JP5558243B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5558243B2 JP5558243B2 JP2010164368A JP2010164368A JP5558243B2 JP 5558243 B2 JP5558243 B2 JP 5558243B2 JP 2010164368 A JP2010164368 A JP 2010164368A JP 2010164368 A JP2010164368 A JP 2010164368A JP 5558243 B2 JP5558243 B2 JP 5558243B2
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- 239000004065 semiconductor Substances 0.000 title claims description 134
- 238000009792 diffusion process Methods 0.000 claims description 180
- 239000000758 substrate Substances 0.000 claims description 95
- 239000012535 impurity Substances 0.000 claims description 60
- 238000002955 isolation Methods 0.000 claims description 26
- 239000010410 layer Substances 0.000 description 210
- 238000005468 ion implantation Methods 0.000 description 71
- 238000000034 method Methods 0.000 description 48
- 238000004519 manufacturing process Methods 0.000 description 30
- 229910004298 SiO 2 Inorganic materials 0.000 description 26
- 230000001133 acceleration Effects 0.000 description 18
- 238000000926 separation method Methods 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 15
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 14
- 150000002500 ions Chemical class 0.000 description 14
- 229920005591 polysilicon Polymers 0.000 description 14
- 239000013078 crystal Substances 0.000 description 13
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 11
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 10
- 229910052796 boron Inorganic materials 0.000 description 10
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000002347 injection Methods 0.000 description 7
- 239000007924 injection Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 239000000654 additive Substances 0.000 description 5
- 230000000996 additive effect Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- -1 205a is formed Chemical compound 0.000 description 3
- 230000005465 channeling Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 108091006146 Channels Proteins 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011960 computer-aided design Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/735—Lateral transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76237—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials introducing impurities in trench side or bottom walls, e.g. for forming channel stoppers or alter isolation behavior
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0821—Collector regions of bipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/73—Bipolar junction transistors
- H01L29/732—Vertical transistors
- H01L29/7322—Vertical transistors having emitter-base and base-collector junctions leaving at the same surface of the body, e.g. planar transistor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
Description
θty≧tan-1[(21/2・W)/(t+d)] (式4)
10 p型半導体基板
11 ディープトレンチ
12 シャロートレンチ
21 第1のn型コレクタ拡散層
22 第2のn型コレクタ拡散層
23 n型外部コレクタ拡散層
30 p型チャネルストッパ層
41 トレンチ側壁SiO2膜
42 トレンチ内部ポリシリコン膜
50 n型拡散層
61 p型ベース拡散層
62 p型外部ベース拡散層
70 SiO2膜
80 n型エミッタ拡散層
90 表面絶縁膜
101 エミッタ電極
102 ベース電極
103 コレクタ電極
110 絶縁膜
Claims (4)
- 第1の導電型の半導体基板と、
前記半導体基板に形成され、前記第1の導電型とは逆の導電型である第2の導電型の不純物がドープされた、バイポーラトランジスタのコレクタ領域として機能する第1の拡散層と、
前記第1の拡散層を囲むように前記半導体基板に形成された、素子分離領域を構成する溝と、
前記溝の下方に形成され、前記第1の導電型の不純物がドープされた第2の拡散層と、
前記溝の側壁と前記第1の拡散層との間において、前記溝の側部のみに形成され、前記第2の導電型の不純物がドープされた、バイポーラトランジスタのコレクタ領域として機能する第3の拡散層と、を有し、
前記第3の拡散層の不純物濃度は、前記第1の拡散層の不純物濃度よりも高く、
前記第3の拡散層において、前記第1の拡散層近傍の領域での不純物濃度は、前記溝の側壁近傍の領域での不純物濃度よりも高い
半導体装置。 - 前記第3の拡散層は、前記溝の側壁において、前記半導体基板と前記第1の拡散層との境界部分から上の位置に形成される
請求項1に記載の半導体装置。 - 前記第3の拡散層は、前記溝の側部から斜め下方に向かって形成される
請求項1または2に記載の半導体装置。 - 前記第1の導電型がp型であり、
前記第2の導電型がn型であり、
さらに、前記第1の拡散層の上に形成されたp型ベース領域を有し、
前記半導体装置は、縦型NPNバイポーラトランジスタである
請求項1〜3のいずれか1項に記載の半導体装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010164368A JP5558243B2 (ja) | 2010-07-21 | 2010-07-21 | 半導体装置 |
PCT/JP2011/003560 WO2012011225A1 (ja) | 2010-07-21 | 2011-06-22 | 半導体装置及びその製造方法 |
US13/725,163 US8710621B2 (en) | 2010-07-21 | 2012-12-21 | Bipolar transistor with diffused layer between deep trench sidewall and collector diffused layer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010164368A JP5558243B2 (ja) | 2010-07-21 | 2010-07-21 | 半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012028474A JP2012028474A (ja) | 2012-02-09 |
JP2012028474A5 JP2012028474A5 (ja) | 2013-05-09 |
JP5558243B2 true JP5558243B2 (ja) | 2014-07-23 |
Family
ID=45496663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010164368A Expired - Fee Related JP5558243B2 (ja) | 2010-07-21 | 2010-07-21 | 半導体装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8710621B2 (ja) |
JP (1) | JP5558243B2 (ja) |
WO (1) | WO2012011225A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9406710B2 (en) * | 2013-11-11 | 2016-08-02 | United Microelectronics Corp. | Semiconductor device and manufacturing method of the same |
KR102209097B1 (ko) | 2014-02-27 | 2021-01-28 | 삼성전자주식회사 | 이미지 센서 및 이의 제조 방법 |
KR102571242B1 (ko) * | 2016-07-11 | 2023-08-25 | 삼성디스플레이 주식회사 | 고경도 플라스틱 기판 및 이를 포함하는 표시장치 |
CN108109913B (zh) * | 2017-12-18 | 2021-08-31 | 深圳市晶特智造科技有限公司 | 双极晶体管的制作方法 |
CN108063161A (zh) * | 2017-12-18 | 2018-05-22 | 深圳市晶特智造科技有限公司 | 双极晶体管及其制作方法 |
JP7084735B2 (ja) * | 2018-01-31 | 2022-06-15 | キヤノン株式会社 | 半導体装置の製造方法 |
US11887981B2 (en) * | 2019-10-22 | 2024-01-30 | Semiconductor Components Industries, Llc | Lateral surge protection devices |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60241230A (ja) * | 1984-05-16 | 1985-11-30 | Hitachi Micro Comput Eng Ltd | 半導体装置 |
USH204H (en) | 1984-11-29 | 1987-02-03 | At&T Bell Laboratories | Method for implanting the sidewalls of isolation trenches |
US4711017A (en) * | 1986-03-03 | 1987-12-08 | Trw Inc. | Formation of buried diffusion devices |
JPS62279666A (ja) | 1986-05-28 | 1987-12-04 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JPS645064A (en) * | 1987-06-26 | 1989-01-10 | Nec Corp | Semiconductor integrated circuit device |
JPH01286356A (ja) * | 1988-05-11 | 1989-11-17 | Nec Corp | 半導体集積回路 |
JP2733271B2 (ja) | 1988-12-23 | 1998-03-30 | シャープ株式会社 | 半導体装置の製造方法 |
JPH02283028A (ja) * | 1988-12-23 | 1990-11-20 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JPH0461346A (ja) * | 1990-06-29 | 1992-02-27 | Mitsubishi Electric Corp | バイポーラ型半導体集積回路装置の製造方法 |
JP3207561B2 (ja) * | 1992-11-05 | 2001-09-10 | 株式会社東芝 | 半導体集積回路およびその製造方法 |
JPH07263371A (ja) * | 1994-03-18 | 1995-10-13 | Nissan Motor Co Ltd | 不純物導入法 |
JP4139105B2 (ja) | 2001-12-20 | 2008-08-27 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
US7791139B2 (en) * | 2007-07-27 | 2010-09-07 | Infineon Technologies Austria Ag | Integrated circuit including a semiconductor assembly in thin-SOI technology |
-
2010
- 2010-07-21 JP JP2010164368A patent/JP5558243B2/ja not_active Expired - Fee Related
-
2011
- 2011-06-22 WO PCT/JP2011/003560 patent/WO2012011225A1/ja active Application Filing
-
2012
- 2012-12-21 US US13/725,163 patent/US8710621B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US8710621B2 (en) | 2014-04-29 |
US20130134550A1 (en) | 2013-05-30 |
WO2012011225A1 (ja) | 2012-01-26 |
JP2012028474A (ja) | 2012-02-09 |
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