JP5465873B2 - 被膜付き切削工具の製造方法および切削工具 - Google Patents
被膜付き切削工具の製造方法および切削工具 Download PDFInfo
- Publication number
- JP5465873B2 JP5465873B2 JP2008322721A JP2008322721A JP5465873B2 JP 5465873 B2 JP5465873 B2 JP 5465873B2 JP 2008322721 A JP2008322721 A JP 2008322721A JP 2008322721 A JP2008322721 A JP 2008322721A JP 5465873 B2 JP5465873 B2 JP 5465873B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- layer
- manufacturing
- coating
- cutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
- C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12007—Component of composite having metal continuous phase interengaged with nonmetal continuous phase
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Description
非金属の機能層または機能層システムを堆積する工程、
上記非金属の機能層または機能層システムをイオンエッチングする工程、および
次の手順の前に、金属中間層を少なくとも1層堆積する工程
を含む手順を少なくとも1回踏む。
形状の異なる3種類の超硬合金インサートCNMG120408−MM、R290−12T0308M−KM、R390−11T308M−PMを用いた。
形状CNMG120408−MMの超硬合金インサートを被覆した。
下記の表現または用語は金属の切削について一般に用いられている。
fz(mm/歯) 送り速度
z(個) カッターの歯数
ae(mm) 半径方向の切り込み深さ
ap(mm) 軸方向の切り込み深さ
D(mm) カッターの直径
〔実施例3〕
実施例1のインサートA(従来技術)およびインサートB(本発明)と、実施例2のインサートC(従来技術)およびインサートD(本発明)とを、全て形状CNMG120408−MMのものについて、旋削加工で試験した。切削条件は下記のとおりである。
Vc= 160m/min
fz= 0.3mm/回転
a= 2mm
冷却剤 エマルジョン
工具寿命の判定基準は、逃げ面摩耗が0.3mmを超えるか、または、インサートが破壊することとした。工具寿命の向上に決定的な摩耗形態の差異は、クレーター摩耗が少ないことであった。
実施例1のインサートA(従来技術)とインサートB(本発明)とを、形状R390−11T0308M−PMのものについて、フライス加工で試験した。切削条件は下記のとおおりである。
Vc= 120m/min
fz= 0.12mm/回転
ae= 2mm
ap= 4mm
z= 1
D= 32mm
冷却剤 エマルジョン
工具寿命の判定基準は、逃げ面摩耗が0.2mmを超えるか、または、フリッティング(fritting)が0.3mmを超えることとした。
実施例1のインサートA(従来技術)とインサートB(本発明)とを、形状R290−12T0308M−KMのものについて、フライス加工で試験した。切削条件は下記のとおりである。
Vc= 400m/min
fz= 0.15mm/歯
ae= 110mm
ap= 3mm
z= 1
D= 125mm
工具寿命の判定基準は、逃げ面摩耗が0.3mmを超えるか、または、フリッティング(fritting)が0.4mmを超えることとした。
Claims (11)
- 基材を用意し、該基材をカソードアーク蒸着被覆方法により被覆することを含み、2層の非金属機能層の間に1層以上の金属層を堆積することを含む被膜付き切削工具の製造方法において、該被覆方法が、
非金属の機能層または機能層システムを堆積する工程、
上記機能層または機能層システムの表面にイオンエッチングを施す工程、
上記イオンエッチングを施された機能層または機能層システムの上に、金属の中間層を少なくとも一層堆積する工程
を含む手順を少なくとも1回行うことを特徴とする被膜付き切削工具の製造方法。 - 請求項1において、上記イオンエッチングをアルゴンイオンによって行うことを特徴とする製造方法。
- 請求項1において、上記イオンエッチングを金属イオンによって行うことを特徴とする製造方法。
- 請求項1〜3のいずれかにおいて、上記金属の中間層がTi、Mo、Al、Cr、V、Y、Nb、Hf、W、Ta、Zrから選択された純金属またはこれらの混合物から成ることを特徴とする製造方法。
- 請求項1〜3のいずれかにおいて、上記金属の中間層が不足当量セラミックからなり、金属元素の分量が該不足当量セラミックの60%以上であることを特徴とする製造方法。
- 請求項5において、上記不足当量セラミックが窒化物MeNであって、MeはTi、Mo、Al、Cr、V、Y、Nb、Hf、W、Ta、Zrから選択された1種以上の金属またはこれらの混合物であることを特徴とする製造方法。
- 請求項1〜6のいずれかにおいて、上記堆積した非金属の層または層システムが、窒化物、酸化物、硼化物、炭化物、またはこれらの組み合わせであることを特徴とする製造方法。
- 請求項1〜7のいずれかにおいて、上記金属の層の厚さが5〜500nmであることを特徴とする製造方法。
- 請求項1〜8のいずれかにおいて、上記非金属の層または層システムの厚さが上記金属の層の3〜200倍であることを特徴とする製造方法。
- 請求項1〜9のいずれかにおいて、上記被膜全体の合計厚さが0.5〜15μmであることを特徴とする製造方法。
- 請求項1〜10のいずれかの方法により製造された切削工具。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0702866 | 2007-12-21 | ||
SE0702866-5 | 2007-12-21 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009148884A JP2009148884A (ja) | 2009-07-09 |
JP2009148884A5 JP2009148884A5 (ja) | 2009-09-03 |
JP5465873B2 true JP5465873B2 (ja) | 2014-04-09 |
