JP5528493B2 - ポジ型感光性樹脂組成物、硬化膜の製造方法、硬化膜、有機ｅｌ表示装置および液晶表示装置 - Google Patents

ポジ型感光性樹脂組成物、硬化膜の製造方法、硬化膜、有機ｅｌ表示装置および液晶表示装置 Download PDF

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JP5528493B2
JP5528493B2 JP2012054088A JP2012054088A JP5528493B2 JP 5528493 B2 JP5528493 B2 JP 5528493B2 JP 2012054088 A JP2012054088 A JP 2012054088A JP 2012054088 A JP2012054088 A JP 2012054088A JP 5528493 B2 JP5528493 B2 JP 5528493B2
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group
structural unit
acid
resin composition
photosensitive resin
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JP2013186450A (ja
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悟 山田
豪 安藤
健太 山▲ざき▼
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Fujifilm Corp
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Fujifilm Corp
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Priority to TW102107915A priority patent/TWI595320B/zh
Priority to KR1020130025665A priority patent/KR102095312B1/ko
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/60—OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
    • H10K59/65—OLEDs integrated with inorganic image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K65/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element and at least one organic radiation-sensitive element, e.g. organic opto-couplers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/151—Copolymers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Architecture (AREA)
  • Computer Hardware Design (AREA)
  • Sustainable Development (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Electroluminescent Light Sources (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP2012054088A 2012-03-12 2012-03-12 ポジ型感光性樹脂組成物、硬化膜の製造方法、硬化膜、有機ｅｌ表示装置および液晶表示装置 Active JP5528493B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012054088A JP5528493B2 (ja) 2012-03-12 2012-03-12 ポジ型感光性樹脂組成物、硬化膜の製造方法、硬化膜、有機ｅｌ表示装置および液晶表示装置
TW102107915A TWI595320B (zh) 2012-03-12 2013-03-06 正型感光性樹脂組成物、硬化膜的製造方法、硬化膜、有機ｅｌ顯示裝置及液晶顯示裝置
KR1020130025665A KR102095312B1 (ko) 2012-03-12 2013-03-11 포지티브형 감광성 수지 조성물, 경화막의 제조 방법, 경화막, 유기 ｅｌ 표시 장치, 및 액정 표시 장치

Applications Claiming Priority (1)

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JP2012054088A JP5528493B2 (ja) 2012-03-12 2012-03-12 ポジ型感光性樹脂組成物、硬化膜の製造方法、硬化膜、有機ｅｌ表示装置および液晶表示装置

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JP2013186450A JP2013186450A (ja) 2013-09-19
JP5528493B2 true JP5528493B2 (ja) 2014-06-25

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KR (1) KR102095312B1 (zh)
TW (1) TWI595320B (zh)

Families Citing this family (11)

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JP6492444B2 (ja) * 2013-09-04 2019-04-03 Jsr株式会社 感放射線性樹脂組成物、硬化膜、その形成方法、及び電子デバイス
JP2015069179A (ja) * 2013-09-30 2015-04-13 Jsr株式会社 感放射線性樹脂組成物、硬化膜、その形成方法、及び表示素子
KR102194820B1 (ko) * 2014-06-10 2020-12-24 삼성디스플레이 주식회사 수지 조성물, 이를 사용하는 표시 장치의 제조 방법 및 그 방법으로 제조된 표시 장치
US10109691B2 (en) 2014-06-25 2018-10-23 Joled Inc. Method for manufacturing organic EL display panel
JP2016017172A (ja) * 2014-07-11 2016-02-01 Dic株式会社 含フッ素熱分解性樹脂、レジスト組成物、カラーフィルター保護膜用組成物、レジスト膜及びカラーフィルター保護膜
JP6573982B2 (ja) * 2015-08-31 2019-09-11 富士フイルム株式会社 硬化性組成物、硬化膜の製造方法、カラーフィルタ、遮光膜、固体撮像素子及び画像表示装置
EP3778674A4 (en) * 2018-05-14 2022-01-05 The School Corporation Kansai University NEW FERROELECTRIC MATERIAL
WO2019230846A1 (ja) * 2018-05-30 2019-12-05 デンカ株式会社 有機エレクトロルミネッセンス表示素子用封止剤
JPWO2020054559A1 (ja) * 2018-09-10 2021-09-16 セントラル硝子株式会社 含フッ素樹脂組成物
JP6797351B2 (ja) * 2019-03-28 2020-12-09 Dic株式会社 含フッ素熱分解性樹脂、レジスト組成物、カラーフィルター保護膜用組成物、レジスト膜及びカラーフィルター保護膜
JP7473811B2 (ja) 2020-09-08 2024-04-24 セントラル硝子株式会社 光硬化性組成物、その硬化物、電子デバイスおよび光学部材

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JP2008535950A (ja) * 2005-03-11 2008-09-04 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 光画像形成可能な熱硬化性フッ素化レジスト
JP2007101762A (ja) * 2005-10-03 2007-04-19 Jsr Corp 感放射線性樹脂組成物ならびに層間絶縁膜およびマイクロレンズの形成
JP5652404B2 (ja) * 2009-11-30 2015-01-14 Jsr株式会社 感放射線性組成物及びレジストパターン形成方法
JP5623896B2 (ja) * 2010-01-15 2014-11-12 富士フイルム株式会社 感光性樹脂組成物、硬化膜の形成方法、硬化膜、有機ｅｌ表示装置、及び、液晶表示装置
US8652755B2 (en) * 2010-02-02 2014-02-18 Nissan Chemical Industries, Ltd. Positive photosensitive resin composition and lyophobic film
US8765357B2 (en) * 2011-04-19 2014-07-01 Sumitomo Chemical Company, Limited Resin and photoresist composition comprising same
JP5742661B2 (ja) * 2011-10-25 2015-07-01 信越化学工業株式会社 ポジ型レジスト組成物及びパターン形成方法

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TW201341961A (zh) 2013-10-16
TWI595320B (zh) 2017-08-11
KR20130105420A (ko) 2013-09-25
JP2013186450A (ja) 2013-09-19
KR102095312B1 (ko) 2020-03-31

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