JP5549629B2 - 発光素子 - Google Patents
発光素子 Download PDFInfo
- Publication number
- JP5549629B2 JP5549629B2 JP2011074972A JP2011074972A JP5549629B2 JP 5549629 B2 JP5549629 B2 JP 5549629B2 JP 2011074972 A JP2011074972 A JP 2011074972A JP 2011074972 A JP2011074972 A JP 2011074972A JP 5549629 B2 JP5549629 B2 JP 5549629B2
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- layer
- electrode
- opening
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010410 layer Substances 0.000 claims description 227
- 239000004065 semiconductor Substances 0.000 claims description 112
- 239000002346 layers by function Substances 0.000 claims description 45
- 239000000758 substrate Substances 0.000 claims description 35
- 238000002955 isolation Methods 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 239000000463 material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 6
- 239000007772 electrode material Substances 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229960001296 zinc oxide Drugs 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011074972A JP5549629B2 (ja) | 2011-03-30 | 2011-03-30 | 発光素子 |
KR1020120003765A KR101220130B1 (ko) | 2011-03-30 | 2012-01-12 | 발광소자 |
TW101109417A TWI456809B (zh) | 2011-03-30 | 2012-03-20 | 發光元件 |
CN201210074692.5A CN102738343B (zh) | 2011-03-30 | 2012-03-20 | 发光元件 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011074972A JP5549629B2 (ja) | 2011-03-30 | 2011-03-30 | 発光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012209475A JP2012209475A (ja) | 2012-10-25 |
JP5549629B2 true JP5549629B2 (ja) | 2014-07-16 |
Family
ID=46993479
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011074972A Active JP5549629B2 (ja) | 2011-03-30 | 2011-03-30 | 発光素子 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5549629B2 (ko) |
KR (1) | KR101220130B1 (ko) |
CN (1) | CN102738343B (ko) |
TW (1) | TWI456809B (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101418760B1 (ko) * | 2013-01-28 | 2014-07-11 | 실리콘 디스플레이 (주) | 투명 지문인식 센서 어레이 |
KR102091844B1 (ko) * | 2013-07-02 | 2020-04-14 | 서울바이오시스 주식회사 | 정전방전에 강한 발광 다이오드 칩 및 그것을 갖는 발광 다이오드 패키지 |
KR102070088B1 (ko) * | 2013-06-17 | 2020-01-29 | 삼성전자주식회사 | 반도체 발광소자 |
JP2016009817A (ja) * | 2014-06-26 | 2016-01-18 | 京セラ株式会社 | 発光素子 |
JP5893699B1 (ja) * | 2014-09-25 | 2016-03-23 | 泰谷光電科技股▲ふん▼有限公司 | 発光ダイオードの透明導電層構成 |
CN105789400B (zh) * | 2016-03-14 | 2018-08-14 | 聚灿光电科技股份有限公司 | 一种并联结构的led芯片及其制造方法 |
US10505092B2 (en) * | 2017-01-24 | 2019-12-10 | Epistar Corporation | Light-emitting diode device |
US11329097B2 (en) | 2017-03-27 | 2022-05-10 | Suzhou Lekin Semiconductor Co., Ltd. | Semiconductor device having a first pad not overlapping first connection electrodes and a second pad not overlapping second connection electrodes in a thickness direction |
KR102392866B1 (ko) * | 2017-03-27 | 2022-05-02 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 반도체 소자 |
KR102381866B1 (ko) * | 2017-05-02 | 2022-04-04 | 서울바이오시스 주식회사 | 자외선 발광 다이오드 |
US10784407B2 (en) * | 2018-04-23 | 2020-09-22 | Asahi Kasei Kabushiki Kaisha | Nitride semiconductor light emitting element and nitride semiconductor light emitting device |
KR102556280B1 (ko) | 2018-07-05 | 2023-07-17 | 엘지전자 주식회사 | 반도체 발광 소자를 이용한 램프 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW448589B (en) * | 2000-07-14 | 2001-08-01 | United Epitaxy Co Ltd | Semiconductor light emitting device |
JP4069936B2 (ja) * | 2002-05-27 | 2008-04-02 | 日亜化学工業株式会社 | 窒化物半導体発光素子、発光素子、素子積層体、並びにそれらを用いた発光装置 |
JP4572604B2 (ja) * | 2003-06-30 | 2010-11-04 | 日亜化学工業株式会社 | 半導体発光素子及びそれを用いた発光装置 |
JP4977957B2 (ja) | 2004-03-29 | 2012-07-18 | 日亜化学工業株式会社 | 半導体発光素子 |
KR100616693B1 (ko) * | 2005-08-09 | 2006-08-28 | 삼성전기주식회사 | 질화물 반도체 발광 소자 |
KR100765075B1 (ko) * | 2006-03-26 | 2007-10-09 | 엘지이노텍 주식회사 | 질화물 반도체 발광 소자 및 그 제조방법 |
CN102779918B (zh) * | 2007-02-01 | 2015-09-02 | 日亚化学工业株式会社 | 半导体发光元件 |
CN201191612Y (zh) * | 2008-02-28 | 2009-02-04 | 陈朝春 | 一种具有保护功能的防静电发光二极管 |
KR101020910B1 (ko) * | 2008-12-24 | 2011-03-09 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
KR20100087466A (ko) * | 2009-01-28 | 2010-08-05 | 삼성엘이디 주식회사 | 발광다이오드 소자 및 이의 제조방법 |
JP5614938B2 (ja) * | 2009-02-26 | 2014-10-29 | 日亜化学工業株式会社 | 半導体発光素子 |
KR100999806B1 (ko) * | 2009-05-21 | 2010-12-08 | 엘지이노텍 주식회사 | 반도체 발광소자 및 그 제조방법 |
-
2011
- 2011-03-30 JP JP2011074972A patent/JP5549629B2/ja active Active
-
2012
- 2012-01-12 KR KR1020120003765A patent/KR101220130B1/ko not_active IP Right Cessation
- 2012-03-20 TW TW101109417A patent/TWI456809B/zh active
- 2012-03-20 CN CN201210074692.5A patent/CN102738343B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TW201242119A (en) | 2012-10-16 |
KR20120111960A (ko) | 2012-10-11 |
KR101220130B1 (ko) | 2013-01-11 |
CN102738343A (zh) | 2012-10-17 |
CN102738343B (zh) | 2015-07-01 |
TWI456809B (zh) | 2014-10-11 |
JP2012209475A (ja) | 2012-10-25 |
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