Family
ID=40227765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008322721A Expired - Fee Related JP5465873B2 (ja) | 2007-12-21 | 2008-12-18 | 被膜付き切削工具の製造方法および切削工具 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20090169910A1 (ja) |
EP (1) | EP2072636B1 (ja) |
JP (1) | JP5465873B2 (ja) |
KR (1) | KR20090068150A (ja) |
CN (2) | CN101462386B (ja) |
IL (1) | IL195962A0 (ja) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2298954B1 (en) * | 2009-09-18 | 2013-03-13 | Sandvik Intellectual Property Ab | A PVD method for depositing a coating onto a body and coated bodies made thereof |
IL202549A (en) * | 2009-12-06 | 2015-02-26 | Iscar Ltd | Coated product and method of making coated product |
CN102409302A (zh) * | 2010-09-23 | 2012-04-11 | 鸿富锦精密工业(深圳)有限公司 | 涂层、具有该涂层的被覆件及该被覆件的制备方法 |
CN102443773A (zh) * | 2010-10-06 | 2012-05-09 | 鸿富锦精密工业(深圳)有限公司 | 涂层、具有该涂层的被覆件及该被覆件的制造方法 |
CN102181835B (zh) * | 2011-04-01 | 2012-10-31 | 山推工程机械股份有限公司 | Ti-Zr/ZrN纳米多层涂层刀具及其制备工艺 |
JP5796354B2 (ja) * | 2011-06-02 | 2015-10-21 | 三菱マテリアル株式会社 | 耐熱性および耐溶着性に優れた表面被覆切削工具 |
EP2743016B1 (en) * | 2011-08-01 | 2018-04-11 | Hitachi Tool Engineering, Ltd. | Surface-modified wc-based cemented carbide member and method for producing surface-modified wc-based cemented carbide member |
CN102328118A (zh) * | 2011-08-03 | 2012-01-25 | 四川欧曼机械有限公司 | 一种硬质合金钻头 |
CN102328473A (zh) * | 2011-08-03 | 2012-01-25 | 四川欧曼机械有限公司 | 一种立方氮化硼刀具及其制造方法 |
CN102336036A (zh) * | 2011-08-03 | 2012-02-01 | 四川欧曼机械有限公司 | 一种硬质合金刀片 |
CN102335762A (zh) * | 2011-08-03 | 2012-02-01 | 四川欧曼机械有限公司 | 一种切削刀具 |
DE102011116576A1 (de) * | 2011-10-21 | 2013-04-25 | Oerlikon Trading Ag, Trübbach | Bohrer mit Beschichtung |
US9381575B2 (en) | 2012-02-27 | 2016-07-05 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool and method of manufacturing the same |
EP2684982A1 (de) * | 2012-07-11 | 2014-01-15 | Siemens Aktiengesellschaft | Schutzschicht für eine Komponente einer Strömungsmaschine |
CN103042753B (zh) * | 2012-12-26 | 2015-06-24 | 中国科学院宁波材料技术与工程研究所 | 一种纳米多层结构的VC/Co增韧涂层及其制备方法 |
CN103895283B (zh) * | 2012-12-26 | 2016-08-10 | 中国科学院宁波材料技术与工程研究所 | 一种纳米多层结构的VC/Ni增韧涂层及其制备方法 |
JP5974940B2 (ja) * | 2013-03-14 | 2016-08-23 | 三菱マテリアル株式会社 | 交換式切削ヘッド |
CN103252939B (zh) * | 2013-05-17 | 2014-12-24 | 宜昌后皇真空科技有限公司 | 氮化铬/氮化硼钛纳米复合多层涂层刀具及其制备方法 |
CN103556119B (zh) * | 2013-10-28 | 2015-12-09 | 沈阳大学 | 一种氮化钛锆铌氮梯度硬质反应膜的制备方法 |
CN103789724B (zh) * | 2014-01-24 | 2015-10-28 | 四川大学 | 一种AlTiCrN/YN纳米多层硬质涂层及其制备方法 |
JP6155204B2 (ja) * | 2014-02-21 | 2017-06-28 | 株式会社神戸製鋼所 | 硬質皮膜およびその形成方法 |
CN104141110B (zh) * | 2014-07-22 | 2016-08-10 | 桂林电子科技大学 | 一种金属表面沉积铁+钒+钛+氮化钛的多层混合纳米强化层的制备工艺 |
CN104120322B (zh) * | 2014-08-01 | 2016-08-17 | 中南大学 | 一种硬质合金及提高其pvd涂层膜基结合力的方法 |
FR3025929B1 (fr) | 2014-09-17 | 2016-10-21 | Commissariat Energie Atomique | Gaines de combustible nucleaire, procedes de fabrication et utilisation contre l'oxydation. |
