JP5470512B2 - 湿度検出センサ - Google Patents

湿度検出センサ Download PDF

Info

Publication number
JP5470512B2
JP5470512B2 JP2011543336A JP2011543336A JP5470512B2 JP 5470512 B2 JP5470512 B2 JP 5470512B2 JP 2011543336 A JP2011543336 A JP 2011543336A JP 2011543336 A JP2011543336 A JP 2011543336A JP 5470512 B2 JP5470512 B2 JP 5470512B2
Authority
JP
Japan
Prior art keywords
region
sensitive film
moisture sensitive
polymer
detection sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011543336A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2011065507A1 (ja
Inventor
澄人 森田
聡 和賀
崇 佐藤
英紀 牛膓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP2011543336A priority Critical patent/JP5470512B2/ja
Publication of JPWO2011065507A1 publication Critical patent/JPWO2011065507A1/ja
Application granted granted Critical
Publication of JP5470512B2 publication Critical patent/JP5470512B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2011543336A 2009-11-30 2010-11-26 湿度検出センサ Expired - Fee Related JP5470512B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011543336A JP5470512B2 (ja) 2009-11-30 2010-11-26 湿度検出センサ

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009272427 2009-11-30
JP2009272427 2009-11-30
PCT/JP2010/071175 WO2011065507A1 (fr) 2009-11-30 2010-11-26 Capteur de détection d'humidité
JP2011543336A JP5470512B2 (ja) 2009-11-30 2010-11-26 湿度検出センサ

Publications (2)

Publication Number Publication Date
JPWO2011065507A1 JPWO2011065507A1 (ja) 2013-04-18
JP5470512B2 true JP5470512B2 (ja) 2014-04-16

Family

ID=44066611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011543336A Expired - Fee Related JP5470512B2 (ja) 2009-11-30 2010-11-26 湿度検出センサ

Country Status (3)

Country Link
JP (1) JP5470512B2 (fr)
CN (1) CN102549416B (fr)
WO (1) WO2011065507A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101532151B1 (ko) * 2013-12-26 2015-06-26 삼성전기주식회사 습도센서 및 그 제조방법
US9494538B2 (en) * 2014-04-04 2016-11-15 Deere & Company Agricultural moisture sensor with co-planar electrodes
WO2016093343A1 (fr) * 2014-12-11 2016-06-16 北陸電気工業株式会社 Capteur capacitif d'humidité
KR101646048B1 (ko) * 2015-02-12 2016-08-08 인하대학교 산학협력단 나뭇잎의 수분을 측정하는 정전용량형 습도센서
JP6583858B2 (ja) * 2015-03-10 2019-10-02 国立大学法人信州大学 容量型ガスセンサ
US10801985B2 (en) * 2016-06-03 2020-10-13 Texas Instruments Incorporated Sensing capacitor with a permeable electrode
WO2018062379A1 (fr) * 2016-09-30 2018-04-05 ミツミ電機株式会社 Capteur d'humidité
JP6770238B2 (ja) * 2017-03-31 2020-10-14 ミツミ電機株式会社 湿度センサ
JP2019176574A (ja) * 2018-03-27 2019-10-10 豊田合成株式会社 トランスデューサー装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276544A (ja) * 1991-03-05 1992-10-01 Nikon Corp 接合型化学センサ
JPH10221288A (ja) * 1997-01-31 1998-08-21 Ngk Spark Plug Co Ltd 湿度センサ
JPH10267874A (ja) * 1997-03-25 1998-10-09 Chichibu Onoda Cement Corp ガス検知装置および空調機器
JP2003516538A (ja) * 1999-12-13 2003-05-13 エルジー エレクトロニクス インコーポレーテッド 絶対湿度センサ
JP2003156464A (ja) * 2001-11-19 2003-05-30 Denso Corp 容量式湿度センサ
JP2008302685A (ja) * 2007-05-08 2008-12-18 Seiko Epson Corp 流体噴射ヘッド、流体噴射ヘッドの製造方法、及び流体噴射装置
WO2010113711A1 (fr) * 2009-03-31 2010-10-07 アルプス電気株式会社 Capteur d'humidité capacitif et son procédé de production

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2003021246A1 (ja) * 2001-08-31 2004-12-16 株式会社クラベ 容量性感湿素子と容量性感湿素子の製造方法
CN1203312C (zh) * 2003-06-12 2005-05-25 东南大学 电容式相对湿度传感器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04276544A (ja) * 1991-03-05 1992-10-01 Nikon Corp 接合型化学センサ
JPH10221288A (ja) * 1997-01-31 1998-08-21 Ngk Spark Plug Co Ltd 湿度センサ
JPH10267874A (ja) * 1997-03-25 1998-10-09 Chichibu Onoda Cement Corp ガス検知装置および空調機器
JP2003516538A (ja) * 1999-12-13 2003-05-13 エルジー エレクトロニクス インコーポレーテッド 絶対湿度センサ
JP2003156464A (ja) * 2001-11-19 2003-05-30 Denso Corp 容量式湿度センサ
JP2008302685A (ja) * 2007-05-08 2008-12-18 Seiko Epson Corp 流体噴射ヘッド、流体噴射ヘッドの製造方法、及び流体噴射装置
WO2010113711A1 (fr) * 2009-03-31 2010-10-07 アルプス電気株式会社 Capteur d'humidité capacitif et son procédé de production

Also Published As

Publication number Publication date
JPWO2011065507A1 (ja) 2013-04-18
CN102549416A (zh) 2012-07-04
WO2011065507A1 (fr) 2011-06-03
CN102549416B (zh) 2014-03-12

Similar Documents

Publication Publication Date Title
JP5470512B2 (ja) 湿度検出センサ
JP5547296B2 (ja) 湿度検出センサ及びその製造方法
CN105264365B (zh) 集成到半导体电路上的电容性传感器及其制造方法
US9689824B2 (en) Integrated multi-sensor module
JP4770530B2 (ja) 容量式湿度センサ
JP2003270189A (ja) 容量式湿度センサ
WO2012160806A1 (fr) Capteur d'humidité capacitif
KR20100053082A (ko) 정전용량형 습도센서 및 그 제조방법
KR20150028929A (ko) 정전용량형 습도센서
JP2011080833A (ja) 湿度検出センサ
JPWO2010113711A1 (ja) 容量型湿度センサ及びその製造方法
JP2007127612A (ja) 湿度センサ装置及びその製造方法
WO2018180107A1 (fr) Capteur d'humidité
JP2004271461A (ja) 容量式湿度センサ
US10520457B2 (en) Sensor of volatile substances with integrated heater and process for manufacturing a sensor of volatile substances
WO2011149331A1 (fr) Capteur d'humidité capacitif et procédé de fabrication associé
WO2019142593A1 (fr) Dispositif de détection d'humidité
WO2019142592A1 (fr) Dispositif de détection d'humidité
JP6611362B2 (ja) 容量式湿度センサ
JP4984723B2 (ja) 湿度検出装置

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130226

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130412

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20130620

TRDD Decision of grant or rejection written
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20131120

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20131126

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20131127

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20131220

R150 Certificate of patent or registration of utility model

Ref document number: 5470512

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees