JP5544061B2 - 基板支持体及びその製造方法 - Google Patents
基板支持体及びその製造方法 Download PDFInfo
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- JP5544061B2 JP5544061B2 JP2008006487A JP2008006487A JP5544061B2 JP 5544061 B2 JP5544061 B2 JP 5544061B2 JP 2008006487 A JP2008006487 A JP 2008006487A JP 2008006487 A JP2008006487 A JP 2008006487A JP 5544061 B2 JP5544061 B2 JP 5544061B2
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- 239000000758 substrate Substances 0.000 title claims description 60
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000002245 particle Substances 0.000 claims description 49
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 37
- 229910052782 aluminium Inorganic materials 0.000 claims description 37
- 238000010438 heat treatment Methods 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 29
- 241001016380 Reseda luteola Species 0.000 claims description 21
- 238000005266 casting Methods 0.000 claims description 14
- 239000010936 titanium Substances 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000003466 welding Methods 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 5
- IRPGOXJVTQTAAN-UHFFFAOYSA-N 2,2,3,3,3-pentafluoropropanal Chemical compound FC(F)(F)C(F)(F)C=O IRPGOXJVTQTAAN-UHFFFAOYSA-N 0.000 description 14
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminum fluoride Inorganic materials F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 14
- 239000010408 film Substances 0.000 description 12
- 229910017077 AlFx Inorganic materials 0.000 description 10
- 230000007547 defect Effects 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 238000005242 forging Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 210000001503 joint Anatomy 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 239000013529 heat transfer fluid Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000005482 strain hardening Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
- Resistance Heating (AREA)
Description
本発明の実施形態は、一般的には、高温半導体プロセスシステム(semiconductor processing system)における使用に適しているアルミニウム基板支持体(aluminum substrate support)に関する。
集積回路は、1つのチップ上に数百万個のトランジスタ、キャパシタ、及び抵抗器を含むことのできる複雑なデバイスにまで発展した。チップ設計の発展のためには、より高速な回路と、より高い回路密度とがつねに要求され、従ってますます正確な製造プロセスが求められている。化学気相成長法(CVD)は、頻繁に使用される製造プロセスの1つである。
従って、この技術分野には、化学気相成長法の工程における使用に適している改良された加熱型支持体のニーズが存在している。
オプションのステップ506においては、本体、脚部、それらの選択された表面、のうちの1つ以上を表面処理する(texturing)ことができる。1つの実施形態においては、本体の上面を表面処理する。
Claims (17)
- 半導体プロセスシステムに使用される基板支持体であって、
250μm未満の平均粒径を有するアルミニウム本体と、
前記本体に埋め込まれている加熱素子と、
完全溶け込み重ね溶接継手によって前記本体の底部に結合されている脚部とを備えている基板支持体。 - 前記加熱素子が前記脚部の中に延びているリード線を更に備えている請求項1に記載の基板支持体。
- 前記本体を貫いて形成されているリフトピン穴に配置されているセラミックガイドを更に備えている請求項1に記載の基板支持体。
- 前記本体が粒径改良材料を更に備えている請求項1に記載の基板支持体。
- 前記本体がチタン粒径改良材料を更に備えている請求項1に記載の基板支持体。
- 前記本体が0.03〜0.1重量パーセントの間のチタン粒径改良材料を更に備えている請求項1に記載の基板支持体。
- 前記本体が鋳造され又は鍛造される請求項1に記載の基板支持体。
- 半導体プロセスシステムに使用される基板支持体であって、
250μm未満の平均粒径を有する圧延アルミニウム本体と、
前記本体内に配置されている加熱素子と、
脚部であって、前記脚部の取付フランジの端部に形成され、完全溶け込み重ね溶接継手によって前記本体の底部に結合されている脚部とを備えている基板支持体。 - 前記本体が機械加工されている溝を有する6061−T651鍛造板状素材を更に備えており、
前記加熱素子が前記溝に配置されている請求項8に記載の基板支持体。 - 半導体プロセスシステムに使用される基板支持体を製造する方法であって、
250μm未満の平均粒径を有するアルミニウム本体を選択するステップであって、前記本体が中央の止まり穴を有する上面と、反対側の底面とを有する前記ステップと、
管状の脚部を前記本体の前記底面に形成されているくぼみの中に重ね溶接するステップであって、前記脚部のリップは溶接ルート部を形成するための犠牲下地を形成し、前記本体内に配置されている加熱素子のリード線が前記管の中に延びている前記ステップとを含む方法。 - 前記選択するステップが、
250μmより大きい平均粒径を有する本体を含む、複数の鍛造された本体から、250μm未満の平均粒径を有する鍛造された本体を選択するステップを更に含む請求項10に記載の方法。 - 前記本体を鋳造するステップを更に含む請求項10に記載の方法。
- 鋳造するステップが、
粒径改良材料を含むアルミニウム材料から前記本体を鋳造するステップを更に含む請求項12に記載の方法。 - 鋳造するステップが、
チタン粒径改良材料を含むアルミニウム材料から前記本体を鋳造するステップを更に含む請求項12に記載の方法。 - 鋳造するステップが、
0.03〜0.1重量パーセントの間のチタン粒径改良材料を含むアルミニウム材料から前記本体を鋳造するステップを更に含む請求項12に記載の方法。 - 前記本体を形成するための圧延アルミニウム板に、前記加熱素子を受け入れるように構成されている溝を形成するステップを更に含む請求項10に記載の方法。
- 前記本体を形成するための6061−T651鍛造アルミニウム板状素材に、前記加熱素子を受け入れるように構成されている溝を形成するステップを更に含む請求項10に記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US88562207P | 2007-01-18 | 2007-01-18 | |
US88561207P | 2007-01-18 | 2007-01-18 | |
US60/885,622 | 2007-01-18 | ||
US60/885,612 | 2007-01-18 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008177572A JP2008177572A (ja) | 2008-07-31 |
JP2008177572A5 JP2008177572A5 (ja) | 2013-10-03 |
JP5544061B2 true JP5544061B2 (ja) | 2014-07-09 |
Family
ID=39183077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008006487A Active JP5544061B2 (ja) | 2007-01-18 | 2008-01-16 | 基板支持体及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1947689A3 (ja) |
JP (1) | JP5544061B2 (ja) |
KR (1) | KR101059060B1 (ja) |
SG (1) | SG144830A1 (ja) |
TW (1) | TWI478214B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102278081B1 (ko) * | 2019-06-27 | 2021-07-19 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06326081A (ja) * | 1993-05-17 | 1994-11-25 | Fuji Electric Co Ltd | 乾式薄膜加工装置用加熱装置 |
JP3746878B2 (ja) * | 1997-07-23 | 2006-02-15 | 株式会社神戸製鋼所 | ガス耐食性とプラズマ耐食性に優れるアルマイト皮膜形成性および耐熱性に優れた半導体製造装置用Al合金および半導体製造装置用材料 |
JP4627392B2 (ja) * | 2001-09-26 | 2011-02-09 | 株式会社アルバック | 真空処理装置および真空処理方法 |
US7048814B2 (en) * | 2002-02-08 | 2006-05-23 | Applied Materials, Inc. | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus |
JP4010170B2 (ja) * | 2002-04-11 | 2007-11-21 | ソニー株式会社 | 光電変換素子の製造方法 |
JP4008401B2 (ja) * | 2003-09-22 | 2007-11-14 | 日本碍子株式会社 | 基板載置台の製造方法 |
JP2005109169A (ja) * | 2003-09-30 | 2005-04-21 | Ngk Insulators Ltd | 基板加熱装置とその製造方法 |
JP4133958B2 (ja) * | 2004-08-04 | 2008-08-13 | 日本発条株式会社 | ワークを加熱または冷却するための装置と、その製造方法 |
US20060075970A1 (en) * | 2004-10-13 | 2006-04-13 | Guenther Rolf A | Heated substrate support and method of fabricating same |
-
2008
- 2008-01-11 SG SG200800277-6A patent/SG144830A1/en unknown
- 2008-01-15 TW TW097101540A patent/TWI478214B/zh active
- 2008-01-16 JP JP2008006487A patent/JP5544061B2/ja active Active
- 2008-01-18 EP EP08000957A patent/EP1947689A3/en not_active Withdrawn
- 2008-01-18 KR KR1020080005778A patent/KR101059060B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
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JP2008177572A (ja) | 2008-07-31 |
SG144830A1 (en) | 2008-08-28 |
EP1947689A3 (en) | 2011-03-30 |
TW200903593A (en) | 2009-01-16 |
EP1947689A2 (en) | 2008-07-23 |
TWI478214B (zh) | 2015-03-21 |
KR20080068592A (ko) | 2008-07-23 |
KR101059060B1 (ko) | 2011-08-24 |
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