CN107532277B (zh) * | 2015-02-24 | 2020-06-05 | 欧瑞康表面解决方案股份公司,普费菲孔 | 用于高强度钢金属冷成形的高性能涂层和使用所述涂层涂覆基材表面的方法 |
CN105734505B (zh) * | 2016-03-18 | 2017-12-29 | 东北大学 | 一种钛合金切削用复合功能刀具涂层及其制备方法 |
CN105951039B (zh) * | 2016-04-28 | 2018-09-14 | 富耐克超硬材料股份有限公司 | 一种立方氮化硼基体表面粗糙化处理方法,改性立方氮化硼基体及立方氮化硼涂层刀具 |
WO2018112912A1 (zh) * | 2016-12-23 | 2018-06-28 | 深圳市金洲精工科技股份有限公司 | 刀具复合涂层、刀具和刀具复合涂层的制备方法 |
DE112018001654T5 (de) * | 2017-03-29 | 2019-12-24 | Kyocera Corporation | Beschichtetes werkzeug und schneidwerkzeug |
ES2767356T3 (es) * | 2017-05-19 | 2020-06-17 | Walter Ag | Herramienta de corte de metal con revestimiento multicapa |
US11413695B2 (en) * | 2017-08-04 | 2022-08-16 | Oerlikon Surface Solutions Ag, Pfäffikon | Tap drill with enhanced performance |
EP3450591A1 (en) * | 2017-08-30 | 2019-03-06 | Seco Tools Ab | A coated cutting tool and a method for coating the cutting tool |
CN108505001A (zh) * | 2018-04-09 | 2018-09-07 | 苏州市彩衣真空镀膜有限公司 | 一种复合耐磨层及其制备方法 |
CN108642449B (zh) * | 2018-05-29 | 2020-01-14 | 武汉大学 | 超硬强韧高熵合金氮化物纳米复合涂层硬质合金刀片及其制备方法 |
US20210285109A1 (en) * | 2020-03-12 | 2021-09-16 | Kennametal Inc. | Coated body and method for coating |
CN112962059A (zh) * | 2021-02-04 | 2021-06-15 | 上海应用技术大学 | 一种CrAlTiSiCN纳米复合涂层及其制备方法 |
CN114472947B (zh) * | 2022-03-22 | 2023-03-14 | 常德职业技术学院 | 一种基于金属陶瓷的耐超高温切削刀具 |
Family Cites Families (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE338698C (sv) | 1970-06-26 | 1977-10-17 | Sandvik Ab | For skerande bearbetning av stal, gjutjern eller liknande avsett sker |
CH667361GA3 (ja) * | 1986-02-04 | 1988-10-14 | ||
US4781989A (en) * | 1986-03-07 | 1988-11-01 | Mitsubishi Kinzoku Kabushiki Kaisha | Surface-coated cutting member |
DD288625A5 (de) * | 1989-10-23 | 1991-04-04 | Akademie Der Wissenschaften,De | Verschleissfester ueberzug und verfahren zu seiner herstellung |
JPH04214855A (ja) * | 1990-01-22 | 1992-08-05 | Nippon Steel Corp | 耐剥離性向上セラミックコーティング皮膜 |
US5145739A (en) * | 1990-07-12 | 1992-09-08 | Sarin Vinod K | Abrasion resistant coated articles |
US5330853A (en) * | 1991-03-16 | 1994-07-19 | Leybold Ag | Multilayer Ti-Al-N coating for tools |
JP2979922B2 (ja) * | 1992-10-12 | 1999-11-22 | 住友電気工業株式会社 | 超薄膜積層部材 |
DE69319531T2 (de) * | 1992-10-12 | 1999-04-15 | Sumitomo Electric Industries, Ltd., Osaka | Ultradünnes Filmlaminat |
US5690796A (en) * | 1992-12-23 | 1997-11-25 | Balzers Aktiengesellschaft | Method and apparatus for layer depositions |
DE69527236T2 (de) * | 1994-09-16 | 2003-03-20 | Sumitomo Electric Industries, Ltd. | Mehrschichtfilm aus ultrafeinen Partikeln und harter Verbundwerkstoff für Werkzeuge, die diesen Film enthalten |
DE4442370A1 (de) * | 1994-11-29 | 1996-05-30 | Widia Gmbh | Verfahren zur Abscheidung metallischer Schichten auf Substratkörpern und Verbundkörper aus einem Substratkörper und mindestens einer Oberflächenschicht |
DE19523550A1 (de) | 1995-06-28 | 1997-01-02 | Hauzer Holding | PVD-Hartstoffbeschichtung |
