited to this, and a sealing member is provided so as to contact the inside of the furnace port door 2. You may attach to the said contact surface 1b and seal the inside of the furnace main body 1 with the said member.
[0017]
【The invention's effect】
The present invention configured as described above has the following effects.
According to the hot air circulation type oven of claim 1, since the hot air inside the furnace body can be prevented from flowing into the gap between the furnace body and the furnace door, the hot air Can be prevented from adhering to the surface of the furnace door surrounding the gap. As a result, an oven maintenance operation can be easily performed, and a long-life oven that can maintain performance over a long period of time can be configured.
[0018]
Moreover, according to the hot-air circulation type oven described above , each surface of the sealing member and the furnace body main body in contact with the sealing member can be prevented from being exposed to hot air. Adhering to each surface can be effectively prevented, and the interior of the furnace body 1 can be reliably sealed by the sealing member. As a result, it is possible to suppress the deterioration of the sealing member and the deterioration of the sealing performance of the oven and the processing quality of the object to be processed over a long period of time, and it is possible to prevent the purge gas from leaking to the outside.
[Brief description of the drawings]
FIG. 1 is a horizontal cross-sectional view showing a main configuration of an inert gas oven according to an embodiment of the present invention.
2A is an enlarged cross-sectional view of a portion surrounded by a circle II in FIG. 1, and FIG. 2B is an enlarged perspective view showing a connection portion between a blowing pipe and a supply pipe shown in FIG. .
[Explanation of symbols]
1 furnace body 1b contact surface (surface of furnace body)
2 Furnace door 3 Blowout pipe (purge gas introduction means)
4 Supply pipe (purge gas introduction means)
8 Silicon packing (seal member)
A Furnace B B Clearance

Claims (1)

炉体本体と、この炉体本体に設けられた炉口を開閉する炉口扉と、前記炉体本体の内部に設けられた加熱槽とを備え、前記炉体本体の内部を循環させた熱風により前記加熱槽内の被処理物を加熱する熱風循環式オーブンであって、前記炉口扉が前記炉口を閉じたときに当該炉口扉と前記炉体本体との間に形成され、かつ前記炉体本体の内部と連通する隙間に対し、当該隙間への前記熱風の流入を阻止する所定のパージガスを導入するパージガス導入手段を設け、前記パージガス導入手段が前記パージガスを前記隙間の内部に供給することにより前記隙間の内圧が前記加熱槽の内圧よりも高くされており、前記パージガス導入手段は前記加熱槽内に配置された供給管を有することを特徴とする熱風循環式オーブン。A hot air comprising a furnace body, a furnace door that opens and closes the furnace mouth provided in the furnace body, and a heating tank provided in the furnace body, and circulated through the furnace body. A hot-air circulating oven that heats an object to be processed in the heating tank , and is formed between the furnace port door and the furnace body body when the furnace port door closes the furnace port, and Purge gas introduction means for introducing a predetermined purge gas for preventing the flow of the hot air into the gap is provided for the gap communicating with the interior of the furnace body, and the purge gas introduction means supplies the purge gas to the inside of the gap. Thus, the internal pressure of the gap is made higher than the internal pressure of the heating tank, and the purge gas introducing means has a supply pipe arranged in the heating tank .
JP2002078804A 2002-03-20 2002-03-20 Hot air circulation oven Expired - Lifetime JP3720784B2 (en)

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JP5567812B2 (en) * 2009-10-09 2014-08-06 光洋サーモシステム株式会社 Heat treatment equipment

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