JP5490813B2 - 逆圧対応仕切弁 - Google Patents

逆圧対応仕切弁 Download PDF

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Publication number
JP5490813B2
JP5490813B2 JP2011535332A JP2011535332A JP5490813B2 JP 5490813 B2 JP5490813 B2 JP 5490813B2 JP 2011535332 A JP2011535332 A JP 2011535332A JP 2011535332 A JP2011535332 A JP 2011535332A JP 5490813 B2 JP5490813 B2 JP 5490813B2
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JP
Japan
Prior art keywords
pressure
valve plate
sealing material
gate valve
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011535332A
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English (en)
Japanese (ja)
Other versions
JPWO2011043189A1 (ja
Inventor
智彦 佐川
真 杉山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2011535332A priority Critical patent/JP5490813B2/ja
Publication of JPWO2011043189A1 publication Critical patent/JPWO2011043189A1/ja
Application granted granted Critical
Publication of JP5490813B2 publication Critical patent/JP5490813B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/46—Sealings with packing ring expanded or pressed into place by fluid pressure, e.g. inflatable packings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Architecture (AREA)
  • Fluid Mechanics (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
  • Lift Valve (AREA)
  • Sealing Devices (AREA)
JP2011535332A 2009-10-06 2010-09-22 逆圧対応仕切弁 Active JP5490813B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011535332A JP5490813B2 (ja) 2009-10-06 2010-09-22 逆圧対応仕切弁

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009232604 2009-10-06
JP2009232604 2009-10-06
JP2011535332A JP5490813B2 (ja) 2009-10-06 2010-09-22 逆圧対応仕切弁
PCT/JP2010/066396 WO2011043189A1 (ja) 2009-10-06 2010-09-22 逆圧対応仕切弁

Publications (2)

Publication Number Publication Date
JPWO2011043189A1 JPWO2011043189A1 (ja) 2013-03-04
JP5490813B2 true JP5490813B2 (ja) 2014-05-14

Family

ID=43856657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011535332A Active JP5490813B2 (ja) 2009-10-06 2010-09-22 逆圧対応仕切弁

Country Status (3)

Country Link
JP (1) JP5490813B2 (zh)
TW (1) TWI407031B (zh)
WO (1) WO2011043189A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101341431B1 (ko) * 2012-03-02 2014-01-02 주식회사 에스에프에이 게이트 밸브 및 그를 구비하는 진공처리장치
JP6150388B2 (ja) * 2013-06-05 2017-06-21 入江工研株式会社 ゲートバルブ及びチャンバ
CN103644308B (zh) * 2013-12-17 2016-04-13 中冶京诚工程技术有限公司 气封偏置式钟阀
JP2019532493A (ja) 2016-08-22 2019-11-07 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 真空チャンバ用のドアシール
CN114389185B (zh) * 2022-03-07 2022-11-08 深圳市众视通线材有限公司 一种安全性高的电源检修箱

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101717A (en) * 1976-02-23 1977-08-26 Nippon Kokan Kk Valve
JPS6062664U (ja) * 1983-10-07 1985-05-01 日立造船株式会社 バタフライ弁のシ−ル部構造
JPS61104863U (zh) * 1984-12-17 1986-07-03
JPS62166372U (zh) * 1986-04-10 1987-10-22
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁
JPH05215249A (ja) * 1992-02-05 1993-08-24 Ulvac Seiki Kk 真空装置用ゲートバルブ
JP2010092523A (ja) * 2008-10-06 2010-04-22 Showa Denko Kk インライン式成膜装置、磁気記録媒体の製造方法、及びゲートバルブ
JP2011012531A (ja) * 2009-06-02 2011-01-20 Sekisui Chem Co Ltd 真空弁及び真空弁制御システム

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52101717A (en) * 1976-02-23 1977-08-26 Nippon Kokan Kk Valve
JPS6062664U (ja) * 1983-10-07 1985-05-01 日立造船株式会社 バタフライ弁のシ−ル部構造
JPS61104863U (zh) * 1984-12-17 1986-07-03
JPS62166372U (zh) * 1986-04-10 1987-10-22
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁
JPH05215249A (ja) * 1992-02-05 1993-08-24 Ulvac Seiki Kk 真空装置用ゲートバルブ
JP2010092523A (ja) * 2008-10-06 2010-04-22 Showa Denko Kk インライン式成膜装置、磁気記録媒体の製造方法、及びゲートバルブ
JP2011012531A (ja) * 2009-06-02 2011-01-20 Sekisui Chem Co Ltd 真空弁及び真空弁制御システム

Also Published As

Publication number Publication date
TW201116745A (en) 2011-05-16
WO2011043189A1 (ja) 2011-04-14
TWI407031B (zh) 2013-09-01
JPWO2011043189A1 (ja) 2013-03-04

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