DE19547305A1 (de) * | 1995-12-18 | 1997-06-19 | Univ Sheffield | Verfahren zum Beschichten von metallischen Substraten |
DE19809409A1 (de) * | 1998-03-05 | 1999-09-09 | Leybold Systems Gmbh | Messingfarbige Beschichtung mit einer farbgebenden nitridischen Schicht |
JP3031907B2 (ja) * | 1998-03-16 | 2000-04-10 | 日立ツール株式会社 | 多層膜被覆部材 |
US6821571B2 (en) * | 1999-06-18 | 2004-11-23 | Applied Materials Inc. | Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers |
CA2327031C (en) * | 1999-11-29 | 2007-07-03 | Vladimir Gorokhovsky | Composite vapour deposited coatings and process therefor |
JP4560964B2 (ja) * | 2000-02-25 | 2010-10-13 | 住友電気工業株式会社 | 非晶質炭素被覆部材 |
EP1136585A1 (de) | 2000-03-21 | 2001-09-26 | Logotherm AG | Hartstoffschicht mit selbstschmierenden Eigenschaften |
US6723389B2 (en) * | 2000-07-21 | 2004-04-20 | Toshiba Tungaloy Co., Ltd. | Process for producing coated cemented carbide excellent in peel strength |
JP2002103122A (ja) | 2000-09-29 | 2002-04-09 | Mmc Kobelco Tool Kk | 耐摩耗性に優れた硬質皮膜被覆小径軸物工具及びその製造方法 |
ATE441737T1 (de) * | 2000-12-28 | 2009-09-15 | Kobe Steel Ltd | Target zur bildung einer hartschicht |
US6620520B2 (en) * | 2000-12-29 | 2003-09-16 | Lam Research Corporation | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof |
EP2848712B1 (en) | 2002-08-08 | 2018-05-30 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Process for producing alumina coating composed mainly of alpha-type crystal structure, alumina coating composed mainly of alpha-type crystal structure, laminate coating including the alumina coating , member clad with the alumina coating or laminate coating, process for producing the member, and physical vapor deposition apparatus |
CN1304632C (zh) * | 2002-09-17 | 2007-03-14 | 湘潭大学 | 氮化硼复合涂层切削刀具及其制备方法 |
CN100389918C (zh) * | 2003-07-15 | 2008-05-28 | 复旦大学 | 一种多元复合镀层切削刀具及其制备方法 |
US7081186B2 (en) * | 2003-11-20 | 2006-07-25 | Sheffield Hallam University | Combined coating process comprising magnetic field-assisted, high power, pulsed cathode sputtering and an unbalanced magnetron |
US7097922B2 (en) * | 2004-05-03 | 2006-08-29 | General Motors Corporation | Multi-layered superhard nanocomposite coatings |
DE102006004394B4 (de) * | 2005-02-16 | 2011-01-13 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe-shi | Hartfilm, Mehrschichthartfilm und Herstellungsverfahren dafür |
SE528891C2 (sv) * | 2005-03-23 | 2007-03-06 | Sandvik Intellectual Property | Skär belagt med ett multiskikt av metaloxid |
CN1858295A (zh) * | 2005-04-30 | 2006-11-08 | 中国科学院金属研究所 | 一种防护涂层及其制备方法 |
DE102005033769B4 (de) * | 2005-07-15 | 2009-10-22 | Systec System- Und Anlagentechnik Gmbh & Co.Kg | Verfahren und Vorrichtung zur Mehrkathoden-PVD-Beschichtung und Substrat mit PVD-Beschichtung |
SE529200C2 (sv) * | 2005-11-21 | 2007-05-29 | Sandvik Intellectual Property | Belagt skär, metod för dess framställning samt användning |
WO2007136777A2 (en) * | 2006-05-17 | 2007-11-29 | G & H Technologies Llc | Wear resistant coating |
EP2042261A3 (en) * | 2007-09-26 | 2015-02-18 | Sandvik Intellectual Property AB | Method of making a coated cutting tool |
JP5234931B2 (ja) * | 2008-06-23 | 2013-07-10 | 株式会社神戸製鋼所 | 硬質皮膜被覆部材および成形用冶工具 |
-
2008
- 2008-12-10 EP EP08171268.9A patent/EP2072636B1/en not_active Not-in-force
- 2008-12-16 US US12/336,169 patent/US20090169910A1/en not_active Abandoned
- 2008-12-16 IL IL195962A patent/IL195962A0/en unknown
- 2008-12-18 KR KR1020080129538A patent/KR20090068150A/ko not_active Application Discontinuation
- 2008-12-18 JP JP2008322721A patent/JP5465873B2/ja not_active Expired - Fee Related
- 2008-12-22 CN CN2008101884057A patent/CN101462386B/zh active Active
- 2008-12-22 CN CN2008101884199A patent/CN101463461B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101462386B (zh) | 2013-06-12 |
EP2072636A3 (en) | 2010-09-29 |
IL195962A0 (en) | 2009-09-01 |
KR20090068150A (ko) | 2009-06-25 |
EP2072636B1 (en) | 2016-08-31 |
JP2009148884A (ja) | 2009-07-09 |
US20090169910A1 (en) | 2009-07-02 |
CN101463461B (zh) | 2012-02-29 |
CN101463461A (zh) | 2009-06-24 |
EP2072636A2 (en) | 2009-06-24 |
CN101462386A (zh) | 2009-06-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5465873B2 (ja) | 被膜付き切削工具の製造方法および切削工具 | |
US7989093B2 (en) | Method of making a coated cutting tool and the resulting tool | |
JP6222675B2 (ja) | 表面被覆切削工具、およびその製造方法 | |
US6884497B2 (en) | PVD-coated cutting tool insert | |
EP1710326B1 (en) | Surface-coated cutting tool | |
US7838132B2 (en) | PVD-coated cutting tool insert | |
EP2072637B1 (en) | Coated cutting tool and a method of making a coated cutting tool | |
JP6525310B2 (ja) | 被覆工具 | |
JP2008162008A (ja) | 被覆された切削工具 | |
JP5315533B2 (ja) | 表面被覆切削工具 | |
JP6529262B2 (ja) | 被覆工具 | |
JP5065758B2 (ja) | 被覆切削工具 | |
JP5376375B2 (ja) | 表面被覆切削工具 | |
JP3606335B2 (ja) | 高硬度被覆部材 | |
JP2013244549A (ja) | 切削工具用の基材およびそれを含む表面被覆切削工具 | |
KR20210118093A (ko) | 경질 피막 절삭 공구 | |
JP3358696B2 (ja) | 高強度被覆体 | |
JP5315532B2 (ja) | 表面被覆切削工具 | |
JP7031791B2 (ja) | 被覆切削工具 | |
CN112262006B (zh) | 切削工具 | |
CN112262007B (zh) | 切削工具 | |
US20240165713A1 (en) | Surface-coated cutting tool |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090721 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090721 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111206 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20120918 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130118 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20130128 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20130329 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20130614 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20130619 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131205 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140123 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5465873 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |