201116745 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種將内壓之高低關係有逆轉情況的二個直空 室予以隔間之逆壓閘閥。 广 【先前技術】 夕、」!於製造半導體或_、液晶面板等的真空裝置 截r'、工至予以隔間的閘閥，為人周知的有專利文獻1所記 專利文獻丨所記__，係在相對向配置並且分別形成 個密封面之間，具有可滑動地配置的閥板。然後， =的ίΐ閥板滑動至連通孔之位置，以將二個真空室予以 有i由^ 另外’在專利文獻1之閘閥的閥板，係設置 =====封材，且藉由該密封 第5圖所示的_中，係·/戶 =成有連通孔51之密封面52,藉此將;空將室 ίίΪί會相對於閥板53而朝向將該閥板53推 方向作用。因此，此時，就可以較小 =封面52的 52之推壓。另—方面，在閥板53之前面側的直/ ^封面 閥板53之後背側的真空室55為直空 ^工 為大虱壓、 於閥板53而朝向將該閥板53從密封面52拉二會相對 此時，為了要維持將閥板53推壓於密封面52 ^ ^作用。因此， 大的推力。另外，作用於閥板53的 、，就需要报 ㈡大祕之力，係隨著閥板53 201116745 大型化而變大。a此，在制大蝴板之關中，即使 之推力推屢闊板，有時會因被大氣廢推擠而無法轉密封二、 因此，習知作為對應如上述逆壓之真空裝置的閘^，有提案 非專利文獻1所記載者。如第6圖所示，在該習知逆壓閉了 係在依對形成有連通孔60的密封面61之推壓而將連通孔6〇 閉^的閥板64之後背側’形成有藉由該閥板⑷伸縮囊(bdi 3 及壓力板62而區劃出的空間65。然後在逆壓時 64的導入孔66將大氣壓導入於空間65以將閥板私之後 大虱壓狀態，藉此抵銷作用於閥板64之前面的大氣壓之力， 以較小的推力而進行閥板64之推壓。 (專利文獻） 專利文獻1 :日本特開平5-215249號公報。 (非專利文獻） 非專利文獻1 .入江工研株式會社閘閥型錄 KOSLARZE GATE VALVE 第 9 頁上部分。 【發明内容】 (發明所欲解決之課題） _ 若為第6圖之習知逆壓閘閥，則即使在逆壓時，也不需要作 恭iff喜而可確實維持密封。然而’在此種習知逆壓閘閥中, 囊63及動板62 #，使得料數好，有構造複雜化 本發明係有鑑於此種實際情況而開發完成者，其目的在於 比較㈣之構造即使在逆餅也能確實地轉密封的逆 (解決課題之手段） 堡的if明之一態樣，係提供一種逆壓閘闕，用以將具有第1内 借.、ί至及具有第2内_第2室料隔間。該逆壓閘間係Ϊ 部:ΐ封面，其係具有用以連通前述第1及第2室之連通孔ί、。 Ώ，/、係依對前述密封面之推壓而將前述連通孔予以閉塞的閥 201116745 = 且前述第1室位於與前述密封面相對向 在封面與前述閥板中之任一方朝向另一方 =其係攸別述 式出:將前述密封面與前述 =出而當別述弟！内龜於前述第2内壓時解除突出的^ t述構成中’當第1室之第i内壓高於第.2室 2 =密封材就會突出。藉此可將密封面與閥板之間隙予以ί ，閥板可依第1内壓與第2内壓之壓力差而朝離開贫封 塵’即使嶋微離開密封面，也可藉由戶 =二 封材來維持密封面與閥板之間隙的密封。 的… (發明效果） 壓閑間，以簡單的構造即使蝴時也可確實 【實施方式】 (第1實施形態) 以下，係參照第1圖至第3圖詳細說明將本發明之逆壓閘閥 ^體化的第1實施形態。另外第1實施形態之逆壓閘閥，係構成 1、為在用於製造半導體或薄膜、液晶面板等之真空裝置中將大氣 壓與真空予以隔間的閥。 ” 第1圖係顯示從第1實施形態之逆壓閘閥之側方觀看到的剖 面構造。如第1圖所示’第1實施形態之逆壓閘閥，係設置於第1 真空室1及第2真空室4之二個真空室的連結部。 、 在連接於第2真空室4之第1真空室1的侧板，係設置有連 通兩真空室1、4的連通孔2。此種設置有連通孔2之第1真空室 1的側板之外周面，係成為藉由閉塞連通孔2而使切斷兩真空室 1、4之連通的閥板6所推壓的密封面3。 上述閥板6，係配設於第2真空室4之内部。該閥板6，係具 201116745 圖示5的基端。闕板6 ’係配置成：藉由未 壓於ί封面3 向轉動’藉此使闊板6之前面推 ΐ糸在第1真空室1及第2真空室4之内以3 行。另外，在第2真空室4之内部，亦配置 板6 離開密封面3之方向位移的止動器7。 有V止閥 8用^包與圍上住述^面/,向的間板6之前面，係設置有密封材 I圍住k通孔2之外周。又在閥板6之前面的密封 3性體所構成的。環9。在第1實施例中，〇環9 i丁'5又置作為第2密封材。 部*ΐ封由中空之彈性材所形成。在此種密封材δ之内 工3如依而文而由配管10進行空氣之供給。在第i 中，該配管10之一端係開放於大氣中。然後， 材 ^ 端部的周圍處於大氣壓環境下時，密封材8之周圍‘ 間就會成為_大氣壓）。此時的密封材8，由於 2彈性體所以會成為前端凹陷的形狀(參照第2圖(a))。另—方而、 封材.8前端部之周圍處於真空下時，藉由密封材8之周鱼 抢封材8之内部空間的差壓，可供給空氣至密封材8之内部空間 因严’此時的密封材8 ’係以其前端朝向密封面3突出的方心; (麥照第2圖(b)及第3圖）。 x _另外，此種設置有逆壓閘閥的真空裝置，通常是在第丨直办 f 1為真空、第2真空室4為大縫之所謂正壓的狀態、或= 弟1真空室1與第2真空室4同壓的狀態下使用。但是，在 保養時，有時會有第1真空室1為大氣壓、第2真空室4 * 之所謂逆>1的狀態。如以下所述，® 1實施形態之逆壓閘閱’，、= 構成：正壓時、或逆塵時均可適當地進行密封。 ’、 第2圖(a)係顯示閥板6之前面側的第1真空室【之内部直 空:閥板6之後背側的第2真空室4之内部為大氣壓的正壓時^ 肤您。此#的岔封材8前端部之周圍係處於大氣塵環填下，又其 201116745 内$空間也魏大錢。目此，此時贿 ， 2變成_凹_職。但是，此義縣於大氣壓之力f； =於將赃6顧於密封面3的方向，所以可以比較小的推^ 與密封面3之間;!ΐίΓ〇3環的便一提，此時的間板6 ρ他ί 2fibl係顯示閱板6之前面側的第1真空室1之内部、及 i的狀11的第2真空室4之内部為真空之從正壓移至逆壓 *室Γίΐΐΐϊΐ養等’當從正_至逆屋時，就會對第1真 至4之内部同時進行真錄氣。此時，如第2 S空間3、ί、8 _由其前端部周圍與其内 膠：二翻二過配官10供給空氣。因而，密封材8係因膨 、而=/、刖知朝向岔封面3突出的方式彈性變形。 弟3圖係顯示閥板6之前面側的第i直 的真空室4之内部為真空之逆壓ί t 面3 ,基於大祕之力17會侧於綱板6拉離密封 揮功倉匕的二it J板6會被，觀嫌而後退至止動器7發 徊曰b ^ 士 1為止’:、、、、後閥板6—之前面與密封面3之間隙會變大-。… Ϊ的密封材8，會如第2剛所示從正壓移至W寺 二膨脹的狀態’即成為以密封材8之前端朝向密封面3突出 間形!!狀5。因此，即使閥板6之前面與密封面3之 ’也可猎由經突出的密封材8來密封該間隙。 下效果 1 纽上所述的第1實施形態之逆_閥，則至少可達成如 内壓ί^ί密封面3相對向的閥板6之前面側的第1真空室1之 二5:側的第2真空閥4之内壓還高的逆壓時， 可依該雄封材8之内壓而突出，並可藉此將密封面3盥 i封面以密封。因此，閥板6可藉由大氣壓而推向離“ ϊί 閥板6稱微_密封面3，也可藉 的山讀8來維持禮封面3與閥板6之間隙的密封。因而 201116745 ，以峨料_騎使麵壓時也可 (2)苐1實施形態之逆_閥，係 歷吩閥板ό與密封面3之間的間_、体 動°。7 了將延 大之程度停留在某程度。因封面3而擴 地進行閥板，密封面3之間的間隙二8之犬出，可更確實 (3)在第1實施形態之逆壓閘閥 放於大氣中。因而，當密封材 端部之周圍處於直:另一方面，當密封材8前 將空氣供給ί密封;Γ:4$=差，二透過配管⑽ 中空部公，丄’：工邛因此，在此時的密封材8之 突出的方有大减，藉此密封材8會因膨脹而以盆前端 &出=式使，面形狀產生變化。因此， _ = 屋閘閥+ ’可藉由第i真空室i内盘 : 之逆 進行密封材8之進退。 内與大祕&境之差壓，自動地 (苐2-實施形.態） 7告ft —併參照第4圖說明將本發明之逆壓關且體化的第’ 變另/卜第,2實施形，逆壓_的構成，係除 實施料t^餘與第1實施形態的構成相同。因而第2 號並省^其^制錢雜轉祕通者，_轴_元件符 有妒，即使是在第2實施形態之逆壓閘閥，也設置 後ΐ封材2〇。該密封材2〇，係構成：按照對形成於其 ，昭體壓㈣之供給)而進出藉以突出，且按 #二力至22之軋體壓的卸除而後退藉以解除該突出。 第2直空真空至1之内壓比該閥板6之後背側的 面3二6低、且閥板6依大氣㈣朝向推·密封 。彈^的正壓時之密封材20的狀態。如該圖所示，密封 201116745 板6讀面的凹部21，而在密封材20 22。在_ = 壁與密封材2G而區劃形成有塵力室 進行空氣之#'T、财配官1G ’且依f要，透過該配管1〇 其前，部之，係處於大氣_境下，而 此會後退將空氣從勤室22排出，藉 6會被第2直空室4 麥照第4圖⑻）。此時，闕板 與密封面3之乳[彈壓，而推愿於密封面3，而闕板6 ί 4 t it可猎由〇環9(詳細參照第1圖)而密封。 真空室4之内部T為直f f 1 =卩,,、及閥板6之後背側的第2 例如At%一Ϊ 壓移至延壓時的狀態。 室i及第2真正壓移至逆壓時，會對第1真空 所示，在壓力室22之内^ ^進^真空^氣。此時，如第4圖(b) 與壓力室22之内部办門二，如猎由岔封材20之前端部周圍 材，空—二差=:1°供給空氣’而密封 第2真空3=具壓示3、真空室1之内^比該閥板6之後背側的.. 之方向彈壓的逆塵時之氣壓而朝向離開密封面3 部之周圍係處於直介下，山甘 的狀怨。此時的密封材20前端 從第4圖(b)所示力室22變成大氣廢。因此， 力室22，而成為密封树 守持，透過配管1〇供給空氣至壓 材20，係成為以其^ 面3進出的狀態。亦即，密封 態。此時的閥板6，雖_2自出的方式彈性變形的狀 閥板6之前面與货:封而 真工至1之大氣屢而推壓，使 面3突出而密間隙。之間隙擴大，但是密封材20會朝向密封 施形態同樣的效果。。糊的第2實施職、，至少也可達成與第1實 另外以上的各實施形態亦可變更如下。 201116745 •第1實施形態中，係在逆壓時 與其内部空間的差麼，供給空氣至其内H'8ff端部周圍 其前端突㈣方式使其剖面形狀產生 係在逆壓時，依密封材20之前端A ^ 2貝她形悲中， = 地==該 使用空氣以外的加壓氣體使密封材8、2 = 。可 使密封材8、20突出。亦即，密封材 ^出;^或使用加壓液體 透過任意的流體之流之施加及其祕來Jp出2解除，可 轉力或電磁力 專i流體慶以外的推力使▲ 空間，藉由對其内部 除此以外的手法使密封材之剖$產if匕，但是亦可藉由 i:r料形成密封材，.且.透過域等=材== 6 =等施加於閥板6的推力’來停止閥板6離開密封為面 雄封材8 : f之突产將間板6與密封面3之間予⑽ : # ·上述:T施軸中，係在闕板6設置〇環9，^、正| 猎由該〇環9密封閥板6與密封面3間且田正£牯， 外之密封構件進行此種題_密封。又亦^ 封構件，以可解除突出的狀態之密封材8、2 {時=':、 a •上述實施形態中，軸是在閥板6配設“=3封 的密封面3設置密封材8冬又，亦可將 201116745 •上述實施形態中，雖然是藉由氧 可利用•馬達料他_力赴数來==6板6购’但是亦 2之位置上的冓藉由轉動而移動至閉塞連動孔 動孔亦可以藉由滑動而移動至閉塞連 ㈣作為在 本發明的逆朗閥，亦可應用於^^之N況加μ明’但是 本發明之逆壓_應祕^U途^言之，可將 空室予以隔_任意閥。、侧做讀情況的二個真 5=137:::直6二，部6之驅動機構(轉動軸 於第1真空室i内。 —至4内’但是此等亦可配置 【圖式簡單說明】 視圖 第1圖係顯不第1實施形態之逆塵閘閥之閥板周圍構造的到 續^圖ίϊί第如圖之祕閘閥之密封材狀態的剖視圖；宜 時之；狀態二：顯示從 視圖弟3圖係顯示第1圖之逆屋閘閥於逆屋時之密封材狀態的剖 R. m示第2實施職之遞關之密封材狀態的剖視 二正is# 時、（b)係顯示從正歸至逆壓或從逆麗移 至^、（C)係,4不讀時之密封材狀態的剖視圖。 真空裝置之關剖面構造的剖視圖。 θ孔，肩不習知逆壓閘閥之剖面構造的剖視圖。201116745 VI. Description of the Invention: [Technical Field] The present invention relates to a reverse pressure gate valve in which two straight chambers are reversed in which the relationship between the internal pressures is reversed.广 [Prior Art] 夕, "In the manufacture of semiconductors or liquid crystal panels, vacuum devices, etc., and the gate valves that work in the compartments, are well-known patent documents published in Patent Document 1 __ Between the oppositely disposed and separately formed sealing faces, there is a slidably disposed valve plate. Then, the ΐ ΐ valve plate is slid to the position of the communication hole, so that the two vacuum chambers are provided with the valve plate of the gate valve of Patent Document 1, and the sealing material is set by ===== In the _ shown in Fig. 5, the system/household is formed with the sealing surface 52 of the communication hole 51, whereby the chamber ίίί will be urged toward the valve plate 53 with respect to the valve plate 53. . Therefore, at this time, it is possible to make a smaller = push of 52 of the cover 52. On the other hand, the vacuum chamber 55 on the back side of the straight/front cover valve plate 53 on the front side of the valve plate 53 is a large air pressure, and the valve plate 53 faces the valve plate 53 from the sealing surface. 52 pull two will be opposite to this time, in order to maintain the valve plate 53 against the sealing surface 52 ^ ^ role. Therefore, the big thrust. In addition, if it acts on the valve plate 53, it is necessary to report the force of (2), which becomes larger as the valve plate 53 201116745 is enlarged. a, in the closing of the big butterfly board, even if the thrust is pushed wide, sometimes it can not be turned over due to being pushed by the atmosphere. Therefore, it is known as a brake corresponding to the vacuum device such as the above-mentioned reverse pressure. ^, there is a proposal described in Non-Patent Document 1. As shown in Fig. 6, in the conventionally, the back side is formed by the back side of the valve plate 64 which is pressed against the sealing surface 61 in which the communication hole 60 is formed, and the communication hole 6 is closed. The valve plate (4) expands the bladder (bdi 3 and the pressure plate 62 to define a space 65. Then, at the back pressure 64, the introduction hole 66 introduces atmospheric pressure into the space 65 to privately press the valve plate, thereby being pressed. The force of the atmospheric pressure acting on the front surface of the valve plate 64 is offset, and the valve plate 64 is pressed with a small thrust. (Patent Document 1) Japanese Laid-Open Patent Publication No. Hei 5-215249 (Non-Patent Document) Non-Patent Document 1. Kawasaki Kawasaki Co., Ltd. Gate Valve Catalogue KOSLARZE GATE VALVE Part 9 of the above. [Summary of the Invention] (Problems to be Solved by the Invention) _ If it is the conventional reverse pressure gate valve of Figure 6, even in In the case of back pressure, there is no need to be a tribute to the fact that the seal can be maintained. However, in such a conventional reverse pressure gate valve, the bladder 63 and the movable plate 62 #, the number of materials is good, and the structure is complicated. In view of the fact that the development is completed, the purpose is to compare the structure of (4) even in the inverse The cake can also be surely turned to the reverse of the seal (the means to solve the problem). One of the characteristics of the Fort, is to provide a reverse pressure gate, which will have the first internal borrowing, the 355 and the second inner _ A two-compartment compartment. The reverse-pressure-brake compartment is a ΐ cover having a communication hole for connecting the first and second chambers, Ώ, /, depending on the sealing surface. And the valve 201116745 that closes the communication hole is located, and the first chamber is located opposite to the sealing surface, and is oriented toward the other side of the front cover and the valve plate. In the above description, when the turtle is released from the second internal pressure, the internal pressure of the first chamber is higher than that of the second chamber 2 and the sealing material is protruded. Thereby, the gap between the sealing surface and the valve plate can be applied, and the valve plate can be moved away from the lean dust according to the pressure difference between the first internal pressure and the second internal pressure. The second sealing material is used to maintain the seal between the sealing surface and the valve plate. (Invention effect) The pressure free space can be confirmed even with a simple structure. (First Embodiment) Hereinafter, a first embodiment in which a reverse pressure gate valve according to the present invention is formed will be described in detail with reference to Figs. 1 to 3, and a reverse pressure gate valve according to the first embodiment is configured. 1. A valve that separates atmospheric pressure from vacuum in a vacuum apparatus for manufacturing a semiconductor, a film, a liquid crystal panel, etc." Fig. 1 shows a section viewed from the side of the reverse pressure gate valve of the first embodiment. In the first embodiment, the reverse pressure gate valve of the first embodiment is connected to the two vacuum chambers of the first vacuum chamber 1 and the second vacuum chamber 4. The second vacuum chamber 4 is connected to the second vacuum chamber 4 The side plate of the first vacuum chamber 1 is provided with a communication hole 2 that connects the two vacuum chambers 1, 4. The outer peripheral surface of the side plate of the first vacuum chamber 1 in which the communication hole 2 is provided is a sealing surface 3 that is pressed by the valve plate 6 that closes the communication between the vacuum chambers 1 and 4 by closing the communication hole 2 . The valve plate 6 is disposed inside the second vacuum chamber 4. The valve plate 6 is attached to the base end of Figure 5 of 201116745. The seesaw 6' is arranged such that the front surface of the panel 6 is pushed into the first vacuum chamber 1 and the second vacuum chamber 4 by three rows without being pressed against the ί cover. Further, inside the second vacuum chamber 4, a stopper 7 in which the plate 6 is displaced away from the sealing surface 3 is also disposed. There is a V-valve 8 which is surrounded by a ^ bag and a front surface of the inter-panel 6 which is provided with a sealing material I which surrounds the outer circumference of the k-through hole 2. It is also composed of a sealed body on the front side of the valve plate 6. Ring 9. In the first embodiment, the annulus "5" is again placed as the second sealing member. The part* is sealed by a hollow elastic material. Within the sealing material δ, the supply of air is performed by the pipe 10 as it is. In the i-th, one end of the pipe 10 is open to the atmosphere. Then, when the periphery of the material ^ is in an atmospheric pressure environment, the periphery of the sealing material 8 will become _ atmospheric pressure. The sealing material 8 at this time has a shape in which the front end is recessed by the two elastic bodies (see Fig. 2(a)). In addition, when the periphery of the front end portion of the sealing material 8 is under vacuum, the internal space of the sealing material 8 can be supplied to the internal space of the sealing material 8 by the difference pressure of the inner space of the sealing material 8 . The sealing material 8' at this time is a square center in which the front end thereof protrudes toward the sealing surface 3; (Matt. 2 (b) and 3). x _ In addition, such a vacuum device provided with a reverse pressure gate valve is usually in a state where the first vacuum chamber f 1 is a vacuum, the second vacuum chamber 4 is a so-called positive pressure in a large slit, or = 1 vacuum chamber 1 and The second vacuum chamber 4 is used in the same state as the pressure. However, in the case of maintenance, there may be a state in which the first vacuum chamber 1 is at atmospheric pressure and the second vacuum chamber 4* is in a so-called inverse >1. As described below, the reverse pressure brake of the embodiment of the first embodiment can be appropriately sealed when the positive pressure is applied or when the dust is reversed. ', Fig. 2 (a) shows the first vacuum chamber on the front side of the valve plate 6 [the internal straight space: the inside of the second vacuum chamber 4 on the back side after the valve plate 6 is a positive pressure at atmospheric pressure. . The front end of this #岔封材8 is filled with atmospheric dust ring, and its $116 space in 201116745 is also big money. At this time, at this time, the bribe, 2 becomes _ concave _ position. However, the force of this county in atmospheric pressure f; = in the direction of the sealing surface 3, so can be relatively small between the push and sealing surface 3;! ΐ Γ〇 Γ〇 3 ring will be mentioned, this time The inside of the first vacuum chamber 1 on the front side of the reading plate 6 and the inside of the second vacuum chamber 4 in the shape 11 of i are vacuumed from the positive pressure to the reverse pressure * chamber. Γίΐΐΐϊΐ养等' When you go from positive to negative, you will be able to record the inside of the first true to the fourth. At this time, for example, the 2nd S space 3, ί, 8_ is supplied with air from the periphery of the front end portion and the inner glue thereof. Therefore, the sealing material 8 is elastically deformed so as to protrude toward the front cover 3 due to swelling. The figure 3 shows that the inside of the ith straight vacuum chamber 4 on the front side of the valve plate 6 is the reverse pressure of the vacuum surface 3, and the force based on the secret force 17 will be pulled away from the seal plate. The second it J board 6 will be stunned and retracted to the stopper 7 until ^b ^士1':,,,, and the rear valve plate 6 - the gap between the front surface and the sealing surface 3 will become larger -. The seal member 8 of the crucible is moved from the positive pressure to the state where the W temple is expanded as shown in the second step, that is, the front end of the seal member 8 is protruded toward the seal surface 3 to form a shape of a shape of 5. Therefore, even the front face of the valve plate 6 and the sealing face 3 can be sealed by the protruding seal member 8 to seal the gap. In the reverse valve of the first embodiment described above, at least the second vacuum chamber 1 on the front side of the valve plate 6 facing the sealing surface 3 can be at least 5: side When the internal pressure of the second vacuum valve 4 is still high, the inner pressure of the male sealing material 8 can be protruded, and the sealing surface of the sealing surface 3 can be sealed. Therefore, the valve plate 6 can be pushed away from the valve plate 6 by the atmospheric pressure, and can also be borrowed from the mountain to read the gap between the cover 3 and the valve plate 6. Thus, 201116745,峨 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ To some extent, the valve plate is expanded by the cover 3, and the dog of the gap between the sealing faces 3 is released. (3) The reverse pressure gate valve of the first embodiment is placed in the atmosphere. The circumference of the end of the sealing material is straight: on the other hand, the air is supplied to the sealing material 8 before sealing; Γ: 4$=poor, two through the pipe (10) hollow part, 丄': work, therefore, at this time The protrusion of the sealing material 8 is greatly reduced, whereby the sealing material 8 is deformed by the front end of the bowl and the shape of the surface is changed. Therefore, _ = the gate valve + ' can be used by the ith vacuum chamber i inner disk: reverse the sealing material 8 forward and backward. The difference between the inner and the big secret & the environment, automatically (苐2-implementation state) 7 ft - and with reference to Figure 4 to illustrate the invention In the case of the reverse pressure and the second embodiment, the second embodiment and the reverse pressure _ are the same as the configuration of the first embodiment. Therefore, the second embodiment is omitted. In the case of the reverse pressure gate valve of the second embodiment, the rear sealing material 2〇 is provided. The sealing material 2〇 is configured to be formed in accordance with the pair. In addition, the supply of the body pressure (4) is exaggerated, and the removal of the rolling body pressure of #2 to 22 is reversed to release the protrusion. The second straight vacuum is 1 to the internal pressure ratio of the valve plate 6 Thereafter, the back side faces 3 and 6 are low, and the valve plate 6 is pushed and sealed in accordance with the atmosphere (four). The state of the seal member 20 at the time of positive pressure of the elastic member. As shown in the figure, the concave portion 21 of the 201116745 plate 6 reading surface is sealed. In the sealing material 20 22. In the _ = wall and the sealing material 2G, a dust chamber is formed to carry out the air #'T, the financial officer 1G', and according to the f, through the pipe 1 before, the part The system is in the atmosphere_, and this will retreat to remove the air from the service room 22, and the 6th will be the second straight space 4, the photo of the fourth picture (8). At this time, the milk of the seesaw and the sealing surface 3 [ Elastic pressure, Pushing the sealing surface 3, and the seesaw 6 ί 4 t it can be sealed by the cymbal ring 9 (refer to Fig. 1 in detail). The internal T of the vacuum chamber 4 is straight ff 1 = 卩,,, and the valve plate 6 Then, the second side of the back side, for example, At%Ϊ, is pressed to the state at the time of the pressure. When the chamber i and the second true pressure are moved to the back pressure, the first vacuum is shown, and within the pressure chamber 22 ^ Vacuum ^ gas. At this time, as shown in Figure 4 (b) and the internal chamber 2 of the pressure chamber 22, such as hunting the surrounding material of the front end of the sealing material 20, air - two difference =: 1 ° supply air ' Sealing the second vacuum 3 = with the pressure indication 3, the pressure inside the vacuum chamber 1 is lower than the pressure of the back side of the valve plate 6 in the direction of the back side, and the air pressure is directed toward the periphery of the sealing surface 3 , Shan Gan’s complaints. At this time, the tip end of the sealing material 20 is changed from the force chamber 22 shown in Fig. 4(b) to the atmosphere. Therefore, the force chamber 22 is held by the sealing tree, and air is supplied to the pressure material 20 through the pipe 1 to be in a state in which it enters and exits the surface 3. That is, the sealed state. At this time, the valve plate 6 is elastically deformed in such a manner that the valve plate 6 is elastically deformed, and the front surface of the valve plate 6 is pressed against the air. The gap is enlarged, but the sealing material 20 has the same effect as the sealing form. . In the second implementation of the paste, at least the first embodiment can be achieved. The other embodiments can be changed as follows. 201116745 • In the first embodiment, is the difference between the internal space and the internal space during the back pressure, and the air is supplied to the end of the H'8ff end portion of the air (4), and the cross-sectional shape is generated by the back pressure. 20 before the end A ^ 2 shell her form of sadness, = ground = = the use of pressurized gas other than air to make the sealing material 8, 2 =. The sealing members 8, 20 can be protruded. That is, the sealing material is discharged; or the application of the pressurized liquid through the flow of any fluid and its secrets are released, and the thrust can be made by the force other than the fluid force or the electromagnetic force. In addition to the internal method, the sealing material is cut to produce if, but the sealing material can be formed by i:r material, and the medium is equal to the material ==6=etc. The thrust 'to stop the valve plate 6 from leaving the seal to the face of the male seal 8 : f between the production of the between the plate 6 and the sealing surface 3 (10): # · The above: T in the shaft, the set of the 阙 ring 6 9, ^, positive | Hunting by the 〇 ring 9 seal valve plate 6 and the sealing surface 3 and Tian Zheng 牯, the outer sealing member to carry out such a problem _ sealing. In addition, the sealing member 8 and 2 which are capable of releasing the protruding state are replaced by the following: In the above embodiment, the shaft is provided with a sealing material 3 of the sealing plate 3 of the valve plate 6 8 winter, can also be 201116745 • In the above embodiment, although it is available by oxygen, the motor is used to make the number ==6 board 6 purchase 'but the position on the 2 position is moved by the rotation The moving hole to the occluding interlocking hole can also be moved to the occlusion joint by sliding (4) as the reverse valve in the present invention, and can also be applied to the N condition of the ^^, but the reverse pressure of the present invention is _ ^In other words, the empty chamber can be separated by _ any valve. The two sides of the reading situation are two true 5=137::: straight 6 two, the driving mechanism of the part 6 (the rotating shaft is in the first vacuum chamber i. Up to 4 'but this can also be configured [Simple description of the drawing] View 1 shows the structure around the valve plate of the reverse dust gate valve of the first embodiment. Continuation of the seal of the gate valve Sectional view of the material state; time 2; state 2: shows the cross-section R. m of the state of the sealing material of the reverse roof gate of Figure 1 from the view of the brother 3 In the second implementation, the cross-sectional view of the sealing material state is the second positive is#, (b) shows the seal from the positive to the reverse or from the reverse to the ^, (C), 4 when not reading Cross-sectional view of the material state. Cross-sectional view of the closed cross-sectional structure of the vacuum device. θ hole, cross-sectional view of the cross-sectional structure of the reverse pressure gate valve.
S 12 201116745 【主要元件符號說明】 1第1真空室(第1室) 2、 51、60連通孔 3、 52、61 密封面 4第2真空室(第2室) 5轉動轴 6、53、64 閥板 7止動器 8、20 密封材 9 Ο環 10 配管 21 凹部 22壓力室 5.0 氣缸 54、55 真空室 62壓力板 63伸縮囊 65 空間 —........- 66 導入孔S 12 201116745 [Description of main components] 1 1st vacuum chamber (1st chamber) 2, 51, 60 communication holes 3, 52, 61 Sealing surface 4 2nd vacuum chamber (2nd chamber) 5 Rotating shafts 6, 53 64 valve plate 7 stopper 8, 20 sealing material 9 Ο ring 10 piping 21 recess 22 pressure chamber 5.0 cylinder 54, 55 vacuum chamber 62 pressure plate 63 bellows 65 space -........- 66 introduction hole