JP5524254B2 - ミラー駆動装置及びその制御方法 - Google Patents

ミラー駆動装置及びその制御方法 Download PDF

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Publication number
JP5524254B2
JP5524254B2 JP2012029444A JP2012029444A JP5524254B2 JP 5524254 B2 JP5524254 B2 JP 5524254B2 JP 2012029444 A JP2012029444 A JP 2012029444A JP 2012029444 A JP2012029444 A JP 2012029444A JP 5524254 B2 JP5524254 B2 JP 5524254B2
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Prior art keywords
piezoelectric
mirror
actuator
cantilevers
cantilever
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Japanese (ja)
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JP2013167681A5 (enExample
JP2013167681A (ja
Inventor
崇幸 直野
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Fujifilm Corp
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Fujifilm Corp
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Priority to JP2012029444A priority Critical patent/JP5524254B2/ja
Priority to CN201310047380.XA priority patent/CN103246059B/zh
Priority to US13/763,478 priority patent/US9030721B2/en
Publication of JP2013167681A publication Critical patent/JP2013167681A/ja
Publication of JP2013167681A5 publication Critical patent/JP2013167681A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Physical Vapour Deposition (AREA)
JP2012029444A 2012-02-14 2012-02-14 ミラー駆動装置及びその制御方法 Active JP5524254B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2012029444A JP5524254B2 (ja) 2012-02-14 2012-02-14 ミラー駆動装置及びその制御方法
CN201310047380.XA CN103246059B (zh) 2012-02-14 2013-02-06 镜驱动设备和控制该设备的方法
US13/763,478 US9030721B2 (en) 2012-02-14 2013-02-08 Mirror driving device and method of controlling the device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012029444A JP5524254B2 (ja) 2012-02-14 2012-02-14 ミラー駆動装置及びその制御方法

Publications (3)

Publication Number Publication Date
JP2013167681A JP2013167681A (ja) 2013-08-29
JP2013167681A5 JP2013167681A5 (enExample) 2013-11-07
JP5524254B2 true JP5524254B2 (ja) 2014-06-18

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JP2012029444A Active JP5524254B2 (ja) 2012-02-14 2012-02-14 ミラー駆動装置及びその制御方法

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US (1) US9030721B2 (enExample)
JP (1) JP5524254B2 (enExample)
CN (1) CN103246059B (enExample)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014172617A1 (en) * 2013-04-18 2014-10-23 Cornell University Monolithic pzt actuator, stage, and method for making
CN105209958B (zh) * 2014-04-23 2016-08-31 三菱电机株式会社 电扫描器以及激光加工装置
JP5654158B1 (ja) * 2014-05-07 2015-01-14 株式会社トライフォース・マネジメント 可動反射素子および二次元走査装置
US10263173B2 (en) * 2015-01-16 2019-04-16 The Regents Of The University Of Michigan Multi-axis piezoelectric transducer
JP6601711B2 (ja) * 2015-06-03 2019-11-06 株式会社リコー 回動装置及び光走査装置
CN106646857B (zh) * 2015-11-02 2020-01-21 华为技术有限公司 一种压电微镜和控制方法
ITUB20156009A1 (it) 2015-11-30 2017-05-30 St Microelectronics Srl Riflettore mems biassiale risonante con attuatori piezoelettrici e sistema mems proiettivo includente il medesimo
WO2017100485A1 (en) * 2015-12-08 2017-06-15 The Regents Of The University Of Michigan 3d mems scanner for real-time cross-sectional endomicroscopy
JP2017129685A (ja) * 2016-01-19 2017-07-27 キヤノン株式会社 光学装置、投影光学系、露光装置およびデバイス製造方法
EP3220183B1 (en) 2016-03-17 2021-11-10 Ricoh Company, Ltd. Control unit, optical deflection system, image projection apparatus, and control method
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
CN106205582B (zh) * 2016-08-31 2023-04-28 北京越音速科技有限公司 一种致动装置及其制造方法和一种水声换能器
JP6880385B2 (ja) * 2016-09-28 2021-06-02 ミツミ電機株式会社 光走査装置
IT201600121010A1 (it) * 2016-11-29 2018-05-29 St Microelectronics Srl Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di pilotaggio
IT201600131849A1 (it) * 2016-12-28 2018-06-28 St Microelectronics Srl Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di comando
WO2018183405A1 (en) 2017-03-27 2018-10-04 Avegant Corp. Steerable foveal display
US11150464B2 (en) 2017-06-13 2021-10-19 Mitsubishi Electric Corporation Optical scanning device and method of adjusting optical scanning device
DE102017217653A1 (de) * 2017-10-05 2019-04-11 Robert Bosch Gmbh Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Anregen einer Bewegung eines verstellbaren Teils um eine Rotationsachse
WO2020006011A1 (en) 2018-06-26 2020-01-02 Magic Leap, Inc. Hybrid optical fiber mems scanner
WO2020006008A1 (en) * 2018-06-26 2020-01-02 Magic Leap, Inc. Raster scanned projector with microelectromechanical system scanner
US11169383B2 (en) 2018-12-07 2021-11-09 Avegant Corp. Steerable positioning element
US11126261B2 (en) 2019-01-07 2021-09-21 Avegant Corp. Display control system and rendering pipeline
IT201900004199A1 (it) 2019-03-22 2020-09-22 St Microelectronics Srl Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche
US11586049B2 (en) 2019-03-29 2023-02-21 Avegant Corp. Steerable hybrid display using a waveguide
US11221478B2 (en) * 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner
EP3961289A4 (en) * 2019-04-26 2022-06-15 FUJIFILM Corporation MICRO-MIRROR DEVICE
EP3751328B1 (en) * 2019-06-10 2021-10-27 Murata Manufacturing Co., Ltd. Two-axis mems mirror with separated drives
US12091313B2 (en) 2019-08-26 2024-09-17 The Research Foundation For The State University Of New York Electrodynamically levitated actuator
JP7451930B2 (ja) * 2019-10-11 2024-03-19 株式会社リコー 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両
WO2021142486A1 (en) 2020-01-06 2021-07-15 Avegant Corp. A head mounted system with color specific modulation
CN111568386B (zh) * 2020-06-22 2021-07-06 中国科学院长春光学精密机械与物理研究所 一种自适应光学相干层析成像设备
EP4194926A4 (en) * 2020-08-04 2024-01-10 FUJIFILM Corporation MICRO MIRROR DEVICE AND OPTICAL SCANNING DEVICE
JP7436686B2 (ja) * 2020-09-04 2024-02-22 富士フイルム株式会社 マイクロミラーデバイス及び光走査装置
US12164103B2 (en) 2020-12-16 2024-12-10 STMicroelectronics (Research &Develoment) Limited Compact line scan MEMS time of flight system with actuated lens
US11747611B2 (en) 2020-12-16 2023-09-05 Stmicroelectronics (Research & Development) Limited Compact line scan mems time of flight system with actuated lens
CN112817141B (zh) * 2020-12-31 2023-03-24 歌尔股份有限公司 Mems扫描镜及其驱动方法、激光投影仪
CN117255969A (zh) * 2021-05-07 2023-12-19 宁波舜宇光电信息有限公司 摄像模组、光学致动器、感光组件及其制造方法
CN115426448B (zh) * 2021-06-01 2024-06-25 宁波舜宇光电信息有限公司 感光组件、摄像模组和感光组件的制备方法
US20250035534A1 (en) * 2021-11-09 2025-01-30 Beckman Coulter, Inc. Flow cytometer alignment
EP4220273A1 (en) * 2022-02-01 2023-08-02 Silicon Austria Labs GmbH Micromirror device for quasi-static mirror movement and method operating a micromirror device
CN116699739A (zh) * 2022-02-24 2023-09-05 宁波舜宇光电信息有限公司 可变焦距透镜装置和摄像模组
JP2024006096A (ja) * 2022-06-30 2024-01-17 ミツミ電機株式会社 可動デバイス、ｍｅｍｓデバイス、及び光走査装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1189254A (ja) * 1997-09-08 1999-03-30 Wac Data Service Kk 圧電アクチュエータ
US6091050A (en) * 1997-11-17 2000-07-18 Roxburgh Limited Thermal microplatform
JP2002221673A (ja) * 2001-01-26 2002-08-09 Olympus Optical Co Ltd アクチュエータを備えた光学ユニット
US20040125472A1 (en) * 2002-12-12 2004-07-01 R. Todd Belt Actuated deformable membrane mirror
CN2639915Y (zh) * 2003-09-12 2004-09-08 清华大学 一种mems扫描微镜
JP2006311423A (ja) * 2005-05-02 2006-11-09 Fujitsu Component Ltd Ｍｅｍｓ型可変共振器
CN1731236A (zh) * 2005-07-15 2006-02-08 清华大学 片式化的二维压电光反射结构
JP4926596B2 (ja) * 2006-08-08 2012-05-09 スタンレー電気株式会社 光偏向器及びその製造方法
JP2008298829A (ja) * 2007-05-29 2008-12-11 Panasonic Corp 光学反射素子
US7605966B2 (en) * 2008-01-21 2009-10-20 Stanley Electric Co., Ltd. Optical deflector
JP5290610B2 (ja) 2008-04-09 2013-09-18 富士フイルム株式会社 圧電膜の成膜方法
JP2010139691A (ja) * 2008-12-11 2010-06-24 Brother Ind Ltd 光スキャナ及びこの光スキャナを備えた画像表示装置
JP5191939B2 (ja) * 2009-03-31 2013-05-08 スタンレー電気株式会社 光偏向器用アクチュエータ装置
JP5640974B2 (ja) 2009-05-11 2014-12-17 パナソニック株式会社 光学反射素子
JP4868047B2 (ja) * 2009-09-01 2012-02-01 セイコーエプソン株式会社 アクチュエータ、光スキャナ、および画像形成装置
JP2011085677A (ja) * 2009-10-14 2011-04-28 Panasonic Corp 光走査装置、光走査装置の製造方法及びこの光走査装置を用いたレーザプロジェクタ
JP5779472B2 (ja) * 2011-10-07 2015-09-16 スタンレー電気株式会社 光偏向器

Also Published As

Publication number Publication date
CN103246059A (zh) 2013-08-14
CN103246059B (zh) 2016-08-10
US9030721B2 (en) 2015-05-12
JP2013167681A (ja) 2013-08-29
US20130208330A1 (en) 2013-08-15

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