JP5505685B2 - 投影光学系、並びに露光方法及び装置 - Google Patents

投影光学系、並びに露光方法及び装置 Download PDF

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Publication number
JP5505685B2
JP5505685B2 JP2009018093A JP2009018093A JP5505685B2 JP 5505685 B2 JP5505685 B2 JP 5505685B2 JP 2009018093 A JP2009018093 A JP 2009018093A JP 2009018093 A JP2009018093 A JP 2009018093A JP 5505685 B2 JP5505685 B2 JP 5505685B2
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optical system
projection optical
exposure
pattern
image
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JP2010177423A5 (enExample
JP2010177423A (ja
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康弘 日高
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Nikon Corp
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Nikon Corp
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2009018093A 2009-01-29 2009-01-29 投影光学系、並びに露光方法及び装置 Expired - Fee Related JP5505685B2 (ja)

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JP2009018093A JP5505685B2 (ja) 2009-01-29 2009-01-29 投影光学系、並びに露光方法及び装置

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JP2009018093A JP5505685B2 (ja) 2009-01-29 2009-01-29 投影光学系、並びに露光方法及び装置

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JP2010177423A JP2010177423A (ja) 2010-08-12
JP2010177423A5 JP2010177423A5 (enExample) 2012-10-25
JP5505685B2 true JP5505685B2 (ja) 2014-05-28

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JP2009018093A Expired - Fee Related JP5505685B2 (ja) 2009-01-29 2009-01-29 投影光学系、並びに露光方法及び装置

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5881314B2 (ja) * 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置
TWI564671B (zh) * 2011-05-30 2017-01-01 Orc Manufacturing Co Ltd Exposure device
EP2720072A1 (en) * 2012-10-12 2014-04-16 Vision Engineering Limited Optical instrument with diffractive element
CN105954980A (zh) * 2016-07-20 2016-09-21 马颖鏖 基于数字微镜阵列的紫外曝光机及其控制方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07297110A (ja) * 1994-04-27 1995-11-10 Nikon Corp 投影露光装置
JP3689490B2 (ja) * 1996-06-07 2005-08-31 キヤノン株式会社 ノズル部材の製造方法及びそれを用いた加工装置
JP2004200430A (ja) * 2002-12-19 2004-07-15 Nikon Corp 露光装置、露光装置の調整方法及び露光方法
JP4929762B2 (ja) * 2006-03-03 2012-05-09 株式会社ニコン 露光装置、露光方法、及びデバイス製造方法
JPWO2008007632A1 (ja) * 2006-07-12 2009-12-10 株式会社ニコン 照明光学装置、露光装置、およびデバイス製造方法

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