CN103246059B - 镜驱动设备和控制该设备的方法 - Google Patents
镜驱动设备和控制该设备的方法 Download PDFInfo
- Publication number
- CN103246059B CN103246059B CN201310047380.XA CN201310047380A CN103246059B CN 103246059 B CN103246059 B CN 103246059B CN 201310047380 A CN201310047380 A CN 201310047380A CN 103246059 B CN103246059 B CN 103246059B
- Authority
- CN
- China
- Prior art keywords
- actuator
- mirror
- piezoelectric
- cantilever
- piezoelectric cantilever
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims 3
- 238000006073 displacement reaction Methods 0.000 claims 11
- 238000005452 bending Methods 0.000 claims 7
- 239000000126 substance Substances 0.000 claims 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 239000010408 film Substances 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 229910052787 antimony Inorganic materials 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 2
- 238000010276 construction Methods 0.000 claims 2
- 229910052758 niobium Inorganic materials 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 229910052720 vanadium Inorganic materials 0.000 claims 2
- 229910052793 cadmium Inorganic materials 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 230000002596 correlated effect Effects 0.000 claims 1
- 230000000875 corresponding effect Effects 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052706 scandium Inorganic materials 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
- H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-029444 | 2012-02-14 | ||
| JP2012029444A JP5524254B2 (ja) | 2012-02-14 | 2012-02-14 | ミラー駆動装置及びその制御方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103246059A CN103246059A (zh) | 2013-08-14 |
| CN103246059B true CN103246059B (zh) | 2016-08-10 |
Family
ID=48925681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310047380.XA Active CN103246059B (zh) | 2012-02-14 | 2013-02-06 | 镜驱动设备和控制该设备的方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9030721B2 (enExample) |
| JP (1) | JP5524254B2 (enExample) |
| CN (1) | CN103246059B (enExample) |
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|---|---|---|---|---|
| WO2014172617A1 (en) * | 2013-04-18 | 2014-10-23 | Cornell University | Monolithic pzt actuator, stage, and method for making |
| CN105209958B (zh) * | 2014-04-23 | 2016-08-31 | 三菱电机株式会社 | 电扫描器以及激光加工装置 |
| JP5654158B1 (ja) * | 2014-05-07 | 2015-01-14 | 株式会社トライフォース・マネジメント | 可動反射素子および二次元走査装置 |
| US10263173B2 (en) * | 2015-01-16 | 2019-04-16 | The Regents Of The University Of Michigan | Multi-axis piezoelectric transducer |
| JP6601711B2 (ja) * | 2015-06-03 | 2019-11-06 | 株式会社リコー | 回動装置及び光走査装置 |
| CN106646857B (zh) * | 2015-11-02 | 2020-01-21 | 华为技术有限公司 | 一种压电微镜和控制方法 |
| ITUB20156009A1 (it) | 2015-11-30 | 2017-05-30 | St Microelectronics Srl | Riflettore mems biassiale risonante con attuatori piezoelettrici e sistema mems proiettivo includente il medesimo |
| WO2017100485A1 (en) * | 2015-12-08 | 2017-06-15 | The Regents Of The University Of Michigan | 3d mems scanner for real-time cross-sectional endomicroscopy |
| JP2017129685A (ja) * | 2016-01-19 | 2017-07-27 | キヤノン株式会社 | 光学装置、投影光学系、露光装置およびデバイス製造方法 |
| EP3220183B1 (en) | 2016-03-17 | 2021-11-10 | Ricoh Company, Ltd. | Control unit, optical deflection system, image projection apparatus, and control method |
| ITUA20162170A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo |
| CN106205582B (zh) * | 2016-08-31 | 2023-04-28 | 北京越音速科技有限公司 | 一种致动装置及其制造方法和一种水声换能器 |
| JP6880385B2 (ja) * | 2016-09-28 | 2021-06-02 | ミツミ電機株式会社 | 光走査装置 |
| IT201600121010A1 (it) * | 2016-11-29 | 2018-05-29 | St Microelectronics Srl | Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di pilotaggio |
| IT201600131849A1 (it) * | 2016-12-28 | 2018-06-28 | St Microelectronics Srl | Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di comando |
| WO2018183405A1 (en) | 2017-03-27 | 2018-10-04 | Avegant Corp. | Steerable foveal display |
| US11150464B2 (en) | 2017-06-13 | 2021-10-19 | Mitsubishi Electric Corporation | Optical scanning device and method of adjusting optical scanning device |
| DE102017217653A1 (de) * | 2017-10-05 | 2019-04-11 | Robert Bosch Gmbh | Mikromechanisches Bauteil, Herstellungsverfahren für ein mikromechanisches Bauteil und Verfahren zum Anregen einer Bewegung eines verstellbaren Teils um eine Rotationsachse |
| WO2020006011A1 (en) | 2018-06-26 | 2020-01-02 | Magic Leap, Inc. | Hybrid optical fiber mems scanner |
| WO2020006008A1 (en) * | 2018-06-26 | 2020-01-02 | Magic Leap, Inc. | Raster scanned projector with microelectromechanical system scanner |
| US11169383B2 (en) | 2018-12-07 | 2021-11-09 | Avegant Corp. | Steerable positioning element |
| US11126261B2 (en) | 2019-01-07 | 2021-09-21 | Avegant Corp. | Display control system and rendering pipeline |
| IT201900004199A1 (it) | 2019-03-22 | 2020-09-22 | St Microelectronics Srl | Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche |
| US11586049B2 (en) | 2019-03-29 | 2023-02-21 | Avegant Corp. | Steerable hybrid display using a waveguide |
| US11221478B2 (en) * | 2019-04-15 | 2022-01-11 | Microsoft Technology Licensing, Llc | MEMS scanner |
| EP3961289A4 (en) * | 2019-04-26 | 2022-06-15 | FUJIFILM Corporation | MICRO-MIRROR DEVICE |
| EP3751328B1 (en) * | 2019-06-10 | 2021-10-27 | Murata Manufacturing Co., Ltd. | Two-axis mems mirror with separated drives |
| US12091313B2 (en) | 2019-08-26 | 2024-09-17 | The Research Foundation For The State University Of New York | Electrodynamically levitated actuator |
| JP7451930B2 (ja) * | 2019-10-11 | 2024-03-19 | 株式会社リコー | 光偏向器、偏向装置、距離測定装置、画像投影装置、及び車両 |
| WO2021142486A1 (en) | 2020-01-06 | 2021-07-15 | Avegant Corp. | A head mounted system with color specific modulation |
| CN111568386B (zh) * | 2020-06-22 | 2021-07-06 | 中国科学院长春光学精密机械与物理研究所 | 一种自适应光学相干层析成像设备 |
| EP4194926A4 (en) * | 2020-08-04 | 2024-01-10 | FUJIFILM Corporation | MICRO MIRROR DEVICE AND OPTICAL SCANNING DEVICE |
| JP7436686B2 (ja) * | 2020-09-04 | 2024-02-22 | 富士フイルム株式会社 | マイクロミラーデバイス及び光走査装置 |
| US12164103B2 (en) | 2020-12-16 | 2024-12-10 | STMicroelectronics (Research &Develoment) Limited | Compact line scan MEMS time of flight system with actuated lens |
