JP5503376B2 - 熱処理装置 - Google Patents
熱処理装置 Download PDFInfo
- Publication number
- JP5503376B2 JP5503376B2 JP2010083463A JP2010083463A JP5503376B2 JP 5503376 B2 JP5503376 B2 JP 5503376B2 JP 2010083463 A JP2010083463 A JP 2010083463A JP 2010083463 A JP2010083463 A JP 2010083463A JP 5503376 B2 JP5503376 B2 JP 5503376B2
- Authority
- JP
- Japan
- Prior art keywords
- load factor
- ventilation
- reference load
- unit
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims description 45
- 238000009423 ventilation Methods 0.000 claims description 86
- 238000012545 processing Methods 0.000 claims description 15
- 238000004364 calculation method Methods 0.000 claims description 9
- 230000007423 decrease Effects 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 230000007613 environmental effect Effects 0.000 claims description 2
- 238000000859 sublimation Methods 0.000 description 9
- 230000008022 sublimation Effects 0.000 description 9
- 238000012937 correction Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/16—Drying solid materials or objects by processes not involving the application of heat by contact with sorbent bodies, e.g. absorbent mould; by admixture with sorbent materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Molecular Biology (AREA)
- Furnace Details (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Drying Of Solid Materials (AREA)
Description
11−換気システム
12−炉体
16−換気量調整部
18−ワーク
20−ヒータ
22−循環ファン
162−吸気側自動ダンパ
164−排気側自動ダンパ
166−ブロワ
Claims (3)
- 炉体の内部に配置されたワークに対して熱処理を行うときに、前記炉体の内部を換気する換気システムを有する熱処理装置であって、
前記炉体の内部に配置され、前記ワークを加熱するように構成された加熱部と、
前記加熱部の参照負荷率を演算する参照負荷率演算部と、
前記換気システムの換気量を調整する換気量調整部と、
前記参照負荷率演算部の演算結果に基づいて、前記換気量調整部を制御する換気量制御部と、
を備え、
前記換気量制御部は、前記参照負荷率の増加に応じて前記換気システムの換気量を増加させる一方で、前記参照負荷率の減少に応じて前記換気システムの換気量を減少させる熱処理装置。 - 前記参照負荷率演算部が演算した参照負荷率を、環境情報および処理状況情報によって補正する参照負荷率補正部をさらに備えた請求項1に記載の熱処理装置。
- 前記参照負荷率と前記換気システムの換気量との対応関係を示すルックアップテーブルを記録した記録部をさらに備えた請求項1または2に記載の熱処理装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010083463A JP5503376B2 (ja) | 2010-03-31 | 2010-03-31 | 熱処理装置 |
KR1020100109326A KR101737949B1 (ko) | 2010-03-31 | 2010-11-04 | 열처리장치 |
CN201010580164.8A CN102208344B (zh) | 2010-03-31 | 2010-12-06 | 热处理装置 |
TW100104615A TWI494438B (zh) | 2010-03-31 | 2011-02-11 | 熱處理裝置 |
TW104117971A TWI577804B (zh) | 2010-03-31 | 2011-02-11 | 熱處理裝置 |
KR1020170054420A KR101914434B1 (ko) | 2010-03-31 | 2017-04-27 | 열처리장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010083463A JP5503376B2 (ja) | 2010-03-31 | 2010-03-31 | 熱処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014051765A Division JP5767354B2 (ja) | 2014-03-14 | 2014-03-14 | 熱処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011214777A JP2011214777A (ja) | 2011-10-27 |
JP5503376B2 true JP5503376B2 (ja) | 2014-05-28 |
Family
ID=44697114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010083463A Expired - Fee Related JP5503376B2 (ja) | 2010-03-31 | 2010-03-31 | 熱処理装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5503376B2 (ja) |
KR (2) | KR101737949B1 (ja) |
CN (1) | CN102208344B (ja) |
TW (2) | TWI494438B (ja) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003007594A (ja) * | 2001-06-21 | 2003-01-10 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
JP4133929B2 (ja) * | 2004-05-28 | 2008-08-13 | 新日本製鐵株式会社 | 加熱炉の炉圧制御方法 |
CN1782570A (zh) * | 2004-11-30 | 2006-06-07 | 乐金电子(天津)电器有限公司 | 中央空调电磁膨胀阀控制方法 |
CN100532979C (zh) * | 2004-11-30 | 2009-08-26 | 乐金电子(天津)电器有限公司 | 中央空调各室负载计算方法以及电磁膨胀阀控制方法 |
JP5202810B2 (ja) * | 2006-02-06 | 2013-06-05 | 古河電気工業株式会社 | グラファイト加熱炉および光ファイバの製造方法 |
JP4273145B2 (ja) * | 2006-09-13 | 2009-06-03 | エスペック株式会社 | 熱処理装置 |
JP4331784B2 (ja) * | 2008-07-22 | 2009-09-16 | 株式会社フューチャービジョン | 基板焼成炉の給排気方法 |
-
2010
- 2010-03-31 JP JP2010083463A patent/JP5503376B2/ja not_active Expired - Fee Related
- 2010-11-04 KR KR1020100109326A patent/KR101737949B1/ko active IP Right Grant
- 2010-12-06 CN CN201010580164.8A patent/CN102208344B/zh active Active
-
2011
- 2011-02-11 TW TW100104615A patent/TWI494438B/zh active
- 2011-02-11 TW TW104117971A patent/TWI577804B/zh active
-
2017
- 2017-04-27 KR KR1020170054420A patent/KR101914434B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
CN102208344B (zh) | 2016-03-30 |
KR20110109785A (ko) | 2011-10-06 |
TWI577804B (zh) | 2017-04-11 |
JP2011214777A (ja) | 2011-10-27 |
TW201139689A (en) | 2011-11-16 |
TW201534735A (zh) | 2015-09-16 |
KR20170053157A (ko) | 2017-05-15 |
TWI494438B (zh) | 2015-08-01 |
CN102208344A (zh) | 2011-10-05 |
KR101737949B1 (ko) | 2017-05-19 |
KR101914434B1 (ko) | 2018-11-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5216246B2 (ja) | 連続焼成炉 | |
JP2008002766A (ja) | 基板焼成炉の給排気システム | |
JP4331784B2 (ja) | 基板焼成炉の給排気方法 | |
US20120049922A1 (en) | Total energy limiting and controlling device, and total electric power limiting and controlling device and method | |
TWI507651B (zh) | 熱處理裝置 | |
KR101380481B1 (ko) | 열처리 장치 | |
JP2011158219A (ja) | 空調制御方法および装置 | |
JP5767354B2 (ja) | 熱処理装置 | |
JP2007263548A (ja) | 換気システム | |
JP5737385B2 (ja) | 熱風循環炉 | |
JP5503376B2 (ja) | 熱処理装置 | |
JP4896952B2 (ja) | 熱処理装置 | |
KR20200080735A (ko) | 주방후드와 환기장치의 연동 제어 장치 및 연동 제어 방법 | |
JP3959141B2 (ja) | 昇華物対策付き熱処理装置 | |
JP5169158B2 (ja) | 基板加熱処理装置 | |
EP3872161A1 (en) | Culture device | |
JP5690493B2 (ja) | 温度勾配差を用いて空調制御を行う製麹装置 | |
JP4981543B2 (ja) | 熱処理装置 | |
JP5491908B2 (ja) | 加湿量制御システム | |
JP2010257885A (ja) | バッテリ装置 | |
KR101510780B1 (ko) | Bldc모터의 정풍량 제어방법 | |
JP2005183596A (ja) | 熱処理装置および半導体装置の製造方法 | |
JP3607822B2 (ja) | 真空熱処理炉 | |
JP2014102026A (ja) | 排気装置、基板処理装置、及び、排気方法 | |
JP2008272620A (ja) | 連続塗装設備での溶剤排気処理方法及び排気ファン制御装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130315 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140212 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140314 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5503376 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |