JP5539612B2 - 配向膜の製造方法 - Google Patents
配向膜の製造方法 Download PDFInfo
- Publication number
- JP5539612B2 JP5539612B2 JP2007083127A JP2007083127A JP5539612B2 JP 5539612 B2 JP5539612 B2 JP 5539612B2 JP 2007083127 A JP2007083127 A JP 2007083127A JP 2007083127 A JP2007083127 A JP 2007083127A JP 5539612 B2 JP5539612 B2 JP 5539612B2
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- JP
- Japan
- Prior art keywords
- liquid crystal
- alignment film
- silicon oxide
- thin film
- oxide thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133738—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers for homogeneous alignment
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133742—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers for homeotropic alignment
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/133765—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers without a surface treatment
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Description
(出典 : Minhua
Lu,"Liquid Crystal Orientation Induced by Van Der Waals
Interaction",Jap.J.Appl.Phy.Vol.43,pp.8156,2004.)
J.N.Israelachvili,"Intermolecular and Surface forces",Academic Press.
1991)
このような状態において、第1偏光板150に入射された光は一方向に偏光された後、第2の偏光板250で吸収され、液晶表示装置はブラック状態になる。
配向膜320は液晶表示装置が少なくとも100%の透過率を有することができる適正の厚さを有することが好ましい。例えば、図13Bからの結果と誤差の範囲を考慮して、配向膜320は、ほぼ300nm以下の厚さを有することが好ましい。
2 配向膜
3 液晶
Claims (8)
- 酸化シリコン(SiOx)薄膜からなり、633nmの波長を有する光に対する屈折率は前記xが小さくなるほど大きくなり、
前記酸化シリコン薄膜上で液晶を垂直方向に配列させる場合には、前記xが1.5〜2.0であり、前記屈折率が1.8より小さい前記酸化シリコン薄膜を形成し、
前記酸化シリコン薄膜上で液晶を水平方向に配列させる場合には、前記xが1.0〜1.5であり、前記屈折率が1.8より大きい前記酸化シリコン薄膜を形成する配向膜の製造方法において、
前記酸化シリコン薄膜は、一酸化シリコン又は二酸化シリコンを用いた物理蒸着方法によって形成され、
前記屈折率が1.8より大きい前記酸化シリコン薄膜の形成は、前記屈折率が1.8より小さい前記酸化シリコン薄膜の形成に比べて、初期圧力と作業圧力を低くすることを特徴とする配向膜の製造方法。 - 前記酸化シリコン薄膜は、平らな表面を有することを特徴とする請求項1に記載の配向膜の製造方法。
- 前記酸化シリコン薄膜の表面粗さの2乗平均粗さの値は3nm以下であることを特徴とする請求項2に記載の配向膜の製造方法。
- 前記酸化シリコン薄膜上で液晶を垂直方向に配列させる場合には、前記xを1.65〜1.75にすることを特徴とする請求項2に記載の配向膜の製造方法。
- 前記液晶の誘電率異方性は−3.9〜−1.0であることを特徴とする請求項1に記載の配向膜の製造方法。
- 前記酸化シリコン薄膜上で液晶を垂直方向に配列させる場合には、前記xを1.65より大きく2.0より小さくすることを特徴とする請求項1に記載の配向膜の製造方法。
- 前記酸化シリコン薄膜は、50nm〜300nmの厚さを有することを特徴とする請求項1に記載の配向膜の製造方法。
- 前記酸化シリコン薄膜は、90nm〜110nmの厚さを有することを特徴とする請求項7に記載の配向膜の製造方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2006-0033677 | 2006-04-13 | ||
KR20060033677 | 2006-04-13 | ||
KR1020060129412A KR20070102372A (ko) | 2006-04-13 | 2006-12-18 | 배향막과 그 제조방법 및 이를 갖는 액정표시장치 |
KR10-2006-0129412 | 2006-12-18 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007286617A JP2007286617A (ja) | 2007-11-01 |
JP2007286617A5 JP2007286617A5 (ja) | 2010-04-22 |
JP5539612B2 true JP5539612B2 (ja) | 2014-07-02 |
Family
ID=38179684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007083127A Expired - Fee Related JP5539612B2 (ja) | 2006-04-13 | 2007-03-27 | 配向膜の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070279562A1 (ja) |
EP (1) | EP1845408B1 (ja) |
JP (1) | JP5539612B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4846603B2 (ja) * | 2007-01-11 | 2011-12-28 | 株式会社アルバック | 配向膜の製造方法 |
US7741171B2 (en) * | 2007-05-15 | 2010-06-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Oxygen-rich layers underlying BPSG |
JP2008304499A (ja) * | 2007-06-05 | 2008-12-18 | Sony Corp | 光学補償部材及び液晶表示装置、並びに、配向膜用組成物及び配向膜 |
US8319937B2 (en) | 2007-10-11 | 2012-11-27 | Pixeloptics, Inc. | Alignment of liquid crystalline materials to surface relief diffractive structures |
KR101998124B1 (ko) * | 2012-07-24 | 2019-07-09 | 엘지디스플레이 주식회사 | 어레이 기판 및 그 제조방법 |
JP6261099B2 (ja) * | 2012-08-01 | 2018-01-17 | 株式会社 高千穂 | シラス構造体の製造方法 |
CN113196158B (zh) * | 2019-11-29 | 2023-12-19 | 京东方科技集团股份有限公司 | 显示基板、显示面板及其制作方法和显示装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2722871A1 (de) * | 1977-05-20 | 1978-11-23 | Siemens Ag | Fluessigkristallzelle mit einer isolationsschicht auf siliciumoxidbasis |
EP0301660B1 (en) * | 1987-07-23 | 1992-06-03 | Koninklijke Philips Electronics N.V. | Display cell |
US5084801A (en) * | 1991-02-19 | 1992-01-28 | General Electric Company | Liquid crystal variable capacitor and high intensity discharge lamp ballast employing same |
JP3077126B2 (ja) * | 1991-09-21 | 2000-08-14 | ソニー株式会社 | 液晶表示素子 |
JP2812601B2 (ja) * | 1992-03-23 | 1998-10-22 | シャープ株式会社 | 液晶表示装置 |
US5907382A (en) * | 1994-12-20 | 1999-05-25 | Kabushiki Kaisha Toshiba | Transparent conductive substrate and display apparatus |
DE69729022T2 (de) * | 1996-03-25 | 2005-06-09 | Teijin Ltd. | Beschichtungszusammensetzung, transparentes Elektrodensubstrat mit einer solchen Beschichtung und Flüssigkristallanzeigeelement mit einem solchen Substrat |
GB9606768D0 (en) * | 1996-03-29 | 1996-06-05 | Secr Defence | Liquid crystal materials and devices |
JPH11189772A (ja) * | 1997-12-26 | 1999-07-13 | Chisso Corp | 強誘電性液晶組成物および液晶素子 |
US6297865B1 (en) * | 1998-03-10 | 2001-10-02 | Sony Corporation | Liquid crystal element having polarization moderating properties |
US6724449B1 (en) * | 2000-03-27 | 2004-04-20 | International Business Machines Corporation | Vertical aligned liquid crystal display and method using dry deposited alignment layer films |
JP2003222916A (ja) * | 2002-01-29 | 2003-08-08 | Nippon Sheet Glass Co Ltd | 導波路型液晶光スイッチ |
JP4058321B2 (ja) * | 2002-10-07 | 2008-03-05 | ソニー株式会社 | 液晶表示素子およびその製造方法 |
SE0303041D0 (sv) * | 2003-06-23 | 2003-11-18 | Ecsibeo Ab | A liquid crystal device and a method for manufacturing thereof |
JP2006030530A (ja) * | 2004-07-15 | 2006-02-02 | Matsushita Electric Ind Co Ltd | 光学デバイスおよびその製造方法 |
JP2006047613A (ja) | 2004-08-04 | 2006-02-16 | Seiko Epson Corp | 液晶表示素子、及びその製造方法、並びに投射型表示装置 |
JP2006072106A (ja) * | 2004-09-03 | 2006-03-16 | Victor Co Of Japan Ltd | 反射型液晶表示装置 |
-
2007
- 2007-03-27 JP JP2007083127A patent/JP5539612B2/ja not_active Expired - Fee Related
- 2007-03-30 EP EP07006658A patent/EP1845408B1/en not_active Expired - Fee Related
- 2007-04-12 US US11/786,814 patent/US20070279562A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1845408A1 (en) | 2007-10-17 |
US20070279562A1 (en) | 2007-12-06 |
JP2007286617A (ja) | 2007-11-01 |
EP1845408B1 (en) | 2009-09-02 |
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