| US11747611B2 (en) | 2020-12-16 | 2023-09-05 | Stmicroelectronics (Research & Development) Limited | Compact line scan mems time of flight system with actuated lens |
| CN112817141B (zh) * | 2020-12-31 | 2023-03-24 | 歌尔股份有限公司 | Mems扫描镜及其驱动方法、激光投影仪 |
| CN117255969A (zh) * | 2021-05-07 | 2023-12-19 | 宁波舜宇光电信息有限公司 | 摄像模组、光学致动器、感光组件及其制造方法 |
| CN115426448B (zh) * | 2021-06-01 | 2024-06-25 | 宁波舜宇光电信息有限公司 | 感光组件、摄像模组和感光组件的制备方法 |
| US20250035534A1 (en) * | 2021-11-09 | 2025-01-30 | Beckman Coulter, Inc. | Flow cytometer alignment |
| EP4220273A1 (en) * | 2022-02-01 | 2023-08-02 | Silicon Austria Labs GmbH | Micromirror device for quasi-static mirror movement and method operating a micromirror device |
| CN116699739A (zh) * | 2022-02-24 | 2023-09-05 | 宁波舜宇光电信息有限公司 | 可变焦距透镜装置和摄像模组 |
| JP2024006096A (ja) * | 2022-06-30 | 2024-01-17 | ミツミ電機株式会社 | 可動デバイス、ｍｅｍｓデバイス、及び光走査装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6091050A (en) * | 1997-11-17 | 2000-07-18 | Roxburgh Limited | Thermal microplatform |
| CN2639915Y (zh) * | 2003-09-12 | 2004-09-08 | 清华大学 | 一种mems扫描微镜 |
| CN1731236A (zh) * | 2005-07-15 | 2006-02-08 | 清华大学 | 片式化的二维压电光反射结构 |
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| JPH1189254A (ja) * | 1997-09-08 | 1999-03-30 | Wac Data Service Kk | 圧電アクチュエータ |
| JP2002221673A (ja) * | 2001-01-26 | 2002-08-09 | Olympus Optical Co Ltd | アクチュエータを備えた光学ユニット |
| US20040125472A1 (en) * | 2002-12-12 | 2004-07-01 | R. Todd Belt | Actuated deformable membrane mirror |
| JP2006311423A (ja) * | 2005-05-02 | 2006-11-09 | Fujitsu Component Ltd | Ｍｅｍｓ型可変共振器 |
| JP4926596B2 (ja) * | 2006-08-08 | 2012-05-09 | スタンレー電気株式会社 | 光偏向器及びその製造方法 |
| JP2008298829A (ja) * | 2007-05-29 | 2008-12-11 | Panasonic Corp | 光学反射素子 |
| US7605966B2 (en) * | 2008-01-21 | 2009-10-20 | Stanley Electric Co., Ltd. | Optical deflector |
| JP5290610B2 (ja) | 2008-04-09 | 2013-09-18 | 富士フイルム株式会社 | 圧電膜の成膜方法 |
| JP2010139691A (ja) * | 2008-12-11 | 2010-06-24 | Brother Ind Ltd | 光スキャナ及びこの光スキャナを備えた画像表示装置 |
| JP5191939B2 (ja) * | 2009-03-31 | 2013-05-08 | スタンレー電気株式会社 | 光偏向器用アクチュエータ装置 |
| JP5640974B2 (ja) | 2009-05-11 | 2014-12-17 | パナソニック株式会社 | 光学反射素子 |
| JP4868047B2 (ja) * | 2009-09-01 | 2012-02-01 | セイコーエプソン株式会社 | アクチュエータ、光スキャナ、および画像形成装置 |
| JP2011085677A (ja) * | 2009-10-14 | 2011-04-28 | Panasonic Corp | 光走査装置、光走査装置の製造方法及びこの光走査装置を用いたレーザプロジェクタ |
| JP5779472B2 (ja) * | 2011-10-07 | 2015-09-16 | スタンレー電気株式会社 | 光偏向器 |
-
2012
- 2012-02-14 JP JP2012029444A patent/JP5524254B2/ja active Active
-
2013
- 2013-02-06 CN CN201310047380.XA patent/CN103246059B/zh active Active
- 2013-02-08 US US13/763,478 patent/US9030721B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6091050A (en) * | 1997-11-17 | 2000-07-18 | Roxburgh Limited | Thermal microplatform |
| CN2639915Y (zh) * | 2003-09-12 | 2004-09-08 | 清华大学 | 一种mems扫描微镜 |
| CN1731236A (zh) * | 2005-07-15 | 2006-02-08 | 清华大学 | 片式化的二维压电光反射结构 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103246059A (zh) | 2013-08-14 |
| JP5524254B2 (ja) | 2014-06-18 |
| US9030721B2 (en) | 2015-05-12 |
| JP2013167681A (ja) | 2013-08-29 |
| US20130208330A1 (en) | 2013-08-